公开(公告)号：EP2913654B1

公开(公告)日：2017-12-06

申请号：EP13849192.3

申请日：2013-10-04

Applicant: Olympus Corporation

Inventor： MORIMOTO, Nobuhiko

IPC: G01N1/04 ,  B32B43/00

CPC classification number: G01N1/04 ,  B32B41/00 ,  B32B43/006 ,  B32B2310/0831 ,  G01N1/08 ,  G01N1/312 ,  G01N21/6456 ,  G01N2201/025 ,  G02B21/365 ,  Y10T156/1158 ,  Y10T156/1179 ,  Y10T156/19 ,  Y10T156/1917 ,  Y10T156/1983

Abstract: The present invention provides a substrate collecting device (1) that includes a stage (3) on which a sheet (11) is placed with a plurality of substrates (2) facing downward, an acquiring section (4) which carries out a predetermined operation on some of the substrates (2), which are disposed at predetermined positions, from above the stage (3) thereby to cause the substrates (2) to come off from the sheet (11) and fall, an observation section (5) and a collecting section (7) disposed below the stage (3), and a moving mechanism (8), which integrally moves the observation section (5) and the collecting section (7) in a horizontal direction. The moving mechanism (8) is capable of positioning the observation section (5) and the collecting section (7) at two positions at which the observation section (5) or the collecting section (7) is positioned substantially vertically below a predetermined position.

公开(公告)号：EP2891175A1

公开(公告)日：2015-07-08

申请号：EP13833045.1

申请日：2013-09-02

Applicant: Semiconductor Technologies & Instruments Pte Ltd.

Inventor： JIN Jian Ping ,  LEE Leng Kheam

IPC: H01L21/683

CPC classification number: H01L21/681 ,  B25J11/0095 ,  B25J15/0616 ,  B25J15/0658 ,  B25J15/0666 ,  G01B11/27 ,  G01N21/9501 ,  G01N2201/025 ,  H01L21/67144 ,  H01L21/67706 ,  H01L21/6838 ,  H01L21/68757 ,  Y10T29/49826

Abstract: A wafer table structure providing a single wafer table surface suitable for handling both wafers and film frames includes a base tray having a set of compartments formed therein by way of a set of ridges formed in or on an interior base tray surface; a hardenable fluid permeable compartment material disposed within the set of base tray compartments; and a set of openings formed in the base tray interior surface by which the hardened compartment material is exposable to negative or positive pressures. The base tray includes a first ceramic material (e.g., porcelain), and the hardenable compartment material includes a second ceramic material. The base tray and the compartment material are simultaneously machinable by way of a standard machining process to thereby planarize exposed outer surfaces of the base tray and the hardened compartment material at an essentially identical rate for forming a highly or ultra-planar wafer table surface.

公开(公告)号：JP2017526158A

公开(公告)日：2017-09-07

申请号：JP2016568401

申请日：2015-05-15

Applicant: ケーエルエー−テンカー コーポレイション ,  ケーエルエー−テンカー コーポレイション

Inventor： イヴァン マリーヴ ,  イヴァン マリーヴ ,  ヴェンカタ コード ,  ヴェンカタ コード

IPC: H01L21/66 ,  G01B11/30 ,  G01N21/956 ,  H01L21/68

CPC classification number: G01N21/9503 ,  G01N21/47 ,  G01N21/55 ,  G01N2201/025 ,  G01N2201/061

Abstract: ウェーハ上の固定位置(複数)のウェーハ検査座標を決定する方法およびシステムが提供される。1つのシステムは、ウェーハのエッジ上のスポットに光を指向するように構成された照明サブシステムを含む。スポットはウェーハのエッジを越えて延出する。システムはさらに、ウェーハを回転させ、それにより、スポットをウェーハのエッジにわたり走査させる段を含む。システムはさらに、スポットがエッジにわたり走査される間にスポットからの光を検出して、それに応答して出力を生成するように構成された検出器を含む。システムはさらに、ウェーハのエッジ上の2箇所以上の位置のウェーハ検査座標を、出力に基づいて決定し、ウェーハ上の固定位置(複数)のウェーハ検査座標を、エッジ上の2箇所以上の位置のウェーハ検査座標に基づいて決定するように構成されたコンピュータプロセッサを含む。

公开(公告)号：JP2015505049A

公开(公告)日：2015-02-16

申请号：JP2014547458

申请日：2012-12-14

Applicant: シーメンス・ヘルスケア・ダイアグノスティックス・インコーポレーテッドSiemens Healthcare Diagnostics Inc. ,  シーメンス・ヘルスケア・ダイアグノスティックス・インコーポレーテッドSiemens Healthcare Diagnostics Inc.

