公开(公告)号：US20100020319A1

公开(公告)日：2010-01-28

申请号：US12507585

申请日：2009-07-22

Applicant: Stavros G. Demos ,  Miroslav Y. Shverdin ,  Michael D. Shirk

Inventor： Stavros G. Demos ,  Miroslav Y. Shverdin ,  Michael D. Shirk

IPC: G01J3/44 ,  G01J3/30

CPC classification number: G01N21/6456 ,  A61B5/0071 ,  A61B5/0075 ,  A61B5/0084 ,  G01N21/49 ,  G01N21/6486 ,  G01N2021/6419 ,  G01N2021/6484 ,  G01N2021/651 ,  G01N2021/655 ,  G01N2201/06113 ,  G01N2201/06166 ,  G01N2201/0826 ,  G01N2201/0833

Abstract: Portable, field-deployable laser synthesizer devices designed for multi-dimensional spectrometry and time-resolved and/or hyperspectral imaging include a coherent light source which simultaneously produces a very broad, energetic, discrete spectrum spanning through or within the ultraviolet, visible, and near infrared wavelengths. The light output is spectrally resolved and each wavelength is delayed with respect to each other. A probe enables light delivery to a target. For multidimensional spectroscopy applications, the probe can collect the resulting emission and deliver this radiation to a time gated spectrometer for temporal and spectral analysis.

Abstract translation: 设计用于多维光谱法和时间分辨和/或高光谱成像的便携式现场可部署激光合成器装置包括相干光源，其同时产生跨越紫外线，可见光和近紫外线的非常宽泛，高能的离散光谱 红外波长。 光输出被光谱分解，并且每个波长相对于彼此延迟。 探头可以轻松传送到目标。 对于多维光谱应用，探针可以收集所得到的发射并将该辐射传递到时间选通光谱仪用于时间和光谱分析。

公开(公告)号：US07466418B2

公开(公告)日：2008-12-16

申请号：US11670376

申请日：2007-02-01

Applicant: David Nilson ,  Brad Rice ,  Tamara Troy

Inventor： David Nilson ,  Brad Rice ,  Tamara Troy

IPC: G01J3/30 ,  G01N21/25

CPC classification number: G01N21/6456 ,  A01K1/031 ,  A61M16/104 ,  A61M16/18 ,  A61M16/202 ,  A61M2016/0039 ,  G01N2021/1787 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/0227 ,  G01N2201/0826

Abstract: A macroscopic fluorescence illumination assembly is provided for use with an imaging apparatus with a light-tight imaging compartment. The imaging apparatus includes an interior wall defining a view port extending into the imaging compartment to enable viewing of a specimen contained therein. The illumination assembly includes a specimen support surface facing toward the view port of the imaging apparatus. The support surface defines a window portion that enables the passage of light there through. The window portion is selectively sized and dimensioned such that the specimen, when supported atop the support surface, can be positioned and seated over the window portion in a manner forming a light-tight seal substantially there between.

Abstract translation: 提供了一种宏观荧光照明组件，用于与具有不透光成像室的成像装置一起使用。 该成像设备包括限定了一个视图端口的内壁，该视图端口延伸到成像室中以使得能够观察其中容纳的样本。 照明组件包括面向成像设备的视口的样本支撑表面。 支撑表面限定了能够使光通过的窗口部分。 窗口部分被选择性地定尺寸和尺寸使得当被支撑在支撑表面上方时，样本可以以基本上在其之间形成不透光密封的方式被定位和安置在窗口部分上。

公开(公告)号：US07461961B2

公开(公告)日：2008-12-09

申请号：US11740569

申请日：2007-04-26

Applicant: Falai Li

Inventor： Falai Li

IPC: F21V7/04

CPC classification number: H01L21/67288 ,  G01N21/8806 ,  G01N21/9501 ,  G01N2021/8822 ,  G01N2201/08 ,  G01N2201/0826

Abstract: A fiber optic darkfield ring light with many angled fiber optic light lines with direct illumination in a very small package. The fiber optic darkfield ring light includes a base with multiple light heads and multiple light covers attached thereto, a main cover, an optional cord grip, and an optional hood. It incorporates multiple fiber optic line arrays positioned at low angle and used in conjunction with a strobe light source.

