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公开(公告)号：JPS57103113A
公开(公告)日：1982-06-26
申请号：JP17821280
申请日：1980-12-17
Applicant: SONY CORP
Inventor： KINOSHITA TAKASHI , SHIROCHI YOSHIKI , MOTOYOSHI NOBORU
Abstract: PURPOSE:To separate a pilot signal securely from an audio signal without influencing the audio signal, by recording the single pilot signal on more than one audio track in an inphase or out-of-phase state in accordance with the kind of a multiple audio signal. CONSTITUTION:A signal obtained by demodulating a multiple audio signal is recorded on more than one audio track, and in accordance with the kind of the multiple audio signal, a single pilot signal is recorded on more than one audio track in an inphase or out-of-phase state. For example, the recording system 10A of a VTR superposes on encoded single-frequency pilot signals Pb and Pc, generated by a generating circuit 20 from the output Pw of a detecting circuit 15 for the multiple control signal, corresponding to the multiple control signal on demodulated audio signals Sb and Sc to record them on audio tracks of a magnetic tape 5. A reproduction system 10B supplies a reproduced control signal Pw' to a generating circuit 40 for the multiple control signal CS, which is generated corresponding to the pilot signals Pb and Pc.
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公开(公告)号：JP2010027770A
公开(公告)日：2010-02-04
申请号：JP2008185878
申请日：2008-07-17
Inventor： KUBOI NOBUYUKI , NAGAHATA KAZUNORI , KINOSHITA TAKASHI
IPC: H01L21/3065
Abstract: PROBLEM TO BE SOLVED: To solve the problem in the etching end point detection by the conventional visible light monitoring, wherein when a monitoring window is clouded, the transmission of a visible light passing through thereof is reduced and the detection accuracy is reduced.
SOLUTION: Dry etching equipment includes: an etching chamber 2 for dry-etching processing an object to be processed; a semiconductor substrate; and a photo detection unit 3 for detecting a millimeter wave and a submillimeter wave through a window 4 disposed on the side wall of the etching chamber 2. The equipment detects the etching endpoint by using the detection result of the photo detection unit 3.
COPYRIGHT: (C)2010,JPO&INPITAbstract translation: 要解决的问题：为了解决通过常规可见光监测的蚀刻终点检测中的问题，其中当监视窗口变得阴影时，通过其的可见光的透射减少，并且检测精度降低 。 干蚀刻设备包括：用于对要处理的物体进行干蚀刻处理的蚀刻室2; 半导体衬底; 以及用于通过设置在蚀刻室2的侧壁上的窗口4检测毫米波和亚毫米波的光检测单元3.该设备通过使用光检测单元3的检测结果来检测蚀刻终点。
版权所有（C）2010，JPO＆INPIT
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43.发明专利Micro-resonator, band pass filter, semiconductor device and communication equipment 有权微型谐振器，带通滤波器，半导体器件和通信设备
公开(公告)号：JP2007013447A
公开(公告)日：2007-01-18
申请号：JP2005190269
申请日：2005-06-29
Inventor： MORITA SHINYA , KINOSHITA TAKASHI , TANAKA NAOHIRO , TADA MASAHIRO , MITARAI TAKASHI
CPC classification number: H03H3/0073 , H03H3/0072 , H03H9/02244 , H03H9/02433 , H03H9/2463 , H03H2009/02511
Abstract: PROBLEM TO BE SOLVED: To suppress signal leakage through a parasitic capacity in a micro-resonator constituted of an electrostatically driven beam type resonator, to widen the band of a band pass filter by using the micro-resonator, and to increase the reliability of a semiconductor device and communication equipment equipped with the micro-resonator. SOLUTION: This micro-resonator is constituted of a beam type resonator 311, and a beam 36 formed as the vibrating part of the resonator 311 is provided with a high resistance part or an insulating part 361a. The beam 36 is constituted of at least two or more layers, and a portion of an upper layer and the lowermost layer continued to this is formed of a high resistance or an insulator. COPYRIGHT: (C)2007,JPO&INPIT
Abstract translation: 要解决的问题：为了通过由静电驱动光束型谐振器构成的微谐振器中的寄生电容来抑制信号泄漏，通过使用微谐振器来扩大带通滤波器的频带，并且增加 具有微型谐振器的半导体器件和通信设备的可靠性。 解决方案：该微型谐振器由光束型谐振器311构成，并且形成为谐振器311的振动部分的光束36设置有高电阻部分或绝缘部分361a。 光束36由至少两层或更多层构成，上层的一部分和与其连续的最下层由高电阻或绝缘体形成。 版权所有（C）2007，JPO＆INPIT
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44.发明专利Micro electromechanical element, optical micro electromechanical element, light modulation element and laser display 审中-公开微电子元件，光电微机电元件，光调制元件和激光显示器
公开(公告)号：JP2006068843A
公开(公告)日：2006-03-16
申请号：JP2004253588
申请日：2004-08-31
Inventor： SARUTA NORIHIKO , ITO YASUYUKI , KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To optimize the beam inclination amount while restraining the bending of a beam even if the beam is made micro-sized in a micro electromechanical element requiring an inclination in the surface shape of the beam.
