公开(公告)号：WO2006050229B1

公开(公告)日：2006-10-26

申请号：PCT/US2005039189

申请日：2005-10-29

Applicant: SILICON LIGHT MACHINES CORP ,  TRISNADI JAHJA I ,  CARLISLE CLINTON B ,  LANG ROBERT J

Inventor： TRISNADI JAHJA I ,  CARLISLE CLINTON B ,  LANG ROBERT J

IPC: H01J40/14 ,  G06F3/038 ,  G09G5/08

CPC classification number: G06F3/0383 ,  G06F3/0317

Abstract: An optical sensor and method of using the same is provided for sensing relative movement between the sensor and a surface (512) by detecting changes in optical features of light reflected from the surface. In one embodiment, the sensor includes a two dimensional array (302) of photosensitive elements (304), the array including at least a first plurality of photosensitive elements arranged and coupled to sense a first combined movement along a first set of at least two non-parallel axes, and a second plurality of photosensitive elements arranged and coupled to sense a second combined movement along a second set of at least two non-parallel axes.

Abstract translation: 提供一种光学传感器及其使用方法，用于通过检测从表面反射的光的光学特征的变化来感测传感器和表面（512）之间的相对运动。 在一个实施例中，传感器包括感光元件（304）的二维阵列（302），所述阵列包括至少第一组多个感光元件，所述至少一组光敏元件被布置和耦合以感测沿着至少两个非 平行的轴，以及布置和耦合以感测沿着至少两个非平行轴的第二组的第二组合运动的第二组多个感光元件。

公开(公告)号：WO2006050229A3

公开(公告)日：2006-05-11

申请号：PCT/US2005/039189

申请日：2005-10-29

Applicant: SILICON LIGHT MACHINES CORPORATION ,  TRISNADI, Jahja I ,  CARLISLE, Clinton B ,  LANG, Robert J

Inventor： TRISNADI, Jahja I ,  CARLISLE, Clinton B ,  LANG, Robert J

IPC: H01J40/14 ,  G09G5/08

Abstract: An optical sensor and method of using the same is provided for sensing relative movement between the sensor and a surface (512) by detecting changes in optical features of light reflected from the surface. In one embodiment, the sensor includes a two dimensional array (302) of photosensitive elements (304), the array including at least a first plurality of photosensitive elements arranged and coupled to sense a first combined movement along a first set of at least two non-parallel axes, and a second plurality of photosensitive elements arranged and coupled to sense a second combined movement along a second set of at least two non-parallel axes.

公开(公告)号：WO2006050229A2

公开(公告)日：2006-05-11

申请号：PCT/US2005039189

申请日：2005-10-29

Applicant: SILICON LIGHT MACHINES CORP ,  TRISNADI JAHJA I ,  CARLISLE CLINTON B ,  LANG ROBERT J

Inventor： TRISNADI JAHJA I ,  CARLISLE CLINTON B ,  LANG ROBERT J

IPC: G01J3/50 ,  G06F3/038

CPC classification number: G06F3/0383 ,  G06F3/0317

Abstract: An optical sensor and method of using the same is provided for sensing relative movement between the sensor and a surface (512) by detecting changes in optical features of light reflected from the surface. In one embodiment, the sensor includes a two dimensional array (302) of photosensitive elements (304), the array including at least a first plurality of photosensitive elements arranged and coupled to sense a first combined movement along a first set of at least two non-parallel axes, and a second plurality of photosensitive elements arranged and coupled to sense a second combined movement along a second set of at least two non-parallel axes.

公开(公告)号：WO2005114642A3

公开(公告)日：2005-12-01

申请号：PCT/US2005/017375

申请日：2005-05-17

Applicant: SILICON LIGHT MACHINES CORPORATION ,  ROXLO, Charles B ,  LEHOTY, David A ,  TRISNADI, Jahja I ,  CARLISLE, Clinton B

Inventor： ROXLO, Charles B ,  LEHOTY, David A ,  TRISNADI, Jahja I ,  CARLISLE, Clinton B

IPC: G09G5/08

Abstract: One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface (304) by determining displacement of optical features in a succession of images of the surface (304) . The sensor includes a plurality of linear comb arrays (LCAs) (502) arranged along an associated axis. Each LCA comprises a row of photosensistive elements parallel to the associated axis. Another embodiment relates to a method of sensing movement of a data input device across a surface (304). An intensity pattern of light reflected from an illuminated portion of the surface (304) is detected using a first plurality of linear comb arrays (LCAs) arranged along a first axis and a second plurality of LCAs arranged along a second axis not parallel to the first axis. Other embodiments are also described.

公开(公告)号：WO2005114639A2

公开(公告)日：2005-12-01

申请号：PCT/US2005/017459

申请日：2005-05-18

Applicant: SILICON LIGHT MACHINES CORPORATION ,  LEHOTY, David, A. ,  WEBB, Douglas, A. ,  ROXLO, Charles, B. ,  CARLISLE, Clinton, B. ,  TRISNADI, Jahja, I.

