公开(公告)号：EP0377446A3

公开(公告)日：1990-09-19

申请号：EP90100051.3

申请日：1990-01-02

Applicant: HITACHI, LTD.

Inventor： Ninomiya, Ken ,  Suzuki, Keizo

IPC: G01N23/227 ,  G06F19/00

CPC classification number: G01N21/63 ,  G01N21/1702 ,  G01N23/22 ,  G01N2021/178 ,  G01N2201/1035 ,  G01N2223/10 ,  G01N2223/33 ,  G01N2223/345

Abstract: A method of and an apparatus for analyzing a surface are disclosed, in which the intensity profile of a probe beam at the surface of a sample (2 ) is measured, the intensity distribution of a detection signal along the surface of the sample is measured by scanning the surface of the sample with the probe beam, and mathematical transformation is carried out for each of the measured intensity profile and the measured signal-intensity distribution, to make surface analysis with high resolution.