公开(公告)号：EP1963869A1

公开(公告)日：2008-09-03

申请号：EP06844676.4

申请日：2006-11-30

Applicant: Touchdown Technologies, Inc.

Inventor： GARABEDIAN, Raffi ,  TEA, Nim, Hak ,  WANG, Steven ,  KARKLIN, Heather

IPC: G01R3/00 ,  G01R1/073

CPC classification number: G01R3/00 ,  G01R1/07378 ,  Y10T29/53243

Abstract: A probe card assembly (300) has a probe contactor substrate (310) having a plurality of probe contactor tips (395) thereon and a probe card wiring board (330) with an interposer (340) disposed between the two. Support posts (320) contacting the probe contactor substrate are vertically adjustable until secured by a locking mechanism (380) which is coupled to the probe card wiring board. When the posts are secured in a fixed position, the position is one in which the plane of the plurality of probe contactor substrates is substantially parallel to a predetermined reference plane.

Abstract translation: 探针卡组件（300）具有其上具有多个探针接触器尖端（395）的探针接触器基底（310）和具有设置在两者之间的中介层（340）的探针卡接线板（330）。 与探针接触器衬底接触的支柱（320）是垂直可调的，直到被耦合到探针卡接线板的锁定机构（380）固定为止。 当柱固定在固定位置时，该位置是多个探针接触器衬底的平面基本平行于预定参考平面的位置。

公开(公告)号：EP1910849A1

公开(公告)日：2008-04-16

申请号：EP05825103.4

申请日：2005-11-18

Applicant: Touchdown Technologies, Inc.

Inventor： KHOO, Melvin ,  TEA, Nim ,  ISMAIL, Salleh ,  HSU, Yang ,  TANG, Weilong ,  GARABEDIAN, Raffi

IPC: G01R1/067 ,  G01R3/00

CPC classification number: G01R1/06727 ,  G01R1/06738 ,  G01R3/00

Abstract: The present invention relates to a probe for making electrical connection to a contact pad on a microelectronic device. A foot having a length, a thickness, a width, a proximal end, and a distal end, is connected to a substrate. The length of the foot is greater than its width. A torsion bar having a length, a width, a thickness, a proximal end, and a distal end, is connected to the distal end of the foot at the proximal end of torsion bar. The torsion bar lies in a first plane. A spacer having a length, a width, and a thickness, is connected to the distal end of the torsion bar. An arm having a length, a width, a thickness, a proximal end, and a distal end is connected to said spacer at the arms proximal end. The arm lies in a second plane and the second plane is in a different plane than the first plane. A first post having a top side and a bottom side is connected to the arm near the distal end of the arm. A tip is electrically connected to the top side of the post.

Abstract translation: 本发明涉及一种用于与微电子器件上的接触垫电连接的探针。 具有长度，厚度，宽度，近端和远端的脚连接到基底。 脚的长度大于其宽度。 具有长度，宽度，厚度，近端和远端的扭杆在扭杆的近端处连接到脚的远端。 扭杆位于第一个平面内。 具有长度，宽度和厚度的间隔件连接到扭杆的远端。 具有长度，宽度，厚度，近端和远端的臂在臂近端处连接到所述间隔件。 手臂位于第二个平面，第二个平面与第一个平面位于不同的平面。 具有顶侧和底侧的第一柱与靠近臂末端的臂连接。 尖端电连接到柱的顶侧。

公开(公告)号：EP1910850A1

公开(公告)日：2008-04-16

申请号：EP05846491.8

申请日：2005-11-18

Applicant: Touchdown Technologies, Inc.

Inventor： GARABEDIAN, Raffi ,  KHOO, Melvin ,  ISMAIL, Salleh ,  TEA, Nim ,  HSU, Yang ,  TANG, Weilong

IPC: G01R1/067

CPC classification number: G01R1/06727 ,  G01R1/06738 ,  G01R3/00 ,  H01L2924/0002 ,  Y10T29/49117 ,  Y10T29/49204 ,  Y10T29/49222 ,  H01L2924/00

Abstract: The present invention relates to a microfabricated tip (680) and post structure (670) comprising a post having a rough top surface (1500) that diffuses incident light and a cross-section, and a tip, lithographically plated on the rough top surface of the post, having a smooth reflective surface appropriate for automatic vision recognition, and having a cross-section that is less than the cross-section of the post.

公开(公告)号：EP1869528A1

公开(公告)日：2007-12-26

申请号：EP05845202.0

申请日：2005-11-18

Applicant: Touchdown Technologies, Inc.

Inventor： TANG, Weilong ,  HSU, Tseng-Yeng ,  ISMAIL, Salleh ,  TEA, Nim, Hak ,  KHOO, Melvin, B. ,  GARABEDIAN, Raffi ,  NAMBURI, Lakshmikanth

IPC: G03F7/00

CPC classification number: B81C1/00436 ,  B81C1/00666 ,  B81C2201/0107 ,  B81C2201/0197

Abstract: The present invention relates to a process for forming microstructures on a substrate. A plating surface is applied to a substrate. A first layer of photoresist is applied on top of the plating base. The first layer of photoresist is exposed to radiation in a pattern to render the first layer of photoresist dissolvable in a first pattern. The dissolvable photoresist is removed and a first layer of primary metal is electroplated in the area where the first layer of photoresist was removed. The remainder of the photoresist is then removed and a second layer of photoresist is then applied over the plating base and first layer of primary metal. The second layer of photoresist is then exposed to a second pattern of radiation to render the photoresist dissolvable and the dissolvable photoresist is removed. The second pattern is an area that surrounds the primary structure, but it does not entail the entire substrate. Rather it is an island surrounding the primary metal. The exposed surface of the secondary metal is then machined down to a desired height of the primary metal. The secondary metal is then etched away.