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公开(公告)号：KR1020080020838A
公开(公告)日：2008-03-06
申请号：KR1020060084239
申请日：2006-09-01
Applicant: 삼성전자주식회사
CPC classification number: G02B26/085 , G02B26/101 , G02B6/3572 , G02B6/3584
Abstract: An electromagnetic type micro actuator and a manufacturing method thereof are provided to prevent a peel off phenomenon of a coil portion by decreasing a deformation degree of a substrate. An electromagnetic type micro actuator includes a base frame, first and second driving units, and at least one pair of permanent magnets. The driving unit(112) is rotatably connected to the base frame. The second driving unit is rotatably connected to the first driving unit and includes a mirror, which changes an optical path. A coil portion(117) includes plural coils(117a), which are protruded from top surfaces of the first and second driving units. A deformation decreasing unit(119) includes plural grooves, which are formed on the first and second driving units between the coils. A thermal deformation due to a current in the coil portion is decreased by the deformation decreasing unit, for deformation on the first and second driving units to be suppressed.
Abstract translation: 提供电磁式微型致动器及其制造方法，以通过降低基板的变形程度来防止线圈部分的剥离现象。 电磁式微型致动器包括基架，第一和第二驱动单元以及至少一对永磁体。 驱动单元（112）可旋转地连接到基架。 第二驱动单元可旋转地连接到第一驱动单元，并且包括改变光路的反射镜。 线圈部分117包括从第一和第二驱动单元的顶表面突出的多个线圈（117a）。 变形减小单元（119）包括形成在线圈之间的第一和第二驱动单元上的多个凹槽。 由于变形减小单元，由于线圈部分中的电流导致的热变形，因此要抑制第一和第二驱动单元上的变形。
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公开(公告)号：KR100633101B1
公开(公告)日：2006-10-12
申请号：KR1020050068213
申请日：2005-07-27
Applicant: 삼성전자주식회사
IPC: H01H59/00
Abstract: An RF MEMS switch is provided to easily detach the switch from a contact surface by differently setting the rigidity of spring elements positioned at left/right sides of a membrane. An RF MEMS(Micro Electro Mechanical System) switch includes support members positioned on a substrate, membranes positioned on both sides of the support members and suspended by spring elements(340a,340b), and a lower electrode formed on an upper surface of the substrate at a position corresponding to the membrane. The spring element positioned on the both sides of the membrane has asymmetric rigidity. When the RF MEMS switch is off, the membrane corresponding to the spring element with higher rigidity is firstly detached from a contact surface.
Abstract translation: 通过不同地设置位于膜的左侧/右侧的弹簧元件的刚度，RF MEMS开关被设置为容易地将开关从接触表面分离。 RF MEMS（微机电系统）开关包括定位在基板上的支撑构件，定位在支撑构件的两侧上并由弹簧元件（340a，340b）悬置的膜以及形成在基板的上表面上的下电极 在对应于膜的位置。 位于膜两侧的弹簧元件具有非对称刚性。 当RF MEMS开关断开时，与刚性较高的弹簧元件相对应的膜首先从接触表面分离。
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公开(公告)号：KR100503472B1
公开(公告)日：2005-07-25
申请号：KR1020030014106
申请日：2003-03-06
Applicant: 삼성전자주식회사
IPC: G01C19/02
CPC classification number: G01C19/5642 , G01C19/02
Abstract: 본 발명의 회전형 자이로스코프는 기판; 중심평면에 수직인 제 1 축에 관해 가진운동을 하도록 기판으로부터 일정 간격 유격된 상태로, 방사상으로 뻗어있는 다수의 구동지지부를 통해 기판에 지지된 구동체, 전압 인가시 구동체를 제 1 축에 관해 가진운동시키는 구동 전극, 및 구동체와 일체로 가진됨과 동시에 중심평면과 나란한 임의의 제 2 축으로부터 각속도의 입력시 제 1 축과 제 2 축에 수직인 제 3 축에 관해 코리올리의 힘에 의한 감지운동을 발생하도록 양단을 구동체와 연결하는 감지 연결부를 통해 구동체와 연결되고 구동체 내부에 배치된 감지체를 포함하는 구조물층; 및 구조물층의 감지체의 감지운동을 검출하도록 감지체와 대응하여 감지체와 일정간격을 두고 배치된 감지 전극을 구비하는 구조물층을 밀폐하는 커버층을 포함한다. 본 발명의 회전형 자이로스코프는 구동체의 가진 운동이 디커플되고 감지체의 감지 운동이 커플되도록 하여 감지체에도 코리올리의 힘이 작용함으로써 감지성능이 향상될 뿐아니라, 감지체의 둘레에 구동체를 배치하도록 구성하여 감지모드의 변형에 대해 안정한 구조를 제공하는 다축 각속도를 한 평면상에서 감지하는 회전형 자이로스코프를 제공한다.
