公开(公告)号：US20170058402A1

公开(公告)日：2017-03-02

申请号：US15014568

申请日：2016-02-03

Applicant: Samsung Electronics Co., Ltd.

Inventor： Xianyu WENXU ,  Yongsung KIM ,  Jaikwang SHIN ,  Wooyoung YANG

IPC: C23C16/455 ,  C23C16/44

Abstract: A shower head of a combinatorial spatial atomic layer deposition (CS-ALD) apparatus may be provided. The shower head of the CS-ALD apparatus may include a plurality of shower blocks. Each of shower blocks may include a plurality of unit modules. Each of the shower blocks and each of the unit modules may be controlled independently from each other. Each of the plurality of unit modules may include a source gas injection nozzle, a purge gas injection nozzle, a reactant gas injection nozzle, and exhaust areas between the injection nozzles. The plurality of shower blocks may be separated from each other. Gas injection areas of the injection nozzles may be separated from the exhaust area.

Abstract translation: 可以提供组合空间原子层沉积（CS-ALD）装置的喷头。 CS-ALD装置的喷头可以包括多个淋浴块。 每个淋浴块可以包括多个单元模块。 每个淋浴块和每个单元模块可以彼此独立地控制。 多个单元模块中的每一个可以包括源气体喷射喷嘴，吹扫气体喷射喷嘴，反应气体喷射喷嘴和喷射喷嘴之间的排气区域。 多个淋浴块可以彼此分离。 注射喷嘴的气体注入区域可以与排气区域分离。

公开(公告)号：US20170012078A1

公开(公告)日：2017-01-12

申请号：US15193229

申请日：2016-06-27

Applicant: SAMSUNG ELECTRONICS CO., LTD. ,  CALIFORNIA INSTITUTE OF TECHNOLOGY

Inventor： Seunghoon HAN ,  Yongsung KIM ,  Seyedeh Mahsa KAMALI ,  Amir ARBABI ,  Yu HORIE ,  Andrei FARAON ,  Sungwoo HWANG

IPC: H01L27/146

CPC classification number: H01L27/14685 ,  H01L21/76254 ,  H01L21/76256 ,  H01L27/1203 ,  H01L27/14621 ,  H01L27/14698

Abstract: A method of manufacturing an image senor includes: preparing a sensor substrate including: a sensor layer including a photosensitive cell; and a signal line layer including lines to receive electric signals from the photosensitive cell; forming a first material layer having a first refractive index on the sensor substrate; and forming a nanopattern layer on the first material layer, the nanopattern layer including a material having a second refractive index different from the first refractive index.

Abstract translation: 图像传感器的制造方法包括：准备传感器基板，包括：传感器层，包括感光单元; 以及信号线层，包括从感光单元接收电信号的线; 在所述传感器基板上形成具有第一折射率的第一材料层; 以及在所述第一材料层上形成纳米图案层，所述纳米图案层包括具有与所述第一折射率不同的第二折射率的材料。