公开(公告)号：EP2238618A4

公开(公告)日：2011-03-09

申请号：EP09703204

申请日：2009-01-23

Applicant: BREWER SCIENCE INC

Inventor： FLAIM TONY D ,  MCCUTCHEON JEREMY

IPC: H01L23/12 ,  H01L23/48

CPC classification number: H01L21/6835 ,  H01L21/6836 ,  H01L2221/68318 ,  H01L2221/68327 ,  H01L2221/6834 ,  H01L2924/0002 ,  H01L2924/19041 ,  Y10T428/31678 ,  H01L2924/00

公开(公告)号：EP1567288A4

公开(公告)日：2006-06-07

申请号：EP03787250

申请日：2003-12-02

Applicant: BREWER SCIENCE INC

Inventor： PULIGADDA RAMA ,  LAMB JAMES E ,  FLAIM TONY D

IPC: H01L21/312 ,  B05D3/02 ,  B32B17/10 ,  C08F20/26 ,  C08F20/32 ,  C08F220/28 ,  C08G59/32 ,  C08J7/04 ,  C09D163/00 ,  G03F7/09 ,  G03F7/11 ,  H01L20060101 ,  H01L21/027 ,  H01L21/311 ,  B05D1/00

CPC classification number: G03F7/091 ,  C08F220/28 ,  C08G59/3218 ,  C08J7/047 ,  C08J2425/00 ,  C08J2433/00 ,  C08J2471/00 ,  C09D163/00 ,  H01L21/0276 ,  H01L21/31144 ,  C08L2666/16

Abstract: Anti-reflective or fill composition which inhibits or blocks via or photoresist poisoning, a method of coating a substrate and curing it, and a cured protective layer derived therefrom comprises a polymer prepared from a first set of recurring monomers containing a ring member reacted with a light attenuating compound, and a second set of recurring monomers having an unreacted ring member.