公开(公告)号：EP0987540B1

公开(公告)日：2008-08-20

申请号：EP99660148.0

申请日：1999-09-17

Applicant: WALLAC OY

Inventor： Väisälä, Mikko ,  Korpi, Jarmo ,  Nurmi, Jarmo ,  Harju, Raimo

IPC: G01N21/64 ,  G01N21/47 ,  G01N21/66 ,  G01N21/76

CPC classification number: G01J3/08 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/10 ,  G01N21/253 ,  G01N2201/06146 ,  G01N2201/0625

公开(公告)号：EP1662249A4

公开(公告)日：2008-02-13

申请号：EP04771887

申请日：2004-08-19

Applicant: JAPAN SCIENCE & TECH AGENCY ,  NISHIZAWA SEIZI

Inventor： NISHIZAWA SEIZI ,  IWAMOTO TOSHIYUKI

IPC: G01J3/42 ,  G01J3/08 ,  G01N21/35 ,  G01N21/3586 ,  G01N21/64

CPC classification number: G01J3/08 ,  G01N21/3586 ,  G01N2201/0696 ,  G01N2201/0698

Abstract: There is provided a time-series conversion pulse spectrometer capable of easily performing time-series conversion pulse spectrometer measurement of various samples and their states in a short time. The time-series conversion pulse spectrometer includes: a pulse laser light source; division means for dividing the pulse laser beam from the pulse laser light source into an excitation pulse laser beam and a detection pulse laser beam; detection means; a sample holding section for holding a sample; and a sample section incoming/outgoing optical system. The time-series conversion pulse spectrometer is characterized by further including: optical path length modifying means for setting at least one measurement light range arranged in the incident side optical path from the division means to the pulse light emitting means and/or the detection side optical path from the division means to the detection means; and optical delay means for measuring at least one time-series signal arranged in the incident side optical path from the division means to the pulse light emitting means and/or the detection side optical path from the division means to the detection means.

公开(公告)号：EP1754032A1

公开(公告)日：2007-02-21

申请号：EP05766803.0

申请日：2005-06-02

Applicant: Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V. ,  Gesellschaft zur Förderung der Analytischen Wissenschaft e.V.

Inventor： BECKER-ROSS, Helmut ,  FLOREK, Stefan ,  WESEMANN, Günter ,  OKRUSS, Michael

IPC: G01J3/18

CPC classification number: G01J3/1809 ,  G01J3/02 ,  G01J3/0202 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/0237 ,  G01J3/0286 ,  G01J3/0294 ,  G01J3/08 ,  G01J3/12 ,  G01J3/2803

Abstract: The invention relates to a spectrometer arrangement (10) comprising a spectrometer (14) for producing a spectrum of a first wavelength range of radiation from a radiation source on a detector (42). Said arrangement also comprises: an Echelle grating (36) for the spectral decomposition of the radiation penetrating the spectrometer arrangement (10) in a main dispersion direction (46); a dispersing element (34) for separating the degrees by means of spectral decomposition of the radiation in a transversal dispersion direction (48) which forms an angle with the main dispersion direction of the Echelle grating (36), in such a way that a two-dimensional spectrum (50) can be produced with a plurality of separated degrees (52); an imaging optical element (24, 38) for imaging the radiation penetrating through an inlet gap (20) into the spectrometer arrangement (10), in an image plane (40); and a surface detector (42) comprising a two-dimensional arrangement of a plurality of detector elements in the image plane (40). The inventive arrangement is characterised in that another spectrometer (12) comprising at least one other dispersing element (64) and another imaging optical element (60, 66) is provided in order to produce a spectrum (68) of a second wavelength range of radiation, which is different from the first wavelength range, from a radiation source on the same detector (42). The spectra can be spatially or temporally separated on the detector.

公开(公告)号：EP1668342A1

公开(公告)日：2006-06-14

申请号：EP04784655.5

申请日：2004-09-21

Applicant: Metrosol, Inc.

Inventor： HARRISON, Dale A.

IPC: G01N3/28 ,  G01N21/55

CPC classification number: G01J3/2803 ,  G01J3/02 ,  G01J3/0208 ,  G01J3/021 ,  G01J3/0232 ,  G01J3/027 ,  G01J3/0286 ,  G01J3/0291 ,  G01J3/08 ,  G01J3/10 ,  G01J3/28 ,  G01J3/2823 ,  G01J3/36 ,  G01J3/42 ,  G01J3/4531 ,  G01N21/211 ,  G01N21/274 ,  G01N21/33 ,  G01N21/47 ,  G01N21/55 ,  G01N21/9501 ,  G01N2021/335

Abstract: A spectroscopy system (500) is provided which operates in the vacuum ultra-violet spectrum. More particularly, a system utilizing reflectometry techniques in the vacuum ultraviolet spectrum is provided for use in metrology applications. To ensure accurate and repeatable measurement, the environment of the optical paths (506, 508) is controlled to limit absorption effects of gases that may be present in the optical path. To account for absorption effects that may still occur, the length of the optical path is minimized. To further account for absorption effects, the reflectance data may be referenced to a relative standard.

