公开(公告)号：EP1590828A2

公开(公告)日：2005-11-02

申请号：EP03800161.6

申请日：2003-12-23

Applicant: LAM RESEARCH CORPORATION

Inventor： BOYD, John ,  KUTHI, Andras ,  THIE, William ,  SMITH, Michael, G.R. ,  KNOP, Robert ,  ANDERSON, Thomas, W.

IPC: H01L21/302

CPC classification number: B08B3/12 ,  B06B1/0253 ,  B06B2201/71 ,  B08B3/10 ,  H01L21/67057 ,  H01L21/67253

Abstract: system and method of cleaning a substrate (202) includes a megasonic chamber (206) that includes a transducer (210) and a substrate (202). The transducer (210) is being oriented toward the substrate (202). A variable distance d separates the transducer (210) and the substrate (202). The system (200) also includes a dynamically adjustable RF generator (212) that has an output coupled to the transducer. The dynamically adjustable RF generator (212) can be controlled by a phase comparison of an oscillator output (306) voltage and a phase of an RF generator output voltage. The dynamically adjustable RF generator (212) can also be controlled by monitoring a peak voltage of an output signal and controlling the RF generator to maintain the peak voltage within a predetermined voltage range. The dynamically adjustable RF generator (212) can also be controlled by dynamically controlling a variable DC power supply voltage.

公开(公告)号：EP0645057A4

公开(公告)日：1996-04-17

申请号：EP93914396

申请日：1993-06-03

Applicant: ULTRASONIC POWER CORP

Inventor： PUSKAS PETER J

IPC: B06B1/02 ,  H03L5/02 ,  H01L41/08

CPC classification number: B06B1/0246 ,  B06B2201/71 ,  H03L5/02

Abstract: A generator for driving an ultrasonic transducer for use in ultrasonic cleaning. The generator is based on a voltage controlled oscillator (26) which drives an output circuit which includes the ultrasonic transducer (22). The output circuit has a resonant frequency, and a resonance follower (30) produces a control voltage which tunes the voltage controlled oscillator to the resonant frequency. Operating in conjunction with the automatic tuning elements is a constant power control which allows the user to set a desired power level, and monitors the actual output power by means of an output wattmeter circuit (32) to cause the actual output power to match the level selected by the user. The constant output power circuit is effective even during resonance tracking of the system, or during frequency modulation of the ultrasonic output energy.

公开(公告)号：EP0612570A3

公开(公告)日：1994-10-12

申请号：EP94301254.2

申请日：1994-02-22

Applicant: Shibano, Yoshihide

Inventor： Shibano, Yoshihide ,  Saito, Tsutou, 8-12, Aza Yakumojinja

IPC: B06B1/02 ,  B08B3/12

CPC classification number: B06B1/0284 ,  B06B2201/71 ,  B08B3/12

Abstract: An ultrasonic vibrator (1) has a single natural frequency for radiating ultrasonic energy into a cleaning solution (4) to clean and deburr workpieces that are immersed in the cleaning solution. A plurality of oscillating signals (a,b,c) having respective different frequencies which are integral multiples of the natural frequency of the ultrasonic vibrator are generated, and successively outputted for respective periods of time thereby to generate a composite signal which is composed of a time series of the oscillating signals. The composite signal is applied as a drive signal to the ultrasonic vibrator to oscillate the ultrasonic vibrator. The oscillating signals may be outputted successively for said respective periods of time or intermittently with quiescent periods inserted therebetween.

公开(公告)号：EP0172263A1

公开(公告)日：1986-02-26

申请号：EP84109748.8

申请日：1984-08-16

Applicant: Martin Walter Ultraschalltechnik GmbH

Inventor： Weber, Dieter

IPC: B06B1/02

CPC classification number: B08B3/12 ,  B06B1/0253 ,  B06B2201/71

Abstract: Die Leistungsabgabe von Ultraschall-Reinigungsanlagen ist von verschiedenen Parametern abhängig, wie von der verwendeten Flüssigkeit, dem Füllstand, der Viskosität der Flüssigkeit, der Temperatur, der Spannung usw. Durch diese Parameter wird jedoch nicht nur die Leistungsabgabe und damit die Reinigungswirkung beeinflußbt, sondern auch die leistungsaufnahme des Ultraschall-Generators, wie auch des zugehörigen Schallwandlers (Schwingers). Um die Leistungsaufnahme dieser Geräte in Grenzen zu halten und eine von den genannten Parametern unabhängige Leistungsabgabe zu erreichen, wird nach der Erfindung vorgeschlagen, daß die Generatorfrequenz in Abhängigkeit von der Leistungsaufnahme des Wandlers (4) über eine Wirkleistungs-Meßeinrichtung (5), die den Istwert vorgibt, zu regeln, wobei der Istwert zusammen mit einem Sollwert einem Differenzverstärker (6) zugeleitet und das Differenzsignal zum Steuern eines VCO (3), der die Ausgangsfrequenz bestimmt, eingesetzt wird.

