MICROSCOPIC SYSTEM PROVIDED WITH STAGE COORDINATE RECORDING MECHANISM

    公开(公告)号:JPH07333517A

    公开(公告)日:1995-12-22

    申请号:JP15034594

    申请日:1994-06-07

    Inventor: SAKURADA TAKASHI

    Abstract: PURPOSE:To obtain a method for making the relation of micro tissue to macro structure clear by including an X-Y detecting mechanism detecting the position of a sample stage in X-Y directions and an X-Y recording mechanism recording the X-Y coordinates of the sample stage and consecutively recording the two-dimensional displacement of the sample stage. CONSTITUTION:The movement of the sample stage 7 is directly plotted on recording paper 30. A flat recording table 29 is set on the side of a microscope 1 and the recording paper 30 is stuck to the recording table 29. Then, a sample 8 is fixed on the sample stage 7 by a sample fixing jig 9. The image of the sample 8 is projected on a monitor 2. The sample stage 7 is moved manually or by a motor while veiwing the monitor 2 so that the micro tissue of the sample may be in the center of the image. Since an arm 28 is attached to the sample stage 7 and a pen 27 is attached to the tip of the arm 28, the pen 27 slides on the recording paper 30 equally to the movement amount and the bearing of the sample stage 7 so as to draw the movement path of the sample stage 7 on the recording paper 30.

    LIQUID PHASE EPITAXY GROWING METHOD

    公开(公告)号:JPH06144989A

    公开(公告)日:1994-05-24

    申请号:JP32739092

    申请日:1992-11-11

    Inventor: SAKURADA TAKASHI

    Abstract: PURPOSE:To prevent the hindrance of growth reproducibility as there is the loss of raw materials at the time of transferring the raw materials from a glass container to a melt reservoir when a solute, dopant raw material, mixed crystal raw materials, etc., are weighed by using a glass container. CONSTITUTION:The solute, the dopant raw material and the mixed crystal raw materials 2 are put into a container-shaped solid solvent metal 1 and are weighted. These materials are supplied as they are into the melt reservoir 3 and are subjected to growth. Since a glass container, etc., are not used for weighing the solute, the dopant raw material and the mixed crystal raw materials 2, the sure transfer of the entire raw material to the melt reservoir is possible and the growth is executed with high reproducibility.

    METHOD FOR MEASURING DISTRIBUTION WITHIN SURFACE OF SPECIFIC RESISTANCE OF SEMICONDUCTOR WAFER

    公开(公告)号:JPH05232165A

    公开(公告)日:1993-09-07

    申请号:JP6957592

    申请日:1992-02-18

    Inventor: SAKURADA TAKASHI

    Abstract: PURPOSE:To measure a fine distribution of specific resistance with a high resolution by forming a plurality of band-shaped electrodes on one surface of a semiconductor wafer and then forming a plurality of band-shaped electrodes which are laid out nearly in parallel on the other surface so that they cross each other. CONSTITUTION:A plurality of band-shaped electrodes 1 are laid out on the surface of a substrate nearly in parallel. On the other hand, band-shaped electrodes 1 are laid out nearly in parallel also on the rear surface of the substrate 3, where they cross the surface band-shaped electrodes 1. The surface and rear-surface electrodes 1 are formed in a lattice. Then, a generally- rectangular for probe contact is provided in one piece with the electrodes 1 at one edge of the band-shaped electrodes. For example, positions for providing the pad 2 may be changed alternately to prevent pads of the adjacent electrodes 1 from overlapping. A voltage V can be applied to the area between the front and rear electrodes 1 of the substrate, thus measuring current which flows with an ammeter I.

    SIMULTANEOUS SELECTION EXCITATION PL EVALUATION METHOD

    公开(公告)号:JPH04310828A

    公开(公告)日:1992-11-02

    申请号:JP10487791

    申请日:1991-04-09

    Abstract: PURPOSE:To obtain each photoluminescence spectrum rapidly under same conditions and a detailed information on each level by performing excitation with two lights with a different wavelength when measuring photoluminescence for a deep level within a band gap of a semiconductor. CONSTITUTION:Both lights lambda1 and lambda2 are allowed to hit against a sample 4 using two lasers lambda1 and lambda2 with a different wavelength for a light source. The light lambda2 is blocked by a chopper 3. A PL spectrum for a light with lambda2 is obtained by amplifying by a lock-in amplifier 8 a signal regarding the PL light intensity which is obtained through a spectrometer 6 and a detector 7 in synchronization with a signal when the chopper 3 is opened. A PL signal for a light with lambda1 is integrated by a box car integrator 9 which opens an input gate for a short time in synchronization with a signal when the chopper 3 is closed, thus obtaining the PL spectrum for lambda1.

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