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公开(公告)号：KR1020080078565A
公开(公告)日：2008-08-27
申请号：KR1020080015649
申请日：2008-02-21
Applicant: 연세대학교 산학협력단
IPC: H01L21/027
CPC classification number: G03F7/70291 , G03F7/70275
Abstract: An optical lithography device and a method for manufacturing an optical head thereof are provided to reduce a manufacturing cost by simplifying configuration thereof. An optical lithography device includes a parallel beam supply unit(100), an optical head(200), and a substrate driving unit(300). The parallel beam supply unit supplies a parallel beam. The optical head divides the parallel beam into plural parallel beams through plural areas, controls penetration of the parallel beams at the respective areas, and focuses the beams penetrated through the respective areas. The substrate driving unit drives a substrate to perform a patterning process on the substrate using lights radiated from the optical head.
Abstract translation: 提供光学光刻装置及其光头的制造方法，通过简化其构造来降低制造成本。 光学平版印刷装置包括平行光束供给单元（100），光学头（200）和基板驱动单元（300）。 平行光束供应单元提供平行光束。 光头将平行光束通过多个区域分割成多个平行光束，控制平行光束在各个区域的穿透，并且对穿过各个区域的光束进行聚焦。 基板驱动单元驱动基板，使用从光头照射的光来对基板进行图案化处理。
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公开(公告)号：KR100653956B1
公开(公告)日：2006-12-05
申请号：KR1020050050710
申请日：2005-06-14
Applicant: 강신일 , 연세대학교 산학협력단
IPC: G11B13/06
Abstract: A parallel optical probe optical system is provided to obtain an optical probe of sufficient strength necessary for recording information in an information recording object. A collimator(3) provides a collimation beam. An aperture array(7) passes the collimation beam, and generates a parallel optical probe to a rear by talbot effect. A spatial light modulator(13) is installed in the rear of the aperture array(7), and is partitioned into a plurality of areas mapped with the parallel optical probe by one to one. The spatial light modulator(13) independently controls the passing/blocking of light with respect to the respective areas. An information recording object containing part, installed in a rear of the spatial light modulator(13), contains an information recording object(9) in a position whether the parallel optical probe is irradiated.
Abstract translation: 提供平行光学探测器光学系统以获得用于在信息记录对象中记录信息所需的足够强度的光学探测器。 准直器（3）提供准直光束。 孔径阵列（7）通过准直光束，并通过塔伯特效应产生到后方的平行光学探针。 空间光调制器（13）安装在孔径阵列（7）的后部，并且被划分成与平行光学探针一一对应的多个区域。 空间光调制器（13）独立地控制光相对于各个区域的通过/阻挡。 安装在空间光调制器（13）的后部的信息记录对象包含部分在无论是否照射平行光学探针的位置中包含信息记录对象（9）。
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公开(公告)号：KR102042975B1
公开(公告)日：2019-11-11
申请号：KR1020170152650
申请日：2017-11-15
Applicant: 연세대학교 산학협력단
IPC: H02N11/00 , H01L41/047 , H01L41/113
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公开(公告)号：KR101636696B1
公开(公告)日：2016-07-06
申请号：KR1020140062632
申请日：2014-05-23
Applicant: 연세대학교 산학협력단
CPC classification number: A61B5/0075 , A61B5/0071 , A61B2562/146 , A61B2562/164 , G01J1/42 , G01J3/44 , G01J3/4412 , G01Q60/22 , G01Q70/06 , Y10S977/954
Abstract: 본발명의일측면에따르면 Far field 광학계의광원에서조사되는빔에근접장을발현시키는광학헤드로서, 상기광학헤드는피측정물의외형이곡면또는평면이어도밀착하여결합할수 있도록유연기판및 상기유연기판상에위치하며, 상기광원에서조사되는빔에근접장을발현하는근접장발현부를포함하는근접장광학헤드가제공될수 있다.
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公开(公告)号：KR1020160063869A
公开(公告)日：2016-06-07
申请号：KR1020140167679
申请日：2014-11-27
Applicant: 연세대학교 산학협력단
CPC classification number: C09D5/1681 , B63B59/04 , B63B1/32 , B63B2231/02 , Y02T70/12
Abstract: 본발명의일 실시예에따른항력저감및 미생물부착방지용마이크로-나노프랙탈구조프랙탈구조; 상기지지판위에형성되며, 너비는 10 ~ 100㎛, 높이는 10 ~ 50㎛인 마이크로구조물을복수개포함하는마이크로층; 및상기마이크로층 위에형성되며, 너비는 50㎚ ~ 1㎛, 높이대 너비의비율이 0 초과 5 이하인나노구조물을복수개포함하는나노층;을포함한다.
Abstract translation: 根据本发明的一个实施方案，用于减少阻力和防止微生物粘附的微纳米分形结构包括：微层，其形成在支撑板上，并且具有宽度为10至100微米的多个微结构和高度 为10至50微米; 和形成在微层上的纳米层，并且具有宽度为50纳米至1微米的多个纳米结构，其中纳米结构的高宽比大于0且小于或等于5。
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Patent Agency Ranking
公开(公告)号：KR101566263B1
公开(公告)日：2015-11-05
申请号：KR1020140024589
申请日：2014-02-28
Applicant: 연세대학교 산학협력단
IPC: H01L21/027 , G03F7/20
CPC classification number: G03F7/7015
Abstract: 본발명의일측면에따르면기판에패턴을형성하기위한광학리소그래피장치에서, 상기기판에탈착가능한초해상막으로써, 상기초해상막은상부에제1유전층이위치하고, 하부에제2유전층이위치하며, 상기제1유전층과상기제2유전층사이에상변화물질층이위치하되, 상기상변화물질층은 Sb-Se 화합물인초해상막이제공될수 있다.