公开(公告)号：EP1472512A1

公开(公告)日：2004-11-03

申请号：EP03737282.8

申请日：2003-01-28

Applicant: Gesellschaft zur Förderung angewandter Optik, Optoelektronik, Quantenelektronik und Spektroskopie e.V. (G O S) ,  GESELLSCHAFT ZUR FÖRDERUNG DER SPEKTROCHEMIEUND ANGEWANDTEN SPEKTROSKOPIE E.V.

Inventor： FLOREK, Stefan ,  BECKER-ROSS, Helmut ,  HEITMANN, Uwe

IPC: G01J3/18 ,  G01J3/12

CPC classification number: G01J3/04 ,  G01J3/02 ,  G01J3/0229 ,  G01J3/08 ,  G01J3/14 ,  G01J3/1809 ,  G01J3/28 ,  G01J2003/1208 ,  G01J2003/2866

Abstract: The invention relates to a spectrometer assembly (10) containing: a radiation source (11) with a continuous spectrum; a pre-monochromator (2) for generating a spectrum with relatively little linear dispersion, from which a spectral segment can be selected, whose spectral bandwidth is less than or equal to the bandwidth of the free spectral range of the order in the echelle spectrum, for which the mean wavelength of the selected spectral segment can be measured with a maximum blaze efficiency; an echelle spectrometer (4) comprising means for wavelength calibration; an entry slit (21) on the pre-monochromator (2) and an intermediate slit assembly (3) comprising an intermediate slit and a local resolution radiation receiver (5) on the exit plane of the spectrometer for detecting wavelength spectra. The assembly is characterised in that the width of the intermediate slit (3) is greater than the monochromatic image of the entry slit generated by the pre-monochromator at the location of the intermediate slit and that means are provided for calibrating the pre-monochromator, by means of which the radiation that is reproduced in the detector of the radiation source with a continuous spectrum can be calibrated to a reference position.

公开(公告)号：EP0135761B1

公开(公告)日：1991-06-05

申请号：EP84109506.0

申请日：1984-08-09

Applicant: THE PERKIN-ELMER CORPORATION

Inventor： Young, Eugene F.

IPC: G01J3/28 ,  G01J3/02

CPC classification number: G01J3/02 ,  G01J3/0229 ,  G01J3/024 ,  G01J3/08 ,  G01J3/453

公开(公告)号：EP0412410A2

公开(公告)日：1991-02-13

申请号：EP90114675.3

申请日：1990-07-31

Applicant: BODENSEEWERK PERKIN-ELMER GMBH

Inventor： Wulf, Jürgen, Dr. ,  Lahmann, Werner

IPC: G01J3/08 ,  G02B26/04 ,  G01N21/31

CPC classification number: G01J3/08 ,  G01J2003/106 ,  G02B26/04

Abstract: Bei einem Zweistrahlphotometer, enthaltend eine Lichtquelle (10), Detektormittel, einen Probenbereich (44), optische Mittel (16,40,46,36) zum Leiten eines von der Lichtquelle (10,58) ausgehenden Lichtbündels (14) als Meßlichtbündel (34) durch den Probenbereich (44) hindurch auf die Detektormittel, Mittel (16,36) zum Leiten des gleichen Lichtbündels (14) als Referenzlichtbündel (32) unter Umgehung des Probenbereichs (44) auf die Detektor­mittel und Choppermittel in Meß und Referenzlichtbündel, durch welche der Strahlengang des von der Lichtquelle (10) ausgehenden Lichtbündels (14) in einen Strahlengang des Meßlichtbündels (34) und in einen Strahlengang des Referenzlichtbündels an einer Aufspaltstelle aufspaltbar ist und diese Strahlengänge, nachdem des Meßlichtbündel (34) durch den Probenbereich (44) hindurchgetreten ist, an einer Rekombinationsstelle wieder zu einem Strahlengang rekombinierbar, sind, liegen Aufspaltstelle und Rekombinationsstelle räumlich dicht beieinander. Die Choppermittel weisen einen einzigen Chopper (20) auf, der gleichzeitig die Aufspaltung und Rekombination von Meß- und Referenzlichtbündel (34 bzw. 32) bewirkt.

Abstract translation: 在包括光源（10），检测器装置，一个样本区域（44），光学装置（16,40,46,36），用于引导所述光源中的一个（10,58）发出的光束（14），为测量光束的双光束光度计（34 ）（通过样品区44）到检测器上的装置，装置（16,36）（用于引导相同的光束14）（作为参考光束32），在检测器装置绕过样品区（44），和切碎机装置在测量和参考光束，通过该 光源的光路的出射（10）的光束（14）在所述测量光束（34）的光束路径中并进入所述参照光光束的光路在一个Aufspaltstelle解离和测量光束（34）穿过样品区域之后这些光路（44）传递 是，在一个重组被重新组合成一个光束路径再次，Aufspaltstelle和重组是空间上接近beieinande 河 斩波器装置包括一个单一的斩波器（20），它同时使测量和参考光束（34和32）的分裂和重组。

