公开(公告)号：GB2544614A

公开(公告)日：2017-05-24

申请号：GB201616503

申请日：2015-02-13

Applicant: IBM

Inventor： MARCEL BUERGE ,  EMMANUEL DELAMARCHE ,  GOVIND KAIGALA ,  ROBERT LOVCHIK

IPC: B01L3/00 ,  B01L3/02

Abstract: A method of fabrication of microfluidic probe heads (100) is provided, the method comprising: providing (S16) a set of n microfluidic probe head layouts (14) on a same bilayer substrate (10, 10a) that comprises two layers (11, 12), said layouts being annularly distributed on that bilayer substrate, and wherein each of said layouts comprises: a first layer (110), which corresponds to a portion of one (11) of said two layers (11, 12) of the bilayer substrate; and a second layer (120), which corresponds to a portion of another one (12) of said two layers (11, 12) of the bilayer substrate; and comprises at least one microchannel (123, 124) defined by a groove open on an upper surface (120u) of the second layer (120) and closed by a portion of a lower surface (1101) of the first layer (110); machining (S20) a hole (16) substantially at the center of the bilayer substrate (10), to create a cylinder wall (18) that delimits said hole and intercepts each of the at least one microchannel of the layouts (14), such that said at least one microchannel (123, 124) of each of said layouts extends up to at least one respective aperture (121, 122) formed at an end of the groove at the level of said cylinder wall (18); and, finally, singulating (S30) each of the n layouts to obtain n microfluidic probe heads (100). MFP heads accordingly obtained are further provided.