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公开(公告)号：JPH07235486A
公开(公告)日：1995-09-05
申请号：JP30942494
申请日：1994-11-21
Applicant: CANON KK
Inventor： ISOHATA JUNJI , MATSUSHITA KOICHI , YAMAMOTO SEKINORI , MIYAZAKI MAKOTO , OZAWA KUNITAKA , YOSHINARI HIDEKI
IPC: G03F7/20 , G03F7/22 , H01L21/027 , H01L21/68
Abstract: PURPOSE:To provide a method of the manufacture of devices which makes it possible to manufacture highly accurate devices by step and scan exposure. CONSTITUTION:An original plate stage 2 supports an original plate 1, and a substrate stage 4 supports a substrate 3 during the step and scan exposure. The original plate stage 2 and the substrate stage 4 are separately shifted by respective driving sources 16, 17 in synchronization with each other. After the completion of each scan exposure, the substrate is shifted step by step relative to the original plate by means of the substrate stage. Thus a plurality of regions on the substrate are exposed one by one.
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公开(公告)号：JPH0639729A
公开(公告)日：1994-02-15
申请号：JP9604093
申请日：1993-04-22
Applicant: CANON KK
Inventor： KOSAKAI TAKASHI , TAKASHITA JUNJI , NAKAMURA NOBUO , IMANARI TORU , YAMAMOTO SEKINORI
Abstract: PURPOSE:To uniform the tip height of abrasive grain even when the abrasive grain having large grain diameter is used. CONSTITUTION:A base plating layer 2 is formed on the surface of a base material 3, and moreover only one layer of plural abrasive grains 1 is dispersedly arranged on the layer 2. Every abrasive grain 1 is pushedly pressed toward the base plating layer 2 with a pushedly pressing die 4 to be pushed into the base plating layer 2. This can uniform the tip height of every abrasive grain 1, and then every abrasive grain 1 is retained with a bonding plating layer 5. The protruded quantity of each abrasive grain 1 can be optionally set by adjusting the thickness of the bonding plating layer 5.
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公开(公告)号：JPH04244372A
公开(公告)日：1992-09-01
申请号：JP2904791
申请日：1991-01-31
Applicant: CANON KK
Inventor： TAKIMOTO MASAFUMI , NEGISHI MASATO , ANDO MANABU , YAMAMOTO SEKINORI
Abstract: PURPOSE:To uniformly generate the pressure distribution of a polishing surface by enabling the polishing surface of a polishing tool, held to a tool holding part, to sufficiently follow up to a polished surface of a workpiece at the time of polishing, and further eliminating generation of a couple of force acting on the polishing tool. CONSTITUTION:Three balls 5a, 5b(the other not shown) are interposed by a protruded spherical surface 2b formed in a tool holding part 2 for holding a polishing tool 1 and by a recessed spherical surface 3b formed in a supporting part 3, to which polishing force(resultant force of P and N) is applied, to connect the tool holding part 2 to the supporting part 3 by a rubber seal 6. Each center point of the protruded and recessed spherical surfaces 2b, 3b agrees respectively with a center point R of a polishing surface 1a of the polishing tool 1. By rolling each ball 5a, 5b, the polishing tool 1 can be tilted relating to the supporting part 3 within a range of deflection of the rubber seal 6. The above-mentioned polishing force is transmitted to the protruded spherical surface 2b from the recessed spherical surface 3b through each ball 5a, 5b to act on the center point R of the polishing surface 1a. Since friction force F at the time of polishing acts on the polishing surface 1a, no couple of force is generated.
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公开(公告)号：JPH01199103A
公开(公告)日：1989-08-10
申请号：JP5831187
申请日：1987-03-13
Applicant: CANON KK
Inventor： NARUMI KOJI , WATANABE KEIJI , HOSAKA KOTARO , HIGOMURA MAKOTO , YAMAMOTO SEKINORI , NOSE TETSUSHI , NIWA YUKICHI , OWADA MITSUTOSHI
Abstract: PURPOSE:To express the fine uneven shape of a surface to be inspected and to measure a surface shape with high sensitivity and high accuracy, by changing the converging position of an optical probe with respect to the surface to be inspected on the basis of a signal for judging the focus matching state of the optical probe to the surface to be inspected. CONSTITUTION:The focus matching state of an optical probe to the surface to be inspected of an object 30 to be measured is judged by the focus matching state judging optical system of an automatic focus microscope 20 and a fine adjustment motor 17 is driven according to the focus matching state thereof to move the microscope 20 and a focus position is locked to a point to be measured and the object 30 to be measured is revolved around a revolving shaft 21 to perform the scanning of the ridgeline thereof. The distance from the revolving shaft 21 to the point to be measured and an angle of inclination are calculated from the output of the focus matching state judging optical system by a focus state detector 50 and an angle-of-inclination detector 51. The cross-section shape of the object 30 to be measured is measured according to a polar coordinates system by a control computer 60 and a data processing computer 61. Further, the object 30 to be measured is rotated around an indexing shaft 22 to perform multisurface measurement and the surface thereof is measured.
