-
公开(公告)号：KR1020120105987A
公开(公告)日：2012-09-26
申请号：KR1020110023779
申请日：2011-03-17
Applicant: 경희대학교 산학협력단
IPC: C23C16/26 , C23C16/48 , C23C16/458
Abstract: PURPOSE: A thin film deposition device using a fullerene manifold is provided to deposit thin films on a plurality of substrates by arranging a substrate holder that supports the plurality of substrates in a moving path of fullerene manifold. CONSTITUTION: A thin film deposition device using fullerene manifold comprises a vacuum chamber(10), a powder diffusion cell(20), a temperature control unit(30), a stand(40), a substrate holder(50), an electron beam generating unit(60), and a collecting unit(70). The power diffusion cell is installed in the vacuum chamber and has a fullerene monomer powder outlet on the upper side to discharge fullerene molecules. The temperature control unit maintains uniform temperature of the powder diffusion cell. The fullerene monomer molecules discharged from the powder diffusion cell are induced into fullerene manifold by electron beams. The substrate holder deposits the fullerene manifold to form a thin film on a plurality of substrates. The electron beam generating unit creates electron beams to irradiate the fullerene monomer molecules. The collecting unit collects the fullerene manifold induced by the electron beams. The stand is provided between the powder diffusion cell and the substrate holder to support the substrate holder and regulate the height of the substrate holder.
Abstract translation: 目的：提供一种使用富勒烯歧管的薄膜沉积装置，通过将富勒烯歧管的移动路径中支撑多个基板的基板保持器布置在多个基板上来沉积薄膜。 构成：使用富勒烯歧管的薄膜沉积装置包括真空室（10），粉末扩散池（20），温度控制单元（30），支架（40），基板保持器（50），电子束 生成单元（60）和收集单元（70）。 功率扩散单元安装在真空室中，在上侧具有富勒烯单体粉末出口，以排出富勒烯分子。 温度控制单元维持粉末扩散池的均匀温度。 从粉末扩散池排出的富勒烯单体分子通过电子束诱导成富勒烯歧管。 衬底保持器沉积富勒烯歧管以在多个衬底上形成薄膜。 电子束产生单元产生电子束以照射富勒烯单体分子。 收集单元收集由电子束引起的富勒烯歧管。 支架设置在粉末扩散单元和基板支架之间，以支撑基板支架并调节基板支架的高度。
-
Patent Agency Ranking
公开(公告)号：KR101094019B1
公开(公告)日：2011-12-15
申请号：KR1020090017126
申请日：2009-02-27
Applicant: 경희대학교 산학협력단
IPC: C01B31/02
Abstract: 본 발명은 플러렌 단량체 분말을 이용한 플러렌 다량체 제조장치에 설치되는 플러렌 다량체 포집수단에 관한 것으로, 특히 플러렌 다량체 제조장치를 구성하는 실린더 상단에 외주면을 감싸도록 설치되는 냉각부로 구성된 포집수단을 구비하여, 플러렌 다량체 분자가 냉각부 내부의 실린더 내벽에 부착되도록 하여 플러렌 다량체를 포집할 수 있으며, 또 다른 구성으로 상기 실린더 상부 또는 플러렌 단량체 분말이 담긴 용기 상부에 일정거리 이격시켜 Si 기판 등을 설치하여 플러렌 다량체가 그 기판상부에 증착되도록 하여 플러렌 다량체 박막을 얻을 수 있는 플러렌 다량체 포집장치를 제공한다.
플러렌 다량체, 플러렌 다량체 제조장치, 플러렌 다량체 포집장치Abstract translation: 本发明包括一个，更具体地，富勒烯的多聚体收集装置部分冷却，其被安装成围绕的外周表面在圆筒的顶部构成的富勒烯的多聚体收集在所述富勒烯低聚物制造装置提供装置使用富勒烯单体粉末的制造装置 于，富勒烯和多聚体分子可以捕捉富勒烯的多聚体，以确保附着于被包含在由所述气缸顶部或容器富勒烯单体粉末上方间隔开一预定距离内部冷却，而其他配置的气缸内壁等Si基板 并且富勒烯多聚体沉积在基板上以获得富勒烯多聚物薄膜。
-
公开(公告)号：KR101060383B1
公开(公告)日：2011-08-29
申请号：KR1020080127341
申请日：2008-12-15
Applicant: 경희대학교 산학협력단
Abstract: 본 발명은 마이크로 분무법을 이용하여 생성된 플러렌 다량체를 포집하는 플러렌 다량체 포집장치에 관한 것으로, 특히, 플러렌 다량체 제조장치의 광중합 반응 수단 하부에 설치되고, 칠러에 의해 저온 상태로 유지함으로써 마이크로미터 크기의 플러렌 다량체 용액을 액체 상태로 포집하는 플러렌 다량체 포집장치를 제공한다.
