公开(公告)号：EP1916558A1

公开(公告)日：2008-04-30

申请号：EP07119356.9

申请日：2007-10-26

Applicant: Spatial Photonics, Inc.

Inventor： Pan, Shaoher X.

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge is configured to produce an elastic restoring force on the mirror plate when the mirror plate is tilted away from an un-tilted position. The micro mirror device also includes a controller that can produce an electrostatic force to overcome the elastic restoring force to tilt the mirror plate from the un-tilted position to an "on" position or an "off" position. The electrostatic force can counter the elastic restoring force to hold the mirror plate at the "on" position or the "off" position.

Abstract translation: 微镜装置包括由基板支撑的铰链和可围绕铰链倾斜的反射镜板。 铰链构造成当镜板从倾斜位置倾斜时在镜板上产生弹性恢复力。 微反射镜装置还包括能产生静电力以克服弹性恢复力以将镜板从未倾斜位置倾斜到“打开”位置或“关闭”位置的控制器。 静电力可以抵抗弹性恢复力，以将镜板保持在“开”位置或“关”位置。

公开(公告)号：EP1933188A1

公开(公告)日：2008-06-18

申请号：EP07119368.4

申请日：2007-10-26

Applicant: Spatial Photonics, Inc.

Inventor： Pan, Shaoher X.

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0054 ,  B81B2201/042 ,  B81B2203/0109 ,  B81B2203/058

Abstract: A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge includes a length longer than 1 micron, a thickness less than 500 nanometers, and a width less than 1000 nanometers. The hinge can produce an elastic restoring force on the mirror plate when the mirror plate tilts away from an un-tilted position.

Abstract translation: 微镜装置包括由基板支撑的铰链和可围绕铰链倾斜的反射镜板。 铰链包括长度大于1微米，厚度小于500纳米，宽度小于1000纳米的长度。 当镜板倾斜离开倾斜位置时，铰链可以在镜板上产生弹性恢复力。

公开(公告)号：EP1916559A1

公开(公告)日：2008-04-30

申请号：EP07119361.9

申请日：2007-10-26

Applicant: Spatial Photonics, Inc.

Inventor： Pan, Shaoher X.

IPC: G02B26/08 ,  G02B7/182 ,  B81B3/00

CPC classification number: G02B26/0841

Abstract: A micro mirror device includes a hinge supported by a substrate and a mirror plate tiltable around the hinge. The hinge can include an alloy selected from the group consisting of a titanium-nickel alloy having a titanium composition between about 30% to 70%, a titanium-aluminum alloy having a titanium composition between about 30% to 70%, an aluminum-copper alloy having a copper composition between about 5% to 20%, and an aluminum titanium nitride having a nitrogen composition in the range of 0 to about 15%.

Abstract translation: 微镜装置包括由基板支撑的铰链和可围绕铰链倾斜的反射镜板。 铰链可以包括选自由钛组成在约30％至70％之间的钛 - 镍合金，钛组成在约30％至70％之间的钛 - 铝合金，铝 - 铜 铜组成在约5％至20％之间的合金和氮组成在0至约15％范围内的铝氮化钛。

公开(公告)号：EP1892557A1

公开(公告)日：2008-02-27

申请号：EP07016595.6

申请日：2007-08-23

Applicant: Spatial Photonics, Inc.

Inventor： PAN, Shaoher X.

IPC: G02B26/08

CPC classification number: G02B26/0841

Abstract: A spatial light modulator includes a two-dimensional array of hexagonal mirror plates disposed in a honeycomb pattern over a substrate. Each of the hexagonal mirror plates is supported by one or more structural members. There is a gap between adjacent hexagonal mirror plates. The structural members are not located in the gap.

Abstract translation: 空间光调制器包括以基板上的蜂窝图案设置的六角镜板的二维阵列。 每个六角镜板由一个或多个结构构件支撑。 相邻的六角镜板之间有间隙。 结构件不在间隙内。

公开(公告)号：EP1887421A1

公开(公告)日：2008-02-13

申请号：EP07014920.8

申请日：2007-07-30

Applicant: Spatial Photonics, Inc.

Inventor： Pan, Shaoher X.

IPC: G03B21/14 ,  G02B26/08 ,  H04N5/74

CPC classification number: H04N9/3129 ,  G02B26/123 ,  G02B26/124 ,  G02B26/125 ,  G03B21/008 ,  G03B21/14 ,  G03B21/208 ,  G03B33/12 ,  H04N5/7458 ,  H04N9/3108 ,  H04N9/3111 ,  H04N9/3114

Abstract: A display system (100) includes a transparent tapered plate (260) comprising a first face (265), a second face (266), and a third face (267). The first face is substantially smaller than the second face and the third face. The display system also includes a row of tiltable mirror plates (120) each comprising a reflective surface. Each of the mirror plates is configured to tilt to an "on" position to reflect incident light in an "on" direction or to tilt to an "off" position to reflect incident light in an "off" direction. An optical scanning system is configured to control the direction of the light reflected by the mirror plates in the "on" direction. The row of the tiltable mirror plates, optical scanning system and the tapered plate are configured to allow the light reflected by the row of mirror plates in the "on" direction to enter the tapered plate at the first face, be reflected by the second face, and produce a line of image pixels on the third face. The optical scanning system is configured to scan the line of image pixels across the third face to produce a display image.

