Thin-film transistor and its manufacturing method
    41.
    发明专利
    Thin-film transistor and its manufacturing method 有权
    薄膜晶体管及其制造方法

    公开(公告)号:JP2008192721A

    公开(公告)日:2008-08-21

    申请号:JP2007023767

    申请日:2007-02-02

    CPC classification number: H01L29/7869 H01L29/66969

    Abstract: PROBLEM TO BE SOLVED: To provide a thin-film transistor that can be made into an element applicable for a polymer substrate without high-temperature process, and can establish high performance and high reliability at a low cost. SOLUTION: The thin-film transistor is provided with elements such as three electrodes of a source electrode 4, a drain electrode 5 and a gate electrode 1, a channel layer 3 and a gate insulation film 2. In this case, at least the channel layer 3 is formed of a metal oxide film containing indium. COPYRIGHT: (C)2008,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种薄膜晶体管,可以在不进行高温处理的情况下制成适用于聚合物基板的元件,并且可以以低成本建立高性能和高可靠性。 解决方案:薄膜晶体管设置有诸如源电极4,漏电极5和栅极电极1,沟道层3和栅极绝缘膜2的三个电极的元件。在这种情况下,在 至少沟道层3由含有铟的金属氧化物膜形成。 版权所有(C)2008,JPO&INPIT

    Particle coating method and particle coating apparatus
    42.
    发明专利
    Particle coating method and particle coating apparatus 审中-公开
    颗粒涂料方法和颗粒涂料装置

    公开(公告)号:JP2007204784A

    公开(公告)日:2007-08-16

    申请号:JP2006022461

    申请日:2006-01-31

    Inventor: SHIINO OSAMU

    Abstract: PROBLEM TO BE SOLVED: To provide a method for uniformly covering a particle surface with a thin film by using a sputtering or vapor deposition technique, and to provide an apparatus to be used therefor. SOLUTION: The method for covering the particle surface with the thin film of a covering material by using the sputtering or vapor-depositing technique includes the steps of: accommodating the particles in a particle container with a shape of a bottomed cylinder; tilting a rotation axis of the cylinder of the particle container at a predetermined angle against a horizontal direction; and rotating the particle container around the axis of the cylinder to agitate the particles. COPYRIGHT: (C)2007,JPO&INPIT

    Abstract translation: 要解决的问题:提供一种通过使用溅射或气相沉积技术用薄膜均匀地覆盖颗粒表面的方法,并提供用于其的装置。 解决方案:使用溅射或气相沉积技术用覆盖材料的薄膜覆盖颗粒表面的方法包括以下步骤:将颗粒容纳在具有底圆筒形状的颗粒容器中; 使颗粒容器的圆筒的旋转轴线相对于水平方向倾斜预定角度; 并且使颗粒容器围绕圆筒的轴线旋转以搅拌颗粒。 版权所有(C)2007,JPO&INPIT

    METAL DOPED TiO2 FILM AND ITS DEPOSITION METHOD
    44.
    发明专利
    METAL DOPED TiO2 FILM AND ITS DEPOSITION METHOD 审中-公开
    金属掺杂TiO2薄膜及其沉积方法

    公开(公告)号:JP2006152391A

    公开(公告)日:2006-06-15

    申请号:JP2004346501

    申请日:2004-11-30

    Abstract: PROBLEM TO BE SOLVED: To provide a deposition method of a metal doped TiO2 film capable of easily changing the content of the doped metal, and the metal doped TiO2 film precisely controlled in the doping amount of the metal.
    SOLUTION: Pulse packet-like voltages are alternately applied to a first target 21a composed of metal Ti and a second target 21b composed of doped Ti. The light emission wavelength and light emission intensity of the discharge of the Ti at the time of sputtering of the target 21a are detected by a PEM 31a. Also, the light emission wavelength and light emission intensity of the discharge of the Ti at the time of sputtering of the target 21b are made into electric signals via a collimator 30b, a filter and an optical double amplifier and are detected by a PEM (plasma emission monitor) 31b. The sputtering rates of the targets 21a, 21b are calculated and the pulse electric power, pulse amount and pulse width applied to the respective targets 21a, 21b and the amount of oxygen flowing into a cover 26 and the pressure in the cover are controlled based on the results of the calculation.
    COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供能够容易地改变掺杂金属的含量的金属掺杂的TiO 2膜的沉积方法,并且金属掺杂的TiO 2膜被精确地控制在金属的掺杂量中。 解决方案:将脉冲包状电压交替施加到由金属Ti构成的第一靶21a和由掺杂Ti构成的第二靶21b。 通过PEM 31a检测靶21a的溅射时的Ti的放电的发光波长和发光强度。 此外,通过准直器30b,滤光器和光双重放大器将目标21b溅射时的Ti的放电的发光波长和发光强度形成为电信号,并通过PEM(等离子体 排放监视器)31b。 计算目标21a,21b的溅射速度,并且基于对目标21a,21b施加的各个目标21a,21b的脉冲电功率,脉冲量和脉冲宽度以及流入盖26中的氧气的量和盖的压力基于 计算结果。 版权所有(C)2006,JPO&NCIPI

