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    METHODS OF TESTING FOR DIFFERENCES BETWEEN A SAMPLE PATTERN WITH A STANDARD USING HOLOGRAPHIC TECHNIQUES
    32.
    发明专利
    METHODS OF TESTING FOR DIFFERENCES BETWEEN A SAMPLE PATTERN WITH A STANDARD USING HOLOGRAPHIC TECHNIQUES 未知

    公开(公告)号：GB1248811A

    公开(公告)日：1971-10-06

    申请号：GB1166169

    申请日：1969-03-05

    Applicant: IBM

    Inventor： KOSANKE KURT ,  KULCKE WERNER ,  MAX ERHARD

    IPC: G03H1/00

    Abstract: 1,248,811. Holography. INTERNATIONAL BUSINESS MACHINES CORP. March 5, 1969 [March 9, 1968], No. 11661/69. Heading G2J. A method of testing for differences between a sample pattern (e. g. a mask for making semiconductor wafers) and a standard pattern comprises forming a hologram 7 from a standard pattern 3 and a reference pattern 8 Fig. 3, illuminating the developed hologram 7h Fig. 4 with light that has passed through the sample pattern 12 so that any change in the resultant reconstructed reference pattern 11a 11b provides an indication of differences between standard and sample patterns. The hologram is formed by successive partial simultaneous exposures of the standard pattern and the reference pattern. The reference pattern 8 preferably comprises a pair of pin holes 8a, 8b, and the standard pattern 3, comprises three known pattern 3a, 3b, 3c, corresponding to the samples to be tested. Pattern 3b need not be used. The reference pattern 8a, 8b is reconstructed as pattern 11a 11b. If desired the reference pattern could be a point having a concentric circle the circumference of which formed the limits of acceptable deviation of the pin hole. In a further embodiment useful where large numbers of samples have to be evaluated the reconstructed image illuminates a digital light deflector which can be measurably adjusted to cancel out the deviation in the sample.

    36.
    发明专利
    未知

    公开(公告)号：DE1474371A1

    公开(公告)日：1969-07-10

    申请号：DE1474371

    申请日：1965-05-15

    Applicant: IBM

    Inventor： MAX ERHARD ,  T SINCERBOX GLENN

    IPC: G02F1/29 ,  G03B21/11 ,  G11C13/04 ,  G11C17/00 ,  G11B7/00

    Abstract: 1,057,963. Photographic type-composing. INTERNATIONAL BUSINESS MACHINES CORPORATION. May 10, 1965 [May 25, 1964], No. 19564/65. Heading B6W. [Also in Divisions G4 and H4] Apparatus for projecting optical images of information stored in a transparent Lippmann film 10 having a number of image areas 12 each responsive to radiation of different predetermined frequencies comprises a light source 16 which directs a beam of light at a selected frequency (filter 22) and linearly polarized (polarizer 20) through a beam splitter 26 and a plurality of electro-optic devices formed by electrooptic crystal 30 and transparent electrodes 32 on opposite sides of the crystal in alignment with each of the areas 12. The information is stored in the film 10 in the form of reflecting layers 14 which may be in the shape of alphabetic or numeric characters and the layers for any one of the characters are spaced from each other distances which are inversely proportional to the frequency of the light which originally effected the depositing of the material forming the layers. When quarter-wave voltage is applied to any one of the electro-optic devices, plane polarized light passing through that device becomes circularly polarized and if the area receiving light from this device contains stored information corresponding to the light frequency, then the circularly polarized light is reflected back through the same electro-optic device and becomes plane polarized at 90 degrees to the original beams polarization direction. The reflected light then passes through the beam splitter, which splits the beam according to polarization, and a light deflector 40 to a photo-sensitive medium 46 for effecting a printing of the information. At each of the electro-optic devices not energized, light passes through them without any change in polarization and is reflected back to the beam splitter polarized in a plane which causes the light to return over the same path as that of the interrogating beam from source 16. Deflector 40 is such that a light beam entering it at any point is deflected to a common point 42, medium 46 being moved relative to deflector 40 for effecting printing on a line. Filter 22 is adjusted by the operator so that the frequency of the light delivered to the film corresponds to the frequency which caused the formation of the reflecting layers for the character desired. For half-tone reproduction the electrodes 32 are subjected to less than quarter-wave voltage. At any one area on the film there may be a number of different sets of reflecting layers each set being of a different character shape and having the layers within it spaced differently corresponding to different light frequencies. In a second embodiment, Fig. 2, not shown, the film 10 has information stored over its full surface as a picture or page of information and crystal 30 has two electrodes extending over an area equal to that on the film 10 so that the whole picture or page of information is displayed on a photo-sensitive material.

