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公开(公告)号：JPH08102061A
公开(公告)日：1996-04-16
申请号：JP23783494
申请日：1994-09-30
Applicant: KAO CORP
Inventor： YOSHIDA OSAMU , KITAORI NORIYUKI , WAKABAYASHI SHIGEMI , MIZUNOYA HIROHIDE , SHIGA AKIRA
Abstract: PURPOSE: To obtain a uniform lubricant layer with high productivity by spraying a lubricant with ultrasonic waves to the surface of a material to be vaper deoisited and applying ultrasonic vibration on the back surface to dry it in a vacuum chamber. CONSTITUTION: A synthetic resin tape 6 to be vapor deposited having a magnetic layer on its surface is traveled in a vacuum chamber 1 from a feeding roll 13 to a take-up roller 14 via a guide roll 12. An ultrasonic spraying device 3 is housed in a divided room 10 to produce uniform drops of a lubricant and to spray the drops to the surface of the tape 6. An ultrasonic vibrating means 4 comes into contact with the back surface 6b of the tape 6 via a horn to apply ultrasonic vibration on the tape 6 and uniformly smoothes the lubricant deposited on the magnetic layer. An IR drier 5 is disposed in a divided room 15 to irradiate the tape 6 with IR rays to dry the lubricant deposited on the tape. Since a series of processes can be performed in the vacuum chamber 1, the chamber can be easily connected to the line to form the magnetic layer and deposition of dust can be prevented.
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公开(公告)号：JPH08100266A
公开(公告)日：1996-04-16
申请号：JP23666394
申请日：1994-09-30
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
IPC: C23C16/44 , C23C16/27 , C23C16/455 , C23C16/50 , C23C16/511 , G11B5/84
Abstract: PURPOSE: To form a thin film at a high rate by plasma CVD by supplying a thin film forming material supplied in a reaction tube by ultrasonic spraying and converted to plasma into a vacuum vessel. CONSTITUTION: A liq. hydrocarbon as the material for a thin film from a vessel 12 and hydrogen as a gaseous reactant from a cylinder 15 are supplied to a plasma reaction tube 6. A microwave from a microwave generator 7 is introduced into the tube to convert the material to plasma, and the plasma is supplied to a vacuum tank 2 and brought into contact with a substrate 1 traveling on a cooling can roll 4 and consisting of a metallic magnetic film. As a result, the hydrocarbon is decomposed to form a diamondlike carbon thin film on the substrate 1. In this ECR microwave plasma CVD device 5, the thin film material is ultrasonically sprayed into the reaction tube 6 by an ultrasonic vibrator 14. Consequently, a large amt. of liq. hydrogen droplet is efficiently converted to plasma and supplied, and a thin film is formed at a high rate.
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公开(公告)号：JPH08100258A
公开(公告)日：1996-04-16
申请号：JP23666594
申请日：1994-09-30
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
Abstract: PURPOSE: To control the traveling of a substrate and to form a good film in high yield by passing the substrate coated with a thin film through a capacitance detecting part and detecting the capacitance change based on the fluctuation in the position of the substrate. CONSTITUTION: A metallic material 6 placed in a crucible 5 is heated and vaporized with an electron gun 7 in a vacuum vessel 8. The metallic grain formed is deposited on a substrate 1 traveling along a cooling can roll 3 to form a thin film on the substrate 1. In this method for forming a thin film, the substrate 1 is passed through a capacitance detecting means 11, and a change in capacitance is detected based on the overlap length between both ends of the substrate and a couple of metallic pieces clamping the substrate. The sliding of a guide roll 10 on the substrate 1 is adjusted based on the signal of the detected capacitance change through a control means 12, and the traveling is smoothed.
