Abstract:
PROBLEM TO BE SOLVED: To provide an infrared radiation element capable of enhancing the reliability and increasing the output power while reducing the power consumption.SOLUTION: An infrared radiation element 1 includes; a substrate 2; a functional layer 5 including a heat generation layer 3 and a protection layer 4 covering the heat generation layer 3 which are formed at one surface side of the substrate 2; an insulation layer 6 located at the one surface side of the substrate 2 and being interposed between the substrate 2 and the functional layer 5 to support the functional layer 5; and a pair of pads 9, 9 electrically connected to the heat generation layer 3 at the one surface side of the substrate 2. The substrate 2 includes an opening 2a formed to expose a surface at the side opposite to the heat generation layer 3 in the insulation layer 6. The insulation layer 6 includes a diaphragm portion 6D separating the opening 2a from the heat generation layer 3 and a support portion 6S formed in the periphery portion of the opening 2a at the one surface side of the substrate 2 to support the diaphragm portion 6D. The insulation layer 6 and the protection layer 4 are formed of a material having a linear expansion coefficient closer to that of the heat generation layer 3 than that of the pads 9, 9.
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared radiation element that has high output, is capable of performing high-frequency drive, and has low power consumption, and to provide a method of manufacturing the infrared radiation element. SOLUTION: The infrared radiation element includes a semiconductor substrate 1; a holding layer 2 formed on one surface of the semiconductor substrate 1; a gas layer 3 consisting of a space surrounded by one surface of the semiconductor substrate 1 and that of the holding layer 2; a support section 4 for connecting one surface of the substrate 1 to that of the holding layer 2 inside the gas layer 3 and supporting the holding layer 2; and an infrared radiation layer 5, that is laminated on the other surface of the holding layer 2 and radiates infrared rays due to the heat generated by electrical input. The thickness of the gas layer 3 is set, according to the frequency of voltage applied to the infrared radiation layer 5, and the gas layer works as a heat-insulating layer and a heat-radiating layer, when the temperature of the infrared radiation layer 5 rises and when the infrared radiation layer 5 is lowered, respectively. COPYRIGHT: (C)2010,JPO&INPIT
Abstract:
PROBLEM TO BE SOLVED: To provide a more-inexpensive infrared light source device using a mechanically uniform film forming method capable of removing an impurity concentration distribution in a filament. SOLUTION: This infrared light source device having a filament formed in a micro-bridge shape on a substrate, for emitting an infrared ray by energizing the filament and generating heat therefrom is characterized by being equipped with the etching-formed filament comprising deposited polysilicon to which an impurity is added simultaneously so that the impurity concentration becomes equal in the thickness direction. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide a sensitivity distribution measuring method and apparatus for a photosensor capable of grasping a sensitivity characteristic of the photosensor in detail. SOLUTION: This sensitivity distribution measuring apparatus 2 is provided with an inspection plate 11 with an inspection face 11a drawn with an eccentric circle 20 having a black line 22 and a black-painted area 23, a sensor holder 12 for holding the photosensor 10 and the inspection plate 11 to face an arranging face 10c arranged with a light emitting element 10a and a light receiving element 10b to the inspection face 11a, an inspection plate holder 13, the first stepping motor 14 for rotating the arranging face 10c with respect to the inspection face 11a, the second stepping motor 15 for rotating the inspection plate 11 at a constant speed, and a host computer 16 for drawing out a sensitivity distribution D 2 expressed two-dimensionally, based on an output signal from the light receiving element 10b in every of rotations, by driving the first stepping motor 14 to rotate the arranging face 10c at plurality of times and by driving the second stepping motor 15 in the every of the rotations, and for composing the plurality of obtained sensitivity distributions D 2 to draw out a sensitivity distribution D 3 expressed three-dimensionally. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To stabilize the quantity of light radiated from a light source used for various analyzers such as a spectrophotometer, a fluorophotometer, and a refractive index meter in a short time. SOLUTION: A cooling fan 8 for air-cooling a lamp house 3 is installed in the vicinity of the lamp house 3 for housing a lamp 1 inside. The cooling fan 8 is installed at an air outlet of a casing 5 to directly draw warmed air from the periphery of the lamp house 3 by suction to the outside of this apparatus. The time for the temperature of the lamp house 3 to rise up to reach a stable temperature by heating from the deuterium lamp 1 is previously set at a fan control part 6. The rotation of the cooling fan 8 is halted until the time has elapsed, or the cooling fan 8 is rotated at a smaller rotational speed than a rotational speed at normal operation. Then the cooling fan 8 is started to rotated at the rotational speed at normal operation by the fan control part 6, or its rotational speed is raised to the rotational speed at normal operation to increase the quantity of gases for cooling the lamp house 3, increase the quantity of heat radiation of the lamp house 3, and maintain a constant temperature of the lamp house 3. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract:
PROBLEM TO BE SOLVED: To provide an infrared light source having little variation with time so that individual differences sucbas variation of the relationship between input power and light source intensity differ only slightly each other. SOLUTION: The infrared light source has a filament formed in the shape of a microbridge on a substrate, and emits infrared rays by powering the filament for heating. The substrate is an SOI substrate comprising a monocrystal silicon substrate with a monocrystal silicon layer formed thereon through an insulating film, and the filament is patterned by etching the monocrystal silicon layer and is formed in the shape of a microbridge by etching the monocrystal silicon substrate below the silicon layer.
Abstract:
PROBLEM TO BE SOLVED: To provide a deuterium lamp box high in versatility and a portable- type light source device. SOLUTION: This deuterium lamp box 50 can lead out forward a beam of light having a wavelength different from that of the light of a deuterium lamp 10 from a light emitting opening 69. More specifically, when the see- through type deuterium lamp 10 is lighted, the light generated by the deuterium lamp 10 can be led out from the light emitting opening 69. When the deuterium lamp 10 is turned off and a second lamp 85 is lighted, the light generated by the second lamp 85 is condensed by a lens 84, passes through the deuterium lamp 10, and is led out of the light emitting opening 69. When the deuterium lamp 10 and second lamp 85 are lighted simultaneously, light of different wavelengths is mixed together and led out of the light emitting opening 69. Thus, three kinds of light can be generated according to the manner of lighting the lamps 10, 85, and it can be said that the lamp box 50 is much higher in versatility than a lamp box housing only one lamp.
Abstract:
PROBLEM TO BE SOLVED: To obtain a light source having a uniform light quantity distribution and without having directivity by using a laser light, making an opening of a light entrance part small and setting an optical path dispersion optical system minutely vibrating at a high speed at the light entrance part. SOLUTION: The integrating sphere 10 is used in combination with a laser light source 14 and has an optical path dispersing optical system of a combination of a light-bending mirror 19 and a piezoelectric element 20 opposed to an entrance part 11. An opening of the entrance part 11 is made small and the interior of the integrating sphere 10 is formed of a material of good dispersion properties. The light-bending mirror 19 is mechanically vibrated when a laser light 21 is bent by the mirror 19 and brought into the entrance part 11. Because of this arrangement, the laser light 21 is guided into the integrating sphere 10 through the entrance part 11 from various angles in a minute range, scattered many times in the sphere and projected from a projection part. A test body is observed by a projected light having a vibration component of the light-bending mirror 19 integrated, and therefore in-plane uniformity of the projected light is improved and a light source without directivity is obtained.