Abstract translation: 一种光纤暗场环形灯，具有许多成角度的光纤光线，具有非常小的封装中的直接照明。 光纤暗场环形灯包括具有多个光头的基座和附接到其上的多个灯罩，主盖，可选的绳把和可选的罩。 它集成了多个光栅线阵列，它们以低角度定位并与闪光灯光源一起使用。

公开(公告)号：US07460703B2

公开(公告)日：2008-12-02

申请号：US11931339

申请日：2007-10-31

Applicant: Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

Inventor： Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

IPC: G06K9/00

CPC classification number: G01N21/952 ,  G01N2201/0826 ,  G01N2201/084 ,  H04N7/18

Abstract: The present invention is directed to solving the problems associated with the detection of surface defects on metal bars as well as the problems associated with applying metal flat inspection systems to metal bars for non-destructive surface defects detection. A specially designed imaging system, which is comprised of a computing unit, line lights and high data rate line scan cameras, is developed for the aforementioned purpose. The target application is the metal bars (1) that have a circumference/cross-section-area ratio equal to or smaller than 4.25 when the cross section area is unity for the given shape, (2) whose cross-sections are round, oval, or in the shape of a polygon, and (3) are manufactured by mechanically cross-section reduction processes. The said metal can be steel, stainless steel, aluminum, copper, bronze, titanium, nickel, and so forth, and/or their alloys. The said metal bars can be at the temperature when they are being manufactured. A removable cassette includes various mirrors. A protection tube isolates the moving metal bar from the line light assembly and image acquisition camera. A contaminant reduction mechanism applies a vacuum to remove airborne contaminants.

Abstract translation: 本发明旨在解决与检测金属棒表面缺陷相关的问题以及将金属平面检查系统应用于金属棒以用于非破坏性表面缺陷检测相关的问题。 为了上述目的开发了一种专门设计的成像系统，由计算单元，线路灯和高数据速率线扫描摄像机组成。 目标应用是当给定形状的横截面积为1时，具有等于或小于4.25的圆周/横截面积比的金属棒（1），（2）横截面为圆形，椭圆形 ，或多边形的形状，（3）通过机械截面缩小工艺制造。 所述金属可以是钢，不锈钢，铝，铜，青铜，钛，镍等，和/或它们的合金。 所述金属棒可以处于制造时的温度。 可拆卸的盒子包括各种镜子。 保护管将移动的金属棒与线路灯组件和图像采集相机隔离。 污染物减少机制应用真空去除空气污染物。

公开(公告)号：US07324681B2

公开(公告)日：2008-01-29

申请号：US11194985

申请日：2005-08-02

Applicant: Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

Inventor： Tzyy-Shuh Chang ,  Daniel Gutchess ,  Hsun-Hau Huang

IPC: G06K9/00

CPC classification number: G01N21/952 ,  G01N2201/0826 ,  G01N2201/084 ,  H04N7/18

Abstract: The present invention is directed to solving the problems associated with the detection of surface defects on metal bars as well as the problems associated with applying metal flat inspection systems to metal bars for non-destructive surface defects detection. A specially designed imaging system, which is comprised of a computing unit, line lights and high data rate line scan cameras, is developed for the aforementioned purpose. The target application is the metal bars (1) that have a circumference/cross-section-area ratio equal to or smaller than 4.25 when the cross section area is unity for the given shape, (2) whose cross-sections are round, oval, or in the shape of a polygon, and (3) are manufactured by mechanically cross-section reduction processes. The said metal can be steel, stainless steel, aluminum, copper, bronze, titanium, nickel, and so forth, and/or their alloys. The said metal bars can be at the temperature when they are being manufactured.

