公开(公告)号：JP2003073804A

公开(公告)日：2003-03-12

申请号：JP2001260624

申请日：2001-08-30

Applicant: Sony Corp ,  ソニー株式会社

Inventor： HAYASHI HIROSHI ,  KAKINUMA MASAYASU

IPC: C23C14/04

Abstract: PROBLEM TO BE SOLVED: To enable film-forming treatment coping with a fine pattern to be performed in high accuracy, even to a widened film region of an article to be film formed.
SOLUTION: The device comprises an alignment part 10 for making a mask formed so as to have an equal size to one area out of several areas, which are obtained by dividing the film forming region of an article to be film formed adhere onto the above article, and a film forming part 30 for forming a patterned film on the article through the mask which adheres onto the article. The method is characterized by moving the mask to the other area in the alignment part 10 when the patterned film in the film forming part 30 is finished, in order to use the mask already used in the area in which film formation has been finished, for forming the patterned film in the other area.
COPYRIGHT: (C)2003,JPO

Abstract translation: 要解决的问题：为了能够高精度地进行精细图案的成膜处理，甚至能够成膜的制品的加宽的膜区域。 解决方案：该装置包括对准部分10，用于制造掩模，其形成为具有与几个区域中的一个区域相同的尺寸，这是通过将待成膜的制品的成膜区域分割成上述物品而获得的 以及用于通过粘附在制品上的掩模在制品上形成图案化膜的成膜部分30。 该方法的特征在于，当成膜部分30中的图案化膜完成时，将掩模移动到对准部10中的另一区域，以便使用已经在成膜的区域中已经使用的掩模，用于 在其他区域形成图案化膜。

公开(公告)号：JP2002075639A

公开(公告)日：2002-03-15

申请号：JP2000259629

申请日：2000-08-29

Applicant: SONY CORP

Inventor： OMI MOTOSUKE ,  KAKINUMA MASAYASU ,  HAYASHI HIROSHI ,  KAWASHIMA TOSHITAKA

IPC: H05B33/10 ,  C23C14/04 ,  C23C16/04 ,  H01L51/50 ,  H05B33/12 ,  H05B33/14 ,  H05K3/14 ,  H05K3/16

Abstract: PROBLEM TO BE SOLVED: To keep adhesion property between a metal mask and a substrate without causing large-sizing of a device. SOLUTION: This is equipped with a mask arranged at one face side of the substrate and composed of a magnetic member, the magnetic member arranged at the other face side of the substrate, and the pattern forming means arranged opposing to the face where the mask of the substrate is arranged, and the magnetic member has plural magnetic domains, and the plural magnetic domains are arranged so that the polarity is different from that of the magnetic domain next to each other.

公开(公告)号：JP2001172759A

公开(公告)日：2001-06-26

申请号：JP35825699

申请日：1999-12-17

Applicant: SONY CORP

Inventor： OWADA YOSHIAKI ,  OZAWA YUTAKA ,  KAKINUMA MASAYASU ,  OMI MOTOSUKE

IPC: C08J7/00 ,  C23C14/02

Abstract: PROBLEM TO BE SOLVED: To provide an apparatus and a method for substrate treatment which can simplify a facility and reduce the evacuation time. SOLUTION: The substrate treatment apparatus 1 comprises a carrying belt 2 to carry a film F as a substrate to be treated in a mounted condition, a corona discharge block 3 which is provided on a carrying path by the carrying belt 2 to achieve the pretreatment on the film F, and a sputter block 4 to achieve the predetermined treatment on the film F by forming the atmosphere lower in pressure than the peripheral atmosphere of the carrying belt 2.

