公开(公告)号：US20040251424A1

公开(公告)日：2004-12-16

申请号：US10866511

申请日：2004-06-11

Applicant: Sumitomo Eaton Nova Corporation

Inventor： Hirohiko Murata ,  Masateru Sato

IPC: H01J027/00

CPC classification number: H01J27/08 ,  H01J37/08 ,  H01J2237/31701

Abstract: The ion source apparatus of the present invention includes at least one pair of antenna-opposed magnets sandwiching an antenna element and moveable to magnetic element and the antenna element both in horizontal and vertical directions in a plasma chamber, and a control means performing a positional adjustment over the antenna-opposed magnets to the antenna element in the plasma chamber. An electrons-generated region of high-concentration is formed around the antenna element through electric fields based on outputs of the antenna element and magnetic fields of the antenna-opposed magnets crossing the antenna element.

Abstract translation: 本发明的离子源装置包括在等离子体室中夹持天线元件并且能够在水平和垂直方向上移动到磁性元件和天线元件的至少一对天线相对的磁体，以及执行位置调整的控制装置 在与等离子体室中的天线元件的天线相对的磁体上。 基于天线元件的输出和穿过天线元件的天线相对的磁体的磁场，通过电场在天线元件周围形成高浓度的电子产生区域。

公开(公告)号：US20040026628A1

公开(公告)日：2004-02-12

申请号：US10420516

申请日：2003-04-22

Applicant: Bruker Daltonik GMBH

Inventor： Lutz Schweikhard ,  Gokhan Baykut

IPC: H01J027/00

CPC classification number: H01J49/14

Abstract: The invention relates to a device and method for moving an ion source in a magnetic field by making use of the Lorentz force. The ability of the electron source to move makes it possible to extend and retract it simply by switching the operating current on and off. In mass spectrometry, this means that the entrance of a mass spectrometric analyzer is not permanently obstructed but can be made accessible any time for other applications, such as laser beams.

Abstract translation: 本发明涉及通过利用洛伦兹力来移动磁场中的离子源的装置和方法。 电子源移动的能力使得只需简单地通过切换开启和关闭工作电流来延伸和缩回电子源。 在质谱中，这意味着质谱分析仪的入口不会永久性地被遮挡，而是可以随时随地进行其他应用，例如激光束。

公开(公告)号：US20030183774A1

公开(公告)日：2003-10-02

申请号：US10112451

申请日：2002-03-29

Applicant: The Regents of the University of California

Inventor： Toshiki Tajima

IPC: H01J027/00

CPC classification number: H05H7/16 ,  A61N2005/1088

Abstract: A laser driven compact ion source including a light source that produces an energy pulse, a light source guide that guides the energy pulse to a target and produces an ion beam. The ion beam is transported to a desired destination.

Abstract translation: 包括产生能量脉冲的光源的激光驱动的紧凑离子源，将能量脉冲引导到靶并产生离子束的光源引导件。 离子束被传送到所需的目的地。

公开(公告)号：US20030155522A1

公开(公告)日：2003-08-21

申请号：US10383953

申请日：2003-03-07

Applicant: ADVANTEST CORPORATION

Inventor： Yoshihisa Ooae ,  Yoichi Shimizu ,  Takamasa Satoh ,  Takeshi Haraguchi

IPC: H01J027/00

CPC classification number: B82Y10/00 ,  B82Y40/00 ,  H01J37/065 ,  H01J37/3177

Abstract: An electron beam generating apparatus for generating a plurality of electron beams, which includes: a plurality of cathodes for generating thermoelectrons; a cathode power supply unit for applying negative voltage to the cathodes so as to emit the thermoelectrons from the cathodes; a plurality of grids, which correspond to the plurality of cathodes respectively, for focusing the thermoelectrons emitted from each of the plurality of cathodes, and shaping the plurality of electron beams; and an insulator on which the plurality of cathodes and the plurality of grids are attached.

Abstract translation: 一种用于产生多个电子束的电子束产生装置，包括：多个用于产生热电子的阴极; 用于向阴极施加负电压以从阴极发射热电子的阴极电源单元; 分别对应于多个阴极的多个栅格，用于聚焦从多个阴极中的每一个发射的热电子，并对多个电子束进行成形; 以及绝缘体，多个阴极和多个栅极连接在该绝缘体上。

公开(公告)号：US20030132393A1

公开(公告)日：2003-07-17

申请号：US10334330

申请日：2002-12-31

Inventor： Steven Dimitrijevic ,  James C. Withers ,  Raouf O. Loutfy

IPC: H01J027/00

CPC classification number: B82Y10/00 ,  H01J1/304 ,  H01J1/3044 ,  H01J9/025 ,  H01J2201/30457 ,  H01J2201/30469 ,  Y10S977/745 ,  Y10S977/939

Abstract: The present invention is directed to a nanotube coated with diamond or diamond-like carbon, a field emitter cathode comprising same, and a field emitter comprising the cathode. It is also directed to a method of preventing the evaporation of carbon from a field emitter comprising a cathode comprised of nanotubes by coating the nanotube with diamond or diamond-like carbon. In another aspect, the present invention is directed to a method of preventing the evaporation of carbon from an electron field emitter comprising a cathode comprised of nanotubes, which method comprises coating the nanotubes with diamond or diamond-like carbon.