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公开(公告)号：KR1020050070403A
公开(公告)日：2005-07-07
申请号：KR1020030099886
申请日：2003-12-30
Applicant: 삼성전자주식회사
IPC: B81B7/02
CPC classification number: B81B7/02 , B81C1/00182 , B81C1/00349 , B81C1/00388 , B81C1/00436 , F16F15/04
Abstract: MEMS 기술로 제조된 방진구조물이 개시된다. 본 방진구조물은, 상부 표면의 소정 영역에 함몰부가 형성된 기판, 기판상에서 함몰부 이외의 영역에 형성된 외곽프레임, 함몰부 상에 부유되며, 소정의 외부 디바이스와 전기적으로 결합되는 플랫폼, 외곽프레임 및 플랫폼을 연결하여 외부 디바이스 및 외곽프레임 간에 전달되는 진동을 감쇄시키는 적어도 하나의 방진스프링, 및 적어도 하나의 방진스프링 상부표면에 형성되어 소정의 외부 디바이스 및 외부전기단자를 전기적으로 연결시키는 적어도 하나의 전극을 포함한다. 이에 따라, 연결된 외부디바이스에 전해지는 진동을 감쇄시키며, 외부전기단자와 전기적으로 연결시킬 수 있게 된다.
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公开(公告)号：KR1020020007895A
公开(公告)日：2002-01-29
申请号：KR1020000041425
申请日：2000-07-19
Applicant: 삼성전자주식회사
IPC: B81C1/00
CPC classification number: H02N1/008 , B82Y10/00 , G11B9/1418 , Y10S977/872
Abstract: PURPOSE: A single stage microactuator for multidimensional actuation using a multi-folded spring is provided to drive multiple shafts by using a single electrode in a simplified process by removing the insulation process and effectively restrain the coupling between motions in X-Y plane direction of a stage, increasing the storage capacity of the stage. CONSTITUTION: A single stage micro actuator for multi-shaft driving by using a multi-folded spring includes a substrate(11), a fixing plate electrode formed in the center of the substrate, a rectangular stage positioned on the fixing plate electrode with sides in a first direction and the other sides in a second direction perpendicular to the first direction, a plurality of driving frame parts(33) provided in peripheral areas corresponding to all of the sides and having a plurality of parallel driving frames disposed in a direction perpendicular to sides of the stage adjacent to the corresponding peripheral areas, a first spring part(31) connecting the respective driving frame parts corresponding to the respective sides of the stage with one another and having a plurality of spring elements extended in parallel with the sides corresponding to the stage and spring supporting elements for supporting the springs, a plurality of fixing frame parts having a plurality of fixing frames(21) disposed alternately in parallel with the driving frames, a driving comb electrode(22) provided to the respective driving frames and extended in parallel to one sides of the stage, fixed comb electrode(32) disposed alternately in parallel with the driving comb electrode, and a second spring part(35) for supporting the driving frame parts with respect to the substrate and elastically biasing the driving frame part and having a plurality of spring elements extended in parallel with the driving frame and a spring supporting element for supporting the springs.
