公开(公告)号：KR1020120131379A

公开(公告)日：2012-12-05

申请号：KR1020110049500

申请日：2011-05-25

Applicant: 한국전자통신연구원 ,  한국과학기술원

Inventor： 이대식 ,  윤준보 ,  최동훈 ,  이병기 ,  정문연 ,  김승환

IPC: B01D69/02 ,  B01D67/00

CPC classification number: C23C14/06 ,  B01D67/0062 ,  B82Y30/00 ,  B82Y40/00 ,  C23C14/024 ,  C23C16/56 ,  C23F1/02

Abstract: PURPOSE: A nanoporous membrane and a manufacturing method of the same are provided to increase the reproducibility of devices and to be mass-produced at low cost. CONSTITUTION: A manufacturing method of a nanoporous membrane includes the following steps: a first protective layer(110) is formed on both sides of a substrate(100); one of metal, oxide, nitride, and fluoride is physical or chemical vapor deposited on the protective layer to form a thin film(120) with columnar nanopores; a second protective layer is formed on the thin film; the first protective layer is patterned to expose a part of the lower side of the substrate; the first protective layer through the exposed substrate is etched to expose the thin film with the nanopores; a part of the thin film through the exposed part is etched to control the sizes of nanopores; and the second protective layer is removed.

Abstract translation: 目的：提供一种纳米多孔膜及其制造方法，以提高器件的再现性并以低成本批量生产。 构成：纳米多孔膜的制造方法包括以下步骤：在基板（100）的两面上形成第一保护层（110）; 金属，氧化物，氮化物和氟化物中的一种物理或化学气相沉积在保护层上以形成具有柱状纳米孔的薄膜（120）; 在薄膜上形成第二保护层; 图案化第一保护层以暴露衬底的下侧的一部分; 通过暴露的基底的第一保护层被蚀刻以用纳米孔暴露薄膜; 通过暴露部分的薄膜的一部分被蚀刻以控制纳米孔的尺寸; 并且去除第二保护层。

公开(公告)号：KR1020110000103A

公开(公告)日：2011-01-03

申请号：KR1020090057474

申请日：2009-06-26

Applicant: 한국과학기술원

Inventor： 윤준보 ,  이형석 ,  최동훈

IPC: H01L27/02

Abstract: PURPOSE: A variable passive unit and a method for manufacturing the same are provided to improve the flexibility of circuit design and circuit optimization by matching a capacitive load and an inductive load. CONSTITUTION: Bottom electrode parts(110a, 110b) are formed on an insulating substrate(100). A metal layer(120) and the bottom electrode parts form a capacitor. A spiral inductor(130) is oppositely spaced apart from the metal layer. A driving part(140a) moves the metal layer to the vertical direction of the insulating substrate according to the change of temperature. A supporting part(131) supports the spiral inductor from the insulating substrate.

Abstract translation: 目的：提供可变无源单元及其制造方法，以通过匹配容性负载和电感负载来提高电路设计和电路优化的灵活性。 构成：底部电极部分（110a，110b）形成在绝缘基板（100）上。 金属层（120）和底部电极部分形成电容器。 螺旋电感器（130）与金属层相对地间隔开。 驱动部件（140a）根据温度变化使金属层向绝缘基板的垂直方向移动。 支撑部件（131）支撑来自绝缘基板的螺旋电感器。