Optical module, electronic equipment and driving method
    313.
    发明专利
    Optical module, electronic equipment and driving method 有权
    光学模块,电子设备和驱动方法

    公开(公告)号:JP2014056073A

    公开(公告)日:2014-03-27

    申请号:JP2012200218

    申请日:2012-09-12

    Abstract: PROBLEM TO BE SOLVED: To provide an optical module, electronic equipment and a driving method, in which an operation failure due to a foreign substance can be suppressed and accuracy of gap control can be improved.SOLUTION: An optical module 10 includes: a wavelength variable interference filter 5 having a fixed reflection film, a movable reflection film opposing to the fixed reflection film via a gap between reflection films, and an electrostatic actuator for varying the gap between reflection films; and a gap control unit 15 controlling the electrostatic actuator. The gap control unit 15 controls the electrostatic actuator based on the order set in accordance with a measurement target wavelength to vary the gap between reflection films.

    Abstract translation: 要解决的问题:提供一种光学模块,电子设备和驱动方法,其中可以抑制由异物引起的操作故障,并且可以提高间隙控制的精度。解决方案:光学模块10包括:波长 具有固定反射膜的可变干涉滤光器5,通过反射膜之间的间隙与固定反射膜相对的可移动反射膜和用于改变反射膜之间的间隙的静电致动器; 以及控制静电致动器的间隙控制单元15。 间隙控制单元15基于根据测量目标波长设置的顺序来控制静电致动器,以改变反射膜之间的间隙。

    Light measuring device and scanning optical system
    318.
    发明专利
    Light measuring device and scanning optical system 审中-公开
    光测量装置和扫描光学系统

    公开(公告)号:JP2009109315A

    公开(公告)日:2009-05-21

    申请号:JP2007281369

    申请日:2007-10-30

    Inventor: MATSUURA KOJI

    Abstract: PROBLEM TO BE SOLVED: To provide a light measuring device measuring light by efficiently taking the light from each part of a surface light source.
    SOLUTION: The light measuring device 1 for measuring light from the surface light source 101 comprises: a space division device 3 performing operation for subsequently taking the light from each part of the surface light source 101; an optical light collecting device 5 collecting the light from each part of the surface light source 101 taken by operation of the space division device 3; and a detector 7 receiving the light collected by the optical light collecting device 5 and outputting the signals according to the received light.
    COPYRIGHT: (C)2009,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种通过有效地从表面光源的每个部分获取光来测量光的光测量装置。 解决方案:用于测量来自表面光源101的光的光测量装置1包括:空间分割装置3,用于随后从表面光源101的每个部分取出光; 光收集装置5,收集从空间分割装置3的动作取得的表面光源101的各部分的光; 以及接收由光收集装置5收集的光并根据接收的光输出信号的检测器7。 版权所有(C)2009,JPO&INPIT

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