公开(公告)号：KR1020010045941A

公开(公告)日：2001-06-05

申请号：KR1019990049474

申请日：1999-11-09

Applicant: 삼성전자주식회사

Inventor： 정승태

IPC: H01L21/68

Abstract: PURPOSE: A wafer transfer apparatus for a semiconductor diffusion process is provided to extend the lifetime of the overall transfer apparatus and to stably transfer a wafer, by prevent the transfer apparatus from being corroded by residue gas including corrosive component. CONSTITUTION: An upper transfer unit(10) has a guide hole. A rail part(30) having a rail groove(32) in a position opposite to the guide hole is coupled to a lower transfer unit(20). A transfer unit(40) is horizontally transferred along the rail groove of the guide hole and the rail part, settled on the upper transfer unit. A protection pipe(50) is coupled to a portion of the transfer unit. A plurality of boats(60) are serially built inside the protection pipe. A plurality of wafers(70) are mounted on the boat. A coating layer(80) is adhered to the surface of the rail groove of the rail part of the lower transfer unit to prevent the surface of the rail groove from being oxidized by corrosive reaction gas induced through the guide hole of the upper transfer unit.

Abstract translation: 目的：提供一种用于半导体扩散处理的晶片传送装置，以通过防止转印装置被含有腐蚀性成分的残余气体腐蚀而延长整个转印装置的寿命并稳定地转印晶片。 构成：上转印单元（10）具有引导孔。 具有与引导孔相对的位置的轨道槽（32）的轨道部分（30）联接到下转印单元（20）。 传送单元（40）沿着引导孔的轨道槽和轨道部分水平传递，沉积在上传送单元上。 保护管（50）联接到传送单元的一部分。 多个船只（60）串联地安装在保护管内。 多个晶片（70）安装在船上。 涂覆层（80）粘附到下转印单元的轨道部分的轨道槽的表面，以防止轨道槽的表面被通过上转印单元的引导孔感应的腐蚀性反应气体氧化。

公开(公告)号：KR1020010029131A

公开(公告)日：2001-04-06

申请号：KR1019990041770

申请日：1999-09-29

Applicant: 삼성전자주식회사

Inventor： 유장훈 ,  서중언 ,  조건호 ,  정승태 ,  이철우

IPC: G11B7/09

Abstract: PURPOSE: An optical pick-up device is provided to detect a relative slop between the recording media and an object lens without additional tilt sensor, therefore, reducing the number of components. CONSTITUTION: A light source(35) generates light to radiate the light. An optical path converter(50) converts a processing path of an incident light. An object lens(70) focuses the incident light on a recording media(30). A main optical detector(81) is reflected from a record surface of the recording media(30), and receives the incident light via the object lens(70) and the optical path converter(50) to detect an information signal and an error signal. An object lens location detector detects a moving capacity of the object lens(70). A slope detector calculates a signal receiving the reflected light and a signal inputted from the object lens location detector, and detects a relative slope for the object lens(70) of the recording media(30). A slope optical detector(83) is reflected from the protecting layer surface to receive the incident light via the object lens(70) and the optical path converter(50), and has many dividing boards that perform a photoelectric conversion and are arranged to a tangential and a semidiameter direction of the recording media(30). A slop detecting circuit(100) receives detection signals of each dividing board and an object lens location signal, and detects a slope of the recording media(30) compensated an off-set according to a movement of the object lens(70).

Abstract translation: 目的：提供一种光学拾取装置，用于检测记录介质和物镜之间的相对斜率，无需附加的倾斜传感器，因此减少了部件数量。 构成：光源（35）产生光以照射光。 光路转换器（50）转换入射光的处理路径。 物镜（70）将入射光聚焦在记录介质（30）上。 主光学检测器（81）从记录介质（30）的记录表面反射，并通过物镜（70）和光路转换器（50）接收入射光，以检测信号信号和误差信号 。 物镜位置检测器检测物镜（70）的移动能力。 倾斜检测器计算接收反射光的信号和从物镜位置检测器输入的信号，并检测记录介质（30）的物镜（70）的相对斜率。 倾斜光学检测器（83）从保护层表面反射，以经由物镜（70）和光路转换器（50）接收入射光，并且具有执行光电转换的多个分隔板， 切线和记录介质（30）的半径方向。 倾斜检测电路（100）接收每个分割板和物镜位置信号的检测信号，并且根据物镜（70）的运动来检测补偿了偏移的记录介质（30）的斜率。