Abstract translation: 超声波清洗系统的功率输送取决于各种参数，如使用的液体，饱和度，液体粘度，温度，电压等。然而，不仅功率输送和清洁效果受到影响 通过这些参数，而且超声波发生器和相关联的声音传感器（振荡器）的功率消耗。 为了限制这些装置的功率消耗并且实现独立于上述参数的功率输送，根据本发明提出，发电机频率被控制为换能器（4）的功率消耗的函数， 通过预先确定实际值的有效功率测量装置（5）将实际值与参考值一起馈送到差分放大器（6），差分信号用于控制确定输出频率的VCO（3） 。

公开(公告)号：EP3408036A1

公开(公告)日：2018-12-05

申请号：EP17700513.9

申请日：2017-01-12

Applicant: Weber Ultrasonics GmbH

Inventor： BROSZEIT, Ralf

IPC: B06B1/02 ,  B08B3/12

CPC classification number: B06B1/0284 ,  B06B2201/71 ,  B08B3/12

Abstract: Proposed is a method for exciting sound-wave producing transducers (7) which have operating frequencies defining a transducer frequency range, in which a generator (9) produces an electrical drive signal for the transducers (7), said electrical drive signal being fed to the transducers (7), wherein the generator (9) carries out frequency sweeps in a frequency sweep range between a minimum frequency (f
min ) and a maximum frequency (f
max ) with an adjustable sweep rate, with a target frequency (f
Ziel ) being defined within said frequency sweep range, said method being characterized in that the minimum frequency (f
min ), the maximum frequency (f
max ) and the target frequency (f
Ziel ) are selected in such a way that a first frequency difference (Δf
1 ) between the minimum frequency (fmin) and the target frequency (f
Ziel ) differs in terms of magnitude from a second frequency difference (Δf
2 ) between the maximum frequency (f
max ) and the target frequency (f
Ziel ) within a number of frequency sweeps, and wherein the minimum frequency (f
min ) and/or the maximum frequency (f
max ) and/or the target frequency (f
Ziel ) is/are modified after at least one frequency sweep in such a way that an arithmetic mean of the first frequency differences (Δf
1 ), formed over all frequency sweeps carried out, and an arithmetic mean of the second frequency differences (Δf
2 ), formed over all frequency sweeps carried out, are substantially the same in terms of magnitude.

公开(公告)号：EP3192635A4

公开(公告)日：2018-05-02

申请号：EP14901685

申请日：2014-09-09

Applicant: BLUE STAR R&D CO LTD

Inventor： SHIBANO YOSHIHIDE

IPC: B29C37/02 ,  B08B3/12

CPC classification number: B29C37/02 ,  B06B1/0269 ,  B06B2201/71 ,  B08B3/12 ,  B29C35/0261

Abstract: It is an object of the present invention to remove burrs effectively by further enhancing an impact force of cavitation generated by ultrasonic waves during deburring of the molded product through radiation of ultrasonic waves in the deburring washing water. In a deburring device configured to remove burrs of the molded product through radiation of ultrasonic waves, a height of the storage tank 2 is set to 1.25» mm when a wavelength of an ultrasonic wave is set to » mm. A frequency range of ultrasonic wave radiating means 6 arranged on a bottom side of the washing water storage tank 2 is set to from 18 KHz to 28 KHz, and power density is set to 2 W/cm 2 or higher. Further, there is arrangedoscillatingmeans 9 configured to allow the molded product immersed in the washing water to vertically move with a stroke of at least 1/2» mm in a vertical direction. Further, an amount of dissolved oxygen in the washing water is set to 1 mg/litter or less, and a water temperature of the deburring washing water is set to from 4°C to 8°C.

公开(公告)号：EP3200892A1

公开(公告)日：2017-08-09

申请号：EP15847217.5

申请日：2015-09-30

Applicant: Flodesign Sonics Inc.