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公开(公告)号：JPH0896348A
公开(公告)日：1996-04-12
申请号：JP23125394
申请日：1994-09-27
Applicant: KAO CORP
Inventor： SHIGA AKIRA , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI
Abstract: PURPOSE: To provide a magnetic recording medium excellent in S/N, capable of high density recording over the band from a low band to a high band and having high performance. CONSTITUTION: Two or more magnetic layers 2, 3 are formed on a substrate 1 to obtain the objective magnetic recording medium. The lower magnetic layer 2 contains platy metallic magnetic powder having its axis of easy magnetization in the plate surface and the magnetic powder has been oriented so that the plate surface is in a direction parallel to the surface of the substrate. The upper magnetic layer 3 contains platy metallic magnetic powder having its axis of magnetization in the plate surface and the magnetic powder has been oriented so that the plate surface is in a direction perpendicular to the surface of the substrate.
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公开(公告)号：JPH0896345A
公开(公告)日：1996-04-12
申请号：JP23125494
申请日：1994-09-27
Applicant: KAO CORP
Inventor： SHIGA AKIRA , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI
Abstract: PURPOSE: To obtain a magnetic recording tape having high output over the band from a low band to a high band by laminating a nonmagnetic coating film and a magnetic coating film contg. required metallic magnetic powder on a substrate. CONSTITUTION: A nonmagnetic coating film 2 having 0.5-5μm thickness and contg. nonmagnetic particles and a lubricant is formed on a polyethylene terephthalate film 1 as a substrate with a back coating layer 4 formed on the rear side. A magnetic coating film 3 contg. platy metallic magnetic powder having its axis of easy magnetization in the plate surface, 0.003-0.1μm thickness, 0.3-0.5μm diameter (the ratio of the diameter to the thickness is 3-20), 800-1,900Oe coercive force and 110-160emu/g saturation magnetization is laminated on the film 2 to obtain the objective magnetic recording tape having increased output over the wide band from a low band to a high band.
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Patent Agency Ranking
公开(公告)号：JPH0887738A
公开(公告)日：1996-04-02
申请号：JP22053994
申请日：1994-09-14
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
Abstract: PURPOSE: To improve electric conductivity and running performance and to prevent harmful warpage by forming 1st and 2nd metallic thin films on the front and rear sides of a substrate and forming a cluster between the 2nd metallic thin film and the rear side of the substrate or in the 2nd metallic thin film. CONSTITUTION: A substrate 21 is sent from a roll 7a to a roll 7b and a cluster of Ti particles 24 is stuck on the rear side of the substrate 21 with a plasma gun 2 and a Ti target 3 in a sputtering device 1. Metal Al put in a crucible 5 is irradiated with an electron beam from an electron gun 6 in a vapor deposition device 4 and an Al vapor deposited film 25 is formed on the rear side of the running substrate 21 with the cluster 24. A magnetic film 22 of a Co-Ni alloy is then formed on the front side of the substrate 21 by the conventional diagonal vapor depositing means to obtain the objective magnetic recording medium.
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公开(公告)号：JPH0853769A
公开(公告)日：1996-02-27
申请号：JP18696994
申请日：1994-08-09
Applicant: KAO CORP
Inventor： WAKABAYASHI SHIGEMI , KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , SHIGA AKIRA
IPC: C23C16/50 , C23C16/27 , C23C16/511 , C23C16/54 , G11B5/84
Abstract: PURPOSE:To excellently form a diamondlike carbon thin film rich in uniformity by ultrasonically vibrating a plasma reaction tube when the thin film is formed. CONSTITUTION:The original sheet 1 of a magnetic recording medium is formed by forming a magnetic film of metallic thin film type on the surface of a substrate. The original sheet 1 is traveled in a vacuum vessel 2 from a feed roll 3a through a cooling can roller 4 and wound on a winding roll 3b. A quartz plasma reaction tube 5 is opposed to the can roller 4. A gaseous hydrocarbon feed pipe 6, a porous body 6a (zeolite) fixed to the tip, a microwave guide 7 and an ECR coil 8 are provided to the reaction tube 5. The reaction tube 5 is ultrasonically vibrated with ultrasonic wave generators 9 and 10. Consequently, diamondlike carbon is not deposited and accumulated on the inner wall of the reaction tube, and operation is continued for a long time.
