Light source with laser pumping and method for generating radiation
    41.
    发明授权
    Light source with laser pumping and method for generating radiation 有权
    具有激光泵浦的光源和产生辐射的方法

    公开(公告)号:US09368337B2

    公开(公告)日:2016-06-14

    申请号:US14650657

    申请日:2013-08-23

    Applicant: RND-IS-AN, LTD

    CPC classification number: H01J61/025 H01J61/54 H01J61/76 H01J63/08 H01J65/04

    Abstract: The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention includes extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element, a region of radiating plasma produced in the chamber by the focused laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber, and an optical system for collecting plasma radiation.

    Abstract translation: 本发明涉及具有激光泵浦的光源以及用于在紫外线(UV)和可见光谱范围内产生具有高亮度的辐射的方法。 本发明的技术结果包括通过增加亮度,增加等离子体激光辐射的吸收系数来扩大激光泵浦的光源的功能可能性,并显着减少发射激光束的数值孔​​径 被封闭并且正在通过等离子体。 该装置包括容纳气体的腔室,产生激光束的激光器,光学元件,通过聚焦激光束在腔室中产生的辐射等离子体的区域,封闭器,其安装在发散激光束的轴上 室的第二侧,以及用于收集等离子体辐射的光学系统。

    Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma
    42.
    发明授权
    Apparatus and method utilizing high power density electron beam for generating pulsed stream of ablation plasma 有权
    利用高功率密度电子束产生消融等离子体脉冲流的装置和方法

    公开(公告)号:US07557511B2

    公开(公告)日:2009-07-07

    申请号:US11495684

    申请日:2006-07-31

    CPC classification number: H01J37/3233 H01J37/32009

    Abstract: A pulsed electron ablation (PEA) utilizes a source of a high power density electron beam which includes a cathode plasma supplying electrons for generation of the electron beam and an anode plasma having a front layer extending in the processing chamber in a counter relationship with the front layer of the cathode plasma. A gas supply line is coupled to the processing chamber to supply a process gas in a controlled fashion to the anode to create a pressure gradient between the anode and the cathode plasma, and to stimulate an intense ionization of the process gas in the vicinity to the anode to form the anode plasma. The power density of the electron beam sharply increases as the result of an interaction of said cathode and anode plasmas at the double space charge contact layer formed between their fronts. A target is positioned in the processing chamber a predetermined distance from the front layer of the cathode plasma and is exposed to the electron beam to produce stream of the ablation plasma.

    Abstract translation: 脉冲电子消融(PEA)利用高功率密度电子束的源,其包括提供用于产生电子束的电子的阴极等离子体和具有在处理室中延伸的前层的阳极等离子体与前面 阴极等离子体层。 气体供应管线连接到处理室,以可控方式向阳极供应处理气体,以在阳极和阴极等离子体之间产生压力梯度,并且刺激在邻近的处理气体的强电离 阳极形成阳极等离子体。 由于所述阴极和阳极等离子体在其前沿之间形成的双重空间电荷接触层的相互作用的结果,电子束的功率密度急剧增加。 目标物位于处理室中距离阴极等离子体的前层预定的距离,并暴露于电子束以产生消融等离子体的流。

    Discharge light source with electron beam excitation
    44.
    发明申请
    Discharge light source with electron beam excitation 失效
    放电光源与电子束激发

    公开(公告)号:US20050117621A1

    公开(公告)日:2005-06-02

    申请号:US10506273

    申请日:2003-02-26

    Applicant: Albrecht Kraus

    Inventor: Albrecht Kraus

    CPC classification number: H01J63/08 H01J61/16

    Abstract: The invention relates to a light source (1) with a discharge vessel (12) which is filled with a filling gas, and with an electron beam source (2) which is arranged in vacuum or in a region of low pressure and which generates electrons, propelling the latter through an entry foil (10) into the discharge vessel (12). According to the invention, an electric field can be generated inside the discharge vessel (12).

    Abstract translation: 本发明涉及一种具有放电容器(12)的光源(1),其中填充有填充气体,并且具有设置在真空或低压区域并产生电子的电子束源(2) ,通过入口箔(10)推进到放电容器(12)中。 根据本发明,可以在放电容器(12)内产生电场。

    Electronic light radiation tube
    46.
    发明授权
    Electronic light radiation tube 失效
    电子灯辐射管

    公开(公告)号:US4780645A

    公开(公告)日:1988-10-25

    申请号:US948003

    申请日:1986-12-31

    CPC classification number: H01J63/08

    Abstract: An electronic light radiation tube wherein a cathode and an anode disposed as spaced from each other by a small spacing are housed in an envelope enclosing therein a luminous gas, and a magnetic field is applied to the envelope so as to cause magnetic lines of force of the magnetic field to pass through the envelope, while the magnetic lines of force which have passed through the cathode are prevented from passing through the anode, whereby electrons emitted from the cathode are caused to collide at a high efficiency with the luminous gas throughout the entire interior space of the envelope to excite the gas, and highly uniform light radiation can be realized over the entire envelope.

