公开(公告)号：TWI606231B

公开(公告)日：2017-11-21

申请号：TW105129166

申请日：2016-09-08

Applicant: 閤康生物科技股份有限公司 ,  BIO MATERIALS ANALYSIS TECHNOLOGY INC.

Inventor： 陳弘仁 ,  CHEN, HUNG-JEN

IPC: G01N1/36

CPC classification number: G01N1/36 ,  G01N2001/364 ,  G01N2001/366 ,  H01J37/26

公开(公告)号：TWI600890B

公开(公告)日：2017-10-01

申请号：TW105106089

申请日：2016-03-01

Applicant: 閤康生物科技股份有限公司 ,  BIO MATERIALS ANALYSIS TECHNOLOGY INC.

Inventor： 張平 ,  CHANG, PIN ,  陳弘仁 ,  CHEN, HUNG-JEN

IPC: G01N1/28 ,  G01N35/00

公开(公告)号：EP4027128A1

公开(公告)日：2022-07-13

申请号：EP21217945.1

申请日：2021-12-28

Applicant: Materials Analysis Technology Inc.

Inventor： WU, Chien-Wei ,  CHU, Keng-Chieh ,  FANG, Yung-Sheng ,  WU, Chun-Wei ,  CHEN, Hung-Jen

IPC: G01N1/28

Abstract: A physical analysis method, a sample for physical analysis (M1, M2) and a preparing method thereof are provided. The preparing method of the sample for physical analysis (M1, M2) includes: providing a sample to be inspected (1); and forming a contrast enhancement layer (2) on a surface of the sample to be inspected (1). The contrast enhancement layer (2) includes a plurality of first material layers (21) and a plurality of second material layers (21, 22) stacked upon one another. The first material layer and the second material layer are made of different materials. Each one of the first and second material layers (21, 22) has a thickness that does not exceed 0.1 nm. In an image captured by an electron microscope, a difference between an average grayscale value of a surface layer image of the sample to be inspected (1) and an average grayscale value of an image of the contrast enhancement layer (2) is at least 50.