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公开(公告)号：JP2008012631A
公开(公告)日：2008-01-24
申请号：JP2006186857
申请日：2006-07-06
Inventor： TADA MASAHIRO , KINOSHITA TAKASHI , MITARAI TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide an electric machine element which can reduce a gap length between a lower electrode and an upper electrode of a movable element thereof.
SOLUTION: The electric machine element is composed of the movable element 25 having the lower electrode 23 and the upper electrode via a space 24 therebetween, and either one or both of the lower electrode 23 and the upper electrode 25 are formed of a laminated structure.
COPYRIGHT: (C)2008,JPO&INPITAbstract translation: 要解决的问题：提供一种能够减小其可动元件的下电极和上电极之间的间隙长度的电机元件。 解决方案：电机元件由具有下电极23和上电极的可移动元件25经由其间的空间24组成，并且下电极23和上电极25中的一个或两者由 层压结构。 版权所有（C）2008，JPO＆INPIT
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公开(公告)号：JP2005202309A
公开(公告)日：2005-07-28
申请号：JP2004010761
申请日：2004-01-19
Inventor： KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide an authentication device which secures individual confirmation and is made high in security, speedy in authentication processing, small in size and low in price. SOLUTION: In the authenticating method and authenticating device for speech recognition, an inputted keyword speech signal P is divided as an open key into a plurality of frequency regions, speech signals P1 to P4 of the plurality of divided frequency regions are selected with a 1st digital non-open key 1 having bits as many as the frequency regions, and registers as speech information 2 information whose digital non-open key number overlaps a speech signal of a selected necessary frequency region is registered as speech information 2. In authentication, the inputted keyword speech signal P is divided into the plurality of frequency regions, differences between the speech signals P1 to P4 of the plurality of frequency regions and the registered speech information 2 are calculated in the respective frequency regions, and a 2nd digital non-open key 4 corresponding to a frequency region whose signal intensity is observed is extracted and collated with the 1st digital non-open key 1 to perform authentication. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种认证装置，其确保个人确认并且安全性高，认证处理速度快，尺寸小，价格低。 解决方案：在用于语音识别的认证方法和认证装置中，将输入的关键词语音信号P作为开放键划分为多个频率区域，选择多个分频频率区域中的语音信号P1至P4， 作为具有与频率区域一样多的第一个数字非开放密钥1，并将其数字非开放密钥号码与所选择的必要频率区域的语音信号重叠的语音信息2登记为语音信息2.在认证 ，输入的关键词语音信号P被分成多个频率区域，在各个频率区域中计算出多个频率区域的语音信号P1〜P4与登记的语音信息2之间的差异， 对应于与观察到的信号强度的频率区域对应的打开键4被提取并与第一数字非打开键1对准 执行认证。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2005081524A
公开(公告)日：2005-03-31
申请号：JP2003319253
申请日：2003-09-11
Inventor： MATSUHISA KAZUHIRO , KINOSHITA TAKASHI , NANBADA KOJI
Abstract: PROBLEM TO BE SOLVED: To provide an MEMS structure capable of improving an SN ratio by reducing parasitic capacitance between electrodes even when a signal transmission system with the usage of a high order mode of a beam type vibrator is adopted, and capable of coping with a high frequency range such as a GHz range.
SOLUTION: This micromachine (MEMS) is constituted of the beam type vibrator 1 as a movable structure to which a direct current is applied, an input electrode 2 for exciting vibration to the vibrator 1, and an output electrode 3 for detecting vibration excited by the vibrator 1, and provided with a hierarchical structure wherein the vibrator 1 is fastened between the input electrode 2 and the output electrode 3 so that they are overlapped.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：为了提供一种能够通过减小电极之间的寄生电容来提高SN比的MEMS结构，即使采用使用梁型振动器的高阶模式的信号传输系统，并且能够 应对高频范围，如GHz范围。 解决方案：该微型机械（MEMS）由作为施加直流电的可移动结构的光束型振动器1，用于激励振动器1的振动的输入电极2和用于检测振动的输出电极3 由振动器1激励，并且设置有分层结构，其中振动器1紧固在输入电极2和输出电极3之间，使得它们重叠。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2005005847A
公开(公告)日：2005-01-06
申请号：JP2003164945
申请日：2003-06-10
Inventor： KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To miniaturize a communication device by integrating a function required for demodulating a reception signal in a remarkably small area and making a signal processing apparatus into one chip by using MEMS technology.
