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公开(公告)号：JP4645393B2
公开(公告)日：2011-03-09
申请号：JP2005280718
申请日：2005-09-27
Applicant: エプソントヨコム株式会社
Inventor： 清孝 松木
IPC: H03B5/32
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42.发明专利Dual tuning fork type vibrating reed, vibration type sensor element, and vibration type sensor 审中-公开双调弦式振动台，振动式传感器元件和振动式传感器
公开(公告)号：JP2010286468A
公开(公告)日：2010-12-24
申请号：JP2010015510
申请日：2010-01-27
Applicant: Epson Toyocom Corp , Seiko Epson Corp , エプソントヨコム株式会社 , セイコーエプソン株式会社
Inventor： NISHIZAWA RYUTA , ICHIKAWA SO
Abstract: PROBLEM TO BE SOLVED: To provide a dual tuning fork type vibrating reed having a small size and high sensitivity. SOLUTION: The dual tuning fork type vibrating reed 100 is such that a first vibration arm part 10 has a first region 12, and a second region 14 and a third region 16 aligned in due order in a direction from a first base end 30 toward a second base end 40; a second vibration arm part 20 has a fourth region 22, a fifth region 24 and a sixth region 26 aligned, in this order, in a direction from the first base end 30 toward the second base end 40; first exciting electrodes 110 connected mutually electrically are formed on front and rear surfaces of the first region 12, both side faces of the second region 14, front and rear surfaces of the third region 16, both side faces of the fourth region 22, front and rear surfaces of the fifth region 24 and both side faces of the sixth region 26; and a second exciting electrodes 120 mutually connected electrically are formed on both the side faces of the first region 12, front and rear surfaces of the second region 14, both side faces of the third region 16, the front and rear surfaces of the fourth region 22, both the side faces of the fifth region 24 and front and rear surfaces of the sixth region 26. COPYRIGHT: (C)2011,JPO&INPIT
Abstract translation: 要解决的问题：提供具有小尺寸和高灵敏度的双音叉型振动片。 解决方案：双音叉型振动片100使得第一振动臂部分10具有第一区域12，以及第二区域14和第三区域16，该第二区域14和第三区域16在从第一基端 30朝向第二基端40; 第二振动臂部20具有第四区域22，第五区域24和第六区域26，该第四区域22，第五区域24和第六区域26依次从第一基端30向第二基端40的方向排列。 在第一区域12的前表面和后表面上形成有第一激励电极110，第二区域14的两个侧面，第三区域16的前表面和后表面，第四区域22的两个侧面，前面和后面 第五区域24的后表面和第六区域26的两个侧面; 并且在第一区域12的两个侧面，第二区域14的前表面和后表面，第三区域16的两个侧面，第四区域的前表面和后表面上形成有电连接的第二激励电极120 22，第五区域24的侧面和第六区域26的前表面和后表面两者。版权所有（C）2011，JPO＆INPIT
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43.发明专利
公开(公告)号：JP2010286368A
公开(公告)日：2010-12-24
申请号：JP2009140700
申请日：2009-06-12
Applicant: Epson Toyocom Corp , Seiko Epson Corp , Seiko Npc Corp , エプソントヨコム株式会社 , セイコーNpc株式会社 , セイコーエプソン株式会社
Inventor： NARUSE HIDETO , TAKADA YUTAKA , SATO KENJI , TAKAHASHI MASAYUKI
IPC: G01C19/56 , G01C19/5614 , G01C19/5621 , G01M17/007 , G01M99/00 , G01P21/02
CPC classification number: G01C19/56
Abstract: PROBLEM TO BE SOLVED: To provide a physical quantity detector diagnosing abnormality more reliably, to provide a method of controlling the physical quantity detector, and to provide a system and a method for diagnosing abnormality. SOLUTION: An angular velocity detector 1 (one example of the physical quantity detectors) includes: a gyrosensor element 100 (one example of physical quantity detection elements) for generating a detection signal corresponding to the magnitude of angular velocity (one example of physical quantities) and a leakage signal of vibration based on a drive signal (square wave voltage signal 22) in a detection electrode; a drive circuit 20 for generating a drive signal; a synchronous detection circuit 350 for performing synchronous detection to a signal 36 to be detected including a detection signal and a leakage signal, based on a detection signal 34 in synchronization with the drive signal; and a phase change circuit 352 for changing relative timing of at least one of rising and falling of the detection signal 34 to the signal 36 to be detected so that at least one portion of the leakage signal is outputted by synchronous detection, based on a control signal 64. COPYRIGHT: (C)2011,JPO&INPIT
