公开(公告)号：US20040100632A1

公开(公告)日：2004-05-27

申请号：US10716805

申请日：2003-11-18

Inventor： Timothy R. Piwonka-Corle ,  Karen F. Scoffone ,  Xing Chen ,  Lloyd J. Lacomb JR. ,  Jean-Louis Stehle ,  Dorian Zahorski ,  Jean-Pierre Rey

IPC: G01J004/00

CPC classification number: G01N21/211 ,  G01N2021/213

Abstract: A method and system for spectroscopic ellipsometry employing reflective optics to measure a small region of a sample by reflecting radiation (preferably broadband UV, visible, and near infrared radiation) from the region. The system preferably has an autofocus assembly and a processor programmed to determine from the measurements the thickness and/or complex refractive index of a thin film on the sample. Preferably, only reflective optics are employed along the optical path between the polarizer and analyzer, a sample beam reflects with low incidence angle from each component of the reflective optics, the beam is reflectively focused to a small, compact spot on the sample at a range of high incidence angles, and an incidence angle selection element is provided for selecting for measurement only radiation reflected from the sample at a single, selected angle (or narrow range of angles). The focusing mirror preferably has an elliptical shape to reduce off-axis aberrations in the focused beam. Some embodiments include both a spectrophotometer and an ellipsometer integrated together as a single instrument. In such instrument, the spectrophotometer and ellipsometer share a radiation source, and radiation from the source can be focused by either the spectrophotometer or the ellipsometer to the same focal point on a sample. Preferred embodiments of the ellipsometer employ a rotating, minimal-length Rochon prism as a polarizer, and include a spectrometer with an intensified photodiode array to measure reflected radiation from the sample, and a reference channel (in addition to a sample channel which detects radiation reflected from the sample).

公开(公告)号：US20040085537A1

公开(公告)日：2004-05-06

申请号：US10450958

申请日：2003-12-23

Inventor： Dominique Ausserre ,  Marie-Pierre Valignat

IPC: G01J004/00

CPC classification number: G01B11/0616 ,  G01N21/211

Abstract: A device for ellipsometric two-dimensional display of a sample placed in an incident medium, observed between an analyser and a polarizer intersected by convergent light reflection, wherein the ellipsometric parameters of the assembly formed by the sample and a substrate whereon it is placed, are used. The substrate comprises a support and a stack of base layers and its ellipsometric properties are known. The ellipsometric properties of the substrate are such that variations of the sample ellipsometric parameters are displayed with contrast higher that the contrast produced in the absence of the substrate. The invention also concerns a display method and an ellipsometric measurement method with spatial resolution.

Abstract translation: 在通过会聚光反射相交的分析器和偏振器之间观察到的放置在入射介质中的样品的椭圆二维显示的装置，其中由样品形成的组件的椭圆参数和放置在其上的衬底的椭圆参数是 用过的。 衬底包括支撑体和一叠基底层，其椭圆特性是已知的。 衬底的椭偏特性使得样品椭偏参数的变化被显示，其对比度高于在不存在衬底的情况下产生的对比度。 本发明还涉及具有空间分辨率的显示方法和椭圆测量方法。

公开(公告)号：US20040075834A1

公开(公告)日：2004-04-22

申请号：US10359529

申请日：2003-02-05

Applicant: Hinds Instruments, Inc.

Inventor： Andrew D. Kaplan ,  James C. Mansfield ,  Douglas C. Mark

IPC: G01J004/00

CPC classification number: G01N21/23 ,  G01N2021/9513 ,  G01N2201/101 ,  G01N2201/103

Abstract: The disclosure is directed to systems and methods for precisely measuring birefringence properties of large-format samples of optical elements. A gantry-like configuration is employed for precise movement of birefringence measurement system components relative to the sample. There is also provided an effective large-format sample holder that adequately supports the sample to prevent induced birefringence therein while still presenting a large area of the sample to the unhindered passage of light.

Abstract translation: 本公开涉及用于精确测量大幅面光学元件样品的双折射性质的系统和方法。 双折射测量系统部件相对于样品的精确运动采用了龙门式结构。 还提供了一种有效的大幅面样品保持器，其充分地支撑样品以防止其中引起的双折射，同时仍然将大面积的样品呈现给无阻碍的光通过。

公开(公告)号：US20040075826A1

公开(公告)日：2004-04-22

申请号：US10658645

申请日：2003-09-09

Inventor： Sung-In Ro ,  Hyeon-cheol Kim ,  Yong-Woo Park

IPC: G01J004/00 ,  G01N021/00

CPC classification number: G01L5/0047

Abstract: Disclosed is a residual stress measuring system for measuring the residual stress in an optical fiber. The residual stress measuring system comprises a light source for generating light used to measure the residual stress, a lens system for converting the generated light into a plane wave, a polarimeter for transforming the converted light to an input polarized light, which is incident on the optical fiber, a rotational measuring section for rotating the optical fiber so as to enable the polarized light to transmit through the optical fiber in various directions, and a detector for detecting the residual stress from a phase shift of the transmitted light.