SOLUTION: The signal processing apparatus mounted on the communication device is constituted by providing: a plurality of mechanical vibrators 1 and 2 corresponding to mutually different transmission frequency bands; an excitation means 3 which can simultaneously excite vibration with respect to the mechanical vibrators 1 and 2 by applying a signal being an object of a processing; and a detection means 4 which simultaneously detects and combines vibrations in the mechanical vibrators 1 and 2 and obtains a signal of a specified frequency component.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：通过将在非常小的区域中解调接收信号所需的功能集成并且通过使用MEMS技术将信号处理装置构成一个芯片来使通信装置小型化。 解决方案：安装在通信设备上的信号处理设备通过提供：对应于相互不同的传输频带的多个机械振动器1和2构成; 激励装置3，其通过施加作为处理对象的信号，同时激发相对于机械振动器1和2的振动; 以及检测装置4，其同时检测并组合机械振动器1,2的振动并获得指定频率分量的信号。 版权所有（C）2005，JPO＆NCIPI
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35.发明专利
公开(公告)号：JP2004106232A
公开(公告)日：2004-04-08
申请号：JP2002268815
申请日：2002-09-13
Inventor： YAMAGUCHI SEIYA , KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide a microfluidic driver in which a high fluidic driving force can be obtained while enhancing productivity by realizing a high density driving section, and to provide an electrostatic head comprising it.
SOLUTION: The microfluidic driver comprises a diaphragm 12 for imparting a pressure variation to fluid, independent diaphragm side electrode 11 and substrate side electrode 7 for driving the diaphragm 12, and a strut 13 for forming a space 9 between the diaphragm side electrode 11 and the substrate side electrode 7.
COPYRIGHT: (C)2004,JPO-
Patent Agency Ranking36.发明专利Method for manufacturing hollow structural body and method for manufacturing mems element 审中-公开制造中空结构体的方法及制造MEMS元件的方法
公开(公告)号：JP2004001140A
公开(公告)日：2004-01-08
申请号：JP2002160425
申请日：2002-05-31
Inventor： KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To prevent a deformation defective by surface tension when removing a sacrifice layer and to shorten removing time for the sacrifice layer, in a method for manufacturing a hollow structural body such as a MEMS element.
SOLUTION: This method has a process for forming a substrate side electrode 32 on a substrate 31, a process for forming the sacrifice layer 37 (36, 34) made of two or more kinds of materials selectively removable by each of solution 45 and gas within the same layer by interposing an insulating film 33 or without interposing the insulating film 33 on the substrate side electrode 32, a process for forming a beam 40 having a driving side electrode 39 on the sacrifice layer 37, and a process for selectively removing a part 34 of a material removable by the solution 45 of the sacrifice layer 37 by using the solution 45 and removing a part 36 of a material removable by remaining gas of the sacrifice layer 37 by using gas after displacement/drying through an opening 44 provided in a region except a substantial vibration part 43 of the beam 40 to form a hollow part 48.