Abstract translation: 本发明旨在解决与检测金属棒表面缺陷相关的问题以及将金属平面检查系统应用于金属棒以用于非破坏性表面缺陷检测相关的问题。 为了上述目的开发了一种专门设计的成像系统，由计算单元，线路灯和高数据速率线扫描摄像机组成。 目标应用是当给定形状的横截面积为1时，具有等于或小于4.25的圆周/横截面积比的金属棒（1），（2）横截面为圆形，椭圆形 ，或多边形的形状，（3）通过机械截面缩小工艺制造。 所述金属可以是钢，不锈钢，铝，铜，青铜，钛，镍等，和/或它们的合金。 所述金属棒可以处于制造时的温度。

公开(公告)号：US20070013903A1

公开(公告)日：2007-01-18

申请号：US11524684

申请日：2006-09-21

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 持续移动的晶片被持续时间明显短于像素停留时间的激光脉冲照亮，使得在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅立叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。

公开(公告)号：US20060244957A1

公开(公告)日：2006-11-02

申请号：US11476356

申请日：2006-06-28

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N21/88

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

公开(公告)号：US20060203244A1

公开(公告)日：2006-09-14

申请号：US11434606

申请日：2006-05-15

Applicant: David Nilson ,  Brad Rice ,  Tamara Troy

Inventor： David Nilson ,  Brad Rice ,  Tamara Troy

IPC: G01N21/25

CPC classification number: G01N21/6456 ,  G01N2021/1787 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/0227 ,  G01N2201/0826

Abstract: A dual illumination system is disclosed for use with an imaging apparatus. The imaging apparatus defines a light-tight imaging compartment with an interior wall having a view port extending into the imaging compartment. This view port enables data acquisition of a biological specimen contained in the imaging compartment. The dual illumination system includes a first illumination assembly configured to direct structured light onto a first side of the specimen to enable structured light and surface topography measurements thereof. A second illumination assembly then directs light at the specimen wherein diffused fluorescent light emanates from a surface thereof for receipt through the view port to acquire fluorescence data of the specimen. The combination of structured light imaging and fluorescence imaging enables 3D diffuse tomographic reconstructions of fluorescent probe location and concentration.

公开(公告)号：US20050219535A1

公开(公告)日：2005-10-06

申请号：US11155078

申请日：2005-06-17

Applicant: David Nilson ,  Brad Rice ,  Tamara Troy

Inventor： David Nilson ,  Brad Rice ,  Tamara Troy

IPC: A01K1/03 ,  A22B3/00 ,  A61M16/00 ,  A61M16/10 ,  A61M16/18 ,  A61M16/20 ,  G01N21/64

CPC classification number: G01N21/6456 ,  A01K1/031 ,  A61M16/104 ,  A61M16/18 ,  A61M16/202 ,  A61M2016/0039 ,  G01N2021/1787 ,  G01N2021/6463 ,  G01N2021/6471 ,  G01N2021/6484 ,  G01N2201/0227 ,  G01N2201/0826

Abstract: A macroscopic fluorescence illumination assembly is provided for use with an imaging apparatus with a light-tight imaging compartment. The imaging apparatus includes an interior wall defining a view port extending into the imaging compartment to enable viewing of a specimen contained therein. The illumination assembly includes a specimen support surface sized and dimensioned for receipt in the imaging compartment, and oriented to face toward the view port of the imaging apparatus. The support surface is substantially opaque and defines a window portion that enables the passage of light there through. The window portion is selectively sized and dimensioned such that the specimen, when supported atop the support surface, can be positioned and seated over the window portion in a manner forming a light-tight seal substantially there between. The illumination assembly further includes an excitation light source, and a bundle of fiber optic strands having proximal ends thereof in optical communication with the light source. The distal ends of the strands terminate proximate the window portion of the support surface. The distal ends each emit a respective beam of light originating from the light source which are then collectively directed toward the window portion and into a bottom side of the specimen wherein the diffused light passes there through and exits a topside thereof for receipt through the view port to view the fluorescence of the specimen.