Inventor： LEHOTY, David, A. ,  WEBB, Douglas, A. ,  ROXLO, Charles, B. ,  CARLISLE, Clinton, B. ,  TRISNADI, Jahja, I.

IPC: G09G5/00

CPC classification number: G06F3/0354 ,  G06F3/0317

Abstract: One embodiment relates to an optical displacement sensor for sensing relative movement between a data input device and a surface (304) by determining displacement of optical features in a succession of frames of the surface. The sensor includes at least a detector, first circuitry, and second circuitry. The detector includes a plurality of photosensitive elements organized in first and second arrays (for example, 1502 and 1504). The first circuitry is configured to combine signals from every M'th element of the first array to generate M group signals, and the second circuitry is configured to combine signals from every M'th element of the second array to generate M' group signals. M and M' are numbers which are different from each other. Other embodiments are also disclosed.

Abstract translation: 一个实施例涉及一种用于通过确定表面的一连串框架中的光学特征的位移来感测数据输入设备和表面（304）之间的相对移动的光学位移传感器。 传感器至少包括检测器，第一电路和第二电路。 检测器包括被组织在第一和第二阵列（例如，1502和1504）中的多个光敏元件。 第一电路被配置为组合来自第一阵列的每个第M个元件的信号以产生M组信号，并且第二电路被配置为组合来自第二阵列的每个第M个元件的信号以产生M'组信号。 M和M'是彼此不同的数字。 还公开了其他实施例。

公开(公告)号：WO2005031394A3

公开(公告)日：2005-04-07

申请号：PCT/US2004/031069

申请日：2004-09-23

Applicant: SILICON LIGHT MACHINES CORPORATION ,  TRISNADI, Jahja I ,  CARLISLE, Clinton B

Inventor： TRISNADI, Jahja I ,  CARLISLE, Clinton B

IPC: G02B26/00

Abstract: In one embodiment, a high-density spatial light modulator (300) includes a substrate (402) having a reflective surface (404) and a reflective ribbon (304) over the reflective surface. The ribbon (304) may have one or more openings, such as rectangular slots (308). The openings allow light to pass through the ribbon and impinge on the reflective surface. Deflecting the ribbon (304) towards the substrate (402) thus allows for dynamically-controllable diffraction of incident light. The spatial light modulator pixel requires less space than a conventional light modulator, thus allowing for relatively large pixel count within a manufacturable device size. Other embodiments are also disclosed.

公开(公告)号：WO0057127A9

公开(公告)日：2002-03-28

申请号：PCT/US0007709

申请日：2000-03-22

Applicant: SENSYS INSTR CORP ,  STANKE FRED E ,  WEBER GRABAU MICHAEL ,  RUTH DOUGLAS E ,  TONG EDRIC H ,  CAHILL JAMES M JR ,  CARLISLE CLINTON ,  BURKE ELLIOT ,  PHAM HUNG

Inventor： STANKE FRED E ,  WEBER-GRABAU MICHAEL ,  RUTH DOUGLAS E ,  TONG EDRIC H ,  CAHILL JAMES M JR ,  CARLISLE CLINTON ,  BURKE ELLIOT ,  PHAM HUNG

IPC: B24B49/12 ,  G01B11/06 ,  G01B11/24 ,  G01B11/30 ,  G01N21/21 ,  G01N21/95 ,  H01L21/66 ,  H01L21/67 ,  H01L21/683 ,  C23C16/52 ,  G01N21/88 ,  H01L21/304

CPC classification number: B24B49/12 ,  G01B11/0625 ,  G01B11/30 ,  G01N21/211 ,  G01N21/9501 ,  H01L21/67 ,  H01L22/12

Abstract: This invention is an apparatus for imaging metrology, which in particular embodiments may be integrated with a processor station such that a metrology station is apart from but coupled to a process station. The metrology station is provided with a first imaging camera with a first field of view containing the measurement region. Alternate embodiments include a second imaging camera with a second field of view. Preferred embodiments comprise a broadband ultraviolet light source, although other embodiments may have a visible or near infrared light source of broad or narrow optical bandwidth. Embodiments including a broad bandwidth source typically include a spectrograph, or an imaging spectrograph. Particular embodiments may include curved, reflective optics or a measurement region wetted by a liquid. In a typical embodiment, the metrology station and the measurement region are configured to have 4 degrees of freedom of movement relative to each other.

Abstract translation: 本发明是一种用于成像测量的装置，其在特定实施例中可以与处理器站集成，使得计量站离开处理站而不是耦合到处理站。 计量站设置有具有包含测量区域的第一视野的第一成像照相机。 替代实施例包括具有第二视野的第二成像相机。 优选实施例包括宽带紫外光源，但是其他实施例可以具有宽或窄光带宽的可见光或近红外光源。 包括宽带宽源的实施例通常包括光谱仪或成像光谱仪。 具体实施例可以包括弯曲的，反射光学的或由液体润湿的测量区域。 在典型的实施例中，计量站和测量区域被配置为具有相对于彼此的4个移动自由度。