    38.
    发明专利
    未知

    公开(公告)号：DE1564209A1

    公开(公告)日：1972-01-20

    申请号：DE1564209

    申请日：1966-12-09

    Applicant: IBM DEUTSCHLAND

    Inventor： JEROME HARRIS THOMAS ,  MAX ERHARD

    IPC: H01S3/05 ,  H01S3/107 ,  H01S3/08

    Abstract: 1,100,506. Lasers. INTERNATIONAL BUSINESS MACHINES CORPORATION. 2 Nov., 1966 [16 Dec., 1965], No. 49048/66. Heading H1C. In order to select a particular frequency or frequencies of operation in a laser, a frequency selector including an electrooptical crystal is inserted in the laser cavity. In the embodiment of Fig. 2 a helium-neon laser tube 21 with Brewster angle windows is inserted in cavity 25, 26 together with the frequency selector 27. The latter cavity comprises a quartz crystal 28, an electro-optical crystal 29 controlled by a variable D.C. voltage 31, and a quarter-wave plate 30 and is enclosed by Brewster angle windows 34, 35 and filled with an index matching fluid. Because the Brewster angle windows linearly polarize the laser beam parallel to the plane of incidence only light with the correct polarization will leave and re-enter the frequency selective cavity with minimum loss. The quartz crystal 28 rotates the plane of polarization of light by amounts depending on the frequency, Figs. 3, 4 (not shown), and in operation the D.C. source 31 is varied so that the electro-optic rotator rotates the selected frequencies polarization by an amount so that the polarization of the light emerging from the quartz rotator 28 is again in the plane of incidence. The selected frequency passes through cavity 27 without loss, whereas adjacent frequencies are not rotated by the rotator 29 by the correct amount to compensate for the rotation by crystal 28 and their losses are too great for lasing to occur at these frequencies. In a second arrangement, Fig. 6, the linearly polarized beam is passed through a phase plate whose phase shift is a function of the light frequency. The argon or other ionized gas laser tube 40 is arranged in the optical cavity 45, 46 together with a gypsum phase plate 47, an electro-optic phase crystal 48 and a polarizing calcite crystal 49. The linearly polarized light from laser tube 41 is converted into elliptically polarized light by phase plate 47 which ellipticity is a function of light wavelength which light will also suffer losses in passing through the Brewster windows and will not lase. The electro-optical crystal 48 imparts substantially the same phase shift to all wavelengths of light but the amount of shift is a function of the electric field across the plate. The wavelength to lase is selected by varying the electric field across plate 48 so that the phase shift introduced thereby compensates for the phase shift of the selected wavelength produced by plate 47 and this wavelength will pass through polarizer 49 without loss. However, all other lines will remain elliptically polarized and will suffer losses passing through 49 and will not lase. Polarizer 49 may be omitted in certain cases. Plates 47, 48, 49 may be replaced by a single electro-optic phase plate. Two laser lines may be selected by using two phase plates and two electro-optic phase plates in addition to a polarizing crystal which are inserted in the laser cavity, Fig. 8 (not shown). The first wavelength is selected by arranging that the two phase plates cause a resultant phase shift of zero and applying a zero electric field to the electro-optic phase plates and a second frequency is selected by applying proper voltages to the electro-optic phase plates so that the resultant phase shift of all four plates is zero for the second selected wavelength. Two or more wavelengths may be made to lase simultaneously with this arrangement.

    IMPROVEMENTS IN OPTICAL APPARATUS
    39.
    发明专利
    IMPROVEMENTS IN OPTICAL APPARATUS 未知

    公开(公告)号：GB1220972A

    公开(公告)日：1971-01-27

    申请号：GB5050468

    申请日：1968-10-24

    Applicant: IBM

    Inventor： KOSANKE KURT ,  KULCKE WERNER WOLFGANG ,  MAX ERHARD

    IPC: G02F1/31

    Abstract: 1,220,972. Light deflectors. INTERNATIONAL BUSINESS MACHINES CORP. 24 Oct., 1968 [18 Nov., 1967], No. 50504/68. Heading H4F. A light deflector comprises a switchable electro-optic half-wave plate 6, Fig. 2, selectively operable to change the plane of polarization of a linearly polarized light beam 1 by 90 degrees, and a deflecting element 40 constructed of a plurality of transparent layers, adjacent layers having different refractive indices, and positioned so that the light beam is incident at Brewster's angle and is thus transmitted through or reflected from the deflecting element depending on its plane of polarization. The reflected light beam is aligned with the original direction of the light beam by means of reflecting element 50. In the arrangement as shown in Fig. 2 including multi-layer deflecting elements 40-46, and reflecting elements 50, 56, by selectively energizing electro-optic half-wave crystals 6, 26 and 36 the light beam may be brought to any one of the positions 1f-1n. In a further arrangement, Fig. 3 (not shown) the deflecting elements 41 and 42, and the reflecting elements 51 and 52 of Fig. 2 each comprise one larger deflecting element and reflecting element, respectively. Each deflecting element comprises a ground glass plate having alternate 1 micron layers of titanium dioxide and silicon dioxide placed thereon. The reflecting elements may be curved.

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