公开(公告)号：US06441382B1

公开(公告)日：2002-08-27

申请号：US09316657

申请日：1999-05-21

Applicant: Yongzhang Huang

Inventor： Yongzhang Huang

IPC: H01J37317

CPC classification number: H01J37/3171 ,  H01J2237/04756

Abstract: A deceleration electrode for a high-energy, ultra-low ion implanter is provided. The deceleration electrodes are “tilted” (i.e., not perpendicular with respect the ion beam axis. The deceleration electrode reduces the energy of the ion beam and simultaneously separates neutral particles out of the ion beam. The length of the deceleration electrode is slightly longer than a conventional deceleration electrode. However, because the device functions to also separate neutral particles out of the ion beam, the need for a separate neutral particle separation device is eliminated. Thus, the compact design of the dual function electrode configuration permits a shortening of the distance that a high-current, ultra-low energy ion beam must travel to the target wafer. Further, because the neutral particles can be almost completely separated from the ion beam, the decel ratio may be set high enabling an ultra-low energy, high current ion beam. In the tilted decel apparatus of the present invention, a plurality of decel electrodes having openings are arranged in an inclined manner against the axis which is perpendicular to the base axis of a beam passage. An ion beam impinging with a predetermined ion beam offset distance and inclination angle passes through gaps formed between the decel electrodes and thus, an ion beam is decelerated and neutral particles are separated from the ion beam. Thus, an ion beam can be formed having a high current, low neutral contamination, and ultra-low energy.

Abstract translation: 提供了一种用于高能超低离子注入机的减速电极。 减速电极相对于离子束轴线“倾斜”（即不垂直），减速电极降低离子束的能量，同时将中性粒子从离子束中分离出来，减速电极的长度略长于 然而，由于该装置还用于将离子束中的中性粒子分离，因此不需要分离的中性粒子分离装置，因此双功能电极构造的紧凑设计可以缩短 高电流，超低能量离子束必须行进到目标晶片的距离，此外，由于中性粒子几乎可以完全与离子束分离，所以减小比可以设定得高，能够实现超低能量， 高电流离子束在本发明的倾斜减速装置中，具有开口的多个减速电极设置在倾斜的人中 相对于垂直于梁通道的基轴的轴线。 以预定的离子束偏移距离和倾斜角度照射的离子束通过形成在减速电极之间的间隙，因此离子束被减速，中性粒子与离子束分离。 因此，可以形成具有高电流，低中性污染和超低能量的离子束。