Abstract translation: 要解决的问题：为了提供更可靠地诊断异常的物理量检测器，提供一种控制物理量检测器的方法，并且提供用于诊断异常的系统和方法。 角速度检测器1（物理量检测器的一个示例）包括：用于产生与角速度的大小相对应的检测信号的陀螺仪传感器元件100（物理量检测元件的一个示例） 物理量）和基于检测电极中的驱动信号（方波电压信号22）的振动泄漏信号; 用于产生驱动信号的驱动电路20; 同步检测电路350，用于与驱动信号同步地基于检测信号34对包括检测信号和泄漏信号的待检测信号36进行同步检测; 以及相位改变电路352，用于将检测信号34的上升和下降中的至少一个的相对定时改变为待检测的信号36，使得通过同步检测输出至少一部分泄漏信号，基于控制 信号64.版权所有（C）2011，JPO＆INPIT
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公开(公告)号：JP4600692B2
公开(公告)日：2010-12-15
申请号：JP2007341003
申请日：2007-12-28
Applicant: エプソントヨコム株式会社
Inventor： 亮一 安池
IPC: H03H9/19 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/311 , H01L41/332 , H03B5/32 , H03H3/02 , H03H9/02
CPC classification number: H03H9/02023 , H03H3/04 , H03H9/02102 , H03H9/02133 , H03H9/0547 , H03H9/0552 , H03H9/1021 , H03H9/132 , H03H9/177 , H03H9/19 , H03H2003/022 , Y10T29/42
Abstract: An inverted mesa-type quartz crystal resonator element includes a rotated AT-cut quartz crystal substrate, the substrate having edges parallel to each of a Z" axis obtained by rotating a Z' axis in a range of -120° to +60° about a Y' axis and an X' axis perpendicular to the Z" axis when an angle formed by rotating a +Z' axis in a direction of a +X axis about the Y' axis is a positive rotation angle; a thin section that forms a resonating section; and a thick section adjacent to the resonating section, the thin section and the thick section being formed on the quartz crystal substrate by wet etching. The thin section is formed either on a main surface of the substrate corresponding to a +Y'-axis side or on a main surface of the substrate corresponding to a -Y'-axis side. An amount of residues on the etched surface varies depending on various cutting-out angles because of the anisotropy of the crystallographic orientation of the crystal. The reduction of residues appearing between the thin section, which is the resonating section, and the thick section increases an occupancy of the resonating section. Providing the connection electrode along the direction can suppress influence of stress imposed to the substrate through a support portion. Selected shapes of electrode patterns allow maintaining a defined space of an overlapping region, thereby reducing differences in oscillation characteristics in mass production.
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Patent Agency Ranking
公开(公告)号：JP2010268475A
公开(公告)日：2010-11-25
申请号：JP2010133725
申请日：2010-06-11
Applicant: Epson Toyocom Corp , エプソントヨコム株式会社
Inventor： IWATA KOICHI
IPC: H03H9/19 , H01L41/09 , H01L41/18 , H01L41/22 , H01L41/332
Abstract: PROBLEM TO BE SOLVED: To obtain a means for small-sizing a contour shape of a high frequency piezoelectric vibrator. SOLUTION: A recessed part 2 is formed on one principal surface of a crystal substrate 1, an electrode 3 is disposed almost in the center of an opposite plane side, a lead electrode 4 extends from the electrode 3 to a terminal part of the crystal substrate 1 and is connected with a pad electrode 5 provided in a thick part of an annular surrounding portion of the crystal substrate 1, and a full-surface electrode 6 is deposited to the recessed side of the crystal substrate 1, thereby constituting a high frequency piezoelectric vibrator. In addition, in the thick annular surrounding portion, a thick part α of the annular surrounding portion of one side is formed smaller than other sides. COPYRIGHT: (C)2011,JPO&INPIT
Abstract translation: 要解决的问题：获得用于小型化高频压电振动器的轮廓形状的装置。 解决方案：在晶体基板1的一个主表面上形成凹陷部分2，电极3几乎位于相对平面侧的中心，引线电极4从电极3延伸到 晶体基板1并且与设置在晶体基板1的环形周围部分的厚部分中的焊盘电极5连接，并且在该晶体基板1的凹陷侧沉积全面电极6，由此构成 高频压电振动器。 此外，在厚的环状周围部分中，一侧的环形环绕部分的厚部分α形成为比其他侧面小。 版权所有（C）2011，JPO＆INPIT
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公开(公告)号：JP2010263388A
公开(公告)日：2010-11-18
申请号：JP2009112339
申请日：2009-05-01
Applicant: Epson Toyocom Corp , エプソントヨコム株式会社
Inventor： YAMANAKA KUNIHITO , SAKUMA MASAYASU
Abstract: PROBLEM TO BE SOLVED: To provide a SAW element and a SAW device, capable of effectively and sufficiently performing variable control of frequency.