플러렌 다량체, 플러렌 다량체 제조장치, 플러렌 다량체 포집장치-
公开(公告)号：KR1020100098111A
公开(公告)日：2010-09-06
申请号：KR1020090017124
申请日：2009-02-27
Applicant: 경희대학교 산학협력단
CPC classification number: C01B32/152
Abstract: PURPOSE: A manufacturing method of a fullerene manifold is provided to manufacture a fullerene manifold within a short time and to simplify a manufacturing process by using a fullerene monomer powder. CONSTITUTION: A manufacturing method of a fullerene manifold comprises next steps. A fullerene monomer powder is contained inside a container which has an opened one part and is sublimated by a heating process. The sublimated fullerene monomer powder is discharged into the opened part of the container and an adiabatic expansion process is executed. A fullerene aggregate is generated by enabling the fullerene monomer powder is combined between molecules with the van der Waals force. A polymerization reaction is induced by irradiating an electronic beam to the generated fullerene aggregate.
Abstract translation: 目的：提供富勒烯歧管的制造方法以在短时间内制造富勒烯歧管，并通过使用富勒烯单体粉末来简化制造过程。 构成：富勒烯歧管的制造方法包括以下步骤。 富勒烯单体粉末容纳在具有打开的一部分并通过加热过程升华的容器内。 将升华的富勒烯单体粉末排出到容器的开放部分中，并进行绝热膨胀处理。 通过使富勒烯单体粉末与范德华力结合在分子之间来产生富勒烯聚集体。 通过将电子束照射到所生成的富勒烯聚集体上来诱导聚合反应。
-
公开(公告)号：KR100875509B1
公开(公告)日：2008-12-24
申请号：KR1020070052956
申请日：2007-05-30
Applicant: 경희대학교 산학협력단
Abstract: A manufacturing method of fullerene manifold is provided to obtain easily the bulk fullerene manifold by irradiating a UV laser at the generated fullerene aggregate manufactured by micro-ejecting method. A manufacturing method of fullerene manifold comprises steps of: forming a fullerene aggregate through a micro spraying process after melting the fullerene monomer in a solvent; inducing a photopolymerization of the fullerene aggregate by irradiating a UV laser at the generated fullerene aggregate; and collecting fullerene manifold generated by the photopolymerization to a liquid state.
Abstract translation: 提供富勒烯歧管的制造方法以通过在通过微喷射法制造的所生成的富勒烯聚集体上照射UV激光来容易地获得大块富勒烯歧管。 富勒烯歧管的制造方法包括以下步骤：在溶剂中熔化富勒烯单体后，通过微喷雾过程形成富勒烯聚集体; 通过在产生的富勒烯聚集体上照射紫外激光而诱导富勒烯聚集体的光聚合; 并将通过光聚合生成的富勒烯歧管收集成液态。
-
公开(公告)号：KR1020080105411A
公开(公告)日：2008-12-04
申请号：KR1020070052957
申请日：2007-05-30
Applicant: 경희대학교 산학협력단
CPC classification number: C01B32/152 , B01J2/02 , B01J19/10 , B01J19/123 , B82B3/0004
Abstract: A manufacturing apparatus of fullerene manifold is provided to manufacture easily fullerene manifold of desired amount without freezing the fullerene aggregate solution and to produce three dimensions of fullerene manifold in a nanometer area. A manufacturing apparatus of fullerene manifold contains a unit for removing dissolved oxygen(10) for putting a fullerene monomer in the fullerene solution dissolving a single solvent and removing the dissolved oxygen in the fullerene solution, a micro water ejector(20) producing the fullerene solution from which the dissolved oxygen is removed to a solution drop having a micrometer size using a supersonic vibration demagnetizer and a photopolymerization unit(30) inducing a photopolymerization by irradiating a UV laser at the solution drop generated by the micro ejector.
Abstract translation: 提供富勒烯歧管的制造装置以容易地制造所需量的富勒烯歧管，而不会使富勒烯聚集体溶液冷凝，并在纳米区域中产生三维富勒烯歧管。 富勒烯歧管的制造装置包含用于将富勒烯单体置于富勒烯溶液中以溶解单一溶剂并除去富勒烯溶液中的溶解氧的溶解氧（10）的单元，产生富勒烯溶液的微量水喷射器（20） 使用超音速振动消磁器和通过在由微型喷射器产生的溶液滴下照射UV激光来诱导光聚合的光聚合单元（30）将溶解的氧除去到具有微米尺寸的溶液滴中。
-
-
-
-
-
Search Results
36
records
(took 0.024 seconds)