Abstract translation: 公开了一种用于测量光纤中的残余应力的残余应力测量系统。 残余应力测量系统包括用于产生用于测量残余应力的光的光源，用于将所产生的光转换成平面波的透镜系统，用于将转换的光转换成输入偏振光的偏振计，入射到 光纤，用于使光纤旋转以使得偏振光能够透过各个方向的光纤传播的旋转测量部分，以及用于从透射光的相移中检测残余应力的检测器。

公开(公告)号：US20040021864A1

公开(公告)日：2004-02-05

申请号：US10211018

申请日：2002-07-31

Inventor： William Ian McAlexander ,  Gregory Douglas VanWiggeren

IPC: G01N021/00 ,  G01J004/00

CPC classification number: G01M11/336 ,  G01M11/3181

Abstract: A method for determining at least one optical property of an optical device comprises providing an optical input signal that includes first and second signal components that are modulated at first and second frequencies, respectively, and that have first and second polarization states, respectively. The optical input signal is passed to an optical device. An optical output signal from the optical device is separated into first and second output signals that have third and fourth polarization states, respectively. The first and second output signals are each compared with reference signals at the first and second frequencies to provide four phase shift and amplitude measurements that can be used to determine the at least one optical property of the optical device as a function of wavelength.

Abstract translation: 一种用于确定光学装置的至少一个光学性质的方法包括提供光输入信号，该光输入信号包括分别在第一和第二频率被调制并分别具有第一和第二极化状态的第一和第二信号分量。 光输入信号被传送到光学装置。 来自光学装置的光输出信号分别分成具有第三和第四极化状态的第一和第二输出信号。 第一和第二输出信号各自与第一和第二频率处的参考信号进行比较，以提供可用于确定作为波长的函数的光学器件的至少一个光学特性的四个相移和幅度测量。

公开(公告)号：US20040021863A1

公开(公告)日：2004-02-05

申请号：US10016913

申请日：2001-12-14

Inventor： Tetsuyuki Kurata ,  Tetsuya Satake ,  Takahiro Nishioka ,  Yoshihiro Togashi ,  Toshiaki Maehara ,  Susumu Sato

IPC: G01J004/00

CPC classification number: G02F1/1309

Abstract: Light from a light source 10 is linearly polarized by a polarizer 11. Then it propagates via a half-mirror 12 almost parallel to the normal to a reflective liquid-crystal panel 13 and falls on the reflective liquid-crystal panel 13. The reflected light reflected by the reflective liquid-crystal panel 13 is received by a detector 15 via the half-mirror 12 and an analyzer 14. In this state, the reflective liquid-crystal panel 13 is rotated about an axis almost parallel to the normal to the reflective liquid-crystal panel 13 and an angle (extinction angle) at which the output signal of detector 15 reaches minimum is measured. Then, the gap of the reflective liquid-crystal panel 13 is detected based on the measured extinction angle. It is also possible to measure the output signals of detector 15 by arranging the analyzer 14 in a state in which the transmission axis thereof is almost parallel to the polarization direction of the incident light and a state in which it is almost perpendicular thereto and to detect the gap of the reflective liquid-crystal panel 13 based on the measured signals.

Abstract translation: 来自光源10的光线被偏振片11线偏振，然后通过半反射镜12几乎平行于反射液晶板13的法线传播，并落在反射型液晶面板13上。反射光 由反射型液晶面板13反射的反射型液晶面板13由检测器15通过半透半反镜12和分析器14接收。在该状态下，反射型液晶面板13绕与反射型液晶面板13的法线大致平行的方向旋转 液晶面板13和检测器15的输出信号达到最小的角度（消光角）。 然后，基于测定的消光角检测反射型液晶面板13的间隙。 还可以通过将分析仪14布置在其透射轴几乎平行于入射光的偏振方向的状态和几乎与入射光的偏振方向相同的状态并检测检测器15的输出信号， 基于测量信号的反射液晶板13的间隙。

公开(公告)号：US20030197864A1

公开(公告)日：2003-10-23

申请号：US10430510

申请日：2003-05-06

Inventor： Lanhua Wei ,  Jon Opsal ,  Allan Rosencwaig

IPC: G01J004/00

CPC classification number: G01K11/12 ,  G01B11/065 ,  G01N21/211

Abstract: A method and apparatus are disclosed for accurately and repeatably determining the thickness of a thin film on a substrate. A rotating compensator ellipsometer is used which generates both 2null and 4null output signals. The 4null omega signal is used to provide an indication of the temperature of the sample. This information is used to correct the analysis of the thin film based on the 2null signal. These two different signals generated by a single device provide independent measurements of temperature and thickness and can be used to accurately analyze a sample whose temperature is unknown.