SOLUTION: A lower electrode 43 is provided with a beam 45 opposite thereto through a space 44 and supported at the end parts, and the beam 45 is provided with a step 51 for causing inclination in the width direction of the beam. The step 51 is provided with a means 52 for relaxing the stress of a triple point.
COPYRIGHT: (C)2006,JPO&NCIPIAbstract translation: 要解决的问题：为了优化光束倾斜量，同时抑制光束的弯曲，即使光束被制成微尺寸在需要在光束的表面形状中倾斜的微机电元件中。 解决方案：下电极43通过空间44设置有与其相对的梁45并且在端部处被支撑，并且梁45设置有用于在梁的宽度方向上产生倾斜的台阶51。 步骤51设置有用于放松三重点的应力的装置52。 版权所有（C）2006，JPO＆NCIPI
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45.发明专利Micro-structure, sealing method of micro-structure, micro electro mechanical system, manufacturing method thereof, and electronic device 有权微结构，微结构密封方法，微电子机械系统及其制造方法及电子设备
公开(公告)号：JP2006043847A
公开(公告)日：2006-02-16
申请号：JP2004231210
申请日：2004-08-06
Inventor： SARUTA NORIHIKO , ITO YASUYUKI , KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide a micro-structure, easily forming a sealed structure using a semiconductor process, and a micro electro mechanical system. SOLUTION: An enveloping wall part 48 is formed to enclose a micro electro mechanical system body 46 on a substrate 42, and an upper film 49 lowered due to film characteristic is made to closely adhere to the top face of the enveloping wall part 48, thereby sealing the micro electro mechanical system body 46. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种使用半导体工艺容易地形成密封结构的微结构和微机电系统。 解决方案：包围壁部分48形成为将微电子机械系统主体46包围在基板42上，并且由于膜特性而降低的上膜49被紧密地附着在包封壁部分的顶面上 48，从而密封微机电系统体46.版权所有：（C）2006，JPO＆NCIPI
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Patent Agency Ranking
公开(公告)号：JP2006033740A
公开(公告)日：2006-02-02
申请号：JP2004213305
申请日：2004-07-21
Inventor： TADA MASAHIRO , KINOSHITA TAKASHI , NANBADA KOJI
Abstract: PROBLEM TO BE SOLVED: To provide a micro resonator which secures frequency characteristics, by controlling the fluctuations in the center frequencies among each resonator element. SOLUTION: A micro resonator structural body 10 is constituted so as to be simultaneously provided with a resonator element structural body 11, having a plurality of resonator elements F and contributing to a resonance operation and with a non-resonator element structural body 12, arranged at a periphery of the resonator element structural body 11 having a plurality of non-resonator elements N and giving no contribution to the resonance operation. Even though the micro resonator structural body 10 is influenced by a reflective light at processing a photolithography in its manufacturing process, a forming accuracy of the resonator elements F is secured; while the forming accuracy of the non-resonator elements N is reduced since the influence of the reflected light is easily brought to the forming accuracy of the eternal non-resonator elements N, while it is less likely to affect the forming accuracy of the central resonator elements F. Since the formed dimension of each resonator element F will thereby not easily fluctuate, the center frequency among each resonator element F will not easily fluctuate. COPYRIGHT: (C)2006,JPO&NCIPI
Abstract translation: 要解决的问题：通过控制每个谐振器元件中的中心频率的波动来提供确保频率特性的微谐振器。 解决方案：微谐振器结构体10被构造成同时设置有谐振元件结构体11，谐振元件结构体11具有多个谐振元件F并且有助于谐振操作，并且具有非谐振元件结构体12 布置在具有多个非谐振元件N的谐振元件结构体11的周边，并且对共振操作没有贡献。 即使微波谐振器结构体10在其制造工艺中处理光刻时受到反射光的影响，确保了谐振元件F的成形精度; 同时由于反射光的影响容易达到永久非谐振元件N的成形精度，所以非谐振元件N的成形精度降低，同时不太可能影响中心谐振器的形成精度 由于每个谐振元件F的形状尺寸因此不容易波动，所以每个谐振器元件F之间的中心频率将不容易波动。 版权所有（C）2006，JPO＆NCIPI
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公开(公告)号：JP2005195480A
公开(公告)日：2005-07-21
申请号：JP2004002585
申请日：2004-01-08
Inventor： KINOSHITA TAKASHI
IPC: G01P13/00