公开(公告)号：KR1020010029128A

公开(公告)日：2001-04-06

申请号：KR1019990041767

申请日：1999-09-29

Applicant: 삼성전자주식회사

Inventor： 유장훈 ,  조건호 ,  정승태 ,  이철우 ,  정종삼 ,  신동호

IPC: G11B7/09

CPC classification number: G11B7/13922 ,  G11B7/1374 ,  G11B2007/0006

Abstract: PURPOSE: An objective lens for high density of optical focusing is provided to maintain an operation distance with other device as maintaining high numerical apertures, so as to increase a recording density. CONSTITUTION: An objective lens(155) for high density of optical focusing comprises as follows. The first transmitter(156) emits and transmits an incident light. The first reflector(157) is arranged opposite to the first transmitter(156), and emits/reflects the incident light. The second reflector(158) is formed around the first transmitter(156), and focuses light reflected from the first reflector(157). The second transmitter(159) refracts and transmits the focused light of the second reflector(158). The second transmitter(159) of the objective lens(155) is located opposite to an optical disk(100). An operation distance between the second transmitter(159) and the optical disk(100) has a bigger value than an operation distance of a hemisphere-typed lens.

Abstract translation: 目的：提供高密度光学聚焦的物镜，以保持与其他设备的操作距离，以保持高数值孔径，从而提高记录密度。 构成：用于高密度光学聚焦的物镜（155）包括如下。 第一发射器（156）发射并透射入射光。 第一反射器（157）布置成与第一发射器（156）相对，并且发射/反射入射光。 第二反射器（158）围绕第一发射器（156）形成，并且聚焦从第一反射器（157）反射的光。 第二发射器（159）折射并透射第二反射器（158）的聚焦光。 物镜（155）的第二发射器（159）位于与光盘（100）相对的位置。 第二发送器（159）和光盘（100）之间的操作距离比半球型镜头的操作距离大。

公开(公告)号：KR1020000066820A

公开(公告)日：2000-11-15

申请号：KR1019990014192

申请日：1999-04-21

Applicant: 삼성전자주식회사

Inventor： 이철우 ,  신동호 ,  진대제 ,  정승태 ,  조건호 ,  유장훈

IPC: G11B7/08

Abstract: PURPOSE: A concentration optical system for generating a near field is to minimize a size of a light spot to facilely to increase a recording density without changing a shape and the quality of a concentration optical system. CONSTITUTION: A concentration optical system for generating a near field comprises a first surface having an inner portion(301) for refracting an incident light beam and an outer portion(303) for re-reflecting the reflected light beam, and a second surface having a curved portion(305) for reflecting the light beam refracted in the inner portion of the first surface to the outer portion, and a concentrating portion(307) for concentrating the light beam reflected on the outer portion to from the near field, wherein a concentration angle of the light concentrated on the concentrating portion is increased according to a curvature of the curved portion. In the system, the curved portion of the second surface is formed into a convex lens type. A light spot by the system has a size of 0.15 micron meter.

Abstract translation: 目的：用于产生近场的浓度光学系统是为了最小化光点的尺寸以便容易地增加记录密度，而不改变浓度光学系统的形状和质量。 构成：用于产生近场的集中光学系统包括具有用于折射入射光束的内部部分（301）和用于重新反射反射光束的外部部分（303）的第一表面，以及具有 用于将在第一表面的内部部分折射的光束反射到外部的弯曲部分（305），以及用于将从外部部分反射的光束聚集到近场的聚光部分（307），其中浓度 集中在集中部分上的光的角度根据弯曲部分的曲率而增加。 在该系统中，第二表面的弯曲部分形成为凸透镜型。 该系统的光斑尺寸为0.15微米。

公开(公告)号：KR1020000061708A

公开(公告)日：2000-10-25

申请号：KR1019990010962

申请日：1999-03-30

Applicant: 삼성전자주식회사

Inventor： 이철우 ,  조건호 ,  유장훈 ,  정승태

IPC: G11B7/08

Abstract: PURPOSE: An optical pickup system using a near field, is provided to maintain a regular-sized optical spot on a surface of a protective layer, and an optimal optical spot on an information recording surface, even though the protective layer is thick, by use of a solid immersion lens in order to prevent contamination. CONSTITUTION: The optical beam from a light-transceiving part(10) and a reflective mirror(12) are incident to an objective lens(24), which emits the optical beam to a solid immersion lens(SIL,26). The optical beam emitted is reflectively incident in a form of emitting to a surface of a solid immersion mirror(SIM,26). The reflective optical beam has a larger angle than an emitted angle, via a first and second reflective surface, to be emitted to an emission surface of the SIM. The optical beam emitted to the SIM, forms an optical spot at a center of an information recording surface. The optical spot creates a near field between a surface opposite a disc(28) and protective layer(283) thereof. The creation results in recording information on the disc or reading the information therefrom. And then the optical spot is remained 0.3 mm on a surface of the disc which is facilitated to be proof against stains and dust, and the near field enables recording information in high-density.