Inventor： LIPKENS, Bart ,  KING, Jeff ,  SOKOLOWSKI, David ,  MASI, Anthony B. ,  KENNEDY, Brian T. ,  MCCARTHY, Brian ,  ROSS-JOHNSRUD, Benjamin ,  DIONNE, Jason ,  MEALEY, Dane ,  BARNES, Jason

IPC: B01D17/00 ,  B01D21/28 ,  B01D43/00 ,  C02F1/36

CPC classification number: B01D21/283 ,  B01D17/044 ,  B01D17/06 ,  B01D19/0078 ,  B06B1/06 ,  B06B1/0622 ,  B06B1/0644 ,  B06B2201/71 ,  C12M47/04 ,  C12N13/00

Abstract: Acoustophoretic devices for separating particles from a non-flowing host fluid are disclosed. The devices include a substantially acoustically transparent container and a separation unit, with the container being placed within the separation unit. An ultrasonic transducer in the separation unit creates a planar or multi-dimensional acoustic standing wave within the container, trapping particles disposed within the non-flowing fluid and causing them to coalesce or agglomerate, then separate due to buoyancy or gravity forces.

Abstract translation: 公开了用于从不流动的主流体中分离颗粒的声泳装置。 这些装置包括基本透声的透明容器和分离单元，容器放置在分离单元内。 分离单元中的超声换能器在容器内产生平面或多维声驻波，捕集设置在非流动流体内的颗粒并使它们聚结或结块，然后由于浮力或重力而分离。

公开(公告)号：EP3071339A1

公开(公告)日：2016-09-28

申请号：EP14837096.8

申请日：2014-11-24

Applicant: Messerli, Felipe W.

Inventor： Messerli, Felipe W.

IPC: B06B1/02 ,  B08B3/12

CPC classification number: B06B1/0223 ,  B06B2201/71 ,  B08B3/12

Abstract: The invention relates to an ultrasonic cleaning device comprising at least one actuator (7) that is associated with a basin (1) for receiving the objects to be cleaned. The device also comprises a control device (10) for controlling said actuator. The control device (10) is designed to provide vibrations of a variable frequency within a broad bandwidth at a variable voltage amplitude for different frequencies, by means of driving voltages and by means of the combination of electrodes on the actuators of a transducer (2).

公开(公告)号：EP0978118A1

公开(公告)日：2000-02-09

申请号：EP98917421.4

申请日：1998-04-20

Applicant: British Nuclear Fuels PLC

Inventor： JENNINGS, Howard, T.,British Nuclear Fuels Plc

IPC: G10K11/02 ,  G10K11/00 ,  B06B3/00

CPC classification number: B06B3/00 ,  B06B2201/71 ,  G10K11/004 ,  G10K11/025

Abstract: A method and apparatus for removing contamination or corrosion, as defined, in a chamber or pipe is described. The apparatus comprises a horn and transducer assembly; said horn having two ends, a first end of which is in contact with an external surface of the chamber or pipe; an acoustic transducer in contact with the other end of the horn; and means for energising the acoustic transducer, whereby in use acoustic energy from the transducer is guided through the horn to the surface of the chamber or pipe and thereby into the liquid contained therein.

公开(公告)号：EP0319631A1

公开(公告)日：1989-06-14

申请号：EP87630233.2

申请日：1987-11-09

Applicant: EMERSON ELECTRIC CO.

Inventor： Van Brakel, Ben

IPC: B06B1/02

CPC classification number: B06B1/0253 ,  B06B2201/71 ,  B06B2201/72

Abstract: The invention concerns a method of controlling the operation of an ultrasonic generator including an ultraso­nic oscillator to function at a desired power output, as well as a so controlled ultrasonic generator. The output voltage and/or current is sensed to produce corresponding digital real point voltage and/or current signals which are compared to corresponding digital set point voltage and/or current signals to adjust the frequence and/or pulse width of a digitally controlled ultrasonic oscillator to make real point equal to set point. The invention is par­ticularly useful in ultrasonic cleaning devices or ultra­sonic welders.

Abstract translation: 本发明涉及一种控制超声波发生器的操作的方法，该超声波发生器包括在期望的功率输出上起作用的超声波振荡器，以及如此受控的超声发生器。 感测输出电压和/或电流以产生对应的数字实点电压和/或电流信号，其与对应的数字设定点电压和/或电流信号进行比较，以调整数字控制的超声波振荡器的频率和/或脉冲宽度 使真实点等于设定点。 本发明在超声波清洗装置或超声波焊接机中特别有用。