公开(公告)号：US06530756B2

公开(公告)日：2003-03-11

申请号：US10041739

申请日：2002-01-10

Applicant: Ichiro Morita ,  Masanori Kobayashi ,  Koh Inagaki ,  Makoto Katayama

Inventor： Ichiro Morita ,  Masanori Kobayashi ,  Koh Inagaki ,  Makoto Katayama

IPC: F04B3504

CPC classification number: H02K33/16 ,  F04B35/045 ,  F04B39/0027 ,  F04B39/12 ,  F04B49/02 ,  F04B49/06 ,  F04B49/065 ,  F04B49/12 ,  F04B2201/0201 ,  F04B2201/0206 ,  F04B2203/0401 ,  F04B2203/0402 ,  F04B2205/05 ,  F04B2205/07 ,  F04B2205/10 ,  F04B2205/11 ,  F04B2205/18 ,  H02K1/12 ,  H02K1/20 ,  H02K7/14 ,  H02K33/02 ,  H02K33/06 ,  H02K33/10 ,  H02K33/14

Abstract: A tightly closed casing has an inside space for storing coolant gas. A block is accommodated in this casing. A motor includes a stator and a mover. A piston is connected to the mover of the motor. A movable element includes the mover of the motor and the piston. A stationary element includes the stator of the motor and the block. An elastic element has a portion fixed to the movable element and another portion fixed to the stationary element. A cylinder is shiftable in an axial direction with respect the block. A shifting device shifts the cylinder in the axial direction.

公开(公告)号：US20030021693A1

公开(公告)日：2003-01-30

申请号：US10178068

申请日：2002-06-21

Applicant: Empresa Brasileira De Comressores S.A. - Embraco

Inventor： Marcos Guilherme Schwarz ,  Paulo Sergio Dainez

IPC: F04B049/00

CPC classification number: F04B35/045 ,  F04B2201/0201

Abstract: A system and method for controlling a compressor (1) is provided that prevents the piston (5) of the compressor from colliding against the valve system (8, 9) provided therein. The system and method of the present invention control the stroke of the piston (5), allowing the piston (5) to advance as far as the end of its mechanical stroke in extreme conditions of load, without allowing the piston (5) to collide with the valve system (8,9). The present invention controls the compressor (1) by measuring a movement time of the piston (5); comparing the movement time with a foreseen movement time; and altering the voltage (Vm) if the first movement time is different from the foreseen movement time, the foreseen movement time being such that the movement of the piston (5) will reach a maximum point (M).

公开(公告)号：US06328542B1

公开(公告)日：2001-12-11

申请号：US09363400

申请日：1999-07-29

Applicant: Mark Serafin ,  LeRoy C. Erickson

Inventor： Mark Serafin ,  LeRoy C. Erickson

IPC: F04B1700

CPC classification number: F04B9/115 ,  F04B2201/0201

Abstract: A check valve system and method control the opening and closure of a check valve that supplies product fluid to an intensifier pump based on the position of a piston within the intensifier pump. Position sensing allows anticipation of different events along the path traveled by the piston, such as the start and end of advance, retract, and precompression cycles. The system and method operate to selectively open and close associated check valves based on the sensed position to carefully control the delivery of fluid to each intensifier pump. Active control of the check valves based on piston position allows more precise timing of fluid delivery in relation to the piston cycles. Anticipation of the onset of piston advance and retraction cycles can improve valve response time, providing more uniform fluid pressure for a continuous, steady, high pressure flow of fluid with minimal pressure fluctuation.