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公开(公告)号：JPS6426105A
公开(公告)日：1989-01-27
申请号：JP5830687
申请日：1987-03-13
Applicant: CANON KK
Inventor： NARUMI KOJI , WATANABE KEIJI , HOSAKA KOTARO , HIGOMURA MAKOTO , YAMAMOTO SEKINORI , NOSE TETSUSHI , NIWA YUKICHI , OWADA MITSUTOSHI
Abstract: PURPOSE:To accurately obtain an automatic focus signal and to take an accurate measurement by making the direction of a scan on a surface to be inspected by the optical probe of a focusing state decision optical system and the direction of the deviation of a reflected beam from the surface to be inspected almost orthogonal with each other. CONSTITUTION:The focusing state decision optical system 42 detects the focusing state of the body 30 to be measured for an objective 41 and a jogging motor 17 is driven according to the focusing state to move an automatic focusing microscope 20, thereby locking the focus position of the objective 41 at the point of the intersection of the surface of the body 30 to be measured and the optical axis of the objective 41 at all times. The direction of the deviation of the reflected beam of the focusing state decision optical system 42 and the swivel direction of the body 30 is formed to be almost orthogonal intersection with each other preferably, in relation of 90 deg.+ or -20 deg. intersection.
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Patent Agency Ranking
公开(公告)号：JPS63232975A
公开(公告)日：1988-09-28
申请号：JP6258687
申请日：1987-03-19
Applicant: CANON KK
Inventor： TAKASHITA JUNJI , NAKASUGI MIKIO , YAMAMOTO SEKINORI
IPC: B24B37/00
Abstract: PURPOSE:To suppress damage to a minimum limit on a polished surface and to enhance quality of the finish polished surface, by forming an utmost limited polishing circumferential section on the peripheral surface of a rotary unit polishing tool by a fluid pressure increase-concentrating means so that a high dynamic pressure of fluid is generated in a fine polishing point even if the tool rotates in a low speed. CONSTITUTION:A rotary unit polishing tool 15 opposes its rotary circumferential surface approaching to a workpiece surface provided being arranged and immersed in polishing fluid, and this tool 15, which rotates its rotary circumferential surface relatively with the workpiece surface generating a dynamic pressure of the polishing fluid in a fine clearance between the rotary circumferential surface and the workpiece surface, polishes a fine amount of the workpiece surface. Here the rotary unit polishing tool 15 arranges in an equal space grooves 20 or protruding walls which converge in an opposite direction to the rotation toward the central part from the sideward peripheral edge of the rotary circumferential surface of the tool 15, and the tool 15, which increases a pressure of the polishing fluid to be converged along this rotary circumferential surface by these grooves 20 or protruding walls, enables a high dynamic pressure of fluid to be generated in a fine polishing point and a finished surface of high quality to be obtained.
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公开(公告)号：JPS63223515A
公开(公告)日：1988-09-19
申请号：JP5830987
申请日：1987-03-13
Applicant: CANON KK
Inventor： NARUMI KOJI , WATANABE KEIJI , HOSAKA KOTARO , HIGOMURA MAKOTO , YAMAMOTO SEKINORI , NOSE TETSUSHI , NIWA YUKICHI , OWADA MITSUTOSHI
IPC: G01B11/24 , G01B11/255 , G01M11/00
Abstract: PURPOSE:To shorten the length measurement stroke of a body to be measured which has the large open angle of a lens and to reduce the size of a measuring instrument by setting a scale with polar coordinates based on the center of curvature of a curved surface to be measured as a coordinate origin, scanning a probe by swiveling along the curved surface to be measured, and measuring the surface shape of the curved surface to be measured by using the scale. CONSTITUTION:The focusing state decision optical system 42 of the automatic focusing microscope 20 of a surface shape measuring instrument detects the focusing state of the body 30 to be measured on an objective 41 and a driving motor 17 is driven according to the state to move the microscope 20. This measuring instrument is provided with a tilt angle measurement optical system 43 and sensors 44 and 45 are arranged on the optical systems 42 and 43. Further, the body 30 to be measured is supported on an indexing bearing 8 and the probe is swiveled by a swiveling means fitted to a surface plate along the curved surface to be inspected. Then the swivel angle theta between the swiveling means and the probe or body 30 to be measured is measured and the quantity of shifting in relative position of the probe from the curved surface to be measured in a (y) direction to set the scale with the coordinate system y-theta based upon the center of curvature to be inspected of the curved surface to be inspected as the coordinate origin.
