公开(公告)号：WO2007013806A1

公开(公告)日：2007-02-01

申请号：PCT/NL2006/000393

申请日：2006-07-28

Applicant: OTB GROUP B.V. ,  BIJKER, Martin Dinant ,  HOEX, Bram ,  KESSELS, Wilhelmus Mathijs Marie ,  VAN DE SANDEN, Mauritius Cornelis Maria

Inventor： BIJKER, Martin Dinant ,  HOEX, Bram ,  KESSELS, Wilhelmus Mathijs Marie ,  VAN DE SANDEN, Mauritius Cornelis Maria

IPC: H01L31/18 ,  H01L31/0216 ,  H01L21/316 ,  H01L21/3105 ,  C23C16/40 ,  C23C16/56

CPC classification number: C23C16/402 ,  C23C16/513 ,  C23C16/56 ,  H01L21/3105 ,  H01L21/31604 ,  H01L31/1868 ,  Y02E10/50 ,  Y02P70/521

Abstract: A method for passivating at least a part of a surface of a semiconductor substrate, wherein at least one layer comprising at least one SiOx layer is realized on said part of the substrate surface by: - placing the substrate (1) in a process chamber (5); - maintaining the pressure in the process chamber (5) at a relatively low value; - maintaining the substrate (1) at a specific substrate treatment temperature; - generating a plasma (P) by means of at least one plasma source (3) mounted on the process chamber (5) at a specific distance (L) from the substrate surface; - contacting at least a part of the plasma (P) generated by each source (3) with the said part of the substrate surface; and - supplying at least one precursor suitable for SiOx realization to the said part of the plasma (P); wherein at least the at least one layer realized on the substrate (1) in subjected to a temperature treatment in a gas environment.

Abstract translation: 一种用于钝化半导体衬底的表面的至少一部分的方法，其中通过以下步骤在衬底表面的所述部分上实现包括至少一个SiO x层的至少一个层： - 将衬底（1）放置在处理室 5）; - 将处理室（5）中的压力保持在相对较低的值; - 将衬底（1）保持在特定衬底处理温度; - 借助于与所述衬底表面相距一定距离（L）安装在所述处理室（5）上的至少一个等离子体源（3）产生等离子体（P） - 将由每个源（3）产生的等离子体（P）的至少一部分与所述衬底表面的所述部分接触; 和 - 向所述等离子体（P）的所述部分供应至少一种适用于SiOx实现的前体; 其中在气体环境中至少在所述基板（1）上实现的所述至少一个层进行温度处理。

公开(公告)号：WO2005111260A1

公开(公告)日：2005-11-24

申请号：PCT/NL2005/000375

申请日：2005-05-18

Applicant: OTB GROUP B.V. ,  HOMPUS, Michael, Adrianus, Theodorus ,  SWINKELS, Wilhelmus, Godefridus, Johannes, Paulus

Inventor： HOMPUS, Michael, Adrianus, Theodorus ,  SWINKELS, Wilhelmus, Godefridus, Johannes, Paulus

IPC: C23C14/26

CPC classification number: C23C14/26 ,  H01L51/5088 ,  H01L51/56

Abstract: A method for depositing a layer of an active substance on a substrate (2), wherein the active substance is chosen from the group of substances consisting of an alkali metal, an alkali earth metal, a lanthanide, or an alloy or intermetallic mixture of one or more of the said alkali metal, alkali earth metal or lanthanide elements, characterized in that the active substance is bound in a compound which is stable at room temperature, wherein the compound is incorporated in a wire (4), which wire forms a connection between two electrodes (5,6), wherein, for releasing the active substance, a current (7) is fed through the wire, so that it heats up to a temperature at which the compound decomposes and the active substance evaporates and then precipitates on the substrate. Further, an apparatus is described for carrying out the method.

