公开(公告)号：JPS60102737A

公开(公告)日：1985-06-06

申请号：JP20993983

申请日：1983-11-10

Applicant: CANON KK

Inventor： YAMAMURA MITSUGI ,  YOMODA MINORU

IPC: G03F7/20 ,  H01L21/027 ,  H01L21/30

Abstract: PURPOSE:To shorten a rise time, and to miniaturize a shutter device by using a DC motor as a driving source for a shutter in a semiconductor exposure device and controlling the speed and position of a shutter blade. CONSTITUTION:A processing circuit 51 is operated by a command from an operation command circuit 50, and an integrator 58 is reset. The processing circuit 51 indicates the quantity of revolution to an indicated revolution-quantity register while resetting a revolution counter 53. A speed indicating circuit 54 generates an output by a difference between the indicated revolution-quantity register 52 and the revolution counter 53. Since a DC motor 33 is not turned, an output from an F/V converter 57 is brought to zero, and an output from an error amplifier 56 is large. Consequently, the rise of the DC motor 33 is fast. The revolution of the DC motor 33 is fed back by a rotary encoder 35. The position of a shutter blade 30 is detected by position detecting switches 37, 38.