A photo-electric detecting device and an alignment apparatus using the same

    公开(公告)号:GB2153523A

    公开(公告)日:1985-08-21

    申请号:GB8501167

    申请日:1985-01-17

    Applicant: CANON KK

    Abstract: A photo-electric detecting device including a photo-electric converting element having a light receiving portion which is divided into a plurality of light receiving sections of predetermined configurations and disposed in a predetermined relation. These light receiving sections are selectively used to prevent degradation of the S/N ratio due to unwanted scattered-light caused by foreign particles adhered to and/or caused by unevenness contained in the surface of an object. The light receiving sections may be arranged in predetermined orientations, Fig.5, or concentric rings, Fig.8.

Patent Agency Ranking