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公开(公告)号:KR1019980005888A
公开(公告)日:1998-03-30
申请号:KR1019960025269
申请日:1996-06-28
Applicant: 삼성전자주식회사
Inventor: 임지운
IPC: H01L21/335
公开(公告)号:KR1019980005888A
公开(公告)日:1998-03-30
申请号:KR1019960025269
申请日:1996-06-28
Applicant: 삼성전자주식회사
Inventor: 임지운
IPC: H01L21/335