Abstract translation: 本发明涉及涂覆有金刚石或类金刚石碳的纳米管，包含该金刚石或类金刚石碳的场致发射极阴极以及包括阴极的场致发射体。 还涉及一种通过用金刚石或类金刚石碳涂覆纳米管来防止来自包括由纳米管组成的阴极的场发射体蒸发碳的方法。 另一方面，本发明涉及一种防止碳从包含由纳米管构成的阴极的电子发射体蒸发的方法，该方法包括用金刚石或类金刚石碳涂覆纳米管。

公开(公告)号：US20030066969A1

公开(公告)日：2003-04-10

申请号：US10264723

申请日：2002-10-04

Inventor： Juan Fernandez De La Mora

IPC: H01J027/00

CPC classification number: F03H1/0012 ,  B64G1/402 ,  B64G1/405 ,  H01J49/165

Abstract: The present invention concerns the formation of a stable electrospray of a volatile liquid at reduced pressures by limiting its tendency to evaporate. In a first approach, multi-component capillary jets are produced, comprising a thin layer of low volatility liquid, which is not necessarily a good conductor, surrounding a core of volatile and conducting liquid such as water, so as to minimize direct exposure of the volatile liquid to the region of low pressure. In a second approach, the diameter of the meniscus of a Taylor cone is reduced to a critical diameter, below which no evaporative freezing occurs.

Abstract translation: 本发明涉及通过限制挥发性液体的蒸发趋势在减压下形成稳定的挥发性液体的电喷雾。 在第一种方法中，制造多组分毛细管喷射器，其包括薄层的低挥发性液体，其不一定是围绕挥发性核心和导电液体如水的良好导体，以便最小化直接暴露于 挥发性液体到低压区域。 在第二种方法中，泰勒锥体的弯月面的直径减小到临界直径，在该临界直径之下，不发生蒸发冷冻。

公开(公告)号：US20030031961A1

公开(公告)日：2003-02-13

申请号：US09927929

申请日：2001-08-10

Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.

Inventor： Chuan-Yuan Lin ,  Chang-Cheng Hung ,  Chih Cheng Chin ,  Chin Hsiang Lin

IPC: H01J027/00 ,  G03F007/00

CPC classification number: G03F1/74 ,  H01J37/3005 ,  H01J37/3056 ,  H01J2237/31742

Abstract: The use of dual-focused ion beams for semiconductor image scanning and mask repair is disclosed. A mask is imaged with either a focused negative ion beam, such as a focused oxygen ion beam, or a focused positive ion beam, such as a focused gallium ion beam. Mask imaging is also referred to as image scanning. Defects in the mask are repaired with the ion beam not used in imaging of the mask. Also disclosed is image scanning being performed with the focused negative ion beam to neutralize potential charge buildup, and mask repair being performed with the focused positive ion beam. An apparatus is disclosed that has a negative ion mechanism supplying negative ions, a positive ion mechanism supplying positive ions, a filter to select the desired ratio of the negative to the positive ions, and an aiming mechanism to focus the ions onto the mask.

Abstract translation: 公开了使用双重聚焦离子束进行半导体图像扫描和掩模修复。 用聚焦的负离子束（例如聚焦的氧离子束）或聚焦的正离子束（例如聚焦的镓离子束）对掩模进行成像。 掩模成像也称为图像扫描。 掩模中的缺陷用未在掩模成像中使用的离子束修复。 还公开了用聚焦负离子束进行图像扫描，以中和潜在的电荷积聚，并且利用聚焦的正离子束进行掩模修复。 公开了一种具有提供负离子的负离子机制，提供正离子的正离子机制，选择负离子与正离子的期望比例的滤光器以及将离子聚焦到掩模上的瞄准机构的装置。

公开(公告)号：US20020195570A1

公开(公告)日：2002-12-26

申请号：US09888256

申请日：2001-06-22

Applicant: Applied Materials, Inc.