Abstract translation: 止回阀系统和方法控制基于活塞在增压泵内的位置将产品流体供应到增压泵的止回阀的打开和关闭。 位置检测可以预测沿着活塞行进路径的不同事件，例如提前，收缩和预压周期的开始和结束。 系统和方法操作以基于感测到的位置选择性地打开和关闭相关的止回阀，以便仔细地控制流体到每个增压泵的输送。 基于活塞位置对止回阀的主动控制允许相对于活塞循环的流体输送的更精确的定时。 活塞前进和后退循环开始的预期可以改善阀响应时间，为连续，稳定，高压流体流动提供更均匀的流体压力，同时压力波动最小。

公开(公告)号：US06280149B1

公开(公告)日：2001-08-28

申请号：US09428945

申请日：1999-10-28

Applicant: Stephen D. Able ,  Joseph L. Meloche

Inventor： Stephen D. Able ,  Joseph L. Meloche

IPC: F04B4900

CPC classification number: F04B43/0736 ,  F04B2201/0201

Abstract: A diaphragm pump having an active feedback system is provided. The diaphragm pump includes a diaphragm pump having a housing including a pumping cavity. The pump cavity having at least one diaphragm dividing the pumping cavity into a first pumping chamber and a first pump actuating chamber. A rod is attached to and reciprocally movable along an axis with the at least one diaphragm with the rod including a ferromagnetic material. An induction coil disposed around the rod wherein relative axial movement between the inductance coil and the ferromagnetic material of the rod varies the inductance of the induction coil. Also provided is a diaphragm pump having an active feedback system in which the rod has an electrically conductive, diametrically tapered portion. A linear displacement sensor is disposed next to the tapered portion which induces a current in the tapered portion and generates an output voltage proportional to a relative position between the linear displacement sensor and the tapered portion.

Abstract translation: 提供了具有主动反馈系统的隔膜泵。 隔膜泵包括隔膜泵，其具有包括泵送腔的壳体。 所述泵腔具有至少一个将所述泵送腔分成第一泵送室和第一泵致动室的隔膜。 杆沿着轴线附接并且可沿着轴线往复移动，其中所述至少一个隔膜与杆包括铁磁材料。 设置在杆周围的感应线圈，其中电感线圈和杆的铁磁材料之间的相对轴向运动改变感应线圈的电感。 还提供了一种具有主动反馈系统的隔膜泵，其中杆具有导电的直径锥形部分。 线性位移传感器设置在锥形部分的旁边，其在锥形部分中引起电流，并产生与线性位移传感器和锥形部分之间的相对位置成比例的输出电压。

公开(公告)号：US5947702A

公开(公告)日：1999-09-07

申请号：US770909

申请日：1996-12-20

Applicant: Clifford Biederstadt ,  Gerald B. Costello ,  Arthur J. Heiser, Jr.

Inventor： Clifford Biederstadt ,  Gerald B. Costello ,  Arthur J. Heiser, Jr.

IPC: F04B13/00 ,  F04B17/04 ,  F04B49/06 ,  F04B53/14 ,  F04B35/04

CPC classification number: F04B53/143 ,  F04B13/00 ,  F04B17/042 ,  F04B49/065 ,  F04B2201/0201 ,  F05C2225/04

Abstract: A high precision fluid pump for accurately delivering desired amounts of processing fluids, particularly for use in semiconductor processing and semiconductor processors. The fluid is dispensed by a piston driven by a stepper motor with precise electronic control. A rolling diaphragm isolates the stepper motor from the fluid, fumes or gas. To provide a clean environment for high purity applications, the pump is preferably made of PTFE and nitrogen purging is provided on both sides of the rolling diaphragm to reduce particle count and maintain the motor and controller temperature.

Abstract translation: 一种高精度流体泵，用于精确输送所需量的处理流体，特别适用于半导体处理和半导体处理器。 流体由具有精确电子控制的步进电机驱动的活塞分配。 滚动隔膜将步进电机与流体，烟雾或气体隔离开。 为了提供高纯度应用的清洁环境，泵优选由PTFE制成，并且在滚动隔膜的两侧设置氮气吹扫以减少颗粒数量并保持电机和控制器的温度。

公开(公告)号：US5897781A

公开(公告)日：1999-04-27

申请号：US870661

申请日：1997-06-06

Applicant: Theodore A. Dourdeville

Inventor： Theodore A. Dourdeville

IPC: B01D15/08 ,  B01J4/02 ,  F04B13/00 ,  F04B23/06 ,  F04B49/06 ,  G01N30/32

CPC classification number: G01N30/32 ,  F04B13/00 ,  F04B23/06 ,  F04B49/065 ,  F04B2201/0201 ,  G01N2030/326

