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公开(公告)号：KR1020140000496A
公开(公告)日：2014-01-03
申请号：KR1020120067580
申请日：2012-06-22
Applicant: 에스케이하이닉스 주식회사 , 고려대학교 산학협력단
IPC: C09K3/14 , H01L21/304
CPC classification number: C09G1/02 , B24B37/044
Abstract: The present invention relates to a polishing composition for chemical and mechanical polishing, a method for fabricating the same, and a chemical and mechanical polishing method using the polishing composition. The polishing composition according to an embodiment of the present invention comprises: nanodiamond particles as water based polishing compositions for flattening metal compound thin films which include two or more components of different kinds of metal atoms; and poly(sodium 4-styrenesulfonate) for dispersion stabilizing the nanodiamond particles. In the polishing composition, the nanodiamond particles have non-hydrophilic surfaces and PSS effectively stabilizes the same in order to suppress coagulation of the nanodiamond particles and to maintain enhanced dispersibility so that the polishing composition can obtain enhanced polishing properties for the metal compound thin films using the nanodiamond particles which are nano-scale superhard abrasives.
Abstract translation: 本发明涉及一种用于化学和机械抛光的抛光组合物，其制造方法和使用该抛光组合物的化学和机械抛光方法。 根据本发明实施方案的抛光组合物包括：纳米金刚石颗粒作为水性抛光组合物，用于使包含两种或更多种不同种类的金属原子的组分的金属化合物薄膜平坦化; 和用于分散稳定纳米金刚石颗粒的聚（4-苯乙烯磺酸钠）。 在抛光组合物中，纳米金刚石颗粒具有非亲水性表面，并且PSS有效地稳定其，以抑制纳米金刚石颗粒的凝结并保持增强的分散性，使得抛光组合物可以获得对于金属化合物薄膜的增强的抛光性能，所述金属化合物薄膜使用 纳米金刚石颗粒是纳米级超硬磨料。
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公开(公告)号：KR101341807B1
公开(公告)日：2013-12-17
申请号：KR1020120046276
申请日：2012-05-02
Applicant: 고려대학교 산학협력단
IPC: H01L21/8247 , H01L27/115
Abstract: 본발명은상변화메모리소자의제조방법에관한것으로, 보다구체적으로는하부전극상에콘택플러그가형성된반도체기판이준비되는기판준비단계; 상기콘택플러그를포함한상기반도체기판상에절연막을형성하는절연막형성단계; 상기콘택플러그및 절연막상에상변화막을형성하는상변화막형성단계; 상기상변화막의표면을질소로도핑하는질소도핑단계; 상기질소가도핑된상변화막의표면을연마하는연마단계; 및상기상변화막의상부에상부전극을형성하는전극형성단계;를포함한다. 이러한구성에의해, 본발명의상변화메모리소자의제조방법은 GST막의표면에질소를도핑한후, 화학적또는기계적연마공정을수행함으로써, 서로다른화합물로이루어진 GST막을용이하게평탄화하여 GST막의표면조도를향상시킬수 있는효과가있다.
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公开(公告)号：KR1020130093393A
公开(公告)日：2013-08-22
申请号：KR1020120014962
申请日：2012-02-14
Applicant: 현대자동차주식회사 , 고려대학교 산학협력단
CPC classification number: B05D3/067 , C08K3/04 , C09D183/04
Abstract: PURPOSE: A manufacturing method of a resin coating agent, using diamond particle is provided to offer scratch resistance, weather resistance, UV resistance, and staining resistance by dispersed diamond particle. CONSTITUTION: A manufacturing method of a resin coating agent, using diamond particle comprises the steps of: dispersing nano diamond powder in a solvent by using bead milling; reacting the solution obtained by the previous step with a silane coupling agent having acrylate group, amine group, or mercapto propyl group as an organic functional group; and mixing the silane-added solution obtained by the previous step with monomer, oligomer compound, or silane precursor. The solvent above is C1-3 lower alcohol.
Abstract translation: 目的：提供使用金刚石颗粒的树脂涂覆剂的制造方法，以通过分散的金刚石颗粒提供耐刮擦性，耐候性，耐紫外线性和耐污染性。 构成：使用金刚石颗粒的树脂涂覆剂的制造方法包括以下步骤：通过使用珠磨将纳米金刚石粉末分散在溶剂中; 将由前述步骤获得的溶液与具有丙烯酸酯基，胺基或巯基丙基的硅烷偶联剂作为有机官能团反应; 并将通过前一步骤获得的加入硅烷的溶液与单体，低聚物化合物或硅烷前体混合。 上述溶剂是C1-3低级醇。
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公开(公告)号：KR1020130081599A
公开(公告)日：2013-07-17
申请号：KR1020120002668
申请日：2012-01-09
Applicant: 에스케이하이닉스 주식회사 , 고려대학교 산학협력단
IPC: C09K3/14 , H01L21/304
CPC classification number: C09K13/00 , C09G1/02 , C09K3/1463 , H01L21/30625 , H01L21/3212
Abstract: PURPOSE: An abrasive composition including multicomponent-based metal elements applied to a nonvolatile memory device and performing an chemical mechanical polishing process that is economic and reliable, and a chemical and mechanical planarization method of a substrate having a surface on which a multicomponent-based metal compound thin film is formed are provided. CONSTITUTION: An abrasive composition is for planarization of a metal compound thin film including metal elements of two or more different types. The abrasive composition has abrasive particles and nano-scale particles having a particle size smaller than that of the abrasive particles and a polyhedral structure including a bond of silicon and oxygen. The abrasive particles includes one of alumina (AlOx), ceria (CeOx), zirconia (ZrOx), titania (TiOx), germania (GeOx), a chromium oxide (CrOx), and a manganese oxide (MnOx) and silica (SiOx) or a combination thereof. A size of the abrasive particles has an average size of 10 nm to 150 nm.
