公开(公告)号：EP2753907B1

公开(公告)日：2015-10-21

申请号：EP12748149.7

申请日：2012-08-02

Applicant: Inficon GmbH

Inventor： ANDREAUS, Bernhard

IPC: G01L21/34 ,  G01L21/30 ,  H01J41/06

CPC classification number: G01L21/30 ,  G01L21/34 ,  H01J41/06

公开(公告)号：EP0662607B1

公开(公告)日：1999-04-07

申请号：EP95400038.6

申请日：1995-01-09

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventor： Baptist, Robert

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

公开(公告)号：EP0752716A1

公开(公告)日：1997-01-08

申请号：EP96401447.6

申请日：1996-07-01

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventor： Baptist, Robert

IPC: H01J41/06 ,  G01L21/34

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: La présente invention concerne un dispositif d'amorçage et/ou de maintien d'une décharge apte à être disposée dans une enceinte (16) à l'intérieur de laquelle se trouve une zone de décharge confinée par un champ électromagnétique, ce dispositif comportant une source d'électrons à mîcropointes (20) disposée à proximité de ladite zone et des moyen de polarisation (23) de la source (20) de façon à ce qu'elle émette des électrons vers la zone de décharge afin d'amorcer et/ou de maintenir ladite décharge.
L'invention concerne également une jauge à vide à cathode froide comportant un tel dispositif.

Abstract translation: 其可以连接到一个真空的真空室（16）通过凸缘来测量（17）包含其由冷阴极（14）所包围的阳极（13）。 阳极（13）由一个高压源（18）保持在电势和由流过的电流（19）中的真空确定性开采。 磁体（11,12）位于所述真空室的侧面和如果放电失败可以由微点电子源（20）重新击中。 微点电子源位于排出区附近并具有可以被升高到手动控制（26）下的电势（23）的控制栅极（22）。

公开(公告)号：EP0662607A1

公开(公告)日：1995-07-12

申请号：EP95400038.6

申请日：1995-01-09

Applicant: COMMISSARIAT A L'ENERGIE ATOMIQUE

Inventor： Baptist, Robert

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: Jauge à ionisation munie d'une cathode à micropointes.
Cette jauge à ionisation comprenant une anode filiforme (20), un collecteur cylindrique (22), une source d'électrons (24) placée entre l'anode et le collecteur, se caractérise en ce que la source d'électrons est une source d'électrons à micropointes, orientée de telle façon que le faisceau d'électrons issu de la cathode puisse se déplacer sur une trajectoire hélicoïdale (33) autour de l'anode.

Abstract translation: 电离计包括由圆柱形收集器（22）围绕的线阳极（20）。 在阳极和收集器之间有一个电子源（24），源极是一个微点源。 源极取向，使得来自阴极的电子束沿着阳极周围的螺旋路径行进。 县。 微点电子源（24）包括位于微点附近的控制电极，控制电路单独和独立地设置控制电极的电位，以改变来自电子束的电子束的形状和方向 资源。

公开(公告)号：EP0431233B1

公开(公告)日：1994-08-03

申请号：EP89810932.7

申请日：1989-12-08

Applicant: Balzer, Dinoo, Dr.

Inventor： Balzer, Richard

IPC: H01J41/06

CPC classification number: H01J41/06 ,  G01M3/202

公开(公告)号：EP3353802A1

公开(公告)日：2018-08-01

申请号：EP15774543.1

申请日：2015-09-23

Applicant: Inficon AG

Inventor： WÜEST, Martin

IPC: H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34 ,  H01J2237/18 ,  H01J2237/31701

Abstract: The invention relates to an ionization vacuum measuring cell (10) comprising an evacuable housing (12) with a measurement connection for a vacuum to be measured at an end portion; a measurement chamber (14) in the housing (12), said measurement chamber being fluidically connected to the measurement connection, wherein the measurement chamber (14) is designed as a replaceable component; and a first and a second electrode (16, 18) in the measurement chamber (14), said electrodes being substantially coaxial to an axis and being arranged at a distance from each other. The measuring cell further comprises an electrically insulating and vacuum-tight feedthrough (20) for an electric supply to the second electrode (18) and a magnetization assembly which is designed to generate a magnetic field in the ionization chamber. According to the invention, the measurement chamber (14), in particular at least one of the electrodes (16, 18), comprises a magnetic material.