SOLUTION: In the SAW element 1, an IDT 3 for exciting SAW and heater electrodes 5a, 5b are provided on the main surface of a piezoelectric substrate 2 made of quartz, and the heater electrodes are disposed on both sides of a direction orthogonal to the SAW propagation direction for the IDT. When the frequency versus temperature characteristic of the piezoelectric substrate is expressed by a quadratic curve or a cubic curve, the operation temperature range of the SAW element is set not to include an extremal value but allow the quadratic curve or cubic curve to always change in a negative direction for the rise in a temperature.
COPYRIGHT: (C)2011,JPO&INPITAbstract translation: 要解决的问题：提供能够有效且充分地执行频率的可变控制的SAW元件和SAW器件。 解决方案：在SAW元件1中，用于激发SAW和加热器电极5a，5b的IDT 3设置在由石英制成的压电基板2的主表面上，并且加热器电极设置在方向 与IDT的SAW传播方向正交。 当压电基板的频率对温度特性由二次曲线或三次曲线表示时，SAW元件的工作温度范围被设定为不包括极值，但允许二次曲线或三次曲线总是在 温度上升的负方向。 版权所有（C）2011，JPO＆INPIT
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公开(公告)号：JP2010232932A
公开(公告)日：2010-10-14
申请号：JP2009077828
申请日：2009-03-26
Applicant: Epson Toyocom Corp , エプソントヨコム株式会社
Inventor： YAMADA AKINORI
Abstract: PROBLEM TO BE SOLVED: To increase an area of an excitation electrode, while making a vibrating arm short, and attain improvement in excitation efficiency and reduction in a CI value as well as miniaturization in a piezoelectric vibration chip of a bending vibration mode.
SOLUTION: The vibrating arm 23 of the piezoelectric vibration chip 21 includes a first groove portion 27, extending from an arm portion 24 to an area of a wide spindle portion 25 at a tip of the vibrating arm, on each of top and reverse surfaces thereof, and a first excitation electrode 29 is formed on an internal surface thereof. The spindle portion includes a second bottomed groove portion 28, parallel with the first groove portion, on each of top and reverse surfaces at a part 26 protruding from a side face of the arm portion 24 along the width. A side face of the second groove portion which is adjacent to the first groove portion is formed continuously in level with the side face of the arm portion without any step, and a second excitation electrode 30 is formed continuously on the side face and the side face of the arm part.
COPYRIGHT: (C)2011,JPO&INPITAbstract translation: 要解决的问题：为了增加激励电极的面积，同时使振动臂短，并且提高激发效率和降低CI值以及弯曲振动模式的压电振动芯片的小型化 。 解决方案：压电振动芯片21的振动臂23包括从臂部24延伸到振动臂的尖端处的宽心轴部25的区域的第一槽部27， 在其内表面上形成第一激励电极29。 主轴部分包括与第一凹槽部分平行的第二底部凹槽部分28，其在从臂部分24的侧面沿着宽度突出的部分26的每个顶表面和反面上。 与第一槽部相邻的第二槽部的侧面与臂部的侧面无级地连续形成，第二激励电极30在侧面和侧面 的手臂部分。 版权所有（C）2011，JPO＆INPIT
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50.发明专利
公开(公告)号：JP4561337B2
公开(公告)日：2010-10-13
申请号：JP2004345782
申请日：2004-11-30
Applicant: エプソントヨコム株式会社
Inventor： 国人 山中
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