公开(公告)号：CA2721172C

公开(公告)日：2012-04-10

申请号：CA2721172

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: B81B3/00 ,  G03F7/20 ,  B01L3/00 ,  B29C69/00 ,  B81B1/00 ,  B81B7/00 ,  B81B7/02 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C1/06 ,  F15C1/22 ,  F15C3/04 ,  F15C3/16 ,  F15C5/00 ,  F16K7/00 ,  F16K7/07 ,  F16K7/17 ,  F16K7/20 ,  F16K17/02 ,  F16K99/00 ,  H01H59/00

Abstract: A microfabricated elastomeric structure comprises an elastomeric block formed with microfabricated recesses having a width less than 1000 µm therein. A portion of the elastomeric block is deflectable into one of the recesses when the portion is actuated.

公开(公告)号：NZ533466A

公开(公告)日：2005-10-28

申请号：NZ53346600

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PO ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising : forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer; bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate. Various embodiments are disclosed. (62) Divided out of 516519

公开(公告)号：DE60018425D1

公开(公告)日：2005-04-07

申请号：DE60018425

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  SCHERER AXEL ,  QUAKE STEPHEN R ,  CHOU HOU-PU ,  THORSEN TODD A

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：AT290166T

公开(公告)日：2005-03-15

申请号：AT01128819

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  SCHERER AXEL ,  QUAKE STEPHEN R ,  CHOU HOU-PU ,  THORSEN TODD A

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：ZA200110315B

公开(公告)日：2002-12-17

申请号：ZA200110315

申请日：2001-12-14

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: F16K20060101 ,  F16K

公开(公告)号：DE60000109T2

公开(公告)日：2002-11-07

申请号：DE60000109

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：DK1065378T3

公开(公告)日：2002-07-29

申请号：DK00305389

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.

公开(公告)号：AT215673T

公开(公告)日：2002-04-15

申请号：AT00305389

申请日：2000-06-27

Applicant: CALIFORNIA INST OF TECHN

Inventor： UNGER MARC A ,  CHOU HOU-PU ,  THORSEN TODD A ,  SCHERER AXEL ,  QUAKE STEPHEN R

IPC: G03F7/20 ,  B01L3/00 ,  B81B1/00 ,  B81B3/00 ,  B81B7/00 ,  B81C1/00 ,  B81C99/00 ,  C12Q1/68 ,  F04B17/00 ,  F04B35/04 ,  F04B43/04 ,  F15C5/00 ,  F16K7/00 ,  F16K17/02 ,  F16K99/00

Abstract: A method of fabricating an elastomeric structure, comprising: forming a first elastomeric layer on top of a first micromachined mold, the first micromachined mold having a first raised protrusion which forms a first recess extending along a bottom surface of the first elastomeric layer; forming a second elastomeric layer on top of a second micromachined mold, the second micromachined mold having a second raised protrusion which forms a second recess extending along a bottom surface of the second elastomeric layer, bonding the bottom surface of the second elastomeric layer onto a top surface of the first elastomeric layer such that a control channel forms in the second recess between the first and second elastomeric layers; and positioning the first elastomeric layer on top of a planar substrate such that a flow channel forms in the first recess between the first elastomeric layer and the planar substrate.