    Catalyst structure and film-electrode junction for solid, polymer type fuel cell using the same
    45.
    发明专利
    Catalyst structure and film-electrode junction for solid, polymer type fuel cell using the same 审中-公开
    用于固体,聚合物型燃料电池的催化结构和电极接头

    公开(公告)号:JP2006134603A

    公开(公告)日:2006-05-25

    申请号:JP2004319552

    申请日:2004-11-02

    CPC classification number: Y02E60/521

    Abstract: PROBLEM TO BE SOLVED: To provide a catalyst structure made to carry a catalyst material on a carrier by reactive sputtering method, and to provide a film-electrode junction for a solid, polymer type fuel cell that uses the catalyst structure. SOLUTION: The catalyst structure is formed by coating a catalyst material on the surface of the carrier by reactive sputtering method. The film-electrode junction for solid, polymer type fuel cell is composed of a solid, polymer type electrolyte film, a catalyst layer arranged on both sides of the solid, polymer type electrolyte film, and a diffusion layer arranged on both sides of the catalyst layer. The film-electrode junction for solid, polymer type fuel cell uses this catalyst structure as the catalyst layer. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:提供通过反应溅射法将催化剂材料载持在载体上的催化剂结构,并提供使用催化剂结构的固体聚合物型燃料电池的膜 - 电极接合部。 解决方案:通过反应溅射法在催化剂表面上涂覆催化剂材料形成催化剂结构。 用于固体聚合物型燃料电池的膜 - 电极接合体由固体聚合物型电解质膜,布置在固体两侧的催化剂层,聚合物型电解质膜和布置在催化剂两侧的扩散层组成 层。 用于固体聚合物型燃料电池的膜 - 电极接头使用该催化剂结构作为催化剂层。 版权所有(C)2006,JPO&NCIPI

    Cu2O FILM, METHOD FOR FORMING IT, AND SOLAR BATTERY
    46.
    发明专利
    Cu2O FILM, METHOD FOR FORMING IT, AND SOLAR BATTERY 审中-公开
    Cu2O薄膜,其形成方法和太阳能电池

    公开(公告)号:JP2006124754A

    公开(公告)日:2006-05-18

    申请号:JP2004312616

    申请日:2004-10-27

    CPC classification number: Y02E10/50

    Abstract: PROBLEM TO BE SOLVED: To provide a method of forming an metal-doped Cu 2 O film in which the oxidation number is precisely controlled, at a high speed, and to provide a solar battery using the Cu 2 O film obtained through the film-forming method, as a light absorption layer. SOLUTION: A (p) layer 3 made of the Cu 2 O film is formed on a substrate 1 by the steps of: introducing the transparent substrate 1 into a cover 26; introducing a gas mixture of argon blended with oxygen into the cover 26; applying voltage in a pulse packet form alternately to target electrodes 20A and 20B in a constant cycle to form glow discharge; and sputtering targets 21a and 21b to emit particles from them. In the process, PEM (plasma emission monitor) 31a and 31b take in an electrical signal converted from an emission spectrum of plasma obtained through collimators 30a and 30b; and through using the PEM 31a and 31b, a flow rate of introduced gaseous oxygen is controlled so that copper emission intensity in plasma can be always constant. One of the targets 21a and 21b is made from copper and the other is a dope metal. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 待解决的问题:为了提供一种形成其中氧化数被精确地控制的金属掺杂的Cu 2 O膜的方法,并且提供一种使用 作为光吸收层的通过成膜方法获得的Cu 2 O膜。 解决方案:通过以下步骤在基板1上形成由Cu 2 O膜制成的A(p)层3:将透明基板1引入盖26; 将与氧共混的氩气混合物引入到盖26中; 以恒定周期交替地对目标电极20A和20B施加脉冲数据包形式的电压以形成辉光放电; 溅射靶21a和21b从它们发射出粒子​​。 在该过程中,PEM(等离子体发射监测器)31a和31b获取从通过准直器30a和30b获得的等离子体的发射光谱转换的电信号; 并且通过使用PEM 31a和31b,控制引入的气态氧的流量,使得等离子体中的铜发射强度总是恒定的。 靶21a和21b中的一个由铜制成,另一个是掺杂金属。 版权所有(C)2006,JPO&NCIPI