Abstract translation: 显示系统（100）包括透明锥形板（260），其包括第一面（265），第二面（266）和第三面（267）。 第一面基本上小于第二面和第三面。 显示系统还包括一排每个包括反射表面的可倾斜镜板（120）。 每个镜板被配置为倾斜到“开”位置以反射“开”方向上的入射光或者倾斜到“关”位置以将入射光反射到“关”方向。 光扫描系统被配置为控制由“反光板”反射的光在“向”方向上的方向。 可倾斜镜板，光学扫描系统和锥形盘的行被配置为允许由“行”方向反射的一列反射镜板的光在第一面进入锥形板，被第二面反射 并且在第三面上产生一行图像像素。 光学扫描系统被配置为扫描跨越第三面的图像像素线以产生显示图像。

公开(公告)号：EP1704424A2

公开(公告)日：2006-09-27

申请号：EP04796544.7

申请日：2004-10-26

Applicant: Spatial Photonics, Inc.

Inventor： PAN, Shaoher X.

IPC: G02B1/00

CPC classification number: G02B26/0841 ,  G02B26/0833

Abstract: The upper portion of the high contrast SLM is fully covered by arrays of micro-mirrors with a flat optically reflective layer (102) on the upper surfaces and a pair of embedded torsion hinges (106) under the cavities in the lower portion of mirror plate (103). Torsion hinges (106) in the mirror plate (103) are fabricated to be part of the mirror plate (103) and are kept a minimum distance under the reflective surface to allow only a gap for a predetermined angular rotation. By minimizing the distances between a hinge rotating axes (106) to the upper reflective surfaces (102), the SLM effectively eliminates the horizontal displacement of each minor during an angular transition. According to the present invention, the gaps between adjacent mirrors in the array of SLM can be reduced to less than 0.2 microns to achieve the highest active reflection area fill-ratio of a micro-mirror array at the present time.

公开(公告)号：EP1704424B1

公开(公告)日：2016-12-07

申请号：EP04796544.7

申请日：2004-10-26

Applicant: Spatial Photonics, Inc.

Inventor： PAN, Shaoher X.

IPC: G02B26/00 ,  G02B26/08

CPC classification number: G02B26/0841 ,  G02B26/0833

公开(公告)号：EP2430212A2

公开(公告)日：2012-03-21

申请号：EP10775382.4

申请日：2010-05-11

Applicant: Spatial Photonics, Inc.

Inventor： NOVOTNY, Vlad ,  MATUS, Gabriel

IPC: C23C16/44 ,  C23C16/30 ,  C23C16/46 ,  C23C16/00

CPC classification number: G02B26/0841 ,  B81B3/0075 ,  B81B2201/047

Abstract: Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.

公开(公告)号：EP1793260A1

公开(公告)日：2007-06-06

申请号：EP06024826.7

申请日：2006-11-30

Applicant: Spatial Photonics, Inc.

Inventor： Lee, Chii Guang ,  Kao, Chun-Teh ,  Hu, Hung Kwei ,  Pan, Shaoher X.

IPC: G02B26/08 ,  B81B3/00

CPC classification number: G02B26/0841 ,  B81B3/0008 ,  B81B2201/042 ,  B81B2203/0109

Abstract: A spatial light modulator includes a mirror plate comprising a reflective upper surface, a lower surface having a conductive surface portion, and a substrate portion having a first cavity having an opening on the lower surface, a second cavity in the substrate portion, and a membrane over the second cavity. The modulator includes a substrate comprising an upper surface, a hinge support post in connection with the upper surface, a hinge component supported by the hinge support post and in connection with the mirror plate to facilitate a rotation of the mirror plate, and an upright landing tip in connection with the upper surface of the substrate. The hinge component is extends into the first cavity. The upright landing tip is configured to contact the membrane over the second cavity in the substrate portion of the mirror plate to stop the rotation of the mirror plate at a predetermined orientation.

Abstract translation: 一种空间光调制器包括一个镜面板，它包括一个反射上表面，一个具有导电表面部分的下表面，以及一个基片部分，该基片部分具有一个在下表面上具有开口的第一腔， 超过第二个腔。 该调制器包括一个衬底，该衬底包括上表面，与上表面相连的铰链支撑柱，由铰链支撑柱支撑并与镜板连接以便于镜板旋转的铰链部件，以及直立着陆 尖端与衬底的上表面相连。 铰链部件延伸到第一腔体中。 直立着陆尖端构造成在镜板的衬底部分中的第二腔上接触膜以阻止镜板在预定取向的旋转。