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公开(公告)号：JPH0987854A
公开(公告)日：1997-03-31
申请号：JP24719395
申请日：1995-09-26
Applicant: KAO CORP
Inventor： ENDO KATSUMI , KITAORI NORIYUKI , YOSHIDA OSAMU , SASAKI KATSUMI , ISHIKAWA JUNKO
IPC: C23C16/50 , C23C16/27 , C23C16/511 , G11B5/84
Abstract: PROBLEM TO BE SOLVED: To form a protective film high in the film forming rate and good in durability by providing the inside of a plasma reaction tube with an electron radiating means having a cathode, a grid and a plate for radiating electrons. SOLUTION: A reaction gas is fed to the inside of a plasma reaction tube 5, and microwaves are introduced therein from a wave guide 7 to excite plasma. The magnetic field is generated by a coil 9 for ECR(electron cyclotron resonance) to allow cyclotron resonance to occur. A voltage is applied to the space between a cathode 21 and a plate 24 to allow vacuum discharge to occur. Electrons are radiated into the plate 24 via a grid 23 having a meshy structure, and electrons are fed to the region in the cyclotron resonance. The voltage between the cathode 21 and plate 24 is regulated, and the number of the electrons and energy to be radiated are regulated.
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公开(公告)号：JPH0969438A
公开(公告)日：1997-03-11
申请号：JP22526595
申请日：1995-09-01
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , SASAKI KATSUMI , ISHIKAWA JUNKO
Abstract: PROBLEM TO BE SOLVED: To increase the output in the title magnetic recording medium having a magnetic layer containing especially Fe, N and O. SOLUTION: Within the title magnetic recording medium having a magnetic layer containing especially Fe, N and O on a supporting body, the nitrogen concentration in the magnetic layer is gradually increased from the part near the surface of the magnetic layer in the depth direction of the same while the minimum nitrogen concentration in the magnetic layer exceeds 5 atomic % and the ratios of Fe, N and O in the magnetic layer are represented by the formula of Fe:N:O=55-85:10-40:5--30 to form the Fe-N-O base magnetic layer.
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公开(公告)号：JPH0969437A
公开(公告)日：1997-03-11
申请号：JP22526495
申请日：1995-09-01
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , SASAKI KATSUMI , ISHIKAWA JUNKO
Abstract: PROBLEM TO BE SOLVED: To improve the corrosion resistance and durability of the title magnetic recording medium having a magnetic layer containing especially iron, nitrogen and oxygen. SOLUTION: Within the title magnetic recording medium having a magnetic layer containing iron, nitrogen and oxygen on a supporting body, the nitrogen concentration in the magnetic layer is gradually decreased from the part near the surface of the magnetic layer in the depth direction of the magnetic layer while the maximum nitrogen concentration in the magnetic layer does not exceed 45 atomic % and the ratio of Fe, N and O in the magnetic layer are represented by Fe:N:O=55-90:5-40:5-30 to form the Fe-N-O base magnetic layer.
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公开(公告)号：JPH0963795A
公开(公告)日：1997-03-07
申请号：JP22053295
申请日：1995-08-29
Applicant: KAO CORP
Inventor： SASAKI KATSUMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , MATSUO YUZO , SHIGA AKIRA , ISHIKAWA JUNKO
IPC: H05H1/46 , C23C16/27 , C23C16/50 , C23C16/511 , C30B25/14 , H01L21/205
Abstract: PROBLEM TO BE SOLVED: To easily form the excellent film, which can cope with the uniformity and variety of a film chamber, by providing an opening of a gas leading tube, which leads the gas into a plasma exciting chamber, on the center line of an amplitude of the micro wave. SOLUTION: In this ECR plasma CVD device, a part of a gas leading tube 15 is arranged on the center line of the amplitude of the micro wave inside of a waveguide 11, and the gas leading tube 15 is connected to a window 14. Consequently, in comparison with the conventional device with the structure that the raw material gas is led to the end of a plasma exciting chamber, this device has an opening, which can lead the raw material gas to the center of the plasma exciting chamber. The window 14 made of the material, which passes the microwave, as a quartz glass is integrally formed with the leading tube 15. Inside of the leading tube 15 is formed hollow. The leading tube 15 is desirably positioned at the center of the waveguide 11 in the microwave progressing direction. A joint part of the window 14 and the leading tube 15 needs the strength enough for standing with a pressure difference between inside and outside of the plasma exciting chamber.
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公开(公告)号：JPH0954947A
公开(公告)日：1997-02-25
申请号：JP20100495
申请日：1995-08-07
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , SASAKI KATSUMI , ISHIKAWA JUNKO
Abstract: PROBLEM TO BE SOLVED: To provide a device for producing a magnetic recording medium in which a magnetic layer excellent in durability and magnetic characteristics can be formed. SOLUTION: This device for producing a magnetic recording medium has a vacuum vessel 1 and contains a running device 2, an evaporating source 3, and an electron beam generator 4 for radiating electron beams on a magnetic material in the evaporating source 3 in the vacuum vessel 1. A 1st screen 13 disposed at a position at which the max. incident angle θ1 becomes 85 deg. and a 2nd screen 14 disposed at a position at which the min. incident angle θ2 becomes 60 deg. are also contained in the vessel 1. The 1st and 2nd screens have one of three combinations.
