公开(公告)号：JP2007080716A

公开(公告)日：2007-03-29

申请号：JP2005268126

申请日：2005-09-15

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KARASAWA YASUSHI

IPC: H05B33/04 ,  G09F9/30 ,  H01L27/32 ,  H01L51/50

Abstract: PROBLEM TO BE SOLVED: To provide an electro-optical device in which a light emitting element is not denaturalized by moisture existing in the display, and an electronic equipment.
SOLUTION: A reduction layer 17 is provided so as to surround the surroundings of pixel electrodes 16 on a second interlayer insulating layer 12B in a light emitting panel 2. Further, a sealing layer 22 is constituted of silicon nitride (SiNx) formed by using a high density plasma film-forming method.
COPYRIGHT: (C)2007,JPO&INPIT

Abstract translation: 解决的问题：提供一种其中发光元件不被存在于显示器中的水分变性的电光装置和电子设备。 解决方案：在发光面板2中的第二层间绝缘层12B上设置还原层17以围绕像素电极16的周围。另外，密封层22由形成的氮化硅（SiNx）构成 通过使用高密度等离子体膜形成方法。 版权所有（C）2007，JPO＆INPIT

公开(公告)号：JP2005149981A

公开(公告)日：2005-06-09

申请号：JP2003388016

申请日：2003-11-18

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KARASAWA YASUSHI

IPC: H05B33/28 ,  C23C14/06 ,  H01L51/50 ,  H05B33/10 ,  H05B33/14

Abstract: PROBLEM TO BE SOLVED: To provide an organic EL device having a long life without causing deterioration of functional layers such as a light emitting layer and an electron injecting layer, and also to provide a manufacturing method thereof.
SOLUTION: The organic EL device of this invention is of a top-emission type in which a pixel electrode 111, a functional layer 110 having at least a light emitting layer made of an organic material, and a cathode 12 are disposed in this order on a substrate 2, and the cathode 12 has a light transmitting property. The organic EL device is characterized in that the cathode 12 includes at least a titanium nitride layer.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 解决问题的方案：提供一种寿命长而不引起发光层和电子注入层等功能层劣化的有机EL元件，也可以提供其制造方法。 解决方案：本发明的有机EL器件是顶部发光型，其中像素电极111，至少具有由有机材料制成的发光层的功能层110和阴极12设置在 在基板2上的顺序，阴极12具有透光性。 有机EL器件的特征在于，阴极12至少包括氮化钛层。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2005011573A

公开(公告)日：2005-01-13

申请号：JP2003172150

申请日：2003-06-17

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： HAYASHI KENJI ,  KARASAWA YASUSHI

IPC: H01L51/50 ,  H05B33/04 ,  H05B33/10 ,  H05B33/14

Abstract: PROBLEM TO BE SOLVED: To provide an organic EL device composed by adhering the side of a negative electrode formed of an inorganic material to the side of a luminescent layer formed of an organic material, thereby preventing the deterioration of the luminescent layer due to oxygen or moisture to improve durability; to provide its manufacturing method and an electronic apparatus equipped with it. SOLUTION: This organic EL device is composed by arranging, on a substrate, a first electrode 23, a function layer formed of an organic material and having at least a luminescent layer 60, and a second electrode 50 in that order. The luminescent layer 60 is formed in pixel regions surrounded by barrier ribs 221 formed of an organic material. A closely-attached layer 65 formed of an organic silicon compound or an organic titanium compound is formed on the surface(s) of barrier ribs 221 and/or the function layer. The second electrode 50 formed of an inorganic material is formed on the surface of the adhered layer 65. COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 要解决的问题：提供一种通过将由无机材料形成的负极的侧面粘附到由有机材料形成的发光层的侧面而构成的有机EL器件，由此防止发光层的劣化 以氧气或湿气来提高耐久性; 以提供其制造方法和配备它的电子设备。 解决方案：该有机EL器件通过在基板上依次布置第一电极23，由有机材料形成并具有至少发光层60的功能层和第二电极50而构成。 发光层60形成在由有机材料形成的障壁221包围的像素区域中。 在隔壁221和/或功能层的表面上形成由有机硅化合物或有机钛化合物形成的紧密附着的层65。 在粘附层65的表面上形成由无机材料形成的第二电极50.（C）2005，JPO＆NCIPI

