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公开(公告)号：KR1020120118297A
公开(公告)日：2012-10-26
申请号：KR1020110035782
申请日：2011-04-18
Applicant: 경희대학교 산학협력단
IPC: C23C14/24
Abstract: PURPOSE: An apparatus and a method for manufacturing a high-transmittance thin film are provided to coat a deposition material on a large area of a substrate with high purity and efficiency at low temperatures. CONSTITUTION: An apparatus for manufacturing a high-transmittance thin film comprises a vacuum chamber(100), a substrate holder(110), a cooling unit(130) which cools a substrate placed on the substrate holder, a gas injection unit(150) which injects processing gas including hexafluoropropyleneoxide into the vacuum chamber to form a high-transmittance thin film on the substrate, and a catalyst storage unit(140) which is located under the substrate holder and connected with a power supply unit for heating catalyst. [Reference numerals] (100) Vacuum chamber; (110) Substrate holder; (120) Substrate; (130) Cooling unit; (140) Catalyst storage unit; (150) Gas injection unit; (160) Shutter
Abstract translation: 目的：提供一种用于制造高透光率薄膜的装置和方法，以在低温下以高纯度和高效率涂覆大面积基板上的沉积材料。 构成：用于制造高透光率薄膜的装置包括真空室（100），衬底保持器（110），冷却放置在衬底保持器上的衬底的冷却单元（130），气体注入单元（150） 其将包括六氟环氧丙烷的处理气体注入真空室，以在基板上形成高透光率薄膜，以及催化剂存储单元（140），其位于基板保持器下方并与用于加热催化剂的电源单元连接。 （附图标记）（100）真空室; （110）基板支架; （120）基材; （130）冷却单元; （140）催化剂储存单元; （150）注气单元; （160）快门
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公开(公告)号：KR101022555B1
公开(公告)日：2011-03-16
申请号：KR1020090017124
申请日：2009-02-27
Applicant: 경희대학교 산학협력단
Abstract: 본 발명은 백색발광 특성을 갖는 플러렌 다량체를 제조하기 위한 플러렌 회합체의 제조방법에 관한 것으로, 특히 플러렌 단량체 분말을 진공 중에서 열에 의해 승화시키는 과정에서 플러렌 분자의 단열팽창에 의해 플러렌 단량체의 운동에너지가 낮아지면서 분자운동에너지가 둔화되고, 분자간의 반데르발스력에 의해 플러렌 단량체간의 결합으로 플러렌 회합체가 생성되며, 그 생성된 플러렌 회합체에 전자빔을 조사하여 상호간의 중합반응을 유도하여 플러렌 다량체를 제조하는 플러렌 다량체 제조방법을 제공한다.
플러렌, 플러렌 단량체, 플러렌 회합체-
公开(公告)号：KR1020100098113A
公开(公告)日：2010-09-06
申请号：KR1020090017126
申请日：2009-02-27
Applicant: 경희대학교 산학협력단
IPC: C01B31/02
CPC classification number: C01B32/152 , B01J19/10
Abstract: PURPOSE: A fullerene multimer collecting part is provided to obtain a thin film-shaped fullerene multimer by installing a substrate and to easily collect manufactured fullerene multimer. CONSTITUTION: A fullerene multimer collecting part includes a vacuum chamber which has an exhaust pipe formed in one side, a fullerene monomer powder container(20) which has a fullerene monomer molecule outlet port in the top, a temperature controller which is installed to be contiguous to the container and heats the container, and a cylinder which is a path where a fullerene aggregate moves. An electronic beam emission device(30) is installed in the side of a vacuum chamber. A cooling part is installed in the outer wall of the cylinder upper part.
