公开(公告)号：US20020166975A1

公开(公告)日：2002-11-14

申请号：US10139411

申请日：2002-05-06

Applicant: Varian Semiconductor Equipment Associates, Inc.

Inventor： Jaime M. Reyes

IPC: H01J027/00

CPC classification number: H01J27/04 ,  H01J37/08 ,  H01J2237/31701

Abstract: Methods and apparatus are provided for generating oxygen ions in an ion source having an arc chamber containing at least one oxidizable metal. The method includes the steps of feeding gaseous H2O into the arc chamber and operating the arc chamber in a temperature range where the free energy of formation of gaseous H2O is less than the free energy of formation of oxides of the oxidizable metal.

Abstract translation: 提供了用于在具有包含至少一种可氧化金属的电弧室的离子源中产生氧离子的方法和装置。 该方法包括以下步骤：在气体H 2 O的形成自由能小于可氧化金属的氧化物的自由能的温度范围内将气态H 2 O供入到电弧室中并操作电弧室。

公开(公告)号：US20020043624A1

公开(公告)日：2002-04-18

申请号：US10013511

申请日：2001-12-13

Inventor： Ole Hindsgaul ,  David C. Schriemer

IPC: H01J027/00

CPC classification number: H01J49/165 ,  B01J2219/00585 ,  B01J2219/00704 ,  B01J2219/00707 ,  B01J2219/00731 ,  B01J2219/00738 ,  B01J2219/00745 ,  B01J2219/00747 ,  C40B30/08 ,  C40B40/12 ,  C40B40/18 ,  G01N30/466 ,  G01N30/7266 ,  G01N33/538 ,  G01N33/54306 ,  G01N33/54366 ,  G01N33/68 ,  G01N2030/628 ,  G01N2030/8429 ,  G01N2030/847 ,  Y10T436/24 ,  Y10T436/25 ,  Y10T436/25375 ,  Y10T436/2575

Abstract: An electrospray apparatus employing multiple electrospray needles mounted in a circular arrangement sequentially delivers multiple sample streams to a mass spectrometer for analysis. One electrospray device includes an electrospray chamber, a rotatable needle supporting plate, a plurality of electrospray needles mounted on the plate, and a charger for applying a charge to droplets delivered to the electrospray chamber by the needles. Another electrospray device includes an electrospray chamber, a plurality of electrospray needles arranged in a circular arrangement, a charger, and a rotatable member for delivering gas phase ions from one needle at a time to the mass spectrometer. The rotatable electrospray apparatus provides fast repetitive analysis of simultaneously operating chromatography columns or other sample streams with a single mass spectrometer.

Abstract translation: 使用安装在圆形布置中的多个电喷针的电喷射装置顺序地将多个样品流输送到质谱仪进行分析。 一个电喷射装置包括电喷雾室，可旋转的针支撑板，安装在板上的多个电喷雾针，以及用于向针喷射到电喷雾室的液滴施加电荷的充电器。 另一种电喷雾装置包括电喷雾室，以圆形布置的多个电喷雾针，充电器和可旋转构件，用于一次将气相离子从一个针传送到质谱仪。 可旋转的电喷雾装置通过单个质谱仪快速重复分析同时操作的色谱柱或其他样品流。

公开(公告)号：US20020040969A1

公开(公告)日：2002-04-11

申请号：US09970925

申请日：2001-10-05

Inventor： Sheng-Feng Hung ,  Hua-Jen Tseng ,  Chun-Chieh Lee ,  Dong-Tay Tsai

IPC: H01J027/00

CPC classification number: H01J37/08 ,  H01J27/022

Abstract: Ion implantation equipment is modified so as to provide a support ring between the filament and the cathode where it can continue its function of insulating the filament, thereby greatly extending the lifetime and reducing downtime of the equipment. According to the present invention, apparatus for preventing the short circuit of a filament of a source head to a cathode, comprising: an arc chamber, having an opening; a cathode tube, through the opening of the arc chamber extending in the arc chamber, one end of the cathode tube having a hollow, the hollow facing outside of the arc chamber; an isolated support ring, locating in the hollow's sidewall of the cathode tube; and a filament, through the isolated support ring locating in the cathode tube.