COPYRIGHT: (C)2004,JPOAbstract translation: 要解决的问题：为了防止在去除牺牲层时表面张力的变形和缩短牺牲层的去除时间的变形，在MEMS元件的中空结构体的制造方法中。 解决方案：该方法具有在基板31上形成基板侧电极32的工序，形成由溶液45可选择除去的两种以上材料制成的牺牲层37（36,34）的工序 并且通过插入绝缘膜33或不将绝缘膜33插入到基板侧电极32上的相同层内的气体，用于在牺牲层37上形成具有驱动侧电极39的梁40的工艺，以及用于选择性地 通过使用溶液45去除由牺牲层37的溶液45可去除的材料的部分34，并且通过在通过开口44移位/干燥之后使用气体除去由牺牲层37的剩余气体除去的材料的部分36 设置在除了梁40的实质振动部分43之外的区域中以形成中空部分48.版权所有（C）2004，JPO
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37.发明专利Electrostatic drive type mems element and manufacturing method therefor, optical mems element, optical modulator, glv device and laser display 审中-公开静电驱动型MEMS元件及其制造方法，光学MEMS元件，光学调制器，GLV器件和激光显示器
公开(公告)号：JP2003340795A
公开(公告)日：2003-12-02
申请号：JP2002144981
申请日：2002-05-20
Inventor： IKEDA KOICHI , KINOSHITA TAKASHI
CPC classification number: B81C1/00666 , B81B2201/047 , B81B2203/053 , B81C2201/0169
Abstract: PROBLEM TO BE SOLVED: To flatten a beam composing an electrostatic drive type MEMS element or stabilize and uniformalize a beam shape. SOLUTION: The electrostatic drive type MEMS element comprises a substrate side electrode 33, a beam 36 disposed opposite to the substrate side electrode 33, having a drive side electrode 37 and supported on the both ends thereof, and at least two supporting parts 35A, 35B and 35C, 35D are provided on the both ends of the beam 36 respectively. In the supporting parts 35, the height t1 of the inner supporting parts 35B, 35C is set to be lower than the height t2 of the outer supporting parts 35A, 35D. COPYRIGHT: (C)2004,JPO
Abstract translation: 要解决的问题：使构成静电驱动型MEMS元件的光束变平或稳定并均匀化光束形状。 解决方案：静电驱动型MEMS元件包括基板侧电极33，与基板侧电极33相对设置的光束36，具有驱动侧电极37并被支撑在其两端，以及至少两个支撑部 35A，35B和35C，35D分别设置在梁36的两端。 在支撑部35中，内侧支撑部35B，35C的高度t1被设定为低于外部支撑部35A，35D的高度t2。 版权所有（C）2004，JPO
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公开(公告)号：JP2002118973A
公开(公告)日：2002-04-19
申请号：JP2000311326
申请日：2000-10-11
Applicant: SONY CORP
Inventor： TAKEI MASAAKI , KAWAKITA KOZO , KINOSHITA TAKASHI , UCHIYAMA JUN , KUMAGAI YOSHIAKI , IMAI TORU
Abstract: PROBLEM TO BE SOLVED: To reduce dimensions of a battery charger, while a battery can be charged without difficulties. SOLUTION: This charger has approximately a box shape, whose height is reduced gradually, from one end in its longitudinal direction toward the other end. The largest height is approximately the same as the height of the abdominal part of a robot device 1, when it stands on its four legs, and a horizontal length is not longer than the width between the left and right legs of the robot device 1.
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公开(公告)号：JP2001144086A
公开(公告)日：2001-05-25
申请号：JP2000233954
申请日：2000-08-02
Applicant: SONY CORP , KOBE STEEL LTD
Inventor： NOGAMI TAKESHI , KOMAI HISANORI , IKEDA KOICHI , KINOSHITA TAKASHI , SUZUKI KOHEI , KAWAKAMI NOBUYUKI , FUKUMOTO YOSHITO
IPC: H01L21/283 , H01L21/316 , H01L21/768 , H01L23/522
Abstract: PROBLEM TO BE SOLVED: To provide a method of forming a buried interconnection which has a high reliability and causes no damage or disconnections in interconnections and also causes no damage in an insulation film for filling a space between the interconnections and can have the space between the interconnections surely filled by an insulation material. SOLUTION: A method of forming a buried interconnection comprises a process (A) of forming, on a substrate 11, interconnections 33 and a first insulation film 34 for filling a space between the interconnections, a process (B) of dissolving the first insulation film 34 into a fluid 41, a process (C) of replacing the fluid 41 with a material solution 43 including a material for forming a second insulation film without bringing the interconnections 33 into contact with the air, and a process (D) of drying the material solution after filling at least the space between the interconnections 33 with the second insulation film 44 gelled in the material solution, thereby forming a second insulation film 35 at least between the interconnections 33.
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公开(公告)号：JPS6248310B2
公开(公告)日：1987-10-13
申请号：JP9195681
申请日：1981-06-15
Applicant: SONY CORP
Inventor： KINOSHITA TAKASHI , SHIROCHI YOSHIKI , MOTOYOSHI NOBORU
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