公开(公告)号：KR1020070008151A

公开(公告)日：2007-01-17

申请号：KR1020050063169

申请日：2005-07-13

Applicant: 삼성전자주식회사

Inventor： 정종현

IPC: H01L21/304

Abstract: A system for fabricating a flat panel display device is provided to prevent an interconnection from being locally damaged by water drops by avoiding condensation of water drops in a liquid spraying unit. After a flat panel display substrate(1) is etched, chemical liquid attached to the flat panel display substrate is removed by using a liquid spraying unit(130) in etching equipment(100). The flat panel display substrate etched by the etching equipment is rinsed by rinse equipment(300). A transfer part transfers the flat panel display substrate from the etching equipment to the rinse equipment. The transfer part includes at least one air pressure spraying unit(500) for preventing foreign substances from being introduced from the etching equipment or the rinse equipment. The liquid spraying unit is installed at a substrate outlet(113) of the etching equipment. The at least one air pressure spraying unit includes a first air pressure spraying unit which is installed in the etching equipment and is tilted toward the liquid spraying unit.

Abstract translation: 提供一种用于制造平板显示装置的系统，以通过避免液体喷射单元中水滴的冷凝来防止互连局部地被水滴损坏。 在蚀刻平板显示基板（1）之后，通过在蚀刻设备（100）中使用液体喷射单元（130）来去除附着到平板显示器基板的化学液体。 通过冲洗设备（300）冲洗由蚀刻设备蚀刻的平板显示基板。 转印部件将平板显示基板从蚀刻设备传送到冲洗设备。 转印部分包括至少一个用于防止异物从蚀刻设备或冲洗设备引入的空气压力喷射单元（500）。 液体喷射单元安装在蚀刻设备的基板出口（113）处。 所述至少一个气压喷射单元包括安装在所述蚀刻设备中并朝向所述液体喷射单元倾斜的第一空气压力喷射单元。