公开(公告)号：WO2010132424A3

公开(公告)日：2010-11-18

申请号：PCT/US2010/034354

申请日：2010-05-11

Applicant: Spatial Photonics, Inc. ,  NOVOTNY, Vlad ,  MATUS, Gabriel

Inventor： NOVOTNY, Vlad ,  MATUS, Gabriel

IPC: C23C16/44 ,  C23C16/30 ,  C23C16/46 ,  C23C16/00

Abstract: Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.

公开(公告)号：EP2430212A2

公开(公告)日：2012-03-21

申请号：EP10775382.4

申请日：2010-05-11

Applicant: Spatial Photonics, Inc.

Inventor： NOVOTNY, Vlad ,  MATUS, Gabriel

IPC: C23C16/44 ,  C23C16/30 ,  C23C16/46 ,  C23C16/00

CPC classification number: G02B26/0841 ,  B81B3/0075 ,  B81B2201/047

Abstract: Systems and methods, such as for a MEMS device, can include a component having a contact portion that includes on one side a layer including hydrophilic functional groups and a coating formed on the layer. The coating can include hydrophilic functional groups adapted to interact with the hydrophilic functional groups of the layer. The coating can also include hydrophobic functional groups opposite the hydrophilic functional groups of the coating. The layer can be bonded to the component, and the coating can be bonded to the layer. The coating can be adapted to be formed on the layer while in vapor form and can include a lubricant. The layer can be an atomic monolayer or multilayer, such as of aluminum oxide, and the coating can include a fluorinated acid, such as perfluorodecanoic acid.