Abstract translation: 离子注入设备被修改为在灯丝和阴极之间提供支撑环，其可以继续其隔离灯丝的功能，从而大大延长使用寿命并减少设备的停机时间。 根据本发明，用于防止源极头的阴极短路到阴极的装置包括：具有开口的电弧室; 阴极管，通过在电弧室中延伸的电弧室的开口，阴极管的一端具有中空的面向电弧室外部的空心; 隔离的支撑环，位于阴极管的中空侧壁中; 并通过位于阴极管中的隔离的支撑环穿过灯丝。

公开(公告)号：US20010052574A1

公开(公告)日：2001-12-20

申请号：US09865527

申请日：2001-05-29

Inventor： Susumu Kurosawa ,  Yoshinori Muramatsu

IPC: H01J027/00

CPC classification number: H04N5/361 ,  H01L27/14609 ,  H04N5/374

Abstract: There is disclosed a black-level signal generation circuit for use with a CMOS-based active pixel image sensor. This black-level signal generation circuit delivers a black-level signal of a constant level at all times. The black-level signal generation circuit is equivalent in circuit configuration to any one of pixels forming an effective pixel array and any one of readout portions for reading out signals from the pixels. A photodiode is maintained in a reset state. MOS transistors whose corresponding MOS transistors are turned nullON/OFFnull in any one of the pixels and any one of the readout portions are all kept in nullONnull state. Thus, the black-level signal generation circuit can constantly produce a black-level signal equivalent in level to the pixel signal delivered when no light is incident on the effective pixels.

Abstract translation: 公开了一种与CMOS基有源像素图像传感器一起使用的黑电平信号发生电路。 该黑电平信号发生电路始终提供恒定电平的黑电平信号。 黑电平信号产生电路在电路配置中等同于形成有效像素阵列的任何一个像素和用于从像素读出信号的读出部分中的任何一个。 光电二极管保持在复位状态。 其任何一个像素和任何一个读出部分中的相应MOS晶体管被“ON / OFF”的MOS晶体管都保持在“ON”状态。 因此，黑电平信号发生电路可以不间断地产生与没有光入射在有效像素上时传送的像素信号相当的黑电平信号。

公开(公告)号：US20010038077A1

公开(公告)日：2001-11-08

申请号：US09903475

申请日：2001-07-10

Applicant: California Institute of Technology, a non-profit organization

Inventor： Ara Chutjian ,  Murray R. Darrach ,  Otto J. Orient

IPC: H01J027/00

CPC classification number: H01J49/14

Abstract: The present invention provides an improved electron ionizer for use in a quadrupole mass spectrometer. The improved electron ionizer includes a repeller plate that ejects sample atoms or molecules, an ionizer chamber, a cathode that emits an electron beam into the ionizer chamber, an exit opening for excess electrons to escape, at least one shim plate to collimate said electron beam, extraction apertures, and a plurality of lens elements for focusing the extracted ions onto entrance apertures.

公开(公告)号：US20010035499A1

公开(公告)日：2001-11-01

申请号：US09891919

申请日：2001-06-26

Inventor： Eugene P. Marsh

IPC: H01J027/00

CPC classification number: H01J37/08

Abstract: An organic field ionization source is provided including an ionization needle, an extraction electrode, a voltage source, and a heated reservoir. The ionization needle defines a tip. The extraction electrode defines an extraction aperture therein and the extraction electrode is positioned such that the extraction aperture is disposed proximate the tip of the ionization needle. The voltage source is arranged to maintain the tip of the ionization needle at a high potential relative to the extraction electrode. The heated reservoir contains an organic ion source material therein in contact with the ionization needle. The heated reservoir is arranged to maintain a temperature of the organic ion source material at a magnitude sufficient to encourage capillary flow of the organic ion source material from the heated reservoir along the ionization needle to the tip of the needle. The high potential, the extraction electrode, the tip of the ionization needle, and the organic ion source material are selected and arranged such that the organic material is ionized at the tip of the needle and such that organic ions are drawn through the extraction aperture from the tip of the needle. The organic ion source material preferably comprises coronene, phenylalanine, a vacuum grease, a diffusion pump oil, or another organic material with a high boiling point.

公开(公告)号：US20010017353A1

公开(公告)日：2001-08-30

申请号：US09773664

申请日：2001-02-02

Applicant: NISSIN ELECTRIC CO., LTD.

Inventor： Takatoshi Yamashita

IPC: H01J027/00

CPC classification number: H01J27/08

Abstract: This ion source is set up to satisfy a relation L

Abstract translation: 该离子源被设置为满足关系<段落lvl =“0”> L <3.37B-1 {平方根（VA）x10-6 其中 在等离子体生成容器2和灯丝8之间施加的电弧电压为VA [V]，等离子体生成容器2内的磁场19的磁通密度为B [T]，与最频繁电子 几乎位于灯丝8的尖端中心到等离子体生产容器2的壁面的发射点9为L [m]。

公开(公告)号：US20040245476A1

公开(公告)日：2004-12-09

申请号：US10887425

申请日：2004-07-08

Applicant: SemEquip, Inc.

