公开(公告)号：KR1020040066566A

公开(公告)日：2004-07-27

申请号：KR1020030003670

申请日：2003-01-20

Applicant: 삼성전자주식회사

Inventor： 조은형 ,  이명복 ,  손진승 ,  정미숙 ,  박영필

IPC: G11B7/1374 ,  G11B7/1353 ,  G02B13/10 ,  G02B5/18

Abstract: PURPOSE: An objective lens and a fabrication method thereof are provided to make pitch size of a diffraction grating smaller to precisely form the diffraction grating, and to comprise a refractive portion where the lens is made of a high-refractive material and a diffracted portion where the lens is made of a low-refractive material, thereby obtaining a high NA(Numerical Aperture). CONSTITUTION: An objective lens array(10) consists of a refractive lens portion(11) and a diffracted lens portion(12). The refractive lens portion(11) has plural spherical or aspherical unit refractive portions(11a) made of high-refractive glass materials. The diffracted lens portion(12) is formed on one side of the refractive lens portion(11) by a low-refractive polymer material, and has plural unit diffracted portions(12a) corresponding to the refractive portions(11a). The objective lens array(10) has a structure of unit lenses being arrayed in plural.

Abstract translation: 目的：提供一种物镜及其制造方法，以使衍射光栅的俯仰尺寸更小以精确地形成衍射光栅，并且包括折射部分，其中透镜由高折射材料和衍射部分 透镜由低折射材料制成，从而获得高NA（数值孔径）。 构成：物镜阵列（10）由折射透镜部分（11）和衍射透镜部分（12）组成。 折射透镜部分（11）具有由高折射玻璃材料制成的多个球形或非球面单位折射部分（11a）。 衍射透镜部分（12）通过低折射聚合物材料在折射透镜部分（11）的一侧上形成，并且具有与折射部分（11a）对应的多个单位衍射部分（12a）。 物镜阵列（10）具有以多个排列的单位透镜的结构。