Abstract: A fluid delivery method and apparatus implementing active phasing to actively restore the substantially exact mechanical positions of driven components in a delivery system in order to precisely reproduce the mechanical signature and hydraulic characteristics of the system from run to run without perturbing output flow. The delivery system is configured to intelligently drive pump pistons to a known position and to deliver fluid(s) at a known pressure, and includes a plurality of pump modules each including motor driven syringes having respective pistons configured to reciprocate under control of a control mechanism. Pump phasing is accomplished through a mechanism of compensation delivery of the syringes. An independent, motor-driven syringe of any given pump in a plurality of pumps in a system has the ability to act as a delivering syringe to maintain a prescribed output flow while one other syringe of each of the plurality of pumps is repositioned under load. With the delivering syringe maintaining output flow, the syringe which is repositioning, i.e. being phased, can substantially simultaneously arrive at a destination position and at a destination pressure.

Abstract translation: 实现有源定相的流体输送方法和装置主动地恢复输送系统中驱动部件的基本精确的机械位置，以便精确地再现系统的运行到运行的机械特征和液压特性而不扰乱输出流。 输送系统构造成将泵活塞智能地驱动到已知位置并且以已知压力输送流体，并且包括多个泵模块，每个泵模块包括具有相应活塞的马达驱动注射器，该活塞构造成在控制机构的控制下往复运动 。 泵的定相是通过注射器的补偿输送机制完成的。 在系统中的多个泵中的任何给定的泵的独立的电机驱动的注射器具有作为输送注射器保持规定的输出流量的能力，同时多个泵中的每一个的另一个注射器被重新定位在负载下。 在输送注射器保持输出流量的情况下，重新定位的注射器（即定相）可以基本上同时到达目的地位置和目的地压力。

公开(公告)号：US5823747A

公开(公告)日：1998-10-20

申请号：US654759

申请日：1996-05-29

Applicant: Steven J. Ciavarini ,  Robert J. Dumas

Inventor： Steven J. Ciavarini ,  Robert J. Dumas

IPC: F04B49/10 ,  F04B49/06 ,  F04B53/06 ,  B01D15/08

CPC classification number: F04B53/06 ,  F04B49/06 ,  F04B2201/0201 ,  F04B2205/05 ,  F04B2205/503

Abstract: A serial, dual piston high pressure fluid pumping system that overcomes the difficulties of gas in the fluid stream without the need for added mechanical valves or fluid paths. A bubble detection and recovery mechanism monitors compression and decompression volumes of the serially configured dual pump head pump, and the overall system delivery pressure. Bubble detection is effected by sensing a ratio of compression to decompression volume and determining if the ratio exceeds an empirical threshold that suggests the ratio of gas-to-liquid content of eluent or fluid in the system is beyond the pump's ability to accurately meter a solvent mixture. The magnitude of the ratio of compression to decompression volume indicates that either the intake stroke has a bubble or that the eluent has a higher-than-normal gas content. Once a bubble has been detected, recovery is effected by forcing the pump into a very high stroke volume with the compression and decompression stroke limits constrained to obtain the largest delivery stroke compression ratio that will expel a bubble or solvent that has detrimental quantities of gas.

公开(公告)号：US5507624A

公开(公告)日：1996-04-16

申请号：US365514

申请日：1994-12-28

Applicant: Berthold A. Fehn

Inventor： Berthold A. Fehn

IPC: F04B13/00 ,  F04B15/02 ,  F04B49/06 ,  G01F11/02 ,  F04B53/00

CPC classification number: G01F11/029 ,  F04B13/00 ,  F04B15/02 ,  F04B49/065 ,  F04B2201/0201 ,  F04B2201/0202 ,  F04B2201/0209 ,  F04B2201/06012 ,  F04B2201/1204 ,  F04B2203/0901 ,  F04B2203/0902 ,  F04B2203/0903 ,  F04B2203/091 ,  F04B2205/05 ,  Y10S417/90