Abstract translation: 目的：一种包含应用于非易失性存储装置的多组分金属元素并进行经济可靠的化学机械抛光工艺的磨料组合物，以及具有表面的基材的化学和机械平面化方法，其中多组分基金属 提供复合薄膜。 构成：磨料组合物用于使包含两种或多种不同类型的金属元素的金属化合物薄膜平坦化。 研磨剂组合物具有研磨颗粒和粒径小于磨料颗粒的纳米尺度颗粒和包括硅和氧键的多面体结构。 研磨颗粒包括氧化铝（AlO x），二氧化铈（CeO x），氧化锆（ZrO x），二氧化钛（TiO x），氧化锗（GeO x），氧化铬（CrO x）和氧化锰（MnO x）和二氧化硅（SiO x） 或其组合。 研磨颗粒的尺寸具有10nm至150nm的平均尺寸。
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公开(公告)号：KR1020120111467A
公开(公告)日：2012-10-10
申请号：KR1020110029951
申请日：2011-03-31
Applicant: 고려대학교 산학협력단
CPC classification number: G01N27/3278
Abstract: PURPOSE: A nano-wire in which diamonds are deposited and a manufacturing method thereof are provided to have high specific surface area suitable for the bio-sensor. CONSTITUTION: A nano-wire in which diamonds are deposited covers outer circumference of the nano-wire. The nano-wire is coated with first polymers having polarity. The diamond particle is coated with second polymers having opposite polarity from the first polymers. A method of pre-treating the nano-wire using static charge self-assembly method of the nano-diamond particle comprises the following steps: synthesizing nano-wires; coating first polymers having polarity on the outer circumference of the nano-wire; coating the surface of the nano-diamond particle with the second polymers having the opposite polarity from the static charge of the nano-diamond particle; and dipping the nano-wire into a solution in which the nano-diamond particle is dispersed. [Reference numerals] (AA,BB) Nano-diamond particle chargeB; (CC,DD) Nano-diamond particle chargeA; (EE,FF) Carbon nano-tube chargeA
Abstract translation: 目的：提供其中沉积有金刚石的纳米线及其制造方法以具有适于生物传感器的高比表面积。 构成：其中沉积有金刚石的纳米线覆盖纳米线的外周。 纳米线涂覆有具有极性的第一种聚合物。 金刚石颗粒用与第一聚合物相反极性的第二聚合物涂覆。 使用纳米金刚石颗粒的静电自组装方法对纳米线进行预处理的方法包括以下步骤：合成纳米线; 涂覆在纳米线的外周上具有极性的第一聚合物; 用具有与纳米金刚石颗粒的静电荷相反的极性的第二聚合物涂覆纳米金刚石颗粒的表面; 并将纳米线浸入其中分散有纳米金刚石颗粒的溶液中。 （参考号）（AA，BB）纳米金刚石颗粒电荷B; （CC，DD）纳米金刚石颗粒电荷A; （EE，FF）碳纳米管电荷
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Patent Agency Ranking
公开(公告)号：KR101188172B1
公开(公告)日：2012-10-05
申请号：KR1020100048934
申请日：2010-05-26
Applicant: 고려대학교 산학협력단
IPC: G01N27/327 , G01N33/66 , G01N27/417
Abstract: 본 발명은 금속 나노입자가 증착된 그래핀 시트의 다이아몬드 박막 전극을 이용한 전기화학적 바이오센서 및 그 제조방법에 관한 것이다. 본 발명에 따른 바이오센서는, 기판; 효소 반응이 발생되는 작업전극 및 상기 작업전극과의 전기적 출력 차이를 검출하기 위한 상대전극을 포함하는 전기화학적 바이오센서로서, 상기 작업전극은, 불순물 도핑된 다이아몬드층; 상기 불순물 도핑된 다이아몬드층 상에 형성된 그래핀층; 및 상기 그래핀층 상에 형성된 금속 나노입자층을 포함하는 것이 특징이다.