Abstract translation: 目的：提供使用多折叠弹簧进行多维驱动的单级微型致动器，通过去除绝缘过程并且有效地抑制在平台的XY平面方向上的运动之间的耦合，通过简化的过程中使用单个电极来驱动多个轴， 增加舞台的存储容量。 构成：用于通过使用多折叠弹簧的多轴驱动的单级微致动器包括基板（11），形成在基板中心的固定板电极，位于固定板电极上的矩形台 第一方向和与第一方向垂直的第二方向的另一侧;多个驱动框架部件，设置在与所有侧面对应的周边区域中，并且具有多个平行的驱动框架， 与相应的周边区域相邻的台阶的第一弹簧部分（31），将对应于舞台的相应侧面的相应的驱动框架部分彼此连接并且具有多个弹簧元件，弹簧元件与对应于 用于支撑弹簧的平台和弹簧支撑元件，具有多个固定框架（21）的多个固定框架部件 与驱动框架平行地交替排列;驱动梳状电极（22），设置在各个驱动框架上并平行延伸到载物台的一侧，与驱动梳状电极交替设置的固定梳状电极（32）;以及 第二弹簧部分（35），用于相对于基板支撑驱动框架部分并且弹性偏置驱动框架部分并且具有与驱动框架平行延伸的多个弹簧元件和用于支撑弹簧的弹簧支撑元件。
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Patent Agency Ranking
公开(公告)号：KR1020020007603A
公开(公告)日：2002-01-29
申请号：KR1020000040985
申请日：2000-07-18
Applicant: 삼성전자주식회사
IPC: H02N1/00
CPC classification number: H02N1/008 , B82Y10/00 , G11B9/1418
Abstract: PURPOSE: A single stage micro actuator for a multi-axis actuation is provided to simplify a process, effectively suppress generation of other movement than a movement in an X-Y direction, and maximize a storage capacity by expanding a stage. CONSTITUTION: A fixed frame part is mounted on a substrate(11). An actuating frame part corresponds to the fixed frame part and has a square stage at the center thereof, and the first and second actuating main frames and an actuating sub frame(34) in the periphery. The square stage has sides in the first direction and sides in the second direction perpendicular to the first direction. A plurality of first actuating main frames are arranged at predetermined intervals in parallel to the sides in the second direction and the sides of the first direction. The comb normal directional deformable spring is interposed between the edges in each directions.
Abstract translation: 目的：提供用于多轴致动的单级微致动器，以简化过程，有效地抑制与X-Y方向的运动相比产生其他运动，并通过扩展舞台使存储容量最大化。 构成：固定框架部件安装在基板（11）上。 致动框架部分对应于固定框架部分并且在其中心具有方形平台，并且在周边具有第一和第二致动主框架和致动子框架（34）。 方形舞台具有沿第一方向的侧面和与第一方向垂直的第二方向的一侧。 多个第一致动主框架以与第二方向和第一方向的侧边平行的预定间隔布置。 梳子正方向可变形弹簧插入在各个方向的边缘之间。
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公开(公告)号：KR1020010068999A
公开(公告)日：2001-07-23
申请号：KR1020000001193
申请日：2000-01-11
Applicant: 삼성전자주식회사
IPC: B41J2/045
Abstract: PURPOSE: An ink jet head using a stacked ring type piezoelectric actuator is provided to increase ink discharge force at a low voltage by mounting an actuator formed of piezoelectric elements stacked in the shape of ring with electrodes mounted in two directions for generating large force and large deformation with respect to the small driving voltage. CONSTITUTION: An ink jet head using a stacked ring type piezoelectric actuator includes a nozzle plate(11) formed with at least one nozzle(12), a manifold part(51) having a restrictor plate(41) formed with at least one restrictor(40), a piezoelectric structure(22) provided between the nozzle plate and the manifold part and formed of cylindrical piezoelectric elements(22a-22c) stacked in multiple layers defining a chamber(20) inside for receiving ink, common electrodes(23) and drive electrodes(24) alternately interposed among the piezoelectric elements, and media(25) interposed between the restrictor plate and an end of the piezoelectric structure adjacent to the restrictor plate, and between the nozzle plate and the other end of the piezoelectric structure to be deformed in response to the deformation of the piezoelectric elements.
