MICROMACHINE AND METHOD OF PRODUCING THE SAME
    3.
    发明公开
    MICROMACHINE AND METHOD OF PRODUCING THE SAME 有权
    微机械及其制造方法

    公开(公告)号:EP1568655A4

    公开(公告)日:2006-12-06

    申请号:EP03774185

    申请日:2003-11-25

    Applicant: SONY CORP

    CPC classification number: H03H3/0072 H03H9/2405 H03H2009/02511

    Abstract: A micromachine for a high frequency filter having a high Q factor and a frequency band which is high. A micromachine (1) comprising an output electrode (7) disposed on a board(5), an interlayer insulation film (9) covering the board (5) and having a hole pattern (9a) with an output electrode (7) used as a bottom, and a band-like vibrator electrode (11) disposed on the interlayer insulation film (9) in such a manner that, with the interior of the hole pattern (9a) used as a space (A), it crosses the upper region thereof, the micromachine being characterized in that the vibrator electrode (11) is formed as a recess on the hole pattern (9a) side along the side wall of hole pattern (9a).

    MICROMACHINE AND METHOD OF MANUFACTURING THE MICROMACHINE
    6.
    发明公开
    MICROMACHINE AND METHOD OF MANUFACTURING THE MICROMACHINE 审中-公开
    微机械和方法中微型电机的生产

    公开(公告)号:EP1544162A4

    公开(公告)日:2005-10-05

    申请号:EP03771265

    申请日:2003-07-14

    Applicant: SONY CORP

    CPC classification number: H03H9/2463 H03H3/0072

    Abstract: A micromachine (20) for a high frequency filter having a high Q value and a high frequency band, comprising an input electrode (7b), an output electrode (7a), and a support electrode (7c) installed on a substrate (4), and a band-shaped vibrator electrode (15) formed by laying a beam (vibration part)(16) on the upper part of the output electrode (7a) through a clearance part (A) in the state of supporting both end parts thereof on the input electrode (7b) and the substrate (4) through the support electrode (7c), wherein the both end parts of the vibrator electrode (15) are completely fixed to the input electrode (7b) and the support electrode (7c) on the entire surface thereof ranging from the tip to the beam (16) thereof.

    10.
    发明专利
    未知

    公开(公告)号:DE60322097D1

    公开(公告)日:2008-08-21

    申请号:DE60322097

    申请日:2003-11-25

    Applicant: SONY CORP

    Abstract: Disclosed is a micromachine as a high-frequency filter which includes a high Q value and is suitable for higher frequency bands. The micromachine (1) includes an output electrode (7) formed on a substrate (5), an interlayer insulating film (9) which covers the substrate (5) and includes an opening (9a) whose bottom is the output electrode (7), and a beltlike resonator electrode (11) so formed on the interlayer insulating film (9) as to traverse above the space (A) in the opening (9a), with the resonator electrode (11) being concave toward the opening (9a) along the side wall of the opening (9a).

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