Inventor： Glen E. Howard ,  William J. DeVore

IPC: H01J027/00

CPC classification number: H01J37/075 ,  H01J2237/3175

Abstract: An electron source has an anode and a cathode that is capable of being negatively biased relative to the anode, the cathode having an electron emitting portion and a cathode axis. An electromagnetic radiation source is adapted to generate an electromagnetic radiation beam to heat the cathode. A lens is adapted to direct the electromagnetic radiation beam onto the cathode, the lens having a lens axis that forms an acute angle with, or is substantially parallel to, the cathode axis of the electron emitting portion.

Abstract translation: 电子源具有能够相对于阳极被负偏置的阳极和阴极，阴极具有电子发射部分和阴极轴线。 电磁辐射源适于产生电磁辐射束以加热阴极。 透镜适于将电磁辐射束引导到阴极上，透镜具有与电子发射部分的阴极轴形成锐角或基本平行的透镜轴。

公开(公告)号：US20020117630A1

公开(公告)日：2002-08-29

申请号：US10128305

申请日：2002-04-24

Applicant: SEMICONDUCTOR ENERGY LABORATORY CO., LTD.

Inventor： Shunpei Yamazaki ,  Koichiro Tanaka

IPC: H01J027/00

CPC classification number: B23K26/0738 ,  B23K26/0604 ,  B23K26/0732 ,  G02B27/09 ,  G02B27/0905 ,  G02B27/0911 ,  G02B27/0966 ,  G02B27/0972 ,  G02B27/0977 ,  H01L21/02422 ,  H01L21/02488 ,  H01L21/02532 ,  H01L21/02667 ,  H01L21/02672 ,  H01L21/02678 ,  H01L21/02686 ,  H01L21/02691 ,  H01L21/268 ,  H01L27/1285 ,  H01L29/66757

Abstract: A laser illumination apparatus for illuminating a semiconductor film with a linear laser beam while scanning the semiconductor film with the linear laser beam. An optical system generates a linear laser beam having a beam width W by dividing a pulse laser beam that is emitted from a pulsed laser light source into a plurality of beams vertically and horizontally, and combines divisional beams after they have been processed into a linear shape individually. A mechanism is provided to move a substrate that is mounted with the semiconductor film. A condition W/20nullnull(r)nullxnullW/5 or null(r)nullW/20nullxnullW/5 is satisfied, where r is a height difference of the surface of the semiconductor film, null(r) is a variation amount of the beam width W as a function of the height difference r, and x is a movement distance of the substrate during an oscillation period of the pulsed laser light source.

Abstract translation: 一种用线性激光束照射半导体膜的激光照明装置，同时用线性激光束扫描半导体膜。 光学系统通过将从脉冲激光光源发射的脉冲激光束垂直和水平地分离成多个光束来生成具有光束宽度W的线性激光束，并且在分割光束被处理成直线形状之后组合分割光束 单独。 提供了用于移动安装有半导体膜的衬底的机构。 满足条件W / 20 <= DELTA（r）<= x <= W / 5或DELTA（r）<= W / 20 <= x <= W / 5，其中r是表面的高度差 半导体膜DELTA（r）是作为高度差r的函数的光束宽度W的变化量，x是脉冲激光光源的振荡期间的基板的移动距离。

公开(公告)号：US20020088944A1

公开(公告)日：2002-07-11

申请号：US09755554

申请日：2001-01-05

Inventor： Marvin R. LaFontaine ,  Paul Murphy ,  Paul Barrett

IPC: H01J027/00

CPC classification number: G21K1/14

Abstract: A charge exchange device, typically used in an ion beam accelerator, includes a charge exchange tube defining a charge exchange chamber and beam ports for allowing an ion beam to enter and exit the charge exchange tube, a containment tube mounted external to the charge exchange tube, the containment tube having an entrance port for a charge exchange material, and at least one intermediate tube mounted between the charge exchange tube and the containment tube. The charge exchange tube and the at least one intermediate tube have at least one set of flow ports that are aligned on opposite sides of the charge exchange chamber to permit columnated flow of the charge exchange material into and through the charge exchange chamber. Leakage of the charge exchange material through the beam ports is reduced in comparison with prior art charge exchange devices.

Abstract translation: 通常用于离子束加速器的电荷交换装置包括限定电荷交换室的电荷交换管和用于允许离子束进入和离开电荷交换管的光束端口，安装在电荷交换管外部的容纳管 ，所述容纳管具有用于电荷交换材料的入口，以及安装在所述电荷交换管和所述容纳管之间的至少一个中间管。 电荷交换管和至少一个中间管具有至少一组流动端口，其在电荷交换室的相对侧对准，以允许电荷交换材料在电荷交换室中通过并通过电荷交换室。 与现有技术的电荷交换装置相比，电荷交换材料通过光束端口的泄漏减少。