    Cu2O FILM, METHOD FOR FORMING IT, AND SOLAR BATTERY
    47.
    发明专利
    Cu2O FILM, METHOD FOR FORMING IT, AND SOLAR BATTERY 审中-公开
    Cu2O薄膜,其形成方法和太阳能电池

    公开(公告)号:JP2006124753A

    公开(公告)日:2006-05-18

    申请号:JP2004312615

    申请日:2004-10-27

    CPC classification number: Y02E10/50

    Abstract: PROBLEM TO BE SOLVED: To provide a method of forming an N-doped Cu 2 O film in which the oxidation number is precisely controlled, at a high speed, and to provide a solar battery using the Cu 2 O film obtained through the film-forming method, as a light absorption layer. SOLUTION: A (p) layer 3 made of the Cu 2 O film is formed on a substrate 1 by the steps of: introducing the transparent substrate 1 into a cover 26; introducing a gas mixture of argon blended with oxygen and nitrogen, into the cover 26; applying voltage in a pulse packet form alternately to target electrodes 20A and 20B in a constant cycle to form glow discharge; and sputtering targets 21a and 21b to emit particles from them. In the process, PEM (plasma emission monitor) 31a and 31b take in an electrical signal converted from an emission spectrum of plasma obtained through collimators 30a and 30b; and through using the PEM 31a and 31b, a flow rate of introduced gaseous oxygen is controlled so that copper emission intensity in plasma can be always constant. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 待解决的问题:提供一种形成其中氧化数被精确地控制的N掺杂的Cu 2 O膜的方法,并且提供使用 作为光吸收层的通过成膜方法获得的Cu 2 O膜。 解决方案:通过以下步骤在基板1上形成由Cu 2 O膜制成的A(p)层3:将透明基板1引入盖26; 将与氧和氮混合的氩气混合物引入到盖26中; 以恒定周期交替地对目标电极20A和20B施加脉冲数据包形式的电压以形成辉光放电; 溅射靶21a和21b从它们发射出粒子​​。 在该过程中,PEM(等离子体发射监测器)31a和31b获取从通过准直器30a和30b获得的等离子体的发射光谱转换的电信号; 并且通过使用PEM 31a和31b,控制引入的气态氧的流量,使得等离子体中的铜发射强度总是恒定的。 版权所有(C)2006,JPO&NCIPI

    Manufacturing method of solar cell
    48.
    发明专利
    Manufacturing method of solar cell 审中-公开
    太阳能电池的制造方法

    公开(公告)号:JP2006013098A

    公开(公告)日:2006-01-12

    申请号:JP2004187420

    申请日:2004-06-25

    CPC classification number: Y02E10/50

    Abstract: PROBLEM TO BE SOLVED: To improve solar cell characteristics by improving crystal property of a thin film material to form a solar cell through the selective and short-term annealing process using microwaves. SOLUTION: The solar cell 10 is formed of a transparent polymer base material 1, a transparent conductive film 2 provided on this polymer base material 1, a p-type layer 3 and an n-type layer 4 formed on the transparent conductive film 2 with the sputtering, and a metal electrode 5 provided on this n-type layer 4. After the transparent conductive film 2, p-type layer 3, n-type layer 4 and metal electrode 5 are formed, these are irradiated with the microwave to selectively heat the p-type layer 3 in view of enhancing the crystal property thereof. COPYRIGHT: (C)2006,JPO&NCIPI

    Abstract translation: 要解决的问题:通过使用微波通过选择性和短期退火方法改善薄膜材料的晶体性质以形成太阳能电池来提高太阳能电池的特性。

    解决方案:太阳能电池10由透明聚合物基材1,设置在该聚合物基材1上的透明导电膜2,形成在透明导电性材料1上的p型层3和n型层4形成。 薄膜2和设置在该n型层4上的金属电极5.在透明导电膜2形成p型层3,n型层4和金属电极5之后, 考虑到提高其晶体性质,微波选择性地加热p型层3。 版权所有(C)2006,JPO&NCIPI