公开(公告)号：EP0059025A1

公开(公告)日：1982-09-01

申请号：EP82300121.9

申请日：1982-01-11

Applicant: THE COMMONWEALTH OF AUSTRALIA

Inventor： Skinner, David Robert ,  Stokes, Rex Andrew ,  Freeman, Lewis Ormand ,  McNeill, Alan Robert

IPC: G02B27/10 ,  G01J3/02

CPC classification number: G02B27/143 ,  G01J1/36 ,  G01J3/02 ,  G01J3/0205 ,  G01J3/021 ,  G01J3/08

Abstract: The system is provided with a first branch (10, 12) and a second branch (14) which receive light from a sample and reference target respectively. A shutter (22) sequentially allows light from the two branches to pass to a mirror (20) having a slit (30), reflective portions (32) and transparent portions (34). Light from the first branch passes through portions (30) and (34) to a detecting branch (42, 46, 50-56) and some light is reflected through a lens (16) to eye piece (19). Similarly some light from the second branch passes through mirror (30) and (34) to eye piece (19) and some light is reflected to the detecting branch. Accordingly the measunngfield can be accurately identified by looking through the eye piece (19) whilst at the same time light is directed to the detecting branch for analysis.

Abstract translation: 该系统设置有分别从样本和参考目标接收光的第一分支（10,12）和第二分支（14）。 快门（22）顺序地允许来自两个分支的光通过具有狭缝（30），反射部分（32）和透明部分（34）的反射镜（20）。 来自第一分支的光通过通路部分（30）和（34）到检测分支（42,46,50-56），并且一些光通过透镜（16）反射到眼睛部件（19）。 类似地，来自第二分支的一些光通过反射镜（30）和（34）到眼片（19），并且一些光被反射到检测分支。 通过观察眼片（19）可以准确地识别测量区域，同时将光线定向到检测支路进行分析。

公开(公告)号：EP0015611A1

公开(公告)日：1980-09-17

申请号：EP80200163.6

申请日：1980-02-27

Applicant: PHILIPS ELECTRONICS UK LIMITED ,  Philips Electronics N.V.

Inventor： Perkins, Charles Vincent c/o PHILIPS ELECTRONIC ,  Firth, John Richard c/o PHILIPS ELECTRONIC

IPC: G01J3/42

CPC classification number: G01J3/08 ,  G01J3/06 ,  G01J3/18 ,  G01J3/42

Abstract: A dual beam spectrophotometer includes a radiation chopper (5) and a monochromator (3) which includes a diffraction grating driven by a stepper motor. The chopper (5) includes a gate pulse generator (24) which produces gate pulses Gs and G R which correspond to periods during which radiation from the source (2) passes through a sample cell (19) and a reference cell (14) respectively.
A stepper motor drive circuit (134) produces pulses to step the stepper motor which are synchronised with the chopping cycle by means of the G R and Gs pulses. The stepper motor is arranged to step an equal number of times in each half of a chopping cycle.
A further condition which is preferably satisfied is that the first pulse of a sequence should start in the opposite half of the chopping cycle from that in which the first pulse started in a previous chopping cycle. At low stepping rates the motor will step twice in one chopping cycle and then pause for several cycles before again stepping twice.

公开(公告)号：CN207778340U

公开(公告)日：2018-08-28

申请号：CN201721111580.7

申请日：2017-08-31

Applicant: 卡尔蔡司光谱学有限公司

Inventor： 约尔格·马格拉夫 ,  托马斯·科伊内

IPC: F21V7/00 ,  G01N21/47 ,  G01N21/57 ,  G01J3/10

CPC classification number: G01J3/10 ,  F21V7/04 ,  F21V7/043 ,  G01J3/021 ,  G01J3/08 ,  G01J3/28 ,  G01J3/42 ,  G01J2003/102 ,  G01J2003/425 ,  G01N21/255 ,  G01N21/4738 ,  G01N21/474 ,  G01N21/4785 ,  G01N21/55 ,  G01N21/57 ,  G01N2021/8411 ,  G01N2201/061

Abstract: 本实用新型涉及一种测量光源和用于检测反射光谱的测量系统。用于产生具有均匀的空间照度分布的测量光的测量光源包括空心体(01)，其具有漫反射的内面。在空心体中布置有凹面镜形的凹状照明腔(04)、管状的光成形腔(06)和凹面镜形的凹状光射出腔(07)，它们具有共同的轴线(03)。用于产生光的光源(08)至少部分布置在照明腔中。光射出腔具有光出口(14)。照明腔和光射出腔用它们的凹面镜形状相对而置且通过光成形腔连接。在空心体中布置有用于使被空心体的布置在光射出腔内的内面反射的光穿过光出口向空心体的外部反射的漫反射的反射盘(11)。此外，本实用新型还涉及一种用于检测样品的绝对反射光谱和用于执行参考测量的测量系统。(ESM)同样的发明创造已同日申请发明专利