公开(公告)号：JPH09327927A

公开(公告)日：1997-12-22

申请号：JP14625096

申请日：1996-06-07

Applicant: CANON KK

Inventor： ONO NORIYUKI ,  ORIGASA TAKESHI ,  KIGAMI HIROYUKI ,  HAYASHIZAKI KIMIYUKI ,  FUKAI HISASHI ,  OKAWA MASAYOSHI ,  KASHINO TOSHIO ,  NAKADA YOSHIE

IPC: B41J2/05 ,  B41J2/16

Abstract: PROBLEM TO BE SOLVED: To move and position a thin film material having at not a specific thickness by floating the material on a base, inclining the base and moving it by using an own weight of the material. SOLUTION: When compressed air regulated by a regulator is supplied from an air supply port 105 to an air reservoir in case of moving a thin film material 101 having a thickness of 50μm or less, medium 102 having a micropore size flows from the micropore to an entire rear surface of the material 101, an infinitesimal air layer is formed between the material 101 and the medium 102 to float. Thereafter, a base 107a is inclined in a θY direction with a base 107b as a reference, and bumped against a bumping reference member 106b in a Y direction by an own weight of the material 101. Then, a base 107c is inclined with a base 107c as a reference in a θX direction, bumped against a bumping reference member 106a in an X direction, and a frictional force with a moving base is eliminated. And, it is moved on a positioning base 107.