    Counter electrode for dye-sensitized solar cell, and dye-sensitized solar cell
    49.
    发明专利
    Counter electrode for dye-sensitized solar cell, and dye-sensitized solar cell 审中-公开
    用于透明的太阳能电池的计数器电极和透明的太阳能电池

    公开(公告)号:JP2005228614A

    公开(公告)日:2005-08-25

    申请号:JP2004036500

    申请日:2004-02-13

    CPC classification number: Y02E10/542 Y02P70/521

    Abstract: PROBLEM TO BE SOLVED: To facilitate manufacture of a dye-sensitized solar cell having a plurality of cells (unit cell) connected in series, and to reduce its manufacturing cost. SOLUTION: On a film substrate 1, as a transparent electrode 2, a transparent electrode 2a of the size of two cells and a transparent electrode 2b of the size of one cell are installed. On this transparent electrode 2a, a dye-sensitized semiconductor (titania electrode) 3a of the share of one cell size and the counter electrode 6a of the share of one cell size having light transmittance are installed. On the film substrate 7, the counter electrode 6a of the share of one cell size, and the electrode 10 of the share of two cell sizes are installed. As for the electrode 10, a thin film of platinum is preferable, but not limited to this. The counter electrode 6a is arranged opposed to the semiconductor electrode 3a. On the electrode 10, the semiconductor electrode 3A of the share of one cell size and the counter electrode 6b of the share of one cell size are installed, and this semiconductor electrode 3A is opposedly installed to the counter electrode 6a, and the counter electrode 6b is opposedly installed to the semiconductor electrode 3b. Output voltage is taken out from the middle of the semiconductor electrode 2b and the counter electrode 6a. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:为了便于制造具有串联连接的多个电池(单体电池)的染料敏化太阳能电池,并降低其制造成本。 解决方案:在薄膜基板1上,安装两个单元的尺寸的透明电极2a和一个单元的尺寸的透明电极2b作为透明电极2。 在该透明电极2a上,安装一个单元尺寸份额的染料敏化半导体(二氧化钛电极)3a和具有透光率的一个单元尺寸份额的对置电极6a。 在薄膜基板7上,安装一个单元尺寸份额的对置电极6a和两个单元尺寸份额的电极10。 对于电极10,优选铂薄膜,但不限于此。 对电极6a与半导体电极3a相对配置。 在电极10上,安装一个单元尺寸的共享的半导体电极3A和一个单元尺寸的对置电极6b,并且该半导体电极3A相对地安装在对电极6a上,并且对置电极6b 相对地安装到半导体电极3b。 从半导体电极2b和对置电极6a的中央取出输出电压。 版权所有(C)2005,JPO&NCIPI

    Solar cell
    50.
    发明专利
    Solar cell 审中-公开
    太阳能电池

    公开(公告)号:JP2004296670A

    公开(公告)日:2004-10-21

    申请号:JP2003085561

    申请日:2003-03-26

    CPC classification number: Y02E10/50

    Abstract: PROBLEM TO BE SOLVED: To provide an inexpensive solar cell that does not use any dye and electrolytic solution and has stable characteristics. SOLUTION: The solar cell comprises a transparent electrode film 2 successively laminated onto a transparent substrate 1, a p-layer (p-type semiconductor layer) 3, a titanium oxide layer 4 where the oxidation number is controlled, an n layer (n-type semiconductor layer) 5, and an electrode film 6. An i layer 4 is formed by a reactive sputter method for performing sputtering in an oxygen gas atmosphere. For example, the flowrate of oxygen in the reactive sputtering is controlled or voltage to be applied is made in pulse form, and pulse width is controlled, the oxidation number of titanium oxide can be controlled. COPYRIGHT: (C)2005,JPO&NCIPI

    Abstract translation: 要解决的问题:提供不使用任何染料和电解液并且具有稳定特性的廉价的太阳能电池。 解决方案:太阳能电池包括依次层压在透明基板1上的透明电极膜2,p层(p型半导体层)3,控制氧化数的氧化钛层4,n层 (n型半导体层)5和电极膜6.通过在氧气气氛中进行溅射的反应溅射法形成i层4。 例如,可以控制反应性溅射中的氧气流量,以脉冲形式施加电压,控制脉冲宽度,可以控制氧化钛的氧化数。 版权所有(C)2005,JPO&NCIPI

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