Abstract translation: 一种在基材（2）上沉积活性物质层的方法，其中活性物质选自由碱金属，碱土金属，镧系元素或合金或金属间化合物组成的一组物质 或更多的所述碱金属，碱土金属或镧系元素，其特征在于所述活性物质结合在室温下稳定的化合物中，其中所述化合物结合在电线（4）中，所述电线形成连接 在两个电极（5,6）之间，其中，为了释放活性物质，电流（7）通过电线进料，使其加热至化合物分解的温度，活性物质蒸发，然后沉淀 底物。 此外，描述了用于执行该方法的装置。

公开(公告)号：WO2005026405A1

公开(公告)日：2005-03-24

申请号：PCT/NL2004/000598

申请日：2004-08-26

Applicant: OTB GROUP B.V. ,  LINDELAUF, Paul, August, Marie ,  EVERS, Marinus, Franciscus, Johanus

Inventor： LINDELAUF, Paul, August, Marie ,  EVERS, Marinus, Franciscus, Johanus

IPC: C23C14/04

CPC classification number: C23C14/042 ,  C23C14/568

Abstract: A system for treating substrates, provided with at least one processing chamber (1) to treat at least one substrate (5) with a vacuum process, wherein said processing chamber (1) is provided with a substrate access (13) closable by a closing body (15), wherein the system is provided with a conveying device (8) which is at least arranged to move said closing body (15), wherein said conveying device (8) is arranged to convey a mask (4), intended to at least partly cover said substrate (5) during said vacuum process, at least between a position outside the processing chamber (1) and a position inside the processing chamber (1). It is advantageous when at least said substrate holder (2) is provided with positioning means (50) to position the substrate holder (2) and the mask (4) relative to each other. The invention further provides a use of such a system.

Abstract translation: 一种用于处理基板的系统，其具有设置有至少一个处理室（1）以用真空处理来处理至少一个基板（5），其中所述处理室（1）设置有可通过闭合关闭的基板通路（13） 主体（15），其中所述系统设置有至少布置成移动所述关闭体（15）的输送装置（8），其中所述输送装置（8）布置成输送面罩（4），所述面罩 至少在所述真空处理期间至少部分地覆盖所述基板（5），至少在处理室（1）外部的位置与处理室（1）内的位置之间。 当至少所述衬底保持器（2）设置有相对于彼此定位衬底保持器（2）和掩模（4）的定位装置（50）时，这是有利的。 本发明进一步提供了这种系统的用途。

公开(公告)号：WO2004018179A1

公开(公告)日：2004-03-04

申请号：PCT/NL2003/000580

申请日：2003-08-13

Applicant: OTB GROUP B.V. ,  Briër, Peter ,  DU PAU, Cornelis ,  EVERS, Marinus, Franciscus, Johanus

Inventor： Briër, Peter ,  DU PAU, Cornelis ,  EVERS, Marinus, Franciscus, Johanus

IPC: B29C45/50

CPC classification number: B29C45/5008 ,  B29C2045/5032 ,  B29C2045/5072

Abstract: An injection molding apparatus (1) provided with a screw (2) which extends in a cylinder (3), which cylinder is provided with a filling opening and with a nozzle, the screw (2) being connected with a drive shaft (7) accommodated in a drive housing (6), which drive shaft (7) is in driving communication with a first and a second electric drive unit (8, 9), the drive shaft (7) being provided with a first thread (10), engaged by the first drive unit (9), and with a second thread (12) whose pitch deviates from that of the first thread, the second thread (12) being engaged by the second drive unit (9), while the control (14), for the purpose of the regulation based on force feedback, measures as an input signal the electric current consumed by the first drive unit (8) and the electric current consumed by the second drive unit (9), the control (14) being arranged for regulating on the basis thereof the filling pressure according to a desired pattern.