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公开(公告)号：KR1020100094907A
公开(公告)日：2010-08-27
申请号：KR1020090014098
申请日：2009-02-19
Applicant: 고려대학교 산학협력단
CPC classification number: Y02P70/56 , H01M8/0228 , H01M8/0206 , H01M8/0226 , H01M8/0234 , H01M8/0243 , H01M8/0245 , H01M8/0258 , Y02E60/50
Abstract: PURPOSE: A separator for a fuel cell is provided to secure corrosion resistance and electrical conductivity by forming a surface layer into a polymer composite in which a conductive additive is dispersed and to reinforce adhesive force of a carbon paper layer by forming a conductive adhesive layer in advance. CONSTITUTION: A separator for a fuel cell comprises: a conductive substrate(110); a conductive adhesive layer(120) which is formed on the surface of the conductive substrate; a carbon paper layer(130) which is formed on the conductive adhesive layer; and a surface layer(140) which is formed on the carbon paper layer and is comprised of a polymer composite in which a conductive additive is dispersed.
Abstract translation: 目的：提供一种用于燃料电池的隔板，用于通过在其中分散有导电添加剂的聚合物复合物中形成表面层以确保耐腐蚀性和导电性，并通过形成导电粘合剂层来增强碳纸层的粘附力 提前。 构成：用于燃料电池的隔板包括：导电衬底（110）; 形成在所述导电性基板的表面上的导电性粘接剂层（120） 形成在导电性粘合剂层上的碳纸层（130） 以及形成在碳纸层上并由其中分散有导电添加剂的聚合物复合材料构成的表面层（140）。
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公开(公告)号：KR1020090006964A
公开(公告)日：2009-01-16
申请号：KR1020070070467
申请日：2007-07-13
Applicant: 고려대학교 산학협력단
CPC classification number: B29K2503/04 , Y02P70/56
Abstract: A separator for a fuel cell is provided to secure corrosion resistance and electric conductance, to improve bend strength and to facilitate the manufacture with a compression / molding process. A separator for a fuel cell(10) comprises a substrate(110) having conductivity, a carbon nanotube layer(120) formed on the surface of the substrate and a composite layer(130). The composite layer is formed from a composite having a conductive additive and a polymer and covers the substrate formed with a carbon nanotube layer.
Abstract translation: 提供用于燃料电池的隔板以确保耐腐蚀性和电导率，以提高弯曲强度并且有助于通过压缩/模制工艺制造。 用于燃料电池（10）的隔板包括具有导电性的基板（110），形成在基板表面上的碳纳米管层（120）和复合层（130）。 复合层由具有导电添加剂和聚合物的复合体形成，并覆盖形成有碳纳米管层的基板。
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公开(公告)号：KR20180003096A
公开(公告)日：2018-01-09
申请号：KR20160082482
申请日：2016-06-30
Applicant: 고려대학교 산학협력단
CPC classification number: C04B35/565 , B23K26/123 , B23K26/359 , C04B35/5611 , C04B35/5626 , C04B35/563 , C04B41/0036 , C04B41/91
Abstract: 본발명은탄화물세라믹스의표면에딤플형태의패턴을형성한후에탄소막을형성함으로써내마모성, 기재와의밀착력및 마찰특성등이향상된탄소막을제조하는방법및 이에의해제조된탄소막에관한것이다. 본발명에따라제조된딤플패턴을포함하는탄소막은고분자물질의코팅혹은탄소계열물질의코팅과같이다양한분야에적용이가능하며, 특히우수한기계적특성이요구되는슬라이딩부품, 기계밀봉(mechanical seal), 피스톤링 및압축기의베인과같은기계부품의코팅에유용하게사용될수 있다.
Abstract translation: 公开了一种用凹痕图案制造碳化物衍生碳层的方法。 该方法包括在碳化物陶瓷材料的表面上形成凹痕图案并在其上形成碳化物衍生碳层。 还公开了通过该方法产生的具有凹痕图案的碳化物衍生碳层。 具有凹痕图案的碳化物衍生碳层具有高耐磨性，与机器部件的良好附着力以及优异的摩擦特性。 碳化物衍生碳层可以应用于各种领域，例如碳化物涂层和硬质合金材料的涂层。 特别地，碳化物衍生碳层适用于需要优异机械性能的机器部件（例如，滑动部件，机械密封件，活塞环和压缩机叶片）的涂层。
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公开(公告)号：KR101617617B1
公开(公告)日：2016-05-03
申请号：KR1020140014122
申请日：2014-02-07
Applicant: 고려대학교 산학협력단
Abstract: 본발명은붕소코팅다이아몬드가결합된폐수처리용전극및 이의제조방법에관한것이다. 본발명에따른붕소코팅다이아몬드가결합된폐수처리용전극및 이의제조방법에따라제조된전극은비표면적이보다넓다. 그러므로본 발명에따른폐수처리용전극을사용하여폐수처리를하게되면폐수처리의효과가월등히향상되게된다. 특히 TOC 및 COD 등의수질오염측정지표가기존에사용되던전극에비해월등히향상되게된다.
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