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公开(公告)号：JPH0836730A
公开(公告)日：1996-02-06
申请号：JP17108394
申请日：1994-07-22
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To obtain a highly efficient medium showing a high reproducing output by setting a plate-like application-type magnetic layer having an axis of easy magnetization within its plane and including metallic magnetic powders and a binder resin as a lower magnetic layer and a metallic thin film-type magnetic layer as an upper magnetic layer. CONSTITUTION:A magnetic paint is applied on a polyethylene terephthalate film 1, thereby constituting a coated-type lower magnetic layer 2. Then, a paint, containing carbon black is applied to th surface of the film 1 opposite to the layer 2, thereby forming a back coat layer 6. An upper magnetic layer 3 of a metallic thin film is subsequently formed with the use of an oblique vapor deposition device. A protecting layer 4 of a diamond-like carbon film is set on the layer 3, and a fluorine-based lubricant is applied to form a lubricating film 5.
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公开(公告)号：JPH0830966A
公开(公告)日：1996-02-02
申请号：JP16103994
申请日：1994-07-13
Applicant: KAO CORP
Inventor： YOSHIDA OSAMU , KITAORI NORIYUKI , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
IPC: G11B5/84
Abstract: PURPOSE:To prevent the sticking of dust by forming a nonmagnetic metallic film on one side of a substrate by a film forming process in a vacuum atmosphere, roughening the surface of the film by anodic oxidation and forming a magnetic metallic film on the other side. CONSTITUTION:A vacuum chamber 1a is evacuated to about 10 -10 Torr degree of vacuum, e.g. to 2X10 Torr, an Al-based metallic material 5 in a crucible 4 is evaporated by resistance heating, high-frequency heating, electron beam heating or other method and a back coating layer 12 of 700Angstrom thickness is formed on a PET film 8. This layer 12 is anodically oxidized and coated with a coating material prepd. by diluting perfluoro-ether as a fluorine-contg. lubricant with a fluorine-contg. inert liq. or dispersing the lubricant in a fluorine- contg. inert liq. After drying at 70 deg.C, slitting to 8mm width is carried out to obtain the objective magnetic tape.
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公开(公告)号：JPH07334838A
公开(公告)日：1995-12-22
申请号：JP12595594
申请日：1994-06-08
Applicant: KAO CORP
Inventor： KITAORI NORIYUKI , YOSHIDA OSAMU , MIZUNOYA HIROHIDE , WAKABAYASHI SHIGEMI , SHIGA AKIRA
Abstract: PURPOSE:To obtain a magnetic recording medium having a back coating film having properly roughened surface by forming a nonmagnetic metal film in vacuum on the back surface of a supporting body having a magnetic metal film formed in vacuum, roughening the surface of the nonmagnetic metal film by etching with an acid of pH4.5 to 5.5 in vacuum. CONSTITUTION:While a feeding supporting body (film) 8 having a magnetic metal film formed in vacuum atmosphere from a supply roll 7a into a vacuum chamber 1a, the back surface of the supporting body 8 is coated by vapor deposition of a nonmagnetic metal (Cu-Al alloy) in a crucible 4 in the atmosphere of a gaseous oxygen ejected from a nozzle 6. The supporting body 8 is wound around a cooling can roll 2, guided by a guide roller in contact therewith, and introduced through a communicating path 1c into a vacuum chamber 1b. Then, the body 8 travels along guide rollers 9a-9c and is wound up on a winding roller 7b. The body 8 is brought into contact with a sponge body 10 to which an etching liquid (HCl solution of pH4.5 to 5.5) is supplied between guide rollers 9a and 9b, then wiped with a sponge body 11a to remove the etching liquid, cleaned with water supplied to a sponge body 11b, and wiped with a sponge body 11c.
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