Inventor： マイルスキー ローレンス ,  マイルスキー ローレンス ,  エヌ． ザントス ジョージ ,  エヌ． ザントス ジョージ

IPC: G01N35/04

CPC classification number: G01N21/8483 ,  G01B11/14 ,  G01N21/253 ,  G01N21/27 ,  G01N35/00069 ,  G01N35/04 ,  G01N2035/00148 ,  G01N2035/0491 ,  G01N2201/025 ,  G01N2201/0438 ,  G01N2201/06113

Abstract: 試薬カード分析装置は、所定の強度を有する光信号を送信する光信号源と、送信される光信号の光信号経路を光信号源と共に定めるように、光信号源から所定の距離を置いて配置され、かつ、光信号を検出してその強度を表す電気信号を出力するように構成された光信号検出器と、試薬カードの試薬パッドを読み出すように構成されたリーダと、前端及び後端を有する試薬パッドを含む1つもしくは複数の試薬カードを、光信号経路を通過してリーダへ向かうように、試薬カードを搬送させる、試薬カード搬送装置と、光信号経路に電気的に結合されており、光信号検出器からの電気信号を受信し、試薬カードが光信号経路を通過して移動される際に試薬パッドの前端及び後端の少なくとも一方を表すパッド検出信号を出力するように構成された光信号検出器インタフェースとを含む。

Abstract translation: 试剂卡分析仪，在用于发射具有预定的强度，以便限定与所述光信号源，从光信号源设置的预定距离沿着传输的光信号的光信号路径中的光信号的光信号源 它是，并且被配置为输出电信号表示该强度来检测光信号的光信号检测器，以及被配置为读出的试剂卡的试剂垫，所述前端和后端的读取器 一种或多种试剂包含具有试剂垫卡，作为发往读取器通过所述光信号路径传达试剂卡，该试剂卡输送装置电耦合到所述光信号路径 接收从光学信号检测器的电信号，被配置为输出表示所述试剂垫的前端和后端中的至少一个的焊盘检测信号时的试剂卡移动经过光信号路径 并且它包括一个光信号检测器接口。

公开(公告)号：KR101829953B1

公开(公告)日：2018-02-19

申请号：KR1020140167189

申请日：2014-11-27

Applicant: 타이완 세미콘덕터 매뉴팩쳐링 컴퍼니 리미티드

Inventor： 린친-시앙 ,  추앙쿠오-쉥 ,  우웨이보 ,  쿠웬-유

IPC: H01L21/66 ,  H01L21/677 ,  H01L21/683

CPC classification number: H01L21/30604 ,  G01B11/0641 ,  G01N2201/025 ,  G01N2201/061 ,  H01L21/67253 ,  H01L22/12 ,  H01L22/20

Abstract: 막정보를얻기위해계측장치에의해기판의막을측정하는단계를포함하는통합형시스템의작동방법이개시되어있다. 기판은계측장치로부터이송장치에인접한공정장치로이동된다. 막정보는공정장치로전송된다. 제1 막정보에따라기판에막 처리가실시된다.

Abstract translation: 并通过测量装置测量基板的膜以获得胶片信息。 将衬底从计量设备转移到与转移设备相邻的处理设备。 胶片信息被传送到处理装置。 根据第一胶片信息在基片上进行胶片处理。

公开(公告)号：US11977023B2

公开(公告)日：2024-05-07

申请号：US17765138

申请日：2020-09-24

Applicant: MICRO DIGITAL CO., LTD.

Inventor： Kyung Nam Kim

IPC: G01N21/31 ,  G01J3/42 ,  G01N21/25 ,  G01N21/03

CPC classification number: G01N21/31 ,  G01J3/42 ,  G01N21/255 ,  G01N2021/035 ,  G01N2201/025 ,  G01N2201/06

Abstract: Provided is a spectrophotometric device including a base plate including a first surface to accommodate a sample thereon, a rotatable plate including a second surface corresponding to and spaced a certain distance apart from the first surface, a test beam radiator connected to the first surface through a first beam guide to radiate a test beam to the sample accommodated on a beam path between the first and second surfaces, a spectrophotometer connected to the second surface through a second beam guide to analyze spectroscopic properties of the sample by analyzing a characteristic beam having passed through the sample accommodated on the beam path, and a state determiner provided near the beam path to determine whether the sample accommodated between the first and second surfaces is in a state in which analysis of optical properties is enabled.