公开(公告)号：JP2005011572A

公开(公告)日：2005-01-13

申请号：JP2003172149

申请日：2003-06-17

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KAYANO YUJI ,  KARASAWA YASUSHI ,  MIYASHITA SATORU

IPC: H01L51/50 ,  H05B33/10 ,  H05B33/12 ,  H05B33/14 ,  H05B33/22

Abstract: PROBLEM TO BE SOLVED: To provide an organic EL device, as well as its manufacturing method and an electronic apparatus, with improved contrast, preventing the degradation of display quality due to fluctuation in sizes of ribs, and thereby heightening the display quality.
SOLUTION: The organic EL device is provided with a pixel electrode 23 and an opposed electrode 50 opposed to it on a base body, between which a luminous layer is formed. The luminous layer 60 is arranged at a pixel area surrounded by the ribs 221. The rib 221 is formed by the patterning of a black color layer of a black-color sensitive film having the black color layer.
COPYRIGHT: (C)2005,JPO&NCIPI

Abstract translation: 解决问题：为了提供具有改善的对比度的有机EL器件及其制造方法和电子设备，防止由于肋的尺寸的波动引起的显示质量的劣化，从而提高显示质量 。 解决方案：有机EL器件在基体上设置有与其相对的像素电极23和相对电极50，在其之间形成有发光层。 发光层60被布置在被肋221包围的像素区域处。肋221通过黑色彩色层的黑色层的黑色层的图案形成而形成。 版权所有（C）2005，JPO＆NCIPI

公开(公告)号：JP2004252406A

公开(公告)日：2004-09-09

申请号：JP2003196236

申请日：2003-07-14

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KARASAWA YASUSHI ,  NOJIMA SHIGEO ,  NOZAWA RYOICHI

IPC: H05B33/10 ,  G09F9/00 ,  G09F9/30 ,  H01L27/32 ,  H01L51/50 ,  H01L51/52 ,  H05B33/00 ,  H05B33/14 ,  H05B33/22 ,  H05B33/24 ,  H05B33/26

CPC classification number: H01L51/5281 ,  H01L27/3244 ,  H01L51/5206 ,  H01L51/5218 ,  H01L51/5246 ,  H01L51/5284 ,  H01L51/529 ,  H01L2251/5315

Abstract: PROBLEM TO BE SOLVED: To increase the visibility in the open air. SOLUTION: At least one of the surfaces of a display panel is made a display surface, and the surface is provided with at least a first reflection layer 3 and a second reflection layer 4 on a substrate 1. The layer 3 is formed to match every pixel and is made of titanium (Ti), titanium nitride or titanium-tungsten alloy. The layer 4 is deposited on the layer 3 by using indium tin oxide (ITO), indium zinc oxide or gallium zinc oxide as raw material. COPYRIGHT: (C)2004,JPO&NCIPI

公开(公告)号：JP2003080715A

公开(公告)日：2003-03-19

申请号：JP2001274030

申请日：2001-09-10

Applicant: Seiko Epson Corp ,  セイコーエプソン株式会社

Inventor： KARASAWA YASUSHI ,  SHOJI SHUICHI ,  HONMA NORIYUKI

IPC: B41J2/135

Abstract: PROBLEM TO BE SOLVED: To solve a problem of the components of an ink jet recorder that the nozzle hole of a nozzle plate or the through hole of a semiconductor device can not be bored stably.
SOLUTION: Etching resistant films, i.e., silicon nitride films 13 and 14, are formed by a CVD system on a 200 micron thick (100) face orientation n-type single crystal silicon substrate 1 becoming a nozzle plate. The silicon nitride film 14 is then removed by dry etching and the silicon nitride film 13 is subjected to photoetching at the parts 12 corresponding to nozzle holes. Subsequently, the parts 12 corresponding to nozzle holes are bored by anodizing thus completing a nozzle plate.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：为了解决喷嘴的喷嘴孔或半导体装置的通孔不能稳定地钻孔的部件的问题。 解决方案：通过在200微米厚（100）面取向的n型单晶硅衬底1上成为喷嘴板的CVD系统形成耐蚀刻膜，即氮化硅膜13和14。 然后通过干蚀刻除去氮化硅膜14，并且在对应于喷嘴孔的部分12处对氮化硅膜13进行光刻。 随后，对应于喷嘴孔的部件12通过阳极氧化而钻孔，从而完成喷嘴板。