Abstract translation: 提供了一种宏观荧光照明组件，用于与具有不透光成像室的成像装置一起使用。 该成像设备包括限定了一个视图端口的内壁，该视图端口延伸到成像室中以使得能够观察其中容纳的样本。 照明组件包括尺寸和尺寸适于接收在成像室中的样本支撑表面，并且被定向成面向成像设备的视口。 支撑表面基本上是不透明的，并且限定了能够使光通过的窗口部分。 窗口部分被选择性地定尺寸和尺寸使得当被支撑在支撑表面上方时，样本可以以基本上在其之间形成不透光密封的方式被定位和安置在窗口部分上。 照明组件还包括激发光源，以及一束光纤束，其光纤束的近端与光源光学连通。 股线的末端终止于支撑表面的窗口部分。 远端各自发出源自光源的相应光束，然后将它们共同指向窗口部分并进入样本的底侧，其中漫射光通过其并穿过其顶侧并通过观察端口接收 以观察样品的荧光。

公开(公告)号：US20050110987A1

公开(公告)日：2005-05-26

申请号：US11021393

申请日：2004-12-23

Applicant: Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

Inventor： Dov Furman ,  Gad Neumann ,  Mark Wagner ,  Noam Dotan ,  Ram Segal ,  Shai Silberstein

IPC: G01N20060101 ,  G01N1/00 ,  G01N21/88 ,  G01N21/95 ,  G01N21/956 ,  H01L21/20 ,  H01L21/66 ,  H04B10/08

CPC classification number: G01N21/9501 ,  G01N21/8806 ,  G01N21/95607 ,  G01N21/95623 ,  G01N2021/479 ,  G01N2021/8825 ,  G01N2201/0697 ,  G01N2201/0826

Abstract: Fast on-line electro-optical detection of wafer defects by illuminating with a short light pulse from a repetitively pulsed laser, a section of the wafer while it is moved across the field of view of an imaging system, and imaging the moving wafer onto a focal plane assembly, optically forming a continuous surface of photo-detectors at the focal plane of the optical imaging system. The continuously moving wafer is illuminated by a laser pulse of duration significantly shorter than the pixel dwell time, such that there is effectively no image smear during the wafer motion. The laser pulse has sufficient energy and brightness to impart the necessary illumination to each sequentially inspected field of view required for creating an image of the inspected wafer die. A novel fiber optical illumination delivery system, which is effective in reducing the effects of source coherence is described. Other novel aspects of the system include a system for compensating for variations in the pulse energy of a Q-switched laser output, methods for autofocussing of the wafer imaging system, and novel methods for removal of repetitive features of the image by means of Fourier plane filtering, to enable easier detection of wafer defects.

Abstract translation: 通过用来自重复脉冲激光器的短光脉冲照射晶片缺陷的快速在线电光检测，晶片的一部分在成像系统的视场内移动，并将移动的晶片成像到 焦平面组件，在光学成像系统的焦平面处光学地形成光电检测器的连续表面。 持续移动的晶片被持续时间明显短于像素停留时间的激光脉冲照亮，使得在晶片运动期间实际上没有图像污迹。 激光脉冲具有足够的能量和亮度，以对于产生被检查的晶片管芯的图像所需的每个顺序检查的视场赋予必要的照明。 描述了一种有效减少源相干效应的新型光纤照明传输系统。 该系统的其他新颖的方面包括用于补偿Q开关激光输出的脉冲能量变化的系统，用于晶片成像系统的自动聚焦的方法，以及通过傅里叶平面去除图像的重复特征的新颖方法 过滤，以便更容易地检测晶片缺陷。