Abstract translation: 目的：提供一种使用堆叠式环形压电致动器的喷墨头，通过将形成为环形的压电元件的致动器安装在两个方向上安装的电极以产生大的力和大的尺寸，从而增加了低电压下的排墨力 相对于小的驱动电压变形。 构成：使用堆叠式环型压电致动器的喷墨头包括形成有至少一个喷嘴（12）的喷嘴板（11），具有形成有至少一个限流器的限制板（41）的歧管部分（51） 40），设置在所述喷嘴板和所述歧管部分之间并由圆柱形压电元件（22a-22c）形成的压电结构（22），所述圆柱形压电元件（22a-22c）以限定内部的腔室（20）的多层层叠，用于接收墨水，公共电极（23）和 驱动电极（24）交替插入压电元件之间，介质（25）介于限制板与邻近限流板的压电结构的端部之间，并且在喷嘴板和压电结构的另一端之间 响应于压电元件的变形而变形。
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公开(公告)号：KR1020000038207A
公开(公告)日：2000-07-05
申请号：KR1019980053113
申请日：1998-12-04
Applicant: 삼성전자주식회사
IPC: G01P15/00
CPC classification number: H02K33/00 , G01P15/0888 , G01P15/11 , G01P15/132 , G01P2015/0814 , H01F7/1638 , H01H50/005 , H02K99/20
Abstract: PURPOSE: A structure having comb using electromagnetic force and an actuator and an inertia sensing sensor using the same are provided to generate great force for driving a large structure and easily control the position of the structure. CONSTITUTION: A structure having comb using electromagnetic force comprises a pair of combs(21,22), a magnetic flux guide(23), a coil(24) and a power supply(25) connected to the coil(24). The combs(21,22) consists of magnetic material. The magnetic flux guide(23) magnetically connects the combs. The coil(24) is wound on the guide. The combs(21,22) are separated by a gap(s) to be engaged each other and are driven by the magnetic field generated from the coil, which generates the magnetic field by current from the power supply.
Abstract translation: 目的：提供一种使用电磁力的梳状结构和致动器以及使用其的惯性感测传感器，以产生用于驱动大结构并且容易控制结构位置的大的力。 构成：使用电磁力的梳子的结构包括一对梳子（21,22），磁通引导件（23），线圈（24）和连接到线圈（24）的电源（25）。 梳子（21,22）由磁性材料组成。 磁通引导件（23）磁梳地连接梳子。 线圈（24）缠绕在引导件上。 梳子（21,22）被间隙彼此分开，并被由线圈产生的磁场驱动，该磁场通过来自电源的电流产生磁场。
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公开(公告)号：KR1020000022638A
公开(公告)日：2000-04-25
申请号：KR1019990020488
申请日：1999-06-03
Applicant: 삼성전자주식회사
IPC: G11B19/20
Abstract: PURPOSE: A micro mirror driver is provided to generate a force regardless of a size of a displacement period and an interval between two conductors although a driving displacement is relatively increased, and to reduce a size and a weight by forming a driver in a body with a mirror. CONSTITUTION: In a micro mirror driver, a mirror body(35) is spaced apart from an upper plane of a substrate(31) so as to rotate in a center of a first direction axil. A sense electrode(33) has the same arrangement and structure as a fix electrode(32), and senses a capacitance variation when a common electrode(34) moves. The sense electrode is fixed at the substrate on which a frame(38) is fixed. A power supplies a potential to the fix electrode so as to generate a potential differential between the common electrode and the fix electrode. A sensor measures a variation of a capacitance at the common electrode and at the sense electrode.
Abstract translation: 目的：提供微镜驱动器，而不管位移周期的尺寸和两个导体之间的间隔如何，尽管驱动位移相对增加，并且通过在身体中形成驾驶员来减小尺寸和重量， 一面镜子。 构成：在微镜驱动器中，镜体（35）与衬底（31）的上平面间隔开，以便在第一方向轴的中心旋转。 感测电极（33）具有与固定电极（32）相同的布置和结构，并且当公共电极（34）移动时感测电容变化。 感测电极固定在其上固定有框架（38）的基板上。 A电源向固定电极提供电位，以便在公共电极和固定电极之间产生电位差。 传感器测量公共电极和感测电极处电容的变化。
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公开(公告)号：KR101336886B1
公开(公告)日：2013-12-06
申请号：KR1020070074130
申请日：2007-07-24
Applicant: 삼성전자주식회사
IPC: H04N5/232
CPC classification number: G02B27/646 , G03B5/00 , H01L41/0973 , H01L41/314 , H04N5/23248 , H04N5/23287 , Y10T29/42
Abstract: 엑츄에이팅 장치가 개시된다. 변형 가능한 멤브레인, 멤브레인 상에 형성되어 캐비티를 이루는 월(wall), 캐비티 내부에서, 캐비티 중심을 기준으로 일측의 멤브레인 표면 상에 형성되어, 멤브레인 변형 상태에 연동하여 이동하는 로드(rod) 및 멤브레인 하부에 형성되며 압전 구동되어 멤브레인을 변형시키는 엑츄에이팅부를 포함한다. 이에 따라, 소형 전자기기에 적용되어 기능 모듈을 적절히 엑츄에이팅시킬 수 있다.
로드, 월, 캐비티, 중심, 엑츄에이팅
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