公开(公告)号：JP2000328266A

公开(公告)日：2000-11-28

申请号：JP14146799

申请日：1999-05-21

Applicant: SEIKO EPSON CORP

Inventor： KAYANO YUJI ,  KARASAWA YASUSHI

IPC: B41J2/16 ,  C23F1/08 ,  C23F1/28

Abstract: PROBLEM TO BE SOLVED: To provide an etching method which is capable of forming micro-size patterns with high perpendicularity and high accuracy. SOLUTION: A workpiece 2 formed with resist patterns is etched while high- pressure gas and an aqueous ferric chloride solution are mixed and sprayed. At this time, the workpiece is etched under the conditions under which (1) a distance of spraying is =0.3 MPa, (3) the temperature on the surface of the workpiece 2 at the time of spraying of the aqueous ferric chloride solution is >=30 deg. and (4) the concentration of the aqueous ferric chloride solution is >=40 deg. Baume., by which the etching with the excellent dimensional accuracy and perpendicularity of a cross-sectional shape is made possible.

公开(公告)号：JPH05335314A

公开(公告)日：1993-12-17

申请号：JP14143092

申请日：1992-06-02

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: H01L21/60 ,  H01L21/321

Abstract: PURPOSE:To reduce production cost for a bump electrode by forming an intermediate metallic layer through an electroless plating process, covering the area other than that for an electrode with a photosensitive resin, and forming a contact metallic layer, at the time of manufacturing through plating a bump electrode to be used for minute mounting of a semiconductor element. CONSTITUTION:A conductive layer 3 composed of aluminum, an intermediate metallic layer 5, a gold layer 6, and a contact metallic layer 7 are laminated successively on a silicon substrate 1 forming a circuit.

公开(公告)号：JPH04318935A

公开(公告)日：1992-11-10

申请号：JP8525991

申请日：1991-04-17

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI

IPC: H01L21/60 ,  H01L21/321

Abstract: PURPOSE:To realize the prevention of damage to a substrate at the time of connection by inserting copper in the bump electrode of a semiconductor element, and to reduce the dispersion of the height of the bump electrode by plating the upper section of copper with solder. CONSTITUTION:A nickel-phosphorus layer 4 and a copper layer 5 are laminated on an aluminum layer 2 on a silicon substrate 1, thus forming a bump electrode.

公开(公告)号：JPH0282152A

公开(公告)日：1990-03-22

申请号：JP23562188

申请日：1988-09-20

Applicant: SEIKO EPSON CORP

Inventor： KARASAWA YASUSHI ,  FUJISAKI MASANOBU ,  MATSUSHIMA FUMIAKI

IPC: G01N27/414 ,  G01N27/327

Abstract: PURPOSE:To enhance sensitivity and to extend a life by effecting an electrolysis in an aq. micell soln. to break the micell and to deposit enzyme. CONSTITUTION:A nickel film 2 and an indium oxide film 3 are formed by sputtering vapor deposition method on a sapphire substrate 1 which is an insulating substrate and after an epoxy resin 4 is formed thereon, a lamination pattern is formed by a photolithographic method to form an electrode. An enzyme immobilized layer 5 is formed on the electrode surface to form the glucose enzyme sensor. The film 2 is a coated conductor and the film 3 has an oxidation reduction function. The immobilized layer 5 is fixed with coated enzyme. The electrolysis is, therefore, effected by the aq. micell soln. prepd. by insolubilizing the enzyme subjected to a water insolubilization treatment in the aq. micell of a surfactant to be charged by electrolysis. The immobilized layer 5 is formed by a method of breaking the micell by the electrolytic oxidation and depositing the enzyme. The concn. of a special chemical material is converted to the corresponding concn. of hydrogen ions by this immobilized layer 5 and the concn. of the hydrogen ions is converted by the film 3 to the corresponding potential.