Patent search ap:("ASML NETHERLANDS BV") AND inv:"SOER WOUTER ANTHON" Page 5

41.

发明专利
Method for the protection of an optical element of a lithographic appraratus and device manufacturing method. 未知

公开(公告)号：NL1035913A1

公开(公告)日：2009-03-17

申请号：NL1035913

申请日：2008-09-10

Applicant: ASML NETHERLANDS BV

Inventor： HERPEN MAARTEN MARINUS JOHANNES WILHELMUS VAN , SOER WOUTER ANTHON

IPC: G03F7/20 , H05G2/00 , H05H1/00

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