Abstract translation: 目的：提供富勒烯多聚体收集部分，以通过安装基底并容易地收集制造的富勒烯多聚体来获得薄膜状富勒烯多聚体。 构成：富勒烯多聚体收集部分包括具有在一侧形成的排气管的真空室，在顶部具有富勒烯单体分子出口的富勒烯单体粉末容器（20），安装成连续的温度控制器 到容器并加热容器，以及作为富勒烯骨料移动的路径的圆筒。 电子束发射装置（30）安装在真空室的侧面。 冷却部安装在气缸上部的外壁上。
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公开(公告)号：KR100875508B1
公开(公告)日：2008-12-24
申请号：KR1020070052955
申请日：2007-05-30
Applicant: 경희대학교 산학협력단
Abstract: A manufacturing method of fullerene aggregate is provided to obtain conveniently bulk fullerene aggregates having various properties through a post-process. A manufacturing method of fullerene aggregate comprises steps of: forming a fullerene solution by dissolving a fullerene monomer in a single solvent; spraying the fullerene solution to solution drops having a micrometer size; and distiling naturally the sprayed fullerene solution drops in a vacuum condition. The single solvent is one of benzene, toluene, and CH2Cl2.
Abstract translation: 提供富勒烯聚集体的制造方法以通过后处理方便地获得具有各种性质的块状富勒烯聚集体。 富勒烯聚集体的制造方法包括以下步骤：通过将富勒烯单体溶解在单一溶剂中形成富勒烯溶液; 将富勒烯溶液喷雾至具有微米尺寸的溶液滴; 并且自然地将喷雾的富勒烯溶液在真空条件下滴下。 单一溶剂是苯，甲苯和二氯甲烷中的一种。
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Patent Agency Ranking
公开(公告)号：KR1020080105412A
公开(公告)日：2008-12-04
申请号：KR1020070052958
申请日：2007-05-30
Applicant: 경희대학교 산학협력단
CPC classification number: C01B32/152 , B01J2/02 , B01J3/03 , B01J8/12 , B82B3/0004
Abstract: An apparatus of collecting fullerene manifold is provided to separate easily a solvent and the fullerene manifold by collecting the fullerene manifold manufactured from a solution drop state having a micrometer size like mist and to obtain easily by separating a solvent from the fullerene manifold solution. An apparatus of collecting fullerene manifold contains a unit for removing dissolved oxygen(10) in the fullerene solution, a micro water ejector(20) producing the fullerene solution from which the dissolved oxygen is removed to a fullerene solution drop having a micrometer size, a photopolymerization unit(30) inducing a photopolymerization of the fullerene solution drop, a fullerene manifold collecting unit(41) having a double trap consisting of an inside trap and an outside trap and a vacuum pump(42) connected in order to maintain an inside of the fullerene manifold collecting unit into a vacuum condition.
Abstract translation: 提供收集富勒烯歧管的装置，通过收集由具有微米尺寸如雾的溶液滴状态制造的富勒烯歧管容易地分离溶剂和富勒烯歧管，并且通过从富勒烯歧管溶液中分离溶剂来容易地获得。 收集富勒烯歧管的装置包含用于除去富勒烯溶液中的溶解氧（10）的单元，产生将溶解氧从其中除去的富勒烯溶液的微量水喷射器（20）至具有微米尺寸的富勒烯溶液滴， 诱导富勒烯溶液滴的光聚合的光聚合单元（30），具有由内部捕获器和外部捕获器组成的双阱的富勒烯歧管收集单元（41）和连接以便保持内部阱的真空泵 富勒烯歧管收集单元进入真空状态。
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公开(公告)号：KR1020070114882A
公开(公告)日：2007-12-05
申请号：KR1020060048477
申请日：2006-05-30
Applicant: 경희대학교 산학협력단
Inventor： 안정선
CPC classification number: C09K11/06 , B82Y10/00 , C09K2211/1425 , H01L51/0046 , H01L51/5036 , H05B33/14 , Y02B20/181
Abstract: A method for preparing a fullerene manifold is provided to ensure white light emitting characteristics in the whole visible light region, and to manufacture a display device such as an organic electroluminescence device. A method for preparing a fullerene manifold comprises the steps of: solidifying a homogeneous solution of fullerene monomers to form an associated fullerene; and causing the associated fullerene to be excited by light. The homogeneous solution of fullerene monomers uses any one of benzene, toluene, CS2, acetone, triclene or chlorobenzene as a solvent. In the light excitation step, YAG laser or Ar ion laser is irradiated to the associated fullerene.