Abstract translation: 一种注射成型装置（1），其具有在气缸（3）中延伸的螺杆（2），该气缸设有填充开口和喷嘴，螺杆（2）与驱动轴（7）连接， 所述驱动轴（7）与第一和第二电驱动单元（8,9）驱动连通，所述驱动轴（7）设置有第一螺纹（10），所述驱动轴 由第一驱动单元（9）接合，并且第二螺纹（12）的间距偏离于第一螺纹，第二螺纹（12）由第二驱动单元（9）接合，而控制（14） ），为了基于力反馈的调节目的，测量作为第一驱动单元（8）消耗的电流和由第二驱动单元（9）消耗的电流的输入信号的输入信号，控制（14） 布置成根据所需图案调节填充压力。

公开(公告)号：WO2008060148A2

公开(公告)日：2008-05-22

申请号：PCT/NL2007/050561

申请日：2007-11-13

Applicant: OTB GROUP B.V. ,  KANT, Cornelius Hendrik ,  BIJKER, Martin Dinant

Inventor： KANT, Cornelius Hendrik ,  BIJKER, Martin Dinant

CPC classification number: B05B7/0012 ,  H01L21/225

Abstract: Atomizer for atomizing a doping solution for treating a substrate therewith, wherein the atomizer comprises an atomizing element with a liquid compartment for receiving the doping solution to be atomized, wherein the atomizing element is an atomizing element functioning on the basis of an air flow. The invention further relates to a method for treating a substrate, wherein the method comprises the following steps: - providing a substrate; - atomizing a doping solution; - supplying the atomized doping solution to the substrate to treat the substrate therewith, wherein the doping solution is atomized by passing an air flow over the doping solution.

Abstract translation: 用于雾化用于处理衬底的掺杂溶液的雾化器，其中所述雾化器包括具有用于接收待雾化的掺杂溶液的液体隔室的雾化元件，其中所述雾化元件是基于空气流动起作用的雾化元件。 本发明还涉及一种处理基材的方法，其中该方法包括以下步骤： - 提供基材; - 雾化掺杂溶液; - 将所述雾化的掺杂溶液供应到所述衬底以用于处理所述衬底，其中所述掺杂溶液通过使空气流通过所述掺杂溶液而被雾化。

公开(公告)号：WO2007067031A1

公开(公告)日：2007-06-14

申请号：PCT/NL2005/000845

申请日：2005-12-07

Applicant: OTB Group B.V. ,  SMITS, Rutger Willem Frans ,  EVERS, Marinus Franciscus Johannes

Inventor： SMITS, Rutger Willem Frans ,  EVERS, Marinus Franciscus Johannes

IPC: C23C14/50 ,  B05B13/02

CPC classification number: C23C16/4587 ,  B05B13/0264

Abstract: A system and method for coating relatively large products, such as for instance plastic car windows, wherein the system is provided with: - carriers for the products; - a transport rail along which the product carriers are movable; - a conditioned space bounded by space walls in which the transport rail extends and in which the product carriers are movable; - at least one lock via which a product carrier can be brought into the conditioned space and can be removed from the conditioned space, respectively; - at least one process chamber which is part of the conditioned space; - at least one plasma source of the cascade type, which plasma source is arranged for applying a coating to a product which is present in a said process chamber; and wherein the at least one product carrier has an adjustable length.

Abstract translation: 一种用于涂覆相对大的产品的系统和方法，例如塑料车窗，其中该系统具有： - 用于产品的载体; - 运输轨道，产品承运人可沿其移动; - 由空间墙界定的空调空间，运输轨道延伸在其中，产品承载件可移动; - 至少一个锁，通过该锁可将产品载体分别带入调节空间并可从调节空间移除; - 作为调节空间的一部分的至少一个处理室; - 至少一个级联类型的等离子体源，所述等离子体源布置用于将涂层施加到存在于所述处理室中的产品; 并且其中所述至少一个产品载体具有可调整的长度。

公开(公告)号：WO2007067030A1

公开(公告)日：2007-06-14

申请号：PCT/NL2005/000844

申请日：2005-12-07

Applicant: OTB Group B.V. ,  SMITS, Rutger Willem Frans ,  EVERS, Marinus Franciscus Johannes