Abstract: The present invention is a sludge pump system which includes a means for monitoring operation of a sludge pump. The sludge pump includes a material cylinder and a piston moveable in the material cylinder. A pump drive moves the piston during working cycles which include a pumping stroke and a filling stroke. A pump valve mechanism connects the material cylinder to an outlet during pumping strokes and connects the material cylinder to an inlet during filling strokes. A means for monitoring operation of the pump is provided. The means for monitoring includes a means for sensing a first parameter related to operation of the pump drive, a means for sensing a second parameter indicative of operation of the piston, and a means for determining errors in the operation of the pump based upon the first parameter and the second parameter.

Abstract translation: 本发明是一种污泥泵系统，其包括用于监测污泥泵的操作的装置。 污泥泵包括可在料筒中移动的料筒和活塞。 泵驱动器在包括泵送冲程和填充冲程的工作循环期间移动活塞。 泵阀机构在泵送冲程期间将材料筒连接到出口，并且在填充冲程期间将材料筒连接到入口。 提供了一种用于监测泵的操作的装置。 用于监测的装置包括用于感测与泵驱动器的操作相关的第一参数的装置，用于感测指示活塞的操作的第二参数的装置，以及用于基于第一个来确定泵的操作中的误差的装置 参数和第二个参数。

公开(公告)号：US5257914A

公开(公告)日：1993-11-02

申请号：US903341

申请日：1992-06-24

Applicant: Steven M. Reynolds

Inventor： Steven M. Reynolds

IPC: F04B43/067 ,  F04B43/073 ,  G01P3/54 ,  F04B49/00

CPC classification number: F04B43/067 ,  F04B43/0736 ,  G01P3/54 ,  F04B2201/0201 ,  F04B2201/0202

Abstract: A pump control interface for use in a diaphragm pump including at least one diaphragm adapted to move between a suction stroke and a discharge stroke during operation of the pump. A diaphragm follower is connected for movement with the diaphragm during operation of the pump. A sensor mechanism is provided for sensing at least the position and rate of movement of the diaphragm by sensing the position and rate of movement of the diaphragm follower. In one embodiment, the control interface is provided as a rod interconnecting two diaphragms of a dual diaphragm pump for synchronous movement. A plurality of conductive targets are disposed on the rod, and a proximity switch is mounted adjacent to the rod, in order to produce pulsed output signals when in proximity with the conductive targets.

公开(公告)号：US4705459A

公开(公告)日：1987-11-10

申请号：US767001

申请日：1985-08-19

Applicant: Paul H. Buisine ,  Paul Dancer

Inventor： Paul H. Buisine ,  Paul Dancer

IPC: F04B51/00

CPC classification number: F04B51/00 ,  F04B2201/0201 ,  F04B2201/0207 ,  F04B2201/0601 ,  Y10T137/8242

Abstract: The invention relates in particular to measuring the delivery rate of a positive displacement pump comprising at least one piston (3) driven with reciprocating movement in a chamber (2), which chamber is connected to an inlet circuit (4) via an inlet valve (5) and to an outlet circuit (6) via a delivery valve (7). The number of cycles performed by the pump in unit time are counted, and simultaneously its volumetric efficiency is measured, thereby enabling its real delivery rate to be deduced. Its volumetric efficiency may be measured by means of position sensors (17, 18) detecting the closure and opening instants of the delivery valve, with another sensor determining the instants at which the piston (3) passes through its end positions.

Abstract translation: 本发明特别涉及测量包括至少一个活塞（3）的容积式泵的排量，所述活塞（3）在室（2）中以往复运动驱动，所述室通过入口阀（...）连接到入口回路（4） 5）和经由输送阀（7）的出口回路（6）。 计算泵在单位时间内执行的循环次数，同时测量其体积效率，从而实现其实际传送速率。 其体积效率可以通过检测输送阀的闭合和打开瞬间的位置传感器（17,18）来测量，另一个传感器确定活塞（3）穿过其终端位置的时刻。