公开(公告)号：US20170176341A1

公开(公告)日：2017-06-22

申请号：US15388010

申请日：2016-12-22

Applicant: ARIEL ROSENBERG

Inventor： Adir MUGRABI ,  Ariel ROSENBERG

IPC: G01N21/87 ,  G01N21/01

CPC classification number: G01N21/87 ,  G01N21/01 ,  G01N2201/025

Abstract: A portable small-object holding device, comprising: a housing, movable gripper jaws configured to grip and hold a small object; at least one hinge and at least one cog-wheel configured to enable rotating said at least one hinge around its longitudinal axis; and wherein the portable small-object holding device is adapted to enable illuminating the small object when being held within said portable small-object holding device, by a beam of light at least one wavelength. The inspection of the small-object is carried out after inserting the portable small-object holding device via an aperture comprised in a portable apparatus for inspecting small objects, and preferably engaging the portable small-object holding device with the portable apparatus for inspecting small objects.

公开(公告)号：US09618417B2

公开(公告)日：2017-04-11

申请号：US13656096

申请日：2012-10-19

Applicant: Picarro, Inc.

Inventor： Chris W. Rella ,  Eric R. Crosson ,  Michael Woelk ,  Sze Meng Tan

IPC: G01N9/00 ,  G01M3/20 ,  G01N21/3504 ,  G01N21/01 ,  G01N21/39 ,  G01M3/38 ,  G01N21/03

CPC classification number: G01M3/20 ,  G01M3/38 ,  G01N21/01 ,  G01N21/31 ,  G01N21/3504 ,  G01N21/39 ,  G01N2021/0314 ,  G01N2201/025

Abstract: Improved gas leak detection from moving platforms is provided. Automatic horizontal spatial scale analysis can be performed in order to distinguish a leak from background levels of the measured gas. Source identification can be provided by using isotopic ratios and/or chemical tracers to distinguish gas leaks from other sources of the measured gas. Multi-point measurements combined with spatial analysis of the multi-point measurement results can provide leak source distance estimates. These methods can be practiced individually or in any combination.

公开(公告)号：US09546946B2

公开(公告)日：2017-01-17

申请号：US14361610

申请日：2014-03-28

Applicant: KLA-Tencor Corporation

Inventor： Boris Golovanevsky ,  Noam Sapiens

IPC: A61F11/06 ,  G10K11/16 ,  H03B29/00 ,  G01N21/01 ,  G01N21/95

CPC classification number: G01N21/01 ,  F16F7/01 ,  F16F9/306 ,  F16F15/02 ,  F16F15/023 ,  F16F15/04 ,  G01N21/9501 ,  G01N2201/025 ,  G10K11/1785 ,  G10K11/17873 ,  G10K2210/10 ,  G10K2210/129

Abstract: Metrology tools are provided, which comprise both active and passive vibration isolation devices, passive or active isolation systems such as constrained layer dampers, particle impact dampers or liquid impact dampers, and/or noise cancellation transducers, combined in different supporting structures of the metrology tool to dampen and reduce vibrations at a wide range of frequencies and intensities, and to which frequency range spectral analysis and optimization may be applied to determine specific tool configurations according to the provided principles.

Abstract translation: 提供了计量工具，其包括主动和被动隔振装置，被动或主动隔离系统，例如约束层阻尼器，颗粒撞击阻尼器或液体冲击阻尼器，和/或噪声消除换能器，组合在计量工具的不同支撑结构中 以便在宽范围的频率和强度下抑制和减少振动，并且根据所提供的原理，可以应用哪个频率范围的频谱分析和优化来确定具体的工具配置。

公开(公告)号：US20160178524A1

公开(公告)日：2016-06-23

申请号：US15059203

申请日：2016-03-02

Applicant: Sony Corporation

Inventor： Shinji Watanabe ,  Kazuki Aisaka

IPC: G01N21/64

CPC classification number: G01N21/6458 ,  G01N21/6428 ,  G01N2021/6439 ,  G01N2201/025 ,  G01N2201/12

Abstract: A method of setting a laser-light intensity value includes: emitting laser light, the laser light being excitation light, a fluorescent-dyed biological sample being irradiated with the excitation light and emitting light; detecting fluorescence emitted by the biological sample, and outputting a signal corresponding to a brightness value; prestoring relation information, the relation information including the plurality of laser-light intensity values, and information on at least one possible correlation between a phototoxicity degree and the brightness value in relation to each of the laser-light intensity values, the phototoxicity to the biological sample resulting from the laser light; generating a fluorescence image having the brightness value based on the output signal; calculating a brightness value representative of a ROI area based on the generated fluorescence image; and referring to the relation information, and determining a laser-light intensity value satisfying tolerance of the phototoxicity based on the calculated representative brightness value.