Inventor： SMITS, Rutger Willem Frans ,  EVERS, Marinus Franciscus Johannes

IPC: B05B15/12

CPC classification number: C23C16/54 ,  C23C16/4587

Abstract: A system and process for coating relatively large substrates (P) , for example plastic windscreens, whereby the system comprises: - carriers (6) for the substrates; - a transportrail (21) along which carriers are transportable; - a conditioned spaced (20) delimited by walls (19) where the transportrail goes through and wherein the carriers are transportable; - at least one lock (8, 15) which a carrier crosses before entering the conditioned space and after leaving the conditioned space; - at least one process room (11, 12) that is part of the conditioned space; - at least one source of deposit (33) , which source is suitable for depositing a coating on a substrate present in the process room; - at least one shield (17) with a shield carrier (7) that is transportable in and out of the process room via the at least one lock along the transportrail.

Abstract translation: 用于涂覆相对大的基材（P）的系统和方法，例如塑料挡风玻璃，由此该系统包括： - 用于基材的载体（6）; - 运输轨道（21），运输船可运输; - 由隔墙（19）限定的有条件的间隔（20），其中运输轨道穿过，并且其中载体是可运输的; - 至少一个锁（8,15），其在进入调节空间之前和离开调节空间之后跨越; - 作为调节空间的一部分的至少一个处理室（11,12）; - 至少一个沉积源（33），该源适于在存在于处理室中的衬底上沉积涂层; - 至少一个具有屏蔽载体（7）的屏蔽件（17），所述屏蔽载体（7）可沿着所述运送轨道经由所述至少一个锁运输进出所述处理室。

公开(公告)号：WO2006071106A1

公开(公告)日：2006-07-06

申请号：PCT/NL2004/000916

申请日：2004-12-27

Applicant: OTB GROUP B.V. ,  CAMBRIDGE DISPLAY TECHNOLOGY LIMITED ,  DINGS, Franciscus, Cornelius ,  PENNINGS, Remco, Leonardus, Johannes, Robertus ,  JONGMAN, Jan ,  JERRAM, Paul ,  COATS, Stephen

Inventor： DINGS, Franciscus, Cornelius ,  PENNINGS, Remco, Leonardus, Johannes, Robertus ,  JONGMAN, Jan ,  JERRAM, Paul ,  COATS, Stephen

IPC: H01L51/52

CPC classification number: H01L51/5237 ,  H01L27/1214 ,  H01L27/3283 ,  H01L27/3288 ,  H01L51/5253 ,  H01L51/56

Abstract: Method for manufacturing an organic light emitting device or a blank for forming therefrom an organic light emitting device as well as such a OLED or blank, the organic light emitting device having a light emitting area with two opposite first sides and two opposite second sides, the method comprising at least the following steps: providing a substrate; depositing and partly removing a layer of transparent conductive material on the substrate for forming parallel anode lines which extend between the first sides; depositing and partly removing at least one conductive layer for forming contacts which are connected anode lines; wherein a photoresist layer is deposited so that it fully extends over contacts adjacent the at least one second side except for at least one contact position per cathode line, via which an electric contact between a respective cathode line to be formed and a respective contact is established.

Abstract translation: 用于制造有机发光器件或用于形成有机发光器件的坯料以及这种OLED或坯料的方法，所述有机发光器件具有具有两个相对的第一侧和两个相对的第二侧的发光区域， 至少包括以下步骤：提供衬底; 在衬底上沉积和部分去除透明导电材料层，以形成在第一侧之间延伸的平行阳极线; 沉积并部分去除至少一个用于形成连接的阳极线的触点的导电层; 其中沉积光致抗蚀剂层，使得其完全延伸超过邻近所述至少一个第二侧的触点，除了每个阴极线的至少一个接触位置，通过该至少一个接触位置，要形成的相应阴极线和相应的触点之间的电接触被建立 。

公开(公告)号：WO2005048252A1

公开(公告)日：2005-05-26

申请号：PCT/NL2004/000764

申请日：2004-11-01

Applicant: OTB GROUP B.V. ,  BRIER, Peter

Inventor： BRIER, Peter

IPC: G11B7/24

CPC classification number: B29C45/376 ,  B29C45/263 ,  B29D17/005 ,  B29L2017/005