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公开(公告)号：JPS63223513A
公开(公告)日：1988-09-19
申请号：JP5830787
申请日：1987-03-13
Applicant: CANON KK
Inventor： NARUMI KOJI , WATANABE KEIJI , HOSAKA KOTARO , HIGOMURA MAKOTO , YAMAMOTO SEKINORI , NOSE TETSUSHI , NIWA YUKICHI , OWADA MITSUTOSHI
Abstract: PURPOSE:To evade the collision of a surface to be inspected against an automatic focusing microscope without interrupting measuring operation by performing driving control over a servomechanism by, for example, switching a servomechanism loop which detects a light probe being scattered owing to the presence of dirt or a flaw on the surface to be inspected and focuses the probe on the surface to be inspected and a positioning servomechanism loop. CONSTITUTION:Light from the light probe is projected on the surface of a body 30 to be measured through the focusing state decision optical system 43 of the automatic focusing microscope 20 of a shape measuring instrument so that the center of the light probe slants to be optical axis. Further, the body 30 to be measured is swiveled around a swivel shaft 21 to scan the light probe on the surface of the body 30 to be inspected at right angles to this paper surface. This optical system 42 detects the focusing state of the objective 41 on the body 30 to be measured and a driving motor 17 is driven according to the focusing state to move the microscope 20. Further, an automatic focusing mechanism locks the surface of the body 30 to be measured and the focus position of the lens 41 to evade the collision of the surface of the body 30 to be measured against the microscope 20.
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公开(公告)号：JPS63199417A
公开(公告)日：1988-08-17
申请号：JP3186287
申请日：1987-02-14
Applicant: CANON KK
Inventor： ISOHATA JUNJI , YAMAMOTO SEKINORI , MATSUSHITA KOICHI
Abstract: PURPOSE:To measure the position of a substrate stage to a mask placed on a carriage accurately at all times without being affected by the positional factor of the carriage by mounting a laser interference generating section for detecting displacement in at least two directions onto a scanning means scanning an original plate and a body to be exposed to an exposure means. CONSTITUTION:A laser interference generating section 16 for detecting displacement in at least two directions of an original plate 1 or a body to be exposed 3 is set up onto a scanning means relatively scanning the original plate 1 and the body to be exposed 1 to an exposure means. Beams from a laser tube 14 are reflected by a mirror 33, and divided by a half mirror 22a, and reflected beams are directed toward an interference section 16a for detecting displacement in the X direction. Transmitting beams are divided by a half mirror 22b through a mirror 23a, and reflected beams are directed toward an interference section 16b for detecting displacement in the Y direction. Transmitting beams are projected to an interference section 16c for detecting displacement in the thetadirection through a mirror 23b. A detector 20 detects the change of intensity of beams, and displacement in each direction and a current position are computed by CPU 30.
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公开(公告)号：JPS61252906A
公开(公告)日：1986-11-10
申请号：JP9090085
申请日：1985-04-30
Applicant: CANON KK
Inventor： MATSUSHITA KOICHI , ISOHATA JUNJI , YAMAMOTO SEKINORI , MIYAZAKI MAKOTO , OZAWA KUNITAKA , YOSHINARI HIDEKI
IPC: H01L21/30 , F15B15/10 , H01L21/027 , H01L21/67 , H01L21/68
Abstract: PURPOSE:To prevent the occurrence of permanent set to a diaphragm, by projecting each setting shaft for engagement between a vessel and a body to the inside of the vessel and, when fluid pressure is less than the specified value, making each of these setting shafts contact with each other. CONSTITUTION:Each of setting shafts 92 and 94 for engaging a vessel with a body is projected to the inside the vessel. And when fluid pressure is less than the specified value, end parts of both setting shafts 92 and 94 are made contact with each other, and any displacement in a diaphragm 91 is restricted. With this constitution, a displacement amount of the diaphragm 91 to the lower side due to the weighting of the body is restrainable so that permanent set against the diaphragm 91 is preventable from occurring.
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