Abstract translation: 目的：提供一种使用近场的光学拾取系统，以在保护层的表面上保持规则尺寸的光斑，并且即使保护层较厚，也可通过使用来保持信息记录表面上的最佳光点 的固体浸没透镜以防止污染。 构成：来自光收发部分（10）和反射镜（12）的光束入射到物镜（24），该物镜将光束发射到固体浸没透镜（SIL，26）。 发射的光束以发射到固体浸没镜（SIM，26）的表面的形式反射入射。 反射光束经由第一和第二反射表面具有比发射角度更大的角度，以被发射到SIM的发射表面。 发射到SIM的光束在信息记录表面的中心处形成光点。 光斑在与盘（28）相对的表面与其保护层（283）之间产生近场。 该创建导致在盘上记录信息或从中读取信息。 然后在盘的表面上光斑保持0.3mm，有利于防止污渍和灰尘，并且近场使得能够以高密度记录信息。

公开(公告)号：KR100265237B1

公开(公告)日：2000-09-15

申请号：KR1019970054891

申请日：1997-10-24

Applicant: 삼성전자주식회사

Inventor： 윤두섭 ,  길병룡 ,  김명준 ,  정승태

IPC: G11B7/09

CPC classification number: G11B7/0901 ,  G11B7/00718 ,  G11B7/24079

Abstract: PURPOSE: A tracking method of a shallow/deep-groove type optical disk is provided to perform exact tracking without error by detecting a deep- or shallow-groove type optical disk and obtaining a TES(Tracking Error signal) through a phase inverting of a push-pull signal in a deep-groove type optical disk. CONSTITUTION: A push-pull signal is detected from a loaded optical disk to decide whether the optical disc is a deep-groove type or shallow-groove type. If the optical disk is deep-groove type, phase of the detected push-pull signal is inverted at 180 degrees and decided as a TES. In shallow-groove type, the detected push-pull signal is decides as a TES as it is. Then, tracking servo control is performed for a beam spot to trace the center of a target track exactly with the decided TES. Thereby, the optical disk obtains compatibility in tracking of the optical disk and the beam spot traces the center of the target track precisely without an error.

Abstract translation: 目的：提供浅/深槽型光盘的跟踪方法，通过检测深槽或浅槽型光盘，通过相位反转获得TES（跟踪误差信号），无误地执行精确跟踪 推挽信号在深槽型光盘中。 构成：从加载的光盘检测推挽信号，以决定光盘是深沟型还是浅槽型。 如果光盘是深沟型，则检测到的推挽信号的相位被反转180度并被确定为TES。 在浅槽型中，检测到的推挽信号被原样确定为TES。 然后，对于光束点执行跟踪伺服控制，以精确地跟踪所确定的TES的目标轨道的中心。 因此，光盘获得光盘跟踪的兼容性，并且光束精确地跟踪目标轨道的中心而没有错误。

公开(公告)号：KR100263161B1

公开(公告)日：2000-08-01

申请号：KR1019970066351

申请日：1997-12-05

Applicant: 삼성전자주식회사

Inventor： 유장훈 ,  윤두섭 ,  이철우 ,  박인식 ,  신동호 ,  길병룡 ,  정승태 ,  김태경

IPC: G11B7/007

Abstract: PURPOSE: An optical disk with deep groove-high density is provided for a recording/reproducing apparatus to correctly decide a land track and a groove track while precisely tracking a target track. CONSTITUTION: Header information on header areas of each sector of a land track, and header information on header areas of each sector of a groove track are detected as opposite codes in tracking. Herein, the header information is recorded in deep bits, which is deeper than pits of a groove along a row separated from a mirror field. In recording header information in a header area, the header information are recorded after being separated. Thus, first and second header information is recorded on a left side of the mirror field based on a progressing direction of an optical spot. Third and fourth information are recorded on a right side of the mirror field.

Abstract translation: 目的：提供具有深沟槽高密度的光盘，用于记录/再现装置，以正确地确定轨迹和凹槽轨道，同时精确跟踪目标轨迹。 构成：在轨道的每个扇区的标题区域的标题信息和关于纹道轨迹的每个扇区的标题区域的标题信息被检测为跟踪中的相反代码。 这里，标题信息被记录在比从与镜像场分离的行的凹槽深的深位中。 在标题区中记录标题信息时，标题信息被分离后记录。 因此，基于光点的前进方向，第一和第二标题信息被记录在镜像场的左侧。 第三和第四信息记录在镜像场的右侧。