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Patent Agency Ranking
公开(公告)号：JPH0954937A
公开(公告)日：1997-02-25
申请号：JP20355295
申请日：1995-08-09
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , SASAKI KATSUMI , ISHIKAWA JUNKO
Abstract: PROBLEM TO BE SOLVED: To prevent the contamination of a head and decrease in output caused by repeated use by forming a ground layer on a magnetic layer formed on a supporting body in such a manner that the thickness of the ground layer is continuously changed and the max. thickness and the recording wavelength are in a relation satisfying a specified formula. SOLUTION: A magnetic coating material essentially comprising iron is applied and dried on a supporting body 3 such as a PET film to form a magnetic layer 2, on which a ground layer 3 containing carbon or silicon in which the thickness is continuously changed is formed. The period L between the peaks in this wave form is specified to 0.5-50m, and the max. thickness d (μm) is determined to satisfy the relation of 54.6×d/λ
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公开(公告)号：JPH0944832A
公开(公告)日：1997-02-14
申请号：JP19001195
申请日：1995-07-26
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , SASAKI KATSUMI , YOSHIDA OSAMU , ISHIKAWA JUNKO
Abstract: PROBLEM TO BE SOLVED: To provide a magnetic recording medium having good characteristics suitable for high-density recording and having a high output from a low range to high range by forming a lower magnetic film in such a manner that columns in the lower magnetic film are grown oblique to the base to show a curved line which is convex over the straight line connecting the starting point and the end point of the column. SOLUTION: For example, a PET film 3 is travelled in the direction (A) in the figure at 2.0m/min velocity, while electron beams are emitted from 10-KW electron gun 8 to heat, melt and vaporize a magnetic metal (Co) in a crucible 4 to form a lower magnetic film 11a to 700Åthickness on the PET film 3 when the film is in the position on a cooling can roll 1. The columns in the magnetic film 11a are grown oblique to the base and show a curved line which is convex from the straight line connecting the starting point and the ending point of the column (with the angle θ1 =30 deg.). During the lower magnetic film 11a is formed, oxygen gas is supplied by 50 sccm rate in the direction from the upstream side to the downstream side from an oxygen gas supply nozzle 7.
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公开(公告)号：JPH0941150A
公开(公告)日：1997-02-10
申请号：JP19993795
申请日：1995-08-04
Applicant: KAO CORP
Inventor： ISHIKAWA JUNKO , KITAORI NORIYUKI , YOSHIDA OSAMU , SASAKI KATSUMI
Abstract: PROBLEM TO BE SOLVED: To provide a film forming method by which a thin film such as diamond-like carbon is to be formed on a substrate, a liquid or solid compd. can be used as the source material and a thin film having good adhesion property to a substrate can be formed. SOLUTION: After a compd. which is the source material of a thin film is applied on a substrate 7, radicals of the compd. are produced on the substrate by, for example, passing the substrate through the resonance point E produced by microwaves and a magnetic field so that a thin film derived from the radicals is formed on the substrate.
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公开(公告)号：JPH0935260A
公开(公告)日：1997-02-07
申请号：JP18176795
申请日：1995-07-18
Applicant: KAO CORP
Inventor： SASAKI KATSUMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , MATSUO YUZO , SHIGA AKIRA , ISHIKAWA JUNKO
IPC: G01N3/56 , G11B5/00 , G11B5/84 , G11B15/02 , G11B15/467
Abstract: PROBLEM TO BE SOLVED: To provide a magnetic tape durability testing device small in size, simple in structure, easy to use and capable of shortening the testing/evaluating time by providing a rotating drum means, a pin means and an observing means of the edge of magnetic tape. SOLUTION: A rotating drum means 1 whose trunk part 4 is in pressurized contact with a magnetic tape 5 is rotatable in forward and backward directions A, movable in the vertical direction B and the lower edge face of the magnetic tape 5 is slid on the end face 7 of a flange part 9. A regulating pin 2 is fixed on a board 8 and arranged on both sides of the rotating drum 1 while alternately changing its position of the flange part 9. An observing means of the edge of magnetic tape 3 is composed of a stroboscope 11 and an optical microscope 12 and observes the state of the edge of the magnetic tape. The traveling condition of the magnetic tape is easily changed by setting a traveling speed, a number of pins, etc., and the testing/evaluating time is shortened. The device small in size, simple in structure and easy to use is obtained.
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公开(公告)号：JPH0935235A
公开(公告)日：1997-02-07
申请号：JP18033495
申请日：1995-07-17
Applicant: KAO CORP
Inventor： YOSHIDA OSAMU , KITAORI NORIYUKI , MIZUNOYA HIROHIDE , SASAKI KATSUMI , MATSUO YUZO , SHIGA AKIRA , ISHIKAWA JUNKO
Abstract: PROBLEM TO BE SOLVED: To provide a magnetic recording medium having further improved durability and oxidation resistance, especially a magnetic recording medium with a magnetic layer based on iron and contg. nitrogen or carbon. SOLUTION: A magnetic layer contg. iron and nitrogen or carbon, e.g. an Fe-N-O magnetic layer 2 is formed on a substrate 1 by an ion assist physical vapor deposition method in a vacuum atmosphere. A nickel layer 3 is formed on the magnetic layer 2 by a physical vapor deposition method.
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