    Abstract translation: 一种电子光辐射管,其中阴极和阳极彼此隔开间隔很小的电子灯辐射管被容纳在封闭有发光气体的信封中,并且磁场被施加到信封上,以便产生磁力线 磁场通过包络线,同时防止通过阴极的磁力线穿过阳极,由此使从阴极发射的电子以高效率与整个发光气体发生碰撞 信封的内部空间以激发气体,并且可以在整个信封上实现高度均匀的光辐射。

    Light source
    48.
    发明授权
    Light source 有权
    光源

    公开(公告)号:US09360187B2

    公开(公告)日:2016-06-07

    申请号:US13877361

    申请日:2011-08-17

    Inventor: Shigeki Matsuura

    CPC classification number: F21V7/043 H01J61/025 H01J63/04 H01J63/08 H01J65/04

    Abstract: This light source 1 is provided with a luminescent cylinder 3A housing a luminescent part 2 to generate light; a light guide cylinder 3B connected to the luminescent cylinder 3A on a one end side, and configured to guide the light generated by the luminescent part 2, to an exit window 4 provided on the other end side; and a cylindrical reflective cylinder 9 inserted and fixed between the exit window 4 of the light guide cylinder 3B and a portion connecting the luminescent cylinder 3A and the exit window 4, and having an inner wall surface as a reflective surface 9a to reflect the light.

    Abstract translation: 该光源1设置有容纳发光部2以发光的发光筒3A; 导光筒3B,其在一端侧与发光筒3A连接,并被配置为将由发光部2产生的光引导到另一端侧的出射窗4; 以及插入并固定在导光筒3B的出射窗4与连接发光筒3A和出射窗4的部分之间并具有作为反射光的反射面9a的内壁面的筒状反射筒9。

    LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION
    49.
    发明申请
    LIGHT SOURCE WITH LASER PUMPING AND METHOD FOR GENERATING RADIATION 有权
    具有激光泵的光源和用于产生辐射的方法

    公开(公告)号:US20150311058A1

    公开(公告)日:2015-10-29

    申请号:US14650657

    申请日:2013-08-23

    Applicant: RND-IS-AN, LTD

    CPC classification number: H01J61/025 H01J61/54 H01J61/76 H01J63/08 H01J65/04

    Abstract: The invention relates to light sources with laser pumping and to methods for generating radiation with a high luminance in the ultraviolet (UV) and visible spectral ranges. The technical result of the invention includes extending the functional possibilities of a light source with laser pumping by virtue of increasing the luminance, increasing the coefficient of absorption of the laser radiation by a plasma, and significantly reducing the numerical aperture of a divergent laser beam which is to be occluded and which is passing through the plasma. The device comprises a chamber containing a gas, a laser producing a laser beam, an optical element, a region of radiating plasma produced in the chamber by the focused laser beam, an occluder, which is mounted on the axis of the divergent laser beam on the second side of the chamber and an optical system for collecting plasma radiation.

    Abstract translation: 本发明涉及具有激光泵浦的光源以及用于在紫外线(UV)和可见光谱范围内产生具有高亮度的辐射的方法。 本发明的技术结果包括通过增加亮度,增加等离子体激光辐射的吸收系数来扩大激光泵浦的光源的功能可能性,并显着减少发射激光束的数值孔​​径 被封闭并且正在通过等离子体。 该装置包括容纳气体的腔室,产生激光束的激光器,光学元件,通过聚焦激光束在腔室中产生的辐射等离子体的区域,封闭器,其安装在发散激光束的轴上 室的第二侧和用于收集等离子体辐射的光学系统。

    Light source
    50.
    发明申请
    Light source 审中-公开
    光源

    公开(公告)号:US20050093418A1

    公开(公告)日:2005-05-05

    申请号:US10506405

    申请日:2003-02-26

    CPC classification number: H01J63/02 H01J9/247 H01J63/08

    Abstract: The invention relates to a light source (1) with a discharge vessel (2) which is filled with a filling gas, and with an electron beam source (4) arranged in vacuum or in a region of low pressure, which source (4) generates electrons (12) and propels them through an inlet foil (8) into the discharge vessel (2). According to the invention, the inlet foil (8) comprises a diamond layer.

    Abstract translation: 本发明涉及一种具有放电容器(2)的光源(1),其中填充有填充气体,并且具有以真空或低压区域排列的电子束源(4),该源(4) 产生电子(12)并推动它们通过入口箔(8)进入放电容器(2)。 根据本发明,入口箔(8)包括金刚石层。

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