Abstract translation: 公开了用于精确地和可重复地确定衬底上的薄膜的厚度的方法和装置。 使用旋转补偿器椭偏仪，其产生2omega和4omega输出信号。 4omega欧米茄信号用于提供样品温度的指示。 该信息用于基于2omega信号来校正薄膜的分析。 由单个器件产生的这两个不同的信号提供温度和厚度的独立测量，并可用于准确分析温度未知的样品。

公开(公告)号：US20030193667A1

公开(公告)日：2003-10-16

申请号：US10406693

申请日：2003-04-02

Inventor： Egbert Krause ,  Adalbert Bandemer

IPC: G01J004/00

CPC classification number: G01M11/337 ,  G01J4/04 ,  G01M11/336

Abstract: Highly accurate calibration of a polarimeter of the type having at least four detectors involves using four known states of polarisation of an input light signal (calibration polarisations) and at least one further state of polarisation. All input states of polarisation to the polarimeter have unity normalised power of the light signal and unity degree of polarisation. A Stokes matrix for the four calibration polarisations is generated with at least one variable correction parameter, and a correction matrix is determined from the Stokes matrix and a corresponding detector current matrix measured by the polarimeter. An optimisation criterion that is a function of the degrees of polarisation for the states of polarisation as measured by the polarimeter is generated. The correction parameter is varied iteratively to minimise the optimisation criterion so that the polarimeter is calibrated to produce unity power and degree of polarisation for any input state of polarisation.

Abstract translation: 具有至少四个检测器的类型的偏振计的高精度校准涉及使用四个已知的输入光信号的偏振状态（校准极化）和至少一个另外的极化状态。 偏振光的所有输入状态都具有光信号的统一归一化功率和单位极化度。 使用至少一个可变校正参数生成用于四个校准极化的斯托克斯矩阵，并且从斯托克斯矩阵和由偏振计测量的对应的检测器电流矩阵确定校正矩阵。 产生通过偏振计测量的偏振状态的极化度的函数的优化标准。 校正参数被迭代地改变以最小化优化标准，使得校准偏振器以产生用于任何输入偏振状态的单位功率和极化度。

公开(公告)号：US20030184751A1

公开(公告)日：2003-10-02

申请号：US10397797

申请日：2003-03-26

Applicant: Anritsu Corporation

Inventor： Takanori Saitoh ,  Shigeru Kinugawa

IPC: G01J004/00

CPC classification number: G01J4/00

Abstract: Faraday rotators each have a Faraday element which rotates light and a magnetic field generator for applying a magnetic field to the Faraday element. A wavelength plate is disposed between the Faraday rotators and it retards the light. A polarizer transmits, of the light, light having a predetermined plane of polarization which has been rotated by the Faraday rotators and retarded by the wavelength plate. An optical receiver receives the light transmitted by the polarizer and outputs a light receiving signal which corresponds to the amount of light received. A signal generator outputs a control signal for polarizing the light to be measured into at least four polarization states to the magnetic field generator. A signal processor determines Stokes parameters which indicate the polarization state of the light to be measured based on the four polarization states, and the light receiving signal corresponding to each of the four polarization states.

Abstract translation: 法拉第旋转器各自具有旋转光的法拉第元件和用于向法拉第元件施加磁场的磁场发生器。 波长板布置在法拉第旋转器之间，并延迟光。 偏振器透射具有由法拉第旋转器旋转并被波长板延迟的具有预定偏振面的光。 光接收器接收由偏振器发射的光，并输出与所接收的光量对应的光接收信号。 信号发生器输出用于使待测光被偏振至至少四个极化状态的控制信号给磁场发生器。 信号处理器基于四个偏振态确定表示待测光的偏振状态的斯托克斯参数，以及对应于四个极化状态中的每一个的光接收信号。

公开(公告)号：US20030179375A1

公开(公告)日：2003-09-25

申请号：US10240290

申请日：2003-04-29

Inventor： Baolaing Wang

IPC: G01J004/00

CPC classification number: G01J4/00 ,  G01N21/23

Abstract: A system and method for precisely measuring low-level linear and circular birefringence properties (retardance and direction) of optical materials (26). The system incorporates a photoelastic modulator (24) for modulating polarized light that is then directed through a sample (26). The beam (nullBinull) propagating from the sample is separated into two parts, with one part (nullB1null) having a polarization direction different than the polarization direction of the other beam part (nullB2null). These separate beam parts are then processed as distinct channels. Detection mechanisms (32, 50) associated with each channel detect the time varying light intensity corresponding to each of the two parts of the beam. This information is combined for calculating a precise measure of the linear and/or circular retardance induced by the sample, as well as the sample's fast axis orientation and direction of circular retardance.

Abstract translation: 一种用于精确测量光学材料（26）的低级线性和圆形双折射性质（延迟和方向）的系统和方法。 该系统包含用于调制偏振光的光弹性调制器（24），然后被引导通过样品（26）。 从样品传播的光束（“Bi”）被分成两部分，其中一部分（“B1”）的偏振方向与另一光束部分（“B2”）的偏振方向不同。 然后将这些单独的光束部分作为不同的通道进行处理。 与每个通道相关联的检测机构（32,50）检测对应于梁的两个部分中的每一个的时变光强度。 该信息被组合用于计算由样品引起的线性和/或圆形延迟的精确测量，以及样品的快轴取向和圆形延迟的方向。