Inventor： Thomas Neil Horsky ,  John Noel Williams

IPC: H01J027/00 ,  G21K005/10

CPC classification number: H01J37/3171 ,  C23C14/48 ,  H01J27/205 ,  H01J37/08 ,  H01J2237/047 ,  H01J2237/049 ,  H01J2237/063 ,  H01J2237/0812 ,  H01J2237/0815 ,  H01J2237/082 ,  H01J2237/083 ,  H01J2237/0835 ,  H01J2237/31701 ,  H01J2237/31703 ,  H01J2237/31705 ,  H01L21/26513 ,  H01L21/2658 ,  H01L21/823814

Abstract: Various aspects of the invention provide improved approaches and methods for efficiently: Vaporizing decaborane and other heat-sensitive materials via a novel vaporizer and vapor delivery system; Delivering a controlled, low-pressure drop flow of vapors, e.g. decaborane, into the ion source; Ionizing the decaborane into a large fraction of B10Hxnull; Preventing thermal dissociation of decaborane; Limiting charge-exchange and low energy electron-induced fragmentation of B10Hxnull; Operating the ion source without an arc plasma, which can improve the emittance properties and the purity of the beam; Operating the ion source without use of a strong applied magnetic field, which can improve the emittance properties of the beam; Using a novel approach to produce electron impact ionizations without the use of an arc discharge, by incorporation of an externally generated, broad directional electron beam which is aligned to pass through the ionization chamber to a thermally isolated beam dump; Providing production-worthy dosage rates of boron dopant at the wafer; Providing a hardware design that enables use also with other dopants, especially using novel hydride, dimer-containing, and indium- or antimony-containing temperature-sensitive starting materials, to further enhance the economics of use and production worthiness of the novel source design and in many cases, reducing the presence of contaminants; Matching the ion optics requirements of the installed base of ion implanters in the field; Eliminating the ion source as a source of transition metals contamination, by using an external and preferably remote cathode and providing an ionization chamber and extraction aperture fabricated of non-contaminating material, e.g. graphite, silicon carbide or aluminum; Enabling retrofit of the new ion source into the ion source design space of existing Bernas source-based ion implanters and the like or otherwise enabling compatibility with other ion source designs; Using a control system in retrofit installations that enables retention of the installed operator interface and control techniques with which operators are already familiar; Enabling convenient handling and replenishment of the solid within the vaporizer without substantial down-time of the implanter; Providing internal adjustment and control techniques that enable, with a single design, matching the dimensions and intensity of the zone in which ionization occurs to the beam line of the implanter and the requirement of the process at hand; Providing novel approaches, starting materials and conditions of operation that enable the making of future generations of semiconductor devices and especially CMOS source/drains and extensions, and doping of silicon gates.

公开(公告)号：US20040238755A1

公开(公告)日：2004-12-02

申请号：US10793689

申请日：2004-03-03

Inventor： Edgar D. Lee ,  Alan L. Rockwood ,  Bingfang Yue ,  Milton L. Lee

IPC: H01J027/00

CPC classification number: H01J49/147 ,  H01J49/063

Abstract: A radio-frequency quadrupole ion guide having a symmetrical magnetic field disposed along an axis of the ion guide, wherein the system provides prolonged interaction between electrons and uncharged compounds within an ionization volume of the ion guide, resulting in enhanced ion creation.

Abstract translation: 具有沿着离子导向器的轴线设置的对称磁场的射频四极离子导向器，其中系统在离子导向器的电离体积内提供电子与不带电化合物之间的延长的相互作用，导致增强的离子产生。

公开(公告)号：US20040173758A1

公开(公告)日：2004-09-09

申请号：US10788371

申请日：2004-03-01

Applicant: SHIMADZU CORPORATION

Inventor： Masayasu Suzuki ,  Masahiro Ueda ,  Yoshiyuki Konishi

IPC: H01J027/00

CPC classification number: H01J37/08 ,  H01J27/022 ,  H01J2237/3146 ,  H01J2237/3151

Abstract: An ion source includes a plasma producing device, an ion deriving electrode having a first grid with a positive potential and a second grid with negative potential for deriving ions from a plasma producing area of the plasma producing device, and a communicating portion communicating the plasma area with an outside thereof for removing an influence of the negative potential of the second grid with respect to electrons from the plasma producing area.

Abstract translation: 离子源包括等离子体产生装置，具有正电势的第一栅极的离子导出电极和用于从等离子体产生装置的等离子体产生区域导出离子的具有负电位的第二栅极，以及将等离子体区域 其外部用于消除相对于来自等离子体产生区域的电子的第二栅极的负电位的影响。