公开(公告)号：JP2001143644A

公开(公告)日：2001-05-25

申请号：JP32098699

申请日：1999-11-11

Applicant: SONY CORP

Inventor： OMI MOTOSUKE ,  KAWASHIMA TOSHITAKA ,  KAKINUMA MASAYASU ,  IKUI KUNIO

IPC: H01J9/20 ,  G02B1/10 ,  G02B1/113 ,  H01J29/88 ,  H01J29/89

Abstract: PROBLEM TO BE SOLVED: To provide a functional film having an electrode that may be connected with a conductive layer with high reliability and stable quality hardly changing the quality with time and that provide easy automated manufacturing facility and a method of fabricating it at low cost. SOLUTION: Sequentially formed over a substrate 20 are a conductive layer 12 and a low conductive layer 13 having a lower conductivity than the layer 12. The method comprises a step of subjecting the surface of the conductive layer 12 to corona discharge, a step of lowering a vacuum chamber 60 to contact its opening portion 65 with the surface of the low conductive layer 13, a step of evacuating the vacuum chamber 60 by opening the exhaust valve 61 to a prescribed vacuum state, and a step of introducing a sputtering gas into the vacuum chamber 60 by opening a gas inlet valve 63 to sputter an electrode film 14 on the surface of the low conductive layer 13. The electrode film 14 is connected through the low conductive layer 13 to the conductive layer 12.

公开(公告)号：JPH11323542A

公开(公告)日：1999-11-26

申请号：JP13045698

申请日：1998-05-13

Applicant: SONY CORP

Inventor： KAKINUMA MASAYASU

IPC: C23C14/34 ,  H01L21/203

Abstract: PROBLEM TO BE SOLVED: To provide a sputtering device in which the cooling efficiency of a cathode part is improved to improve the efficiency of sputtering. SOLUTION: This sputtering device is the one in which an anode part 11 to be deposited with an object FM and a cathode part 14 arranged opposite to the anode part 11 and having a target part 15 composed of a material forming a thin film on the object FM, and a thin film is formed on the object FM. In this case, the cathode part 14 is composed of a backing plate 16 in which a target part 15 is adhered and held on one end side, and grooves 16a and 16b are formed on the other end side and a cooling pipe 17 in which cooling water is flowed to the hollow part for cooling the heat of the backing plate 16 and the target part 15, arranged on the other end side of the backing plate 16 and adhered with the groove of the backing plate 16 when the cooling water is flowed.

公开(公告)号：JPH11193458A

公开(公告)日：1999-07-21

申请号：JP2998

申请日：1998-01-05

Applicant: SONY CORP

Inventor： OOSHIMA YOSHIHIRO ,  KAKINUMA MASAYASU

IPC: C23C14/34 ,  C23C14/00 ,  C23C14/56 ,  H01L21/203

Abstract: PROBLEM TO BE SOLVED: To provide a sputtering device in which the adjustment of the flow rate of a gas is easy, and time is not taken for the adjustment. SOLUTION: This sputtering device is the one in which the inside of a gas distributor 9 having a plurality of gas nozzles 12 formed in a vacuum chamber is fed with a reactive gas, and this reactive gas is jetted from the gas nozzles 12, and the inside of the vacuum chamber is provided with a gauge port type connector 13 for removing the gas distributor 9. The gas nozzles 12 are arranged toward the outside of the chamber. The gas nozzles 12 are formed of screws having holes spouting out the reaction gas. Thus, the adjustment of the flow rate of the gas is easy, and time is not taken for the adjustment.

公开(公告)号：JPH08287826A

公开(公告)日：1996-11-01

申请号：JP8384995

申请日：1995-04-10

Applicant: SONY CORP

Inventor： OMI MOTOSUKE ,  OWADA YOSHIAKI ,  KAKINUMA MASAYASU

IPC: H01J9/24 ,  H01J9/20 ,  H01J29/88

Abstract: PURPOSE: To provide a manufacturing method of an article by sticking a film to a panel surface and a film sticking device, by which a film can be stuck in close contact to a panel surface without infiltrating bubbles into it by using a film beforehand formed in a prescribed dimension. CONSTITUTION: An adhesive is applied to at least one of a panel surface 16 of an article such as a cathode-ray tube or a film 20 beforehand prepared in a prescribed dimension according to a shape of the panel surface 16, and the film 20 is held by a film holding tool 19 composed of an elastic body. The panel surface 16 is pressed against the film 20 in a vacuum condition, and the film holding tool 19 is elastically deformed according to the shape of the panel surface 16, and the film 20 is brought into close contact with the panel surface 16, and the adhesive is hardened in its close contact condition, and the film 20 is stuck to the panel surface 16.