公开(公告)号：KR100261082B1

公开(公告)日：2000-07-01

申请号：KR1019970041973

申请日：1997-08-28

Applicant: 삼성전자주식회사

Inventor： 정승태 ,  길병룡

IPC: G11B7/09

Abstract: PURPOSE: A device for recording/reproducing an optical magnet is provided to reduce the number of optical aperture by enhancing one end portion of an optic fiber by using an adjacent window explorer structure and to reduce an access time by making a portion of one end of the optic fiber be contacted and slid to a recording medium. CONSTITUTION: A movable unit(300) is rotatably arranged at a recording medium(40), and makes a light provided from a fixing optical system(100) be focused on a predetermined position of the recording medium(40). An optic fiber(200) both ends thereof are connected to the fixing optical system(100) and the movable unit(300), respectively, and transmits a light. The fixing optical system(100) is fixed to a main body, and creates and irradiates a light being demanded for recording/reproducing information in the recording medium(40). The optic fiber(200) comprises a core and a clad having a different refraction rate to that of the core. The clad surrounds the core, and inputted light is guided through the core. The movable unit(300) makes the light guided through the optic fiber(200) which was irradiated in the fixing optical system(100) be focused on a predetermined position of the recording medium(40).

Abstract translation: 目的：提供用于记录/再现光学磁体的装置，以通过使用相邻的窗口浏览器结构来增强光纤的一个端部以减少光学孔径的数量，并且通过使一​​个端部的一部分 使光纤接触并滑动到记录介质。 构成：可移动单元（300）可旋转地布置在记录介质（40）处，并且使从定影光学系统（100）提供的光聚焦在记录介质（40）的预定位置上。 其两端的光纤（200）分别连接到固定光学系统（100）和可移动单元（300），并透射光。 固定光学系统（100）固定在主体上，并产生和照射记录/再现信息的光被记录在记录介质（40）中。 光纤（200）包括具有与芯的折射率不同的折射率的芯和包层。 包层围绕着核心，输入的光被引导通过核心。 可移动单元（300）使通过固定光学系统（100）中照射的光纤（200）引导的光聚焦在记录介质（40）的预定位置。

公开(公告)号：KR1019990047819A

公开(公告)日：1999-07-05

申请号：KR1019970066351

申请日：1997-12-05

Applicant: 삼성전자주식회사

Inventor： 유장훈 ,  윤두섭 ,  이철우 ,  박인식 ,  신동호 ,  길병룡 ,  정승태 ,  김태경

IPC: G11B7/007

Abstract: 본 발명은 λ/4n(λ:레이져광원의 파장, n:기판의 굴절율)보다 깊게 된 그루브를 구비하는 딥그루브-고밀도광디스크에 관한 것으로, 기록 및 재생을 위한 트랙킹시, 각 섹터가 랜드열에 속하는지 그루브열에 속하는지 구분가능토록 랜드열의 섹터와 그루브열의 섹터에 기록되는 헤더정보들의 값을 서로 다른 값으로 기록하는 딥그루브-고밀도광디스크이다. 본 발명에 따르는 딥그루브-고밀도광디스크는 레이져광원을 사용하는 기록/재생장치에 의한 트랙킹시 늘어난 광경로로 인해 발생하는 트랙킹오류신호의 반전현상을 방지하는 효과를 제공한다.

公开(公告)号：KR100200803B1

公开(公告)日：1999-06-15

申请号：KR1019920007409

申请日：1992-04-30

Applicant: 삼성전자주식회사

Inventor： 정승태

IPC: G11B7/26

CPC classification number: G11B7/261 ,  Y10S430/146 ,  Y10S430/163

Abstract: 포토크로믹(photochromic;光色性) 물질과 같은 광감응 기록매체에 정보를 복제하여 재생전용 광디스크를 제조하는데 사용될 수 있는 정보소스 디스크와 그 기록장치 및 그 복제방법과 복제장치가 각각 개시되어 있다. 그 정보소스 디스크는 투광성 기체에 기록막이 도포되고 그 기록막에 홀이 정보에 따라 배열 형성되어 광투과형의 정보를 기록한다. 그 정보소스 디스크는 그의 광기록장치로 정를 기록할 때 오토 트래킹을 위한 그루우브를 가진다. 그 복제방법과 복제장치는 개시된 광기록장치에 의하여 정보가 광투과형으로 기록된 정보소스 디스크를 광학적으로 복제하여 그의 정보가 전사형식으로 복제된 재생전용 광디스크의 제작을 가능케 하기 위하여 정보소스 디스크에의 광조사수단과 그 정보소스 디스크를 투과하는 광을 복제용 디스크로 전달하는 전달광학수단을 사용한다. 개시된 내용에 의하면 재생전용 광디스크의 제작에 있어서, 공정의 단순화, 장비의 저가격화 할 수 잇점이 제공되고, 아울러 그 광디스크의 생산성을 극대화할 수 있는 것이다.