公开(公告)号：EP2753907A1

公开(公告)日：2014-07-16

申请号：EP12748149.7

申请日：2012-08-02

Applicant: Inficon GmbH

Inventor： ANDREAUS, Bernhard

IPC: G01L21/34 ,  H01J41/06

CPC classification number: G01L21/30 ,  G01L21/34 ,  H01J41/06

Abstract: The invention relates to an ionization vacuum measuring cell comprising: a) an evacuatable housing (10) with a measuring connection (8) for the vacuum to be measured, b) a first outer and a second inner electrode (3, 4) which are coaxially arranged in an interspaced manner with a common axis (7), whereby a measuring chamber (20) is formed between said two electrodes, said measuring chamber communicating with the measuring connection (8), c) a voltage source (16) which is connected to the electrodes (3, 4), d) a current measuring means (17) for analyzing a discharge current generated between the electrodes (3, 4), and e) at least one permanent magnet ring (1) which surrounds the coaxial electrode (3, 4) arrangement, has a magnetizing direction (13) directed radially to the axis, and comprises a soft-magnetic yoke (2) that surrounds the permanent magnet ring (1). The yoke (2) extends axially away from the permanent magnet ring (1) on both sides and radially towards the axis (7) and the first electrode (3) on both sides after a specified distance (d) from the permanent magnet ring (1) such that the yoke (2) forms two annular poles (9a, b) on both sides at a distance from the permanent magnet ring (1), via which at least some of the field lines of the permanent magnet ring (1) form a closed loop within the measuring chamber (20), penetrating the first electrode (3).

公开(公告)号：EP2215647B1

公开(公告)日：2012-06-20

申请号：EP08806729.3

申请日：2008-10-07

Applicant: Edwards Limited

Inventor： KEY, Matthew

IPC: H01J41/06

CPC classification number: H01J41/06

Abstract: A gauge head (10) for an ionisation vacuum gauge includes an electrical device (12, 28, 54) operable to provide an electrical discharge in a gas whose pressure is to be measured to initiate ion discharge in the gas.

Abstract translation: 一种用于电离真空计的测头（10）包括电气装置（12,28,54），其可操作以提供气体中的放电，该气体的压力将被测量以引发气体中的离子放电。

公开(公告)号：EP1856713A2

公开(公告)日：2007-11-21

申请号：EP06708602.5

申请日：2006-03-02

Applicant: Inficon GmbH

Inventor： WETZIG, Daniel ,  GERDAU, Ludolf

IPC: H01J41/06

CPC classification number: G01L21/34 ,  H01J41/06

Abstract: A cold cathode pressure sensor (10) comprises a gas-tight housing (12), a test gas inlet (18), an anode (14) and a cathode (16, 17) arranged in the housing (12), and a radiation source (20) directed towards the cathode (16, 17) in order to ignite a cold cathode discharge. The housing (12) is at least in part made of glass. The radiation source (20) is arranged outside the housing (12) and irradiates the cathode (16, 17) through the glass which makes up the housing. The wavelength of the radiation from the radiation source (20) ranges substantially from more than 350 nm to less than 1400 nm.

公开(公告)号：EP1540294A1

公开(公告)日：2005-06-15

申请号：EP03753312.2

申请日：2003-09-17

Applicant: Otto-Von-Guericke-Universität Magdeburg

Inventor： EDELMANN, Christian ,  WILFERT, Stefan

IPC: G01L21/34 ,  H01J41/06

CPC classification number: H01J41/06 ,  G01L21/34

Abstract: The invention relates to a cold-cathode ionisation manometer for measuring pressure in a vacuum, said manometer operating according to the inverse magnetron principle and being used to measure pressures in fine vacuums, high vacuums, and ultrahigh vacuums (preferably between 10 Pa and 1 Pa). The aim of the invention is to reduce the contamination tendency and thus to extend the service life of said measuring tubes. To this end, a measuring tube comprising two separately controlled cathodes (K1, K2) and a common anode (A), enabling two independent discharges to be ignited inside the same, is used. While a discharge (K1) which is directly localised at the inlet of the measuring tube takes on the function of a gas purification device in which plasma-chemical dissociation reactions enable vapours contaminated by hydrocarbons or other substances entering into the measuring tube to be cracked or polymerised, a second discharge chamber (K2) inserted into the measuring tube housing (MRG) and protected by a gas discharge path (K1) operates as an intrinsic measuring chamber. Only the discharge current flowing out of said discharge area (K2) is evaluated and is used to measure the pressure. Said special double-chamber measuring tube geometry enables the plasma to burn in the integral measuring chamber (K2) under optimum conditions of cleanliness, thus enabling the service life of the measuring tube to be extended.

Abstract translation: 本发明涉及一种用于测量真空中的压力的​​冷阴极电离压力计，所述压力计根据反磁控原理工作，并用于测量精细真空，高真空和超高真空（优选10Pa至1Pa ）。 本发明的目的是减少污染趋势并由此延长所述测量管的使用寿命。 为此，使用包括两个单独控制的阴极（K1，K2）和公共阳极（A）的测量管，使得两个独立的放电在其内被点燃。 当直接位于测量管入口处的排出口（K1）具有气体净化装置的功能时，其中等离子体 - 化学分解反应使得被碳氢化合物或其他物质污染的蒸汽进入测量管而被破碎或 聚合后，插入测量管壳体（MRG）中并由气体排出路径（K1）保护的第二排出室（K2）用作本征测量室。 只有流出所述放电区域（K2）的放电电流被评估并用于测量压力。 所述特殊的双室测量管几何形状使等离子体能够在最佳清洁条件下在整体式测量室（K2）中燃烧，从而延长了测量管的使用寿命。