Abstract translation: 提供一种制备富勒烯歧管的方法，以确保整个可见光区域的白色发光特性，并制造诸如有机电致发光器件的显示装置。 制备富勒烯歧管的方法包括以下步骤：使富勒烯单体的均匀溶液固化以形成相关的富勒烯; 并使相关的富勒烯被光激发。 富勒烯单体的均相溶液使用苯，甲苯，CS2，丙酮，三氯或氯苯中的任一种作为溶剂。 在光激发步骤中，将YAG激光或Ar离子激光照射到相关的富勒烯上。
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公开(公告)号：KR1020110115869A
公开(公告)日：2011-10-24
申请号：KR1020100035437
申请日：2010-04-16
Applicant: 경희대학교 산학협력단
IPC: C23C16/452 , C23C16/44 , H01L21/205
Abstract: 촉매 화학 증착법을 이용한 초소수성 물질의 박막 제조 방법 및 장치가 제공된다.
전술한 기술적 과제를 달성하기 위한 본 발명의 실시예에 따른, 촉매 화학 증착법을 이용한 초소수성 물질의 박막 제조 방법은, 챔버 내부에 기판을 부착시키고, 상기 챔버 내부를 진공 상태로 만드는 단계; 상기 기판과 일정 거리 이격되어 구비된 촉매체에 전류를 흘려 상기 촉매체를 제2 온도로 상승시키고, 상기 기판을 제1 온도로 냉각시키는 단계; 상기 챔버 내부로 피드 가스를 주입하는 단계; 상기 주입된 피드 가스의 분압, 상기 기판의 온도 및 상기 촉매체의 온도를 조절하여 상기 기판에 초소수성 물질의 박막을 증착시키는 단계를 포함한다.
Cat-CVD 방법을 이용하여 자가세정(Self-Cleaning)의 효과가 탁월한 초소수성 표면을 가지는 PTFE 박막을 저온의 환경에서 대면적으로 증착이 가능한 장점이 있다.-
公开(公告)号：KR1020100098112A
公开(公告)日：2010-09-06
申请号：KR1020090017125
申请日：2009-02-27
Applicant: 경희대학교 산학협력단
IPC: C01B31/02
CPC classification number: C01B32/152 , B01J19/10
Abstract: PURPOSE: A fullerene multimer manufacturing device is provided to obtain a three-dimensional structure which has a fullerene multimer as an elementary particle by sublimating a fullerene monomer powder and manufacturing the multimer in a vacuum state. CONSTITUTION: A fullerene multimer manufacturing device includes a vacuum chamber(10) in which an exhaust pipe(11) is formed in one side, a container(20) in which a minute fullerene monomer powder outlet port, in which the fullerene molecule can be flown out, is formed in the top, a temperature controller(13) for the control of the temperature of the container, a fullerene aggregate which is formed with the van der Waals force between the adiabatic expansion of the fullerene monomer molecule and the molecule, a cylinder(14) which is a path where the fullerene multimer moves, and an electron beam generating device(30) irradiating an electronic beam to the fullerene aggregate of the inside of the cylinder.
Abstract translation: 目的：提供富勒烯多聚体制造装置，以通过升华富勒烯单体粉末并以真空状态制造多聚体，获得具有富勒烯多聚体作为基本粒子的三维结构。 构成：富勒烯多聚体制造装置包括在一侧形成有排气管（11）的真空室（10），容器（20），其中富勒烯分子可以是微量富勒烯单体粉末出口 在顶部形成有用于控制容器温度的温度控制器（13），在富勒烯单体分子的绝热膨胀与分子之间以范德华力形成的富勒烯聚集体， 作为富勒烯多聚体移动的路径的圆筒（14）和将电子束照射到圆筒内部的富勒烯骨料的电子束产生装置（30）。
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