Abstract: A method, injection mold and injection molding apparatus for manufacturing an injection molded product, wherein, utilizing the same injection mold, injection molded products of a different final form are made, wherein the injection molded products of a different final form are made, wherein the injection mold bounds a mold cavity, of which cavity the shape can be varied in that at least a part of the injection mold disposes of a movable wall part, wherein operating means are provided by means of which the position of the respective movable wall part can be influenced, wherein these operating means are operated to provide in a first injection molding processing step an injection molded product having a second final form, deviating from the first final form. The invention further relates to an injection molded product obtained with the method and apparatus for manufacturing DVDs using the method.

Abstract translation: 一种用于制造注射成型产品的方法，注射模具和注射成型装置，其中，利用相同的注射模具制造不同最终形式的注射成型产品，其中制造不同最终形式的注射成型产品，其中 注射模具限定了模腔，其中腔的形状可以变化，因为注射模具的至少一部分配置有可移动的壁部分，其中提供操作装置，借助于这些操作装置，可移动壁部分的位置可以 受影响，其中这些操作装置被操作以在第一注射加工步骤中提供具有偏离第一最终形式的第二最终形式的注射成型产品。 本发明还涉及使用该方法制造DVD的方法和装置获得的注塑产品。

公开(公告)号：WO2005023510A1

公开(公告)日：2005-03-17

申请号：PCT/NL2004/000546

申请日：2004-08-02

Applicant: OTB GROUP B.V. ,  EVERS, Marinus, Franciscus, Johanus ,  HOMPUS, Michael, Adrianus, Theodorus

Inventor： EVERS, Marinus, Franciscus, Johanus ,  HOMPUS, Michael, Adrianus, Theodorus

IPC: B29C45/50

CPC classification number: B29C45/5008 ,  B29C2045/5024 ,  B29C2045/5028 ,  B29C2045/504 ,  B29C2045/5084 ,  F16H25/2247

Abstract: An injection molding apparatus (1) provided with a central control and with a screw (2) which extends in a cylinder (3), which cylinder is provided with a filing opening (4) and with a nozzle (5), the screw being drivingly connected with two controllable electric motors (8, 9) such that a movement in rotational and/or axial sense can be imposed on the screw, the driving connection comprising a number of cylindrical planetary rollers (10) accommodated for rotation in a planetary cage (7) such that the planetary rollers can be engaged from a space located radially outside the planetary cage and a space located radially within the planetary cage, the planetary cage being connected to the screw in a manner secured against rotation, while a first drive part (11) connected with a rotor (13) of the first electric motor (8), is provided with a first engaging surface facing radially inward which engages the planetary rollers from the space located radially outsid the planetary cage, while a second drive part (12), connected with a rotor (14) of the second electric motor (9) is provided with a second engaging surface facing outwards which engages the planetary rollers from a space located radially within the planetary cage.

Abstract translation: 一种注射成型设备（1），其具有中央控制器和在气缸（3）中延伸的螺杆（2），该气缸设有一个填料开口（4）和一个喷嘴（5），螺杆是 驱动地连接有两个可控电动机（8,9），使得可以在螺杆上施加旋转和/或轴向感的运动，该驱动连接件包括多个圆柱形行星辊（10），容纳在行星架 （7），使得所述行星辊可以从位于所述行星架的径向外侧的空间和位于所述行星架内径向的空间接合，所述行星齿轮架以不受旋转的方式连接到所述螺杆，同时第一驱动部 （11）与第一电动机（8）的转子（13）连接，设置有面向径向向内的第一接合表面，该第一接合表面从位于行星齿轮架外侧的空间接合行星辊，同时以秒 与第二电动机（9）的转子（14）连接的第一驱动部分（12）设置有朝向外侧的第二接合表面，该第二接合表面从位于行星齿轮架内径向的空间接合行星辊。