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公开(公告)号：KR1020150102557A
公开(公告)日：2015-09-07
申请号：KR1020140024589
申请日：2014-02-28
Applicant: 연세대학교 산학협력단
IPC: H01L21/027 , G03F7/20
CPC classification number: G03F7/7015
Abstract: 본 발명의 일측면에 따르면 기판에 패턴을 형성하기 위한 광학 리소그래피 장치에서, 상기 기판에 탈착가능한초해상막으로서, 상기 초해상막은 상부에 제1유전체보호층이 위치하고, 하부에 제2유전체보호층이 위치하며, 상기 제1유전체보호층과 상기 제2유전체보호층에 상변화물질층이 위치하되, 상기 상변화물질층은 Sb
x Se
100-x 인 초해상막이 제공될 수 있다.Abstract translation: 根据本发明的实施例，在用于在基板上形成图案的光学光刻装置中，在可从基板拆卸的超分辨膜上形成第一介电保护层。 第二介电保护层位于超分辨膜下。 相变材料层位于第一和第二介电保护层中。 相变材料层由Sb_xSe_（100-x）制成。
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公开(公告)号：KR101020634B1
公开(公告)日：2011-03-09
申请号：KR1020080088412
申请日：2008-09-08
Applicant: 연세대학교 산학협력단
Inventor： 강신일
CPC classification number: G02B1/005 , B29D11/00346 , B29D11/00432 , B29D11/00865 , B82Y20/00 , G02B1/118 , G02B1/12 , G02B2207/101
Abstract: 본 발명은 광결정 패턴을 몰드부재에 성형하고, 몰드부재를 렌즈의 곡면부에 가압하여 렌즈의 곡면부 표면에 부착된 폴리머의 표면에 광결정 패턴이 형성되어 곡면 형상을 가지는 렌즈의 표면에 광결정 패턴을 형성할 수 있어 반사손실을 최소화하여 빛 투과율을 향상시킬 수 있는 기능성 나노패턴을 갖는 렌즈의 제조방법을 제공한다.
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49.发明公开
公开(公告)号：KR1020090098470A
公开(公告)日：2009-09-17
申请号：KR1020080023884
申请日：2008-03-14
Applicant: 연세대학교 산학협력단
IPC: G02B3/00
CPC classification number: G02B3/0031 , G02B3/0062 , G02B13/0085 , G02B27/0961 , H04N5/2254
Abstract: A wafer scale lens array, a molding device and a manufacturing method thereof are provided to minimize the failure rate by minimizing the release of the molded member. An optics polymer corresponding to the lens material is coated in the constant thickness on the substrate(100). A molded member is located in the upper of substrate. An ultraviolet lay blocking film protecting the ultraviolet ray is installed at the lower-part of the molded member. The ultraviolet lay blocking film is formed between lens cavities. A molded member is formed with the ultraviolet transmission material. A plurality of lens units(210) and the residual layer arranged between lens units are arranged in the surface of substrate to the constant interval.
Abstract translation: 提供了晶片级透镜阵列，成型装置及其制造方法，以通过最小化模制构件的释放来最小化故障率。 对应于透镜材料的光学聚合物以恒定的厚度涂覆在基底（100）上。 模制构件位于衬底的上部。 保护紫外线的紫外线遮挡膜安装在模制件的下部。 在透镜腔之间形成紫外线遮挡膜。 模制件由紫外线透射材料形成。 布置在透镜单元之间的多个透镜单元（210）和残留层以恒定间隔布置在基板的表面中。
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公开(公告)号：KR1020070096368A
公开(公告)日：2007-10-02
申请号：KR1020060026651
申请日：2006-03-23
Applicant: 연세대학교 산학협력단
CPC classification number: G02B3/08 , H01L33/58 , F21V5/045 , F21V7/0091 , F21Y2115/10
Abstract: A Fresnel lens and an LED(Light Emitting Diode) lighting device using the same are provided to secure excellent luminance uniformity, to reduce the size of the LED lighting device, and to remove a yellow ring effect generated in using a spherical lens. A Fresnel lens(50b) installed in the front side of an LED(10) emitting the light to change a path of the light emitted from the LED has an draft angle(theta) same as an emission angle(theta) of the emitted light. The LED lighting device is composed of the LED; the Fresnel lens; a fluorescent layer surrounding the LED, passing the light emitted from the LED, and containing YAG:Ce(Yttrium Aluminum Garnet:Cerium) fluorescent materials; and an LED cup reflecting the light laterally emitted from the LED, to the front side, wherein the LED is placed in the LED cup.
Abstract translation: 提供了使用其的菲涅尔透镜和LED（发光二极管）照明装置，以确保优异的亮度均匀性，减小LED照明装置的尺寸，并消除使用球面透镜产生的黄色环形效应。 安装在发射光以改变从LED发射的光的路径的LED（10）的前侧中的菲涅耳透镜（50b）具有与发射光的发射角（θ）相同的拔模角（θ） 。 LED照明装置由LED组成; 菲涅尔透镜; 围绕LED的荧光层，通过LED发出的光，并含有YAG：Ce（钇铝石榴石：铈）荧光材料; 以及将从LED侧向发射的光反射到前侧的LED杯，其中LED被放置在LED杯中。
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