Abstract: PROBLEM TO BE SOLVED: To provide a motion detector for simultaneously actualizing sensor chip downsizing and detection sensitivity enhancement. SOLUTION: This motion detector is constructed by using a flow path 4 partly formed into a circular arc shape with a liquid 5 sealed therewithin and a chip 1 comprising pressure detection parts 2 and 3 for detecting a physical change in the liquid 5 sealed in the flow path 4 as a change in pressure received from the liquid 5 at both the ends of the flow path 4. COPYRIGHT: (C)2005,JPO&NCIPI
Abstract translation: 要解决的问题：提供一种用于同时实现传感器芯片尺寸缩小和检测灵敏度增强的运动检测器。 解决方案：该运动检测器通过使用部分形成为圆形的流动路径4，其中密封有液体5并且包括用于检测液体5的物理变化的压力检测部分2和3的芯片1被构造成密封 在流路4中作为从流路2两端的液体5接收的压力变化。版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2005190522A
公开(公告)日：2005-07-14
申请号：JP2003428403
申请日：2003-12-24
Inventor： KOYATA TOSHIHIRO , SAKO YOICHIRO , OTA OSAMU , OGAMI TAKAHISA , KINOSHITA TAKASHI , MIZUNO HIROSHI
Abstract: PROBLEM TO BE SOLVED: To reproduce data stored in a portable reproducing device in excellent quality.
SOLUTION: Since enciphered and compressed music data stored in a portable reproducing device 3 are processed in a decoder section 45 and a music data processing section 46 of a reproduction-only audio system 5, music signals are obtained in the quality higher than reproduced in the decoder section 36 and the music data processing section 37 of the portable reproducing device 3. As a result, this reproducing system can provide a user with the music of excellent quality.
COPYRIGHT: (C)2005,JPO&NCIPIAbstract translation: 要解决的问题：以优异的质量再现存储在便携式再现装置中的数据。 解码：由于在便携式再现装置3中存储的加密和压缩的音乐数据在仅再现音频系统5的解码器部分45和音乐数据处理部分46中被处理，所以音乐信号的质量高于 再现在便携式再现装置3的解码器部分36和音乐数据处理部分37中。结果，该再现系统可以向用户提供优质的音乐。 版权所有（C）2005，JPO＆NCIPI
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公开(公告)号：JP2004306218A
公开(公告)日：2004-11-04
申请号：JP2003104967
申请日：2003-04-09
Inventor： KINOSHITA TAKASHI
Abstract: PROBLEM TO BE SOLVED: To provide a manufacturing method of a micro machine, forming a movable part with good pattern accuracy without a special manufacturing apparatus.
SOLUTION: In the state of covering a sacrificial layer 8 formed in a pattern on a substrate 8, an insulating structure film 11 and a conductive film 13 are formed in order. With a first resist pattern 201 used as a mask, a conductive film 13 part on a sacrificial layer 9 is etched according to the shape of the movable part. After the first resist pattern 201 is removed and the surface of the conductive film 13 is subjected to corrosive processing, with the conductive film 13 used as a mask, the structure film 11 part on the sacrificial layer 9 is etched according to the shape of the movable part to expose part of the sacrificial layer 9. With a second resist pattern 203 for covering the upper side of the sacrificial layer 9 as a mask, the conductive film 13 part on the structure film 11 is etched according to the shape of a wiring pattern 13a. After the second resist pattern 203 is removed, the sacrificial layer 9 is selectively removed to form a space part (a) below the movable part 15.
COPYRIGHT: (C)2005,JPO&NCIPI-
公开(公告)号：JP2001196222A
公开(公告)日：2001-07-19
申请号：JP2000007518
申请日：2000-01-17
Inventor： KINOSHITA TAKASHI , ENOMOTO KAZUYUKI , SHIBUYA KAZUO , TANAKA SHOEI
Abstract: PROBLEM TO BE SOLVED: To secure the magnetic continuity of an absorbing unit and a wire winding unit in a lateral electromagnetic solenoid, prevent variations in magnetic force when the solenoid is energized, and downsize the solenoid. SOLUTION: An iron core unit A comprises a pair of absorbing units 1, 1 which are almost parallel to each other, and a wire winding unit 2 connected orthogonally to the absorbing unit, and the lateral solenoid is formed by winding a wire around the iron core unit. The iron core unit is integrated as the one having an electromagnetic linkage between the absorbing unit and the wire winding unit. A guide groove 101 for winding-wire guidance is provided inside the absorbing unit on the side where winding a wire is started.
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