公开(公告)号：JPH07320642A

公开(公告)日：1995-12-08

申请号：JP13509094

申请日：1994-05-25

Applicant: SONY CORP

Inventor： KAKINUMA MASAYASU ,  OWADA YOSHIAKI ,  SATO TAKAHARU

IPC: H01J9/24 ,  H01J9/26 ,  H01J29/86

Abstract: PURPOSE:To carry out exposure of the whole body of an adhesive curable by ultraviolet ray by applying the adhesive to an object glass face, pressing a thin glass plate to the object glass face by compressed air, and curing the adhesive by applying ultraviolet ray CONSTITUTION:A thin glass plate TG which is chucked in a vacuum chuck 6 is lowered to a displaying screen 40 of a CRT display to which an adhesive curable by ultraviolet ray is alrealy applied and the thin glass plate TG and the display screen of the CRT display CRT are closely stuck to each other. Vacuum suction in the vacuum chuck 6 is switched to compressed air and a sealed container composed of the vacuum chuck 6 and the thin glass plate GT is pressed. The thin glass plate TG is pressed to the display screen 40 side of the CRT display CRT. Plungers 7, 7 are pulled back to be parted from the thin glass plate TG, ultraviolet ray is radiated out of ultraviolet ray lamps 8, 8, and thus the whole body of the adhesive curable by ultraviolet ray and existing between the thin glass plate TG and the display screen of the CRT display CRT is cured.

公开(公告)号：JPH0726365A

公开(公告)日：1995-01-27

申请号：JP19539093

申请日：1993-07-12

Applicant: SONY CORP

Inventor： KAKINUMA MASAYASU ,  AIURA MIKIO ,  KAMAGAMI KAZUYOSHI ,  HAYASHI HIROSHI

IPC: C23C14/00 ,  G11B5/85 ,  H01F41/20

Abstract: PURPOSE:To easily clean off and handle a deposited flying metal by freely attachably and detachably providing a bolt and a flying metal deposition preventing piece on the ceiling wall of the deposition preventing plate surrounding a vaporization source generating the flying metal. CONSTITUTION:A vaporization source 3 of a Co-Ni alloy, etc., arranged in a deposition preventing plate 5 is irradiated with an electron beam, heated and vaporized, and the generated flying metal is supplied from a window 5a and deposited on a base film 14 traveling on a cooling roll 2 to form a thin film. In this material-flying device of the thin film forming device, a bolt 10A and plural bolts 10B piercing the through-hole 6C are fastened to the inner wall surface with nuts 11 at the upper part in the deposition preventing plate 5, and a flying metal deposition preventing piece 9 is fixed to the bolt 10A. The piece 9 consists, for example, of a stationary part 9b fixed detachably to the inner wall surface and a masking part 9a suspended from the inner wall surface toward the vaporization source. The deposited flying metal layers 12 and 13 in the deposition preventing plate 5 are cleaned off by loosening the nuts 11 and extracting the bolts 10A and 10B from the through-hole 5C.

公开(公告)号：JPH06174199A

公开(公告)日：1994-06-24

申请号：JP35350092

申请日：1992-12-14

Applicant: SONY CORP

Inventor： KAKINUMA MASAYASU ,  ISHIKAWA HIROYUKI ,  KIN YASUNORI

IPC: F17D1/08 ,  F16L55/07

Abstract: PURPOSE:To prevent liquid from leaking out and scattering by constituting a device such that residual fluid in a fluid circulating pipe can be extruded to a tank side by blowing compressed air after closing an opening/closing valve in each fluid circulating pipe when detached a connector provided in each connecting end of the paired fluid circulating pipes. CONSTITUTION:In the case of applying to a device for performing delivery of cooling water, when separated a supply side unit P of cooling water from a receiving side unit Q of cooling water, first solenoid valves 5, 6, 12, 13 are closed, to stop circulating the cooling water. Next, solenoid valves 25, 26 of cooling water residual discharge pipes 23, 24 are opened, and also opening a solenoid valve 22 of a compressed air blow pipe 19. In this way, compressed air from a compressed air source 20 is blown into a water supply pipe 8 and a drain pipe 9, left with liquid, through connectors 21, 18 and check valves 16, 17, and the residual liquid is extruded toward the supply side P to flow out into a tank 27 via the residual liquid discharge pipes 23, 24. And then, the solenoid valves 22, 25, 26 are